Nitrogen trifluoride cold trap kettle integrated bottom support

Abstract

The utility model relates to the technical field of nitrogen trifluoride production, in particular to an integrated bottom support of a nitrogen trifluoride cold trap kettle. According to the technical scheme, the integrated cork base of the nitrogen trifluoride cold trap kettle comprises a cork base body, a cold trap treatment kettle is mounted in the cork base body in a supported mode, a cork base inner cavity is formed between the cork base body and the cold trap treatment kettle, one side of the top of the cork base inner cavity is connected with a circulating fan through a first valve, and the other side of the top of the cork base inner cavity is connected with a second valve. The circulating fan is connected with the warm air buffer tank, the other side of the top of the inner cavity of the bottom support is connected with a second valve, and the second valve is connected with a vacuum removal system. According to the utility model, the requirements of cold insulation and temperature rise of nitrogen trifluoride or other product cold trap treatment kettles at different stages can be efficiently met, continuous automation is realized, manpower is liberated, the production efficiency is improved, and meanwhile, potential safety hazards and equipment cold loss caused by nonstandard manual operation are avoided.

Description

Technical Field

[0001] This utility model relates to the field of nitrogen trifluoride production technology, and in particular to an integrated base for a nitrogen trifluoride cold trap reactor. Background Technology

[0002] The production of nitrogen trifluoride using a cold trap treatment vessel mainly consists of two stages: low-temperature collection and heating and gas compression. During the low-temperature stage, a base is required for cold preservation. When the heating stage begins, the base needs to be removed and replaced with heating equipment such as an electric furnace. This involves on-site personnel, resulting in low efficiency. Furthermore, non-standard manual operations pose safety hazards and lead to equipment cooling and heat loss.

[0003] Chinese Patent CN113606820B discloses a cryogenic cold trap device for nitrogen trifluoride electrolysis gas that combines direct and indirect refrigeration. The device includes a protective box containing a cooling box, which in turn contains a cooling tank. A serpentine conveying pipe is installed on the inner wall of the cooling tank, with one end connected to an air inlet device. A cooling mechanism is located outside the cooling tank, with one end of the serpentine conveying pipe connected to a connecting pipe, and the other end connected to a cooling tank. A coolant adding device is connected to the upper end of the cooling tank, and a reflux device is connected to the lower end. However, this patent does not solve the problem of the cold trap requiring repeated low-temperature heating and replacement of the base support. Utility Model Content

[0004] This invention proposes an integrated base for a nitrogen trifluoride cold trap, which solves the problem in the prior art where the base needs to be removed and replaced with heating equipment such as an electric furnace when the heating stage is reached, resulting in low efficiency due to on-site personnel work.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] A nitrogen trifluoride cold trap vessel integrated base includes a base body in which a cold trap treatment vessel is mounted. An inner cavity is formed between the base body and the cold trap treatment vessel. A circulating fan is connected to the top side of the inner cavity via a first valve. The circulating fan is connected to a warm air buffer tank. A second valve is connected to the top side of the inner cavity via a second valve. The second valve is connected to a vacuum system.

[0007] Furthermore, the top of the inner cavity of the base is connected to the second valve and the third valve respectively through the same pipeline, and the third valve is connected to the warm air buffer tank through a gas heating heat exchange device.

[0008] Furthermore, an air compressor is connected to the warm air buffer tank.

[0009] Further, the top of the bottom support body is provided with a mounting ring, two communication pipes are mounted on the mounting ring, the first communication pipe is connected with the first valve, and the second communication pipe is connected with the second valve and the third valve respectively.

[0010] Further, a lower ring is fixedly connected to the mounting ring, the cold trap treatment kettle is inserted into the circular ring of the lower ring, an upper buckle ring is fixedly connected to the outer wall of the cold trap treatment kettle, a third sealing ring is fixedly connected to the edge away from the center of the upper buckle ring, and the inner ring radius of the third sealing ring is the same as the outer ring radius of the lower ring.

[0011] Further, a first sealing ring is mounted on the lower surface of the upper buckle ring, and the lower ring is provided with an embedded groove corresponding to the first sealing ring.

[0012] Further, a second sealing ring is mounted on the lower surface of the upper buckle ring, the second sealing ring is made of silica gel, a pressing ring is fixedly connected to the side close to the center of the lower ring, a gap for accommodating the second sealing ring is formed between the pressing ring and the lower ring, the upper width of the gap is smaller than the lower width of the gap, the second sealing ring is inclined, and the upper thickness of the second sealing ring is smaller than the lower thickness of the second sealing ring.

[0013] The positive effect of the utility model is: can efficiently complete the different stage cold preservation, temperature rising demand of nitrogen trifluoride or other product cold trap treatment kettle, realizes continuous automation, liberates manpower, improves production efficiency, avoids the situation that the non-standard manual operation exists security hidden danger and equipment runs cold, heat loss, heat exchange system can exchange heat with other heat exchange facilities in factory area, reduces energy consumption and production cost. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the bottom support structure schematic diagram of the utility model nitrogen trifluoride cold trap kettle integration;

[0015] Figure 2 It is the first local structure schematic diagram of the utility model nitrogen trifluoride cold trap kettle integration bottom support;

[0016] Figure 3 It is the second local structure schematic diagram of the utility model nitrogen trifluoride cold trap kettle integration bottom support;

[0017] Figure 4 It is the third local structure schematic diagram of the utility model nitrogen trifluoride cold trap kettle integration bottom support;

[0018] Figure 5 It is the fourth local structure schematic diagram of the utility model nitrogen trifluoride cold trap kettle integration bottom support;

[0019] Figure 6 It is the local sectional view of the utility model nitrogen trifluoride cold trap kettle integration bottom support;

[0020] In the figure: 1, cold trap processing kettle; 2, bottom support body; 3, flow meter and thermometer; 4, gas heating heat exchange equipment; 5, warm air buffer tank; 6, air compressor; 7, circulating fan; 8, bottom support inner cavity; 9, first valve; 10, second valve; 11, third valve; 12, mounting ring; 13, communication pipe; 14, lower ring; 15, upper clamping ring; 16, first sealing ring; 17, second sealing ring; 18, pressing ring; 19, third sealing ring. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below in combination with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor are involved in the protection scope of the utility model.

[0022] Embodiment 1

[0023] In combination with Figure 1 As shown in the figure, a trifluoride nitrogen cold trap kettle integrated bottom support, including bottom support body 2, bottom support body 2 is supported and installed with cold trap processing kettle 1, bottom support body 2 and cold trap processing kettle 1 between having bottom support inner cavity 8, the top side of bottom support inner cavity 8 is connected with circulating fan 7 through first valve 9, circulating fan 7 is connected with warm air buffer tank 5, the top side of bottom support inner cavity 8 is connected with second valve 10, and second valve 10 is connected with vacuum system.

[0024] The vacuum system is used to carry out vacuumizing, so that the inside of bottom support inner cavity 8 tends to be in a vacuum state, and the heat insulation effect is achieved.

[0025] The top side of bottom support inner cavity 8 is connected with second valve 10 and third valve 11 respectively through the same pipeline, and third valve 11 is connected with warm air buffer tank 5 through gas heating heat exchange equipment 4; air compressor 6 is connected on warm air buffer tank 5, and air compressor 6 can carry out air compression to obtain heat energy.

[0026] In the embodiment, when cold trap processing kettle 1 needs to be in a low temperature state, first valve 9 and third valve 11 are closed, and only second valve 10 is opened, and vacuum system continuously vacuums inside bottom support inner cavity 8, and the pressure is maintained below-0.08MPa, so that the vacuum heat insulation effect is achieved, and thus the low temperature state is maintained, and the external heat is insulated.

[0027] When cold trap processing kettle 1 needs to be warmed up, second valve 10 is closed in turn, and first valve 9 and third valve 11 are opened, and hot air enters bottom support inner cavity 8 through circulating fan 7;

[0028] The hot air, after circulating in the inner cavity 8 of the base, leaves the inner cavity 8 through the pipeline of the third valve 11, passes through the flow meter and the temperature meter 3 and the gas heating and heat exchange device 4 in sequence, and finally returns to the warm air buffer tank 5.

[0029] The first valve 9 can be adjusted to control the air volume according to the hot air outlet flow and temperature of the flow meter and the temperature meter 3 as required by the process. The warm air buffer tank 5 is provided with constant pressure and temperature, and the warm air buffer tank 5 is in self-control relationship with the gas heating and heat exchange device 4 and the air compressor 6 respectively to adjust the gas temperature and supplement the pressure.

[0030] Embodiment 2

[0031] In combination with Figures 1-6 As shown in the drawings, the difference between this embodiment and embodiment 1 is that the top of the base body 2 is provided with a mounting ring 12, and two communication pipes 13 are mounted on the mounting ring 12. The first communication pipe 13 is connected with the first valve 9, and the second communication pipe 13 is connected with the second valve 10 and the third valve 11 respectively.

[0032] The mounting ring 12 is fixedly connected with a lower ring 14. The cold trap processing kettle 1 is inserted downward from the inner ring of the lower ring 14. The outer wall of the cold trap processing kettle 1 is fixedly connected with an upper buckle ring 15. The edge of the upper buckle ring 15 away from the center is fixedly connected with a third sealing ring 19. The inner ring radius of the third sealing ring 19 is the same as the outer ring radius of the lower ring 14. The lower surface of the upper buckle ring 15 is provided with a first sealing ring 16. The lower ring 14 is provided with an embedded groove corresponding to the first sealing ring 16.

[0033] When the cold trap processing kettle 1 is inserted into the base body 2, in order to ensure the effect of subsequent vacuumization, the insertion contact position needs to be sealed.

[0034] In this embodiment, after the cold trap processing kettle 1 is inserted, the first sealing ring 16 is embedded into the lower ring 14, and the third sealing ring 19 is wrapped outside the lower ring 14, thereby forming the sealing on the outside.

[0035] Embodiment 3

[0036] In combination with Figures 1-6 As shown in the drawings, the difference between this embodiment and embodiment 2 is that the sealing effect is further optimized. The lower surface of the upper buckle ring 15 is provided with a second sealing ring 17 made of silica gel. The side close to the center of the lower ring 14 is fixedly connected with a pressing ring 18. The gap between the pressing ring 18 and the lower ring 14 can accommodate the second sealing ring 17. The upper part of the gap has a width smaller than the lower part of the gap. The second sealing ring 17 is inclined, and the upper part of the second sealing ring 17 has a thickness smaller than the lower part of the second sealing ring 17.

[0037] The second sealing ring 17 is inserted between the compression ring 18 and the gap of the lower ring 14, and is compressed during the insertion process. After the second sealing ring 17 is inserted in place, the second sealing ring 17 is resiliently returned after moving to the lower part of the gap, and the gap between the compression ring 18 and the lower ring 14 is squeezed and closed under the elastic force. The overall width of the gap is less than the thickness of the second sealing ring 17, thereby achieving double sealing and ensuring the subsequent vacuum effect.

[0038] The above-described embodiments are more detailed and specific, express the preferred embodiments of the present application, and are only used to illustrate the technical ideas and characteristics of the present application. The purpose is to enable those skilled in the art to understand the content of the present application and implement it accordingly, but it is not limited to the present application, and the patent range of the present application cannot be limited by the present embodiment. That is, any equivalent changes or modifications made in the spirit disclosed by the present application, without departing from the structure of the present application, the internal partial improvement of the system and the change between the subsystems, the transformation, etc., are still within the patent range of the present application.

Claims

1. A trifluorinated nitrogen cold trap kettle integrated base support, characterized in that, The bottom bracket body (2) is provided with a cold trap processing kettle (1) mounted in the bracket, and a bottom bracket cavity (8) is formed between the bottom bracket body (2) and the cold trap processing kettle (1). The top side of the bottom bracket cavity (8) is connected with a circulating fan (7) through a first valve (9), and the circulating fan (7) is connected with a warm air buffer tank (5). The other side of the top of the bottom bracket cavity (8) is connected with a second valve (10), and the second valve (10) is connected with a vacuum system.

2. The trifluoronitrogen cold trap kettle integrated base support according to claim 1, wherein, The other side of the top of the bottom bracket cavity (8) is connected with the second valve (10) and a third valve (11) through the same pipeline, and the third valve (11) is connected with the warm air buffer tank (5) through a gas heating heat exchange device (4).

3. The trifluoronitrogen cold trap kettle integrated base support according to claim 2, wherein, The warm air buffer tank (5) is connected with an air compressor (6).

4. The trifluoronitrogen cold trap kettle integrated base support according to claim 3, wherein, The top of the bottom bracket body (2) is provided with a mounting ring (12), and two communication pipes (13) are mounted on the mounting ring (12). The first communication pipe (13) is connected with the first valve (9), and the second communication pipe (13) is connected with the second valve (10) and the third valve (11) respectively.

5. The trifluoronitrogen cold trap kettle integrated base support according to claim 4, wherein, The mounting ring (12) is fixedly connected with a lower ring (14), and the cold trap processing kettle (1) is inserted downward from the inside of the circular ring of the lower ring (14). An upper buckle ring (15) is fixedly connected to the outer wall of the cold trap processing kettle (1), and a third sealing ring (19) is fixedly connected to the edge away from the center of the upper buckle ring (15). The inner ring radius of the third sealing ring (19) is the same as the outer ring radius of the lower ring (14).

6. The trifluoronitrogen cold trap kettle integrated base support according to claim 5, wherein, A first sealing ring (16) is mounted on the lower surface of the upper buckle ring (15), and the lower ring (14) is provided with an embedded groove corresponding to the first sealing ring (16).

7. The trifluoronitrogen cold trap-integrated bottom support according to claim 6, characterized by, A second sealing ring (17) is mounted on the lower surface of the upper buckle ring (15), and the second sealing ring (17) is made of silica gel. A pressing ring (18) is fixedly connected to the side close to the center of the lower ring (14). A gap for accommodating the second sealing ring (17) is left between the pressing ring (18) and the lower ring (14). The upper width of the gap is smaller than the lower width of the gap. The second sealing ring (17) is inclined, and the upper thickness of the second sealing ring (17) is smaller than the lower thickness of the second sealing ring (17).

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