Purification table device and photovoltaic material processing equipment

Abstract

The utility model discloses a purification table device and photovoltaic material processing equipment. The purification table device comprises a rack, a partition plate and at least two boat pushing mechanisms. The rack has the length direction, the width direction and the height direction, the length direction, the width direction and the height direction are perpendicular in pairs, and the rack comprises a storage area and a boat inlet and outlet area which are arranged in the X-axis direction. The boat pushing mechanism is arranged in the storage area and distributed in the height direction of the rack, and the boat pushing mechanism is configured to transfer the sheets between the storage area and the reaction furnace. The partition plates are arranged between every two adjacent boat pushing mechanisms. The partition plates are arranged between every two adjacent boat pushing mechanisms so as to divide the boat inlet and outlet area into boat pushing areas, and the boat pushing areas are isolated through the partition plates so as to reduce heat exchange between the boat pushing mechanisms in the two boat pushing areas.

Description

Technical Field

[0001] This application relates to the field of photovoltaic material manufacturing equipment, and in particular to a clean bench device and photovoltaic material processing equipment. Background Technology

[0002] In the production of photovoltaic materials, a reactor is used to process the sheets. A purification cabinet is also installed at the furnace opening for cooling the sheets and purifying the air. The purification cabinet is equipped with a temporary storage rack and a boat-pushing mechanism to store the sheets to be processed or processed through the temporary storage rack and to transfer the sheets between the purification cabinet and the reactor through the boat-pushing mechanism.

[0003] After the sheet reaction is complete, when the pusher mechanism moves the sheet from the reactor to the cleanroom, the heat from the high-temperature sheet will be transferred to the sheets on the adjacent pusher mechanisms above and below, causing interference to the sheets on the adjacent pusher mechanisms above and below. Utility Model Content

[0004] In view of this, this application provides a clean bench device to solve the problem that the heat of a high-temperature sheet will be transferred to the sheets on the adjacent push-boat mechanisms above and below.

[0005] One embodiment of this application provides a clean bench device, including a frame, a temporary storage rack partition, and at least two pusher mechanisms. The frame has a length direction, a width direction, and a height direction, and the length direction, width direction, and height direction are perpendicular to each other. The pusher mechanisms are disposed within the frame, and all pusher mechanisms are spaced apart along the Z-axis direction, which is parallel to the height direction of the frame. The pusher mechanisms are configured to transfer sheets between the frame and the reactor along the Y-axis direction, which is parallel to the length direction of the frame. A partition is disposed between two adjacent pusher mechanisms along the Z-axis direction. The partition extends along the X-axis direction and divides the frame into at least two inlet / outlet areas. The partition is configured to isolate two adjacent pusher mechanisms to reduce heat exchange between the two pusher mechanisms, wherein the X-axis is parallel to the width direction of the frame.

[0006] By placing a partition between two adjacent boat pushing mechanisms, the boat entry and exit areas are separated into separate boat entry and exit areas, and the partition is used to isolate the boat entry and exit areas, thereby reducing heat exchange between the boat pushing mechanisms in the two boat entry and exit areas.

[0007] In some embodiments, the partition is also used to collect stains that fall from adjacent boat pushing mechanisms.

[0008] In some embodiments, the clean bench device further includes an air extraction assembly disposed on one side of the pusher mechanism and configured to extract air toward the sheet on the pusher mechanism.

[0009] In some embodiments, the air extraction assembly includes at least two air extraction pipes, all of which extend along the Y-axis and have multiple air extraction holes. One air extraction pipe is located on one side of a pusher mechanism and is configured to extract air from the sheet on the pusher mechanism through the air extraction holes.

[0010] In some embodiments, the boat-pushing mechanism includes a slide rail, a slider, and a pusher paddle, the slide rail extending along the Y-axis. The slider is slidably connected to the slide rail. The pusher paddle is connected to the slider and extends along the Y-axis; the pusher paddle is used to carry the sheet and transfer the sheet between the storage area and the reactor.

[0011] In some embodiments, the partition is connected to the slide rail.

[0012] In some embodiments, the frame has an inlet / outlet boat area and a storage area distributed along the X-axis. Pushing mechanisms are all disposed in the inlet / outlet boat area, and the storage area is used to buffer the processed sheets. The clean bench device also includes at least two air blowing assemblies. Along the X-axis, one air blowing assembly is disposed on the side of a pushing mechanism paddle near the storage area. The air blowing assembly is configured to blow air from the storage area toward the inlet / outlet boat area, or to blow air along the Z-axis toward adjacent pushing mechanisms, forming an air wall.

[0013] In some embodiments, the blowing assembly includes a blowing conduit extending along the Y-axis direction, the blowing conduit having a plurality of blowing holes.

[0014] In some embodiments, the air blowing pipe is connected to the boat pushing mechanism.

[0015] In some embodiments, the surface of the rack is provided with a door panel, and in the X-axis direction, a partition extends from the storage area toward the door panel.

[0016] In some embodiments, a support block is provided on the door panel, the support block being configured to contact the end of the partition and provide support to the partition.

[0017] In some embodiments, the frame has an inlet / outlet area and a storage area distributed along the X-axis. Pushing mechanisms are disposed in the inlet / outlet areas, and the storage area is used to buffer the processed sheets. The clean bench device also includes a moving mechanism disposed on the side of the pushing mechanism facing the storage area along the X-axis. The moving mechanism is used to transfer the sheets between the pushing mechanism and the storage area.

[0018] One embodiment of this application also provides a photovoltaic material processing apparatus, including a reaction device and a clean bench as described above, wherein the reaction device and the clean bench are arranged along the length of the frame. The reaction device is used to react with sheets. Attached Figure Description

[0019] Figure 1This is a schematic diagram of a clean bench device provided in an embodiment of this application.

[0020] Figure 2 for Figure 1 The side view of the cleanroom unit after removing the door panel.

[0021] Figure 3 for Figure 2 A schematic diagram showing the working state of the boat pushing mechanism, the air extraction component, and the air blowing component.

[0022] Figure 4 for Figure 2 A three-dimensional structural diagram of the boat-pushing mechanism, the air extraction component, and the air blowing component.

[0023] Explanation of main component symbols

[0024] 11. Cleaning station device; 111. Frame; 1111. Storage area; 1112. Boat entry / exit area; 1113. Boat pushing area; 1114. Door panel; 1115. Support block; 112. Temporary storage rack; 113. Boat pushing mechanism; 1131. Slide rail; 1132. Slider; 1133. Boat pushing paddle; 114. Partition; 115. Air extraction assembly; 1151. Air extraction pipe; 116. Air blowing assembly; 117. Boat handling mechanism; 20. Carrier. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0026] The terms “top,” “upper,” “lower,” “front,” “back,” and similar expressions used in this article are for illustrative purposes only.

[0027] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.

[0028] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0029] One embodiment of this application provides a photovoltaic material processing apparatus, including a reaction device (not shown) and a clean bench device 11. The reaction device and the clean bench device 11 are distributed along the length of the clean bench device 11, and the reaction device has a port on the side facing the clean bench device 11. Before the reaction device operates, multiple carriers 20 carrying sheets are placed inside the clean bench device 11. The carriers 20, along with the sheets, are moved through the port into the reaction device so that the reaction device can process the sheets. After the sheets are processed, the carriers 20, along with the sheets, are moved from the reaction device to the clean bench device 11 for cooling, and finally moved out of the clean bench device 11 so that the sheets can proceed to the next processing step.

[0030] In some embodiments, please refer to Figures 1 to 4 The clean bench device 11 includes a frame 111 and a boat-moving mechanism 117, a temporary storage rack 112, and at least two boat-pushing mechanisms 113 disposed within the frame 111. The frame 111 has a length direction, a width direction, and a height direction. The reaction device and the frame 111 are distributed along the Y-axis direction, which is parallel to the length direction of the frame 111. The frame 111 includes a storage area 1111 and a boat-entry / exit area 1112, which are arranged along the X-axis direction, which is parallel to the width direction of the frame 111. The temporary storage rack 112 is disposed in the boat-entry / exit area 1112. All the boat-pushing mechanisms 113 are disposed in the storage area 1111 and are spaced apart along the Z-axis direction, which is parallel to the height direction of the frame 111. The boat-moving mechanism 117 is disposed within the frame 111.

[0031] Before the reaction device begins operation, the boat-moving mechanism 117 moves the sheet material to be processed, along with the carrier 20 supporting the sheet material, stored on the temporary storage rack 112 to the boat-pushing mechanism 113. The boat-pushing mechanism 113 then moves the carrier 20 along with the sheet material into the reaction device, allowing the reaction device to process the sheet material. After the sheet material is processed, the boat-pushing mechanism 113 moves the carrier 20 along with the processed sheet material from the reaction device to the frame 111. The boat-moving mechanism 117 then moves the carrier 20 and the processed sheet material from the boat-pushing mechanism 113 back to the temporary storage rack 112 for cooling. This cycle is repeated to achieve the automation function of the photovoltaic material processing equipment.

[0032] In some embodiments, the positive direction of the Z-axis is vertically upward due to gravity, while the X-axis and Y-axis are both horizontal.

[0033] In other embodiments, the Z-axis is arranged to intersect with the direction of gravity.

[0034] In some embodiments, please refer to Figure 2 and Figure 3The purification unit 11 also includes a partition 114 disposed within the frame 111. The partition 114 is located in the inlet / outlet boat area 1112 and between two adjacent boat pushing mechanisms 113. The partition 114 extends along the X-axis and Y-axis directions to divide the inlet / outlet boat area 1112 into at least two boat pushing areas 1113 and isolate the two adjacent boat pushing mechanisms 113. When one of the boat pushing mechanisms 113 transfers the high-temperature sheet from the reaction device to the storage area 1111, the partition 114 isolates the two adjacent boat pushing mechanisms 113, thereby reducing the risk of heat transfer from one boat pushing area 1113 to the other. This helps to reduce the impact of the high-temperature environment formed by the high-temperature sheet in one boat pushing area 1113 on the other boat pushing area 1113, and helps to keep the ambient temperature of different boat pushing areas 1113 constant, thereby reducing the risk of mutual interference between the sheets in adjacent boat pushing areas 1113 due to temperature differences.

[0035] In some embodiments, the partition 114 is also used to collect stains. The processed sheet or carrier 20 may have stains such as byproducts attached to it. When the pusher mechanism 113 transfers the sheet from the reaction apparatus to the inlet / outlet area 1112, some stains will fall off the sheet or carrier 20. The partition 114 collects these fallen stains, reducing the risk of stains falling onto the pusher mechanism 113 below and contaminating the pusher mechanism 113 or the sheet on it. This helps maintain the cleanliness of the pusher mechanism 113 and the sheet before and after processing.

[0036] In some embodiments, the purification unit 11 can also purify the air inside the rack 111 to remove impurities from the air.

[0037] In some embodiments, please refer to Figure 1 The surface of the frame 111 is provided with a door panel 1114. While closing the door panel 1114 to create a sealed environment inside the frame 111, the parts inside the frame 111 can be maintained and replaced by opening the door panel 1114, and the sheets before and after processing can be easily put into and taken out of the frame 111.

[0038] In some embodiments, please refer to Figure 2 and Figure 3 Along the X-axis, the partition 114 extends from the storage area 1111 to the door panel 1114 within the inlet / outlet boat area 1112, so that the partition 114 can be horizontally placed across the entire inlet / outlet boat area 1112. This reduces the risk of heat exchange between two adjacent push boat areas 1113 due to the gap between the end of the partition 114 and the door panel 1114, and helps to improve the isolation effect of the partition 114.

[0039] In some embodiments, please refer to Figure 3 A support block 1115 is provided on the door panel 1114 on the side of the entry and exit boat area 1112 away from the storage area 1111. When the door panel 1114 is closed, the support block 1115 is located below the partition 114 and supports the end of the partition 114, which helps to improve the stability of the partition 114.

[0040] It is understandable that the support block 1115 has an inclined surface on the side of the door panel 1114 facing the partition 114, so that the support block 1115 can move along the X-axis direction under the drive of the door panel 1114 and move under the guidance of the inclined surface to the bottom of the partition 114, which helps to reduce the risk of interference between the partition 114 and the support block 1115.

[0041] In some embodiments, the reaction apparatus includes at least two reactors, which are spaced apart along the Z-axis. One reactor is correspondingly arranged with a pusher mechanism 113 in the frame 111. The reactor is tubular and extends along the Y-axis. One end of the reactor facing the frame 111 is provided with a furnace opening (not indicated) that extends to a port so that the pusher mechanism 113 can pass the sheet through the port and the furnace opening and transfer the sheet between the reactor and the storage area 1111.

[0042] In some embodiments, the carrier 20 is part of a photovoltaic material processing apparatus.

[0043] In some embodiments, the carrier 20 is made of graphite or quartz.

[0044] In some embodiments, the number of reactors, pusher mechanisms 113, and temporary storage racks 112 are all two or more, with the number of reactors and pusher mechanisms 113 being equal, and the number of temporary storage racks 112 being at least equal to the number of pusher mechanisms 113. One temporary storage rack 112, one pusher mechanism 113, and one reactor are correspondingly arranged. A boat-moving mechanism 117 transfers the sheet between one temporary storage rack 112 and one pusher mechanism 113, and one pusher mechanism 113 then transfers the sheet between a storage area 1111 and a reactor.

[0045] It is understandable that the number of partitions 114 is adjusted to correspond to the number of boat-pushing mechanisms 113.

[0046] In some embodiments, please refer to Figure 3 and Figure 4The boat-pushing mechanism 113 includes a slide rail 1131, a slider 1132, and a pusher 1133. The slide rail 1131 is located between the storage area 1111 and the boat entry / exit area 1112, and extends along the Y-axis. The slider 1132 is slidably connected to the slide rail 1131. One end of the pusher 1133 is connected to the slider 1132, and the pusher 1133 is used to carry the sheet. During operation, the pusher 1133 moves along the Y-axis relative to the frame 111 and the reactor via the slider 1132 on the slide rail 1131, transferring the sheet in the storage area 1111 along with the carrier 20 into the reactor, or transferring the sheet in the reactor along with the carrier 20 into the storage area 1111.

[0047] It is understandable that by extending the propeller 1133 along the Y-axis, the support area of ​​the propeller 1133 is increased, enabling the device to stably support multiple smaller vehicles 20 or larger vehicles 20.

[0048] In some embodiments, the partition 114 is connected to the slide rail 1131, and the propeller 1133 is located above the partition 114 to isolate two adjacent propellers 1133, thereby reducing the risk of heat from the sheet on the propeller 1133 being transferred to the sheet on the adjacent propeller 1133. Simultaneously, the partition 114 is also positioned away from the propeller 1133 below it to reduce the risk of interference between the partition 114 and the sheet on the propeller 1133, the carrier 20, or the carrier 20 itself.

[0049] It is understandable that connecting the partition 114 to the slide rail 1131 helps to shorten the distance between two adjacent slide rails 1131, or to keep the distance between two adjacent slide rails 1131 unchanged, so that the arrangement of the boat pushing mechanism 113 in the frame 111 is more compact.

[0050] In some embodiments, please refer to Figure 2 and Figure 3 The clean bench device 11 also includes an exhaust assembly 115, which is located in the inlet / outlet boat area 1112. During operation, the exhaust assembly 115 exhausts air towards the boat pushing mechanism 113 to remove heat from the frame 111, thereby reducing the risk of reduced cooling efficiency of the sheet material in the frame 111 due to heat accumulation.

[0051] It is understandable that by placing the exhaust assembly 115 in the inlet / outlet area 1112, compared to placing the exhaust assembly 115 in the storage area 1111, it helps to reduce the risk of heat transfer from the inlet / outlet area 1112 to the storage area 1111, thereby reducing the risk of an increase in the ambient temperature of the storage area 1111.

[0052] Furthermore, the vacuum assembly 115 is located on the side of the pusher mechanism 113 away from the storage area 1111, so as to help reduce the risk of the vacuum assembly 115 obstructing the movement path of the transfer mechanism 117 when the transfer mechanism 117 transfers the sheet between the pusher mechanism 113 and the temporary storage rack 112.

[0053] In some embodiments, the air extraction assembly 115 can also extract impurities from the air to purify the air.

[0054] In some embodiments, please refer to Figure 3 and Figure 4 The air extraction assembly 115 includes at least two air extraction pipes 1151. One air extraction pipe 1151 is located on one side of a boat pushing mechanism 113, so that one air extraction pipe 1151 can perform air extraction on a boat pushing area 1113, thereby achieving the effect of air extraction assembly 115 performing air extraction on different boat pushing areas 1113 respectively.

[0055] Furthermore, the suction pipe 1151 extends along the Y-axis direction and is provided with multiple suction holes (not shown) so that the suction pipe 1151 can uniformly suction air towards the corresponding boat pushing mechanism 113.

[0056] It is understandable that when the partition 114 extends along the X-axis to the door panel 1114, the exhaust pipe 1151 is staggered with the partition 114 to reduce the risk of interference between the exhaust pipe 1151 and the partition 114.

[0057] In other embodiments, the exhaust assembly 115 may also be a fan located on the side of the inlet / outlet area 1112 away from the storage area 1111. By continuously exhausting the inlet / outlet area 1112 by the fan, the heat inside the rack 111 can also be discharged.

[0058] In some embodiments, please refer to Figure 3 The purification unit 11 also includes at least two air blowing assemblies 116. One air blowing assembly 116 is disposed within a pusher area 1113 and located on the side of the pusher paddle 1133 closest to the storage area 1111. During operation, the air blowing assembly 116 blows air along the X-axis towards the pusher area 1113 to cool the sheet on the pusher paddle 1133. Simultaneously, by blowing air from the storage area 1111 towards the pusher area 1113 through the air blowing assembly 116, the diffusion of heat from the pusher area 1113 to the storage area 1111 can be suppressed.

[0059] In some embodiments, during operation, the air blowing assembly 116 blows air along the Z-axis toward the adjacent boat pushing area 1113 to form an air wall on the side of each boat pushing area 1113 near the storage area 1111, thereby isolating the heat of the storage area 1111 and the boat entering / exiting area 1112 through the air wall without hindering the transfer of the sheet between the temporary storage rack 112 and the boat pushing mechanism 113.

[0060] In some embodiments, the air blowing assembly 116 includes an air blowing pipe (not shown) extending along the Y-axis, and the air blowing pipe is provided with a plurality of air blowing holes (not shown). Blowing air through the air blowing pipe and air blowing holes along the X-axis or Z-axis direction helps to improve the uniformity of air blowing by the air blowing assembly 116 on the propeller 1133 or adjacent propeller mechanisms 113.

[0061] In some embodiments, the air blowing pipe is connected to the boat pushing mechanism 113 and is spaced apart from the air blowing pipe and the boat pushing mechanism 113, which helps to reduce the space occupied by the air blowing pipe and the boat pushing mechanism 113 in the frame 111.

[0062] In some embodiments, the air blowing pipe is connected to the slide rail 1131 to keep the air blowing pipe away from the pusher mechanism 113 in the adjacent pusher area 1113 above or below, so as to reduce the risk of the air blowing pipe interfering with the movement path of the moving sheet of the moving mechanism 117.

[0063] Furthermore, an air blowing pipe is provided inside the slide rail 1131, creating a hollow structure inside the slide rail 1131, which helps reduce the overall weight of the slide rail 1131. Simultaneously, by providing an air blowing pipe inside the slide rail 1131, during the pushing process of the boat-pushing mechanism 113, when the temperature of the sheet is transferred to the slide rail 1131 along the pusher 1133 and the slider 1132, the airflow carries away the heat from the slide rail 1131, achieving a cooling effect.

[0064] In some embodiments, please refer to Figure 3 The air blowing pipe is located at the lower right corner of the pushing area 1113, and the air extraction pipe 1151 is located at the upper left corner of the pushing area 1113. The air blowing pipe and the air extraction pipe 1151 being located at opposite corners of the pushing area 1113 facilitate sufficient airflow through the pushing area 1113. Alternatively, the air blowing pipe can be located at the upper right corner of the pushing area 1113, and the air extraction pipe 1151 at the lower left corner.

[0065] In some embodiments, the boat pushing mechanism 113 further includes a driver, which is a drive device capable of outputting reciprocating force, such as an electric actuator, a lead screw module, a cylinder, a hydraulic cylinder, or a motor and a synchronous belt.

[0066] For example, when the driver is a motor and a timing belt (not shown), the motor is mounted on the slide rail 1131, the timing belt is rotatably mounted on the slide rail 1131, and the timing belt is connected to the slider 1132. The motor drives the timing belt to rotate and synchronously drives the slider 1132 and the propeller 1133 to move.

[0067] In some embodiments, the boat-moving mechanism 117 is a multi-axis manipulator.

[0068] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the substantive scope of this application fall within the scope of this application.

Claims

1. A clean bench device for storing sheets to be entered into a reactor or sheets stored in or removed from the reactor, characterized in that, The clean bench device includes: A frame having a length direction, a width direction, and a height direction, wherein the length direction, the width direction, and the height direction are perpendicular to each other; At least two boat-pushing mechanisms are provided within the frame, and all the boat-pushing mechanisms are spaced apart along the Z-axis, which is parallel to the height direction of the frame. The boat-pushing mechanisms are configured to transfer the sheet between the frame and the reactor along the Y-axis, which is parallel to the length direction of the frame. A partition is disposed between two adjacent boat-pushing mechanisms along the Z-axis direction, the partition extends along the X-axis direction and divides the frame into at least two boat-pushing areas, the partition is configured to isolate two adjacent boat-pushing mechanisms to reduce heat exchange between the two boat-pushing mechanisms, wherein the X-axis is parallel to the width direction of the frame.

2. The cleanroom bench device according to claim 1, characterized in that, The partition is also used to collect stains that fall from the adjacent boat pushing mechanism.

3. The cleanroom bench device according to claim 1, characterized in that, The purification table device further includes an air extraction component, which is disposed on one side of the pusher mechanism and configured to extract air toward the sheet on the pusher mechanism.

4. The cleanroom bench device according to claim 3, characterized in that, The air extraction assembly includes at least two air extraction pipes, all of which extend along the Y-axis. Each air extraction pipe has a plurality of air extraction holes. One air extraction pipe is located on one side of one of the boat pushing mechanisms. The air extraction pipe is configured to extract air from the sheet on the boat pushing mechanism through the air extraction holes.

5. The cleanroom bench device according to claim 1, characterized in that, The boat pushing mechanism includes a slide rail, a slider, and a boat pushing paddle, wherein the slide rail extends along the Y-axis direction; The slider is slidably connected to the slide rail; The pusher is connected to the slider and extends along the Y-axis. The pusher is used to carry the sheet and transfer the sheet between the frame and the reactor.

6. The cleanroom bench device according to claim 5, characterized in that, The partition is connected to the slide rail.

7. The cleanroom bench device according to claim 1, characterized in that, The frame has an inlet / outlet boat area and a storage area distributed along the X-axis direction. The boat pushing mechanism is located in the inlet / outlet boat area, and the storage area is used to buffer the processed sheet. The purification table device also includes at least two air blowing components, with one of the air blowing components located on the side of the boat pushing mechanism near the storage area along the X-axis direction; The air blowing assembly is configured to blow air into the inlet / outlet boat area from the storage area, or to blow air between adjacent boat pushing mechanisms along the Z-axis direction, forming an air wall.

8. The cleanroom bench device according to claim 7, characterized in that, The air blowing assembly includes an air blowing pipe extending along the Y-axis direction, and the air blowing pipe is provided with a plurality of air blowing holes.

9. The cleanroom bench device according to claim 8, characterized in that, The air blowing pipe is connected to the boat pushing mechanism.

10. The cleanroom bench device according to claim 1, characterized in that, The frame has a door panel on its surface, and in the X-axis direction, the partition extends from the inside of the frame toward the door panel.

11. The cleanroom bench device according to claim 10, characterized in that, A support block is provided on the door panel, and the support block is configured to contact the end of the partition and provide support to the partition.

12. The cleanroom bench device according to claim 1, characterized in that, The frame has an inlet / outlet boat area and a storage area distributed along the X-axis direction. The boat pushing mechanism is located in the inlet / outlet boat area, and the storage area is used to buffer the processed sheet. The purification table device also includes a boat-moving mechanism, which is located on the side of the boat-pushing mechanism facing the storage area along the X-axis. The boat-moving mechanism is used to transfer the sheet between the boat-pushing mechanism and the storage area.

13. A photovoltaic material processing equipment, characterized in that, The device includes a reaction apparatus and a clean bench assembly as described in any one of claims 1 to 12, wherein the reaction apparatus and the clean bench assembly are arranged along the length of the frame. The reaction apparatus is configured to react the sheet.

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