Purification table device and photovoltaic material processing equipment
By designing a foldable push-boat mechanism in the clean bench device, the problem of maintenance difficulty caused by the limited space of the clean bench is solved, and convenient equipment maintenance and operation are achieved.
Patent Information
- Application Number
- CN202520351603.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-02-28
AI Technical Summary
In the production of photovoltaic materials, the confined space of the cleanroom table necessitates the removal of the boat-pushing mechanism by operators, increasing the difficulty of maintenance.
Design a clean bench device in which the pusher mechanism can be rotated to a folded state to form a clearance space, avoiding interference with the reactor or quartz tube, and achieving maintenance without disassembling the pusher mechanism.
By folding the boat-pushing mechanism, maintenance difficulty is reduced, operational convenience and safety are improved, and the risk of interference is reduced.
Smart Images
Figure CN223844254U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of photovoltaic material manufacturing equipment, and in particular to a clean bench device and photovoltaic material processing equipment. Background Technology
[0002] In the production of photovoltaic materials, high-temperature reactors and other process equipment are required to process the sheets. A clean bench is a general term for certain components of the high-temperature reactor process equipment in the photovoltaic material production process. It cools and purifies the sheets and is widely used in industries such as integrated circuits, power electronics, and solar cell production. The clean bench is equipped with a temporary storage area, a boat-moving mechanism, and a boat-pushing mechanism. The boat-moving mechanism transfers the sheets to be processed from the temporary storage area to the boat-pushing mechanism, which then feeds the sheets into the reactor. Alternatively, the boat-pushing mechanism removes processed sheets from the reactor and transfers them to the temporary storage area by the boat-moving mechanism.
[0003] In photovoltaic high-temperature reactors, quartz tubes are often placed into the reactor by manual handling. Since the furnace opening faces the clean bench and the space inside the clean bench is small, temporary storage racks and boat-pushing mechanisms are set on both sides of the clean bench. This means that when installing quartz tubes, operators need to remove the boat-pushing mechanism, which further increases the difficulty of machine maintenance. Utility Model Content
[0004] In view of this, this application provides a clean bench device to solve the problem of high maintenance difficulty caused by the need for operators to remove the pusher mechanism when installing quartz tubes.
[0005] One embodiment of this application provides a clean bench device, including a frame and a pusher mechanism. The pusher mechanism has a pusher state and a folded state. The pusher mechanism is disposed within the frame and is rotatable relative to the frame to switch between the pusher state and the folded state. The rotation direction of the pusher mechanism from the pusher state to the folded state is the folding direction. When the pusher mechanism is in the pusher state, it is used to transfer the carrier between the frame and the reactor. When the pusher mechanism is in the folded state, the side of the pusher mechanism opposite to the folding direction forms a clearance space.
[0006] In the above embodiments, the pusher mechanism is rotatably connected to the frame so that when the quartz tube in the reactor needs to be maintained, the pusher mechanism can be operated to change from the pusher state to the folded state, so that the pusher mechanism and at least one other adjacent pusher mechanism can form a clearance space. Without the need to dismantle the temporary storage mechanism, the quartz tube can be cleared, thus achieving the effect of facilitating maintenance.
[0007] In some embodiments, the frame has a pushing area and a temporary storage area, which are arranged along a first horizontal direction. A pushing mechanism is located between the pushing area and the temporary storage area and is capable of moving the carrier along a second horizontal direction, wherein the second horizontal direction is perpendicular to the first horizontal direction.
[0008] In some embodiments, the boat-pushing mechanism extends along a second horizontal direction, and the axis of rotation of the boat-pushing mechanism is parallel to the second horizontal direction.
[0009] In some embodiments, all the boat-pushing mechanisms are spaced apart along the direction of gravity. Each boat-pushing mechanism includes a first slide rail and a boat-pushing assembly. All first slide rails are located between the boat-pushing area and the temporary storage area and are rotatably connected to the frame. The boat-pushing assembly is slidably connected to the corresponding first slide rail and is configured to carry a carrier. The boat-pushing assembly is also configured to transfer the carrier between the boat-pushing area and the reactor along a second horizontal direction. All boat-pushing assemblies are located in the boat-pushing area. The first slide rail has a length direction, a width direction, and a height direction, wherein the width of the first slide rail is greater than its height. When the boat-pushing mechanism is in the boat-pushing state, the length direction of the first slide rail is parallel to the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the height direction of the first slide rail is parallel to the first horizontal direction, and the width direction of the first slide rail is parallel to the direction of gravity. The clean bench device also includes a boat-moving mechanism connected to the frame. The boat-moving mechanism is used to move the carrier along the first horizontal direction through the gap between two adjacent first slide rails and transfer the carrier between the temporary storage area and the boat-pushing assembly of the boat-pushing mechanism in the boat-pushing state.
[0010] In some embodiments, a first slider is slidably disposed on a first slide rail. The pusher assembly includes a pusher paddle connected to the side of the first slider from the pusher region toward the temporary storage region, the pusher paddle extending along a second horizontal direction, and the pusher paddle being used to carry the sheet and transfer the sheet between the pusher region and the reactor.
[0011] In some embodiments, the boat-lifting mechanism includes two working sections located on either side of the frame along a second horizontal direction, the two working sections being used to lift the vehicle.
[0012] In some embodiments, the boat-moving mechanism further includes two second slide rails and two third slide rails. Both the third slide rails and the second slide rails extend along a first horizontal direction. One second slide rail is slidably connected to a working part and a third slide rail, respectively. The third slide rails are connected to the frame. Both third slide rails are located in a temporary storage area. The second slide rails can drive the working part to move relative to the third slide rail along the first horizontal direction. All the second slide rails can also extend from the temporary storage area to the boat-pushing area relative to the third slide rails. All the working parts can move from the temporary storage area to the boat-pushing area relative to the second and third slide rails and transfer the vehicle boat-pushing assembly. Alternatively, all the working parts can move from the boat-pushing area to the temporary storage area relative to the second and third slide rails and transfer the vehicle to the temporary storage area.
[0013] In some embodiments, the boat-moving mechanism further includes two fourth slide rails, each extending along the direction of gravity. The fourth slide rails are positioned between the boat-pushing area and the temporary storage area, and are slidably connected to the end of the third slide rail closest to the temporary storage area. The two fourth slide rails, two second slide rails, two third slide rails, and two working parts of the boat-moving mechanism are located on both sides of the storage rack along a second horizontal direction. The third slide rails are movable relative to the fourth slide rails and the boat-pushing mechanism along the direction of gravity, and synchronously drive the second slide rails and working parts to move.
[0014] One embodiment of this application also provides a photovoltaic material processing apparatus, including a reaction device and a clean bench as described above, the reaction device and the clean bench arranged along a second horizontal direction. The reaction device includes a reaction furnace extending along the second horizontal direction, the reaction furnace being used to react the sheet material.
[0015] In some embodiments, the number of boat-pushing mechanisms is at least two, and all boat-pushing mechanisms are spaced apart along the direction of gravity. The reactor is capable of moving from the reaction device into the frame along a second horizontal direction, and the reactor can also move within the frame along a first horizontal direction between two adjacent boat-pushing mechanisms.
[0016] In some embodiments, the reactor can also be moved along a first horizontal direction from inside the frame to outside the frame or from outside the frame to inside the frame. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of a photovoltaic material processing equipment provided in one embodiment of this application.
[0018] Figure 2 for Figure 1 A schematic diagram of the clean bench device.
[0019] Figure 3 for Figure 2 Side view of the air purification unit in the middle.
[0020] Figure 4 for Figure 2 A schematic diagram showing the boat-pushing mechanism in different states.
[0021] Figure 5 for Figure 2 A top view of the air purification unit in the middle.
[0022] Figure 6 for Figure 2 A schematic diagram of the boat-pushing mechanism in the diagram.
[0023] Figure 7 for Figure 2 An enlarged diagram of point A in the diagram.
[0024] Figure 8 for Figure 1 A schematic diagram of the frame of the clean bench unit.
[0025] Explanation of main component symbols
[0026] 10. Photovoltaic material processing equipment; 11. Cleanroom unit; 111. Frame; 1110. Column; 1111. Pushing area; 1112. Temporary storage area; 1113. Opening; 1114. Door panel; 112. Pushing mechanism; 1121. First slide rail; 1122. Pushing assembly; 1123. Pushing paddle; 1124. First slider; 114. Moving mechanism; 1141. Second slide rail; 1142. Third slide rail; 1143. Fourth slide rail; 12. Reaction device; 121. Reactor; 20. Carrier. Detailed Implementation
[0027] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.
[0028] The terms “top,” “upper,” “lower,” “front,” “back,” and similar expressions used in this article are for illustrative purposes only.
[0029] The terms “first”, “second”, etc., are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implying the quantity, specific order, or primary and secondary relationship of the indicated technical features.
[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
[0031] Please see Figures 1 to 5One embodiment of this application provides a photovoltaic material processing equipment 10, including a reaction device 12 and a clean bench device 11. The clean bench device 11 includes a frame 111, a boat-moving mechanism 114 and at least two boat-pushing mechanisms 112 disposed within the frame 111. The frame 111 has a length direction, a width direction and a height direction. The reaction device 12 and the frame 111 are distributed along a second horizontal direction, which is parallel to the length direction of the frame 111. The frame 111 has a boat-pushing area 1111 and a temporary storage area 1112, which are arranged along a first horizontal direction, which is parallel to the width direction of the frame 111 and the gravity direction is parallel to the height direction of the frame 111. The frame 111 also includes a column 1110 disposed between the boat-pushing area 1111 and the temporary storage area 1112. All the boat-pushing mechanisms 112 are arranged along the direction of gravity, which is parallel to the height direction of the frame 111. Each boat-pushing mechanism 112 includes a first slide rail 1121 and a boat-pushing assembly 1122. The boat-pushing assembly 1122 is disposed in the boat-pushing area 1111. The first slide rail 1121 is connected to the column 1110, and the boat-pushing assembly 1122 is slidably connected to the first slide rail 1121. The boat-moving mechanism 114 is disposed within the frame 111 and connected to the frame 111.
[0032] In the diagram, the direction of gravity is parallel to the Z-axis, the first horizontal direction is parallel to the X-axis, and the second horizontal direction is parallel to the Y-axis. It should be understood that the arrows in the diagram are not intended to restrict the X, Y, and Z axes to having only a single direction; directions opposite to the arrows are also included.
[0033] Before the reaction device 12 begins operation, the boat-moving mechanism 114 moves the sheet material to be processed, along with the carrier 20 supporting the sheet material, stored in the temporary storage area 1112 to the boat-pushing assembly 1122. The boat-pushing assembly 1122 then moves the carrier 20 along with the sheet material into the reaction device 12, allowing the reaction device 12 to process the sheet material. After the sheet material is processed, the boat-pushing assembly 1122 moves the carrier 20 along with the processed sheet material from the reaction device 12 to the frame 111. The boat-moving mechanism 114 then moves the carrier 20 and the processed sheet material together from the boat-pushing assembly 1122 back to the temporary storage area 1112 for cooling. This cycle is repeated to achieve automated processing of the photovoltaic material processing equipment 10.
[0034] It is understood that by setting the first slide rail 1121 between the pusher area 1111 and the temporary storage area 1112, the side of the frame 111 is avoided, so that when the equipment needs to be maintained, the components in the frame 111 can be maintained or replaced from the side.
[0035] In some embodiments, the boat-moving mechanism 114 is located between the boat-pushing area 1111 and the temporary storage area 1112 and is connected to the column 1110.
[0036] In other embodiments, the boat-moving mechanism 114 is located in the temporary storage area 1112.
[0037] In some embodiments, the reaction apparatus 12 includes a reactor 121, which is provided with a quartz tube for containing the sheet.
[0038] In some embodiments, the boat-pushing mechanism 112 is rotatably connected to the frame 111, and the rotation axis of the boat-pushing mechanism 112 is parallel to a second horizontal direction. The boat-pushing mechanism 112 has a pushing state and a folded state, wherein the rotation direction of the boat-pushing mechanism 112 from the pushing state to the folded state is the folding direction. When the boat-pushing mechanism 112 is in the pushing state, it can transfer the carrier 20 between the frame 111 and the reactor 121. Figure 3 and Figure 4 As shown, S represents the direction of rotation of the pusher mechanism 112. Figure a indicates that the pusher mechanism 112 is in the pusher state, and figure b indicates that the pusher mechanism 112 is in the folded state. Exemplarily, the first slide rail 1121 is rotatably connected to the frame 111. By driving the first slide rail 1121 to rotate from the pusher area 1111 to the temporary storage area 1112, the pusher mechanism 112 is rotated as a whole. Thus, without removing the pusher mechanism 112, a clearance space is formed on the side of the pusher mechanism 112 opposite to the folding direction to avoid the reactor 121 or the quartz tube inside the reactor 121. In this way, during maintenance, the reactor 121 or the quartz tube inside the reactor 121 can move along the Y-axis to the pusher area 1111, which helps to reduce the risk of interference between the pusher mechanism 112 and the reactor 121 or the quartz tube.
[0039] It is understood that in the pushing state, the line connecting the rotation center of the first slide rail 1121 and the pushing assembly 1122 is the first connecting line; in the folded state, the line connecting the rotation center of the first slide rail 1121 and the pushing assembly 1122 is the second connecting line. The first and second connecting lines form a preset angle, which is the rotation angle of the pushing mechanism 112. For example, the preset angle can be 20°, 30°, 40°, 50°, 60°, 70°, 80°, 90°, 100°, 110°, 120°, 130°, 140°, 150°, 160°, 170°, or 180°. The value of the preset angle is not limited and is set according to the required clearance space. When the preset angle is greater than 90°, the pushing mechanism 112 rotates from the pushing area 1111 to the temporary storage area 1112, so that the pushing area 1111 completely forms a clearance space.
[0040] In some embodiments, the boat-pushing mechanism 112 can be folded upwards or downwards along the Z-axis. When the boat-pushing mechanism 112 is folded downwards, a clearance space is formed between the boat-pushing mechanism 112 and the upper boat-pushing mechanism 112. When the boat-pushing mechanism 112 is folded upwards, a clearance space is formed between the boat-pushing mechanism 112 and the lower boat-pushing mechanism 112. In some embodiments, the clearance space includes the area swept by the boat-pushing mechanism 112 when it rotates along the folding direction.
[0041] In some embodiments, the boat pushing mechanism 112 is rotated by manual drive or by a power device.
[0042] In other embodiments, please refer to Figure 1 The axis of rotation of the boat-pushing mechanism 112 is parallel to the direction of gravity, or please refer to [link to relevant documentation]. Figure 6 The axis of rotation of the boat-pushing mechanism 112 is parallel to the first horizontal direction. In the figure, S represents the direction of rotation of the boat-pushing mechanism 112. Furthermore, one end of the boat-pushing mechanism 112 is rotatably connected to the frame 111, and the connection point is located on the side of the frame 111 away from the reactor 121 along the Y-axis direction. This allows the boat-pushing mechanism 112 to rotate away from the reactor 121, so that after the boat-pushing mechanism 112 flips over, it can avoid the space within the boat-pushing area 1111, and at the same time, it can move away from the reactor 121 and avoid the reactor 121.
[0043] In some embodiments, the number of reactors 121 is at least two, and the at least two reactors 121 are distributed at intervals along the direction of gravity. One reactor 121 is correspondingly arranged with one pusher mechanism 112 in the frame 111. The reactor 121 is tubular and extends along a second horizontal direction. One end of the reactor 121 facing the frame 111 is provided with a furnace opening (not indicated) so that the pusher mechanism 112 can transfer the sheet between the reactor 121 and the pusher area 1111 through the furnace opening.
[0044] In the prior art, the first slide rail 1121 typically has a length direction (along the Y-axis), a width direction (along the X-axis), and a height direction (along the Z-axis). The length of the first slide rail 1121 in the width direction (defined as the length of the first side) is smaller than the length of the first slide rail 1121 in the height direction (defined as the length of the second side), so that the boat-pushing mechanism 112 has a smaller size in the X-axis direction. However, in this case, the distance between the upper and lower first slide rails 1121 is too small, and the boat-moving mechanism 114 may interfere when passing the carrier 20 carrying the sheet material between the two first slide rails 1121 along the first horizontal direction. Therefore, the boat-moving mechanism 114 needs to pass above or below all the first slide rails 1121 to bypass them before it can transfer the carrier 20 between the temporary storage area 1112 and the boat-pushing assembly 1122. This significantly increases the travel distance of the boat-moving mechanism 114.
[0045] In some embodiments of this application, please refer to Figures 2 to 5 Without altering the shape of the first slide rail 1121, the length of the first side (i.e., the length along the X-axis) is set to be greater than the length of the second side (i.e., the length along the Z-axis). In other words, the first slide rail 1121 is rotated 90° about the Y-axis. By reducing the size of the first slide rail 1121 along the Z-axis, the distance between two adjacent first slide rails 1121 in the Z-axis direction is increased, thereby reducing the risk of interference between the first slide rail 1121 and the boat-moving mechanism 114, which travels along the first horizontal direction, and the sheet material or carrier 20 transported by the boat-moving mechanism 114. In this configuration, the boat-moving mechanism 114 can, during operation, guide the carrier 20 and the sheet material through the gap between the upper and lower first slide rails 1121 along the first horizontal direction, and transfer the carrier 20 between the temporary storage area 1112 and the boat-pushing assembly 1122, thus shortening the distance the boat-moving mechanism 114 travels to move the sheet material.
[0046] In some embodiments, the boat-moving mechanism 114 includes two working parts (not shown) disposed at both ends in a second horizontal direction. The two working parts are used to accommodate the carrier 20, and in operation, the two working parts are capable of lifting the carrier 20 to achieve the acquisition or release of the carrier 20.
[0047] In some embodiments, the working part includes a support member such as a support paddle or support claw for carrying the carrier 20.
[0048] In some embodiments, please refer to Figure 5 and Figure 7The boat-moving mechanism 114 also includes two second slide rails 1141 and two third slide rails 1142. Both the third slide rails 1142 and the second slide rails 1141 extend along a first horizontal direction. One second slide rail 1141 is slidably connected to a working part and a third slide rail 1142 respectively. The third slide rails 1142 are connected to the frame 111 respectively. Both third slide rails 1142 are located in the temporary storage area 1112. The second slide rails 1141 can drive the working part to move relative to the third slide rails 1142 along the first horizontal direction. When the working part needs to move the carrier 20 in the temporary storage area 1112 to the pusher assembly 1122, the second slide rail 1141, the third slide rail 1142, and the working part are all located in the temporary storage area 1112. Under the combined action of the second slide rail 1141 and the third slide rail 1142, the two working parts lift the carrier 20 in the temporary storage area 1112 from below. Then, the second slide rail 1141 drives the working part to slide relative to the third slide rail 1142 from the temporary storage area 1112 to the pusher area 1111. The movement continues until all the second slide rails 1141 extend from the temporary storage area 1112 to the boat pushing area 1111 relative to the third slide rail 1142. All the working parts slide on the second slide rails 1141 and drive the carrier 20 to move from the temporary storage area 1112 to the boat pushing area 1111 relative to the second slide rails 1141 and the third slide rail 1142. The working parts drive the carrier 20 to move above the boat pushing assembly 1122, and the working parts release the carrier 20 onto the boat pushing assembly 1122.
[0049] When the work unit needs to move the carrier 20 on the pusher assembly 1122 to the temporary storage area 1112, the second slide rail 1141 and the third slide rail 1142 together drive the work unit to move in the opposite direction.
[0050] The second slide rail 1141 extends and retracts from the temporary storage area 1112 to the boat pushing area 1111, thereby allowing the second slide rail 1141 to avoid the boat pushing assembly 1122 in the second horizontal direction. This achieves the effect of the boat pushing assembly 1122 moving the carrier 20 from the boat pushing area 1111 to the reactor 121 or moving the carrier 20 from the reactor 121 to the boat pushing area 1111.
[0051] It is understandable that while the second slide rail 1141 moves relative to the third slide rail 1142 along the first horizontal direction, the working part can also move relative to the second slide rail 1141 and the third slide rail 1142 along the first horizontal direction. This helps to shorten the time for the working part to move back and forth between the temporary storage area 1112 and the pusher assembly 1122, thereby improving the efficiency of the working part in transferring the carrier 20 between the temporary storage area 1112 and the pusher assembly 1122.
[0052] For further details, please refer to Figure 7The boat-moving mechanism 114 also includes two fourth slide rails 1143, both extending along the direction of gravity. A third slide rail 1142 is slidably connected to one of the fourth slide rails 1143. When the working part acquires the carrier 20 and moves it between the boat-pushing area 1111 and the temporary storage area 1112, the third slide rail 1142 moves up and down on the fourth slide rail 1143, simultaneously driving the second slide rail 1141 and the working part to move. This allows the working part to drive the carrier 20 to move along the direction of gravity, enabling the working part to drive the carrier 20 to move up and down. Using a pair of working parts, the temporary storage area 1112 can be at different heights or on different boat-pushing components 1122 to acquire or release the carrier 20, which helps reduce the number of boat-moving mechanisms 114.
[0053] In some embodiments, the working part is a cylinder, and the telescopic end of the cylinder can push upward and lift the carrier 20.
[0054] In some embodiments, the second slide rail 1141, the third slide rail 1142, and the working part of the boat-moving mechanism 114 form two sets and are located on one side of the temporary storage area 1112, the first slide rail 1121, and the boat-pushing assembly 1122 in the second horizontal direction, so that the second slide rail 1141, the third slide rail 1142, and the working part can move up and down on the outside of the first slide rail 1121 and the boat-pushing assembly 1122, thereby reducing the risk of interference between the boat-moving mechanism 114 and the carrier 20 in the temporary storage area 1112 or between the boat-moving mechanism 114 and the boat-pushing mechanism 112.
[0055] In other embodiments, in the first horizontal direction, the lengths of the second slide rail 1141 and the third slide rail 1142 are both less than the spacing of the first slide rail 1121. This is so that when the working part acquires the carrier 20 and moves it between the pusher area 1111 and the temporary storage area 1112, the first slide rail 1121 and the third slide rail 1142 can be positioned between the carrier 20 and the first slide rail 1121 in the temporary storage area 1112. This helps to reduce the risk of interference between the first slide rail 1121 and the third slide rail 1142 and the carrier 20 or the first slide rail 1121 in the temporary storage area 1112, achieving the effect that both the second slide rail 1141 and the third slide rail 1142 can move up and down relative to the pusher assembly 1122.
[0056] In other embodiments, the boat-moving mechanism 114 further includes a robotic arm disposed on one side of the frame 111 along a second horizontal direction, the robotic arm being capable of gripping one end of the carrier 20, gripping at least one carrier 20 or simultaneously gripping multiple sheets, and transferring the carrier 20 between the temporary storage area 1112 and the boat-pushing assembly 1122.
[0057] In some embodiments, please refer to Figure 6The boat pushing mechanism 112 also includes a first slider 1124, which is slidably connected to a first slide rail 1121. The boat pushing assembly 1122 includes a boat pushing paddle 1123 for supporting the carrier 20. One end of the boat pushing paddle 1123 is connected to the first slider 1124. The boat pushing paddle 1123 extends from the first slider 1124 toward the reactor 121 in a second horizontal direction to increase the support area of the boat pushing paddle 1123 so that the boat pushing paddle 1123 can stably support the carrier 20.
[0058] In some embodiments, the pusher 1123 is connected to one side of the first slider 1124 in the first horizontal direction. This connection, relative to the connection of the pusher 1123 to the first slider 1124 in the gravity direction, helps to reduce the risk of interference between the pusher 1123 and the boat-moving mechanism 114 passing between the two first slide rails 1121.
[0059] In some embodiments, the reactor 121 can enter the frame 111 along a second horizontal direction, and the reactor 121 can also be moved from inside the frame 111 to outside the frame 111 along a first horizontal direction. When the reactor 121 needs to be replaced, the damaged reactor 121 is entered into the frame 111 along the second horizontal direction, moved from inside the frame 111 to outside the frame 111 along the first horizontal direction, and finally the intact reactor 121 is moved into the frame 111 through the first opening 1113, and then moved out of the frame 111 along the second horizontal direction. It is understood that, compared to the need for operators or working equipment to enter the narrow frame 111 to disassemble and assemble the reactor 121, operators or working equipment can operate and move the reactor 121 from outside the frame 111, which helps to reduce the obstruction of the frame 111 or the components inside the frame 111 to the reactor 121, achieving the effect of facilitating operation.
[0060] In some embodiments, the reactor 121 can also pass between two adjacent first slide rails 1121 along a first horizontal direction, so as to enable the reactor 121 to move between the push-boat area 1111 and the temporary storage area 1112, which helps to increase the space for the reactor 121 to move within the frame 111 and improves the flexibility of disassembling and assembling the reactor 121.
[0061] It is understandable that when maintenance is required on other components inside the reactor 121, these components can be moved through the above-mentioned steps to facilitate maintenance.
[0062] In some embodiments, please refer to Figure 2The frame 111 is provided with an opening 1113 so that the carrier 20 in the temporary storage area 1112 can enter and exit the frame 111 through the opening 1113, thereby enabling loading and unloading of materials into the frame 111, or maintenance of other components in the frame 111 through the opening 1113.
[0063] In some embodiments, please refer to Figure 8 The outer side of the frame 111 is provided with a door panel 1114, which is movably connected to the outer surface of the frame 111. When the carrier 20 in the temporary storage area 1112 that does not require maintenance enters or exits the frame 111, the frame 111 is covered by the door panel 1114, which can keep the frame 111 in a sealed environment, thereby reducing the risk of heat exchange between the frame 111 and the outside world, reducing the risk of dust and other impurities in the frame 111 polluting the outside environment, or reducing the risk of outside air or dust entering the frame 111 and causing contamination to the sheet.
[0064] In some embodiments, the door panel 1114 is detachably mounted from the frame 111.
[0065] In other embodiments, the door panel 1114 is rotatably or slidably connected to the frame 111.
[0066] In some embodiments, the clean bench device 11 further includes a plurality of drivers (not identified), which are respectively disposed on the first slide rail 1121, the second slide rail 1141, the third slide rail 1142 and / or the fourth slide rail 1143. The drivers are driving elements with output reciprocating force, such as cylinders, hydraulic cylinders, electric actuators or motor synchronous belt modules.
[0067] The driver on the first slide rail 1121 is connected to the first slider 1124 and drives the first slider 1124 to reciprocate on the first slide rail 1121.
[0068] The driver on the third slide rail 1142 is connected to the second slide rail 1141 and drives the second slide rail 1141 to reciprocate on the third slide rail 1142.
[0069] The driver on the second slide rail 1141 is connected to the working part and drives the working part to reciprocate on the second slide rail 1141.
[0070] The driver on the fourth slide rail 1143 is connected to the third slide rail 1142 and drives the third slide rail 1142 to move up and down on the fourth slide rail 1143.
[0071] It is understood that each slide rail is equipped with a slider (not labeled). For example, the second slide rail 1141 is fixedly connected to the slider on the fixed slider. When the driver is a motor and a synchronous belt, the synchronous belt is rotatably mounted on the third slide rail 1142, and the synchronous belt is connected to the slider on the third slide rail 1142. The motor is fixedly mounted relative to the third slide rail 1142 and is connected to the synchronous belt drive. The motor drives the synchronous belt drive and synchronously moves the slider and the second slide rail 1141.
[0072] Similarly, different motors drive different synchronous belts to move, and drive the corresponding first slider 1124, working part or third slide rail 1142 to reciprocate.
[0073] In some embodiments, the clean bench device 11 further includes a cooling assembly (not shown), which is disposed within the frame 111 to cool the processed sheet material, thereby shortening the time the sheet material is stored in the frame 111.
[0074] In some embodiments, the sheet is a photovoltaic material such as a solar cell.
[0075] Furthermore, those skilled in the art should recognize that the above embodiments are merely illustrative of this application and are not intended to limit this application. Any appropriate changes and variations made to the above embodiments within the essential spirit and scope of this application fall within the scope of this application's disclosure.
Claims
1. A clean bench device for feeding a carrier holding sheets to be processed into a reactor for processing or for removing a carrier holding processed sheets from the reactor, characterized in that, The clean bench device includes: frame; A boat-pushing mechanism has a boat-pushing state and a folded state. The boat-pushing mechanism is disposed within the frame and can be rotated relative to the frame to switch between the boat-pushing state and the folded state. The direction of rotation of the boat-pushing mechanism from the boat-pushing state to the folded state is the folding direction. When the boat-pushing mechanism is in the boat-pushing state, the boat-pushing mechanism is used to transfer the carrier between the frame and the reactor; When the boat pushing mechanism is in the folded state, a clearance space is formed on the side of the boat pushing mechanism opposite to the folding direction.
2. The cleanroom bench device according to claim 1, characterized in that, The frame has a boat-pushing area and a temporary storage area, which are arranged along a first horizontal direction; The boat-pushing mechanism is located between the boat-pushing area and the temporary storage area, and is capable of driving the vehicle to move along a second horizontal direction, wherein the second horizontal direction is perpendicular to the first horizontal direction.
3. The cleanroom bench device according to claim 2, characterized in that, The boat-pushing mechanism extends along the second horizontal direction, and the axis of rotation of the boat-pushing mechanism is parallel to the second horizontal direction.
4. The cleanroom bench device according to claim 2, characterized in that, All of the boat-pushing mechanisms are spaced apart along the direction of gravity. Each boat-pushing mechanism includes a first slide rail and a boat-pushing assembly. All the first slide rails are located between the boat-pushing area and the temporary storage area and are rotatably connected to the frame. The boat-pushing assembly is slidably connected to the corresponding first slide rail. The boat-pushing assembly is configured to carry the carrier. The boat-pushing assembly is also configured to transfer the carrier between the boat-pushing area and the reactor along the second horizontal direction. All the boat-pushing assemblies are located in the boat-pushing area. The first slide rail has a length direction, a width direction, and a height direction, wherein the width of the first slide rail is greater than the height of the first slide rail. When the boat-pushing mechanism is in the boat-pushing state, the length direction of the first slide rail is parallel to the second horizontal direction, the second horizontal direction is perpendicular to the first horizontal direction, the height direction of the first slide rail is parallel to the first horizontal direction, and the width direction of the first slide rail is parallel to the direction of gravity. The purification table device also includes a boat-moving mechanism connected to the frame. The boat-moving mechanism is used to move the carrier along a first horizontal direction through the gap between two adjacent first slide rails and to transfer the carrier between the temporary storage area and the boat-pushing assembly of the boat-pushing mechanism in a boat-pushing state.
5. The cleanroom bench device according to claim 4, characterized in that, A first slider is slidably mounted on the first slide rail; The boat-pushing assembly includes a boat-pushing paddle connected to the side of the first slider from the boat-pushing area toward the temporary storage area. The boat-pushing paddle extends along a second horizontal direction and is used to carry a vehicle and transfer the vehicle between the boat-pushing area and the reactor.
6. The cleanroom bench device according to claim 4, characterized in that, The boat-moving mechanism includes two working parts located on both sides of the frame along the second horizontal direction, and the two working parts support the vehicle.
7. The cleanroom bench device according to claim 6, characterized in that, The boat-moving mechanism also includes two second slide rails and two third slide rails. Both the third slide rails and the second slide rails extend along the first horizontal direction. One second slide rail is slidably connected to one of the working parts and one of the third slide rails. The third slide rails are connected to the frame. Both third slide rails are located in the temporary storage area. The second slide rail can drive the working part to move relative to the third slide rail along the first horizontal direction, and all the second slide rails can also extend from the temporary storage area to the push boat area relative to the third slide rail; All of the working parts are capable of moving relative to the second and third slide rails from the temporary storage area to the boat pushing area and transferring the carrier to the boat pushing assembly, or all of the working parts are capable of moving relative to the second and third slide rails from the boat pushing area to the temporary storage area and transferring the carrier to the temporary storage area.
8. The cleanroom bench device according to claim 7, characterized in that, The boat-moving mechanism also includes two fourth slide rails, both of which extend along the direction of gravity. The fourth slide rails are disposed between the boat-pushing area and the temporary storage area, and are slidably connected to the end of the third slide rail near the temporary storage area. The two fourth slide rails, two second slide rails, two third slide rails, and two working parts of the boat-moving mechanism are located on both sides of the temporary storage area along the second horizontal direction; The third slide rail can move relative to the fourth slide rail and the boat pushing mechanism along the direction of gravity, and simultaneously drive the second slide rail and the working part to move.
9. A photovoltaic material processing equipment, characterized in that, The device includes a reaction apparatus and a clean bench as described in any one of claims 1 to 8, wherein the reaction apparatus and the clean bench are arranged along a second horizontal direction. The reaction apparatus includes a reaction furnace that extends along the second horizontal direction and is used to react the sheet.
10. The photovoltaic material processing equipment according to claim 9, characterized in that, The number of the boat-pushing mechanisms is at least two, and all the boat-pushing mechanisms are distributed at intervals along the direction of gravity. The reactor can move from the reaction device into the frame along the second horizontal direction, and the reactor can also move within the frame along the first horizontal direction between two adjacent pusher mechanisms, wherein the first horizontal direction and the second horizontal direction are perpendicular.
11. The photovoltaic material processing equipment according to claim 10, characterized in that, The reactor can also be moved along the first horizontal direction from inside the frame to outside the frame or from outside the frame to inside the frame.