SIC single-face cleaning device

Abstract

The utility model discloses an SIC single-face cleaning device, which relates to the technical field of SIC cleaning equipment and comprises a device base, and a drainage groove is arranged at the bottom of the device base. By means of the limiting rod, the positioning table, the fixing sleeve, the power motor and the electric push rod, the positioning table and the limiting rod are connected in a sleeved mode and then fixed through the fixing sleeve in a threaded mode, after the surface of the SIC wafer is cleaned, the power motor is started to drive the electric push rod to push upwards, the cleaned SIC wafer is ejected out, automatic material returning is achieved, and the automatic material returning efficiency is improved. The subsequent replacement of a new SIC wafer for continuous cleaning is facilitated; according to the SIC wafer surface cleaning device, a filter screen, a positioning rod and a clamping sleeve are arranged, the filter screen is inserted into the bottom of the containing disc through the positioning rod, then the clamping sleeve and a positioning table are clamped and fixed, in the process that the surface of an SIC wafer is cleaned through flushing fluid, impurities adhering to the surface can be mixed into the flushing fluid, the impurities are filtered through the filter screen, and the cleaning fluid can be recycled for secondary utilization; the cleaning cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to SIC cleaning equipment technical field, specifically is a kind of SIC single side cleaning device. BACKGROUND

[0002] SIC is silicon carbide material, because its excellent physical and chemical properties, such as high hardness, high thermal conductivity, good chemical stability and excellent performance in high temperature environment, in semiconductor, electronic, energy and many other fields have been widely used, with the in-depth application of SIC material in various fields, its surface quality requirement is also increasing, and in the production and processing process of SIC material, its surface is inevitably attached to various pollutants, and its surface needs to be cleaned, but the existing cleaning device cannot be cleaned and filtered when in use, and the cleaning liquid cannot be recycled, and the traditional cleaning device can only be cleaned once, and the cleaning efficiency is low, and after cleaning, SIC cannot be automatically returned, to solve the above problems, therefore a kind of SIC single side cleaning device is needed.

[0003] The existing SIC single side cleaning device cannot filter cleaning liquid, cannot automatically return material and has poor cleaning efficiency when operating, so there is an urgent need for a SIC single side cleaning device. UTILITY MODEL CONTENTS

[0004] Therefore, the utility model aims at providing a kind of SIC single side cleaning device to solve the problems of the existing SIC single side cleaning device, which cannot filter cleaning liquid, cannot automatically return material and has poor cleaning efficiency when in use.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a kind of SIC single side cleaning device, including device base, the bottom of the device base is provided with drainage groove, the sidewall of the base is installed with water guide pipe, the outer wall of the water guide pipe is installed with pressure pump, the outer wall of the pressure pump is installed with flushing spray head, the top of the device base is installed with fixed table, the bottom of the fixed table is installed with rotating motor, the top of the rotating motor is installed with rotating disc, the sidewall of the rotating disc is installed with containing disc.

[0006] The bottom of the containing disc is installed with limiting rod, the outer wall of the limiting rod is installed with positioning table, the outer wall of the limiting rod is installed with fixed sleeve, the bottom of the positioning table is installed with power motor, the top of the power motor is installed with electric push rod.

[0007] The bottom of the containing disc is installed with filter screen, the top of the filter screen is installed with positioning rod, the bottom of the filter screen is installed with clamping sleeve.

[0008] Preferably, the drain grooves are arranged in a ring array centered on the central axis of the device base, and the grooves correspond in position to the water guide pipes.

[0009] Preferably, the rotating disc is rotatably connected to the fixed table by the rotating motor, and the holding disc is arranged in a ring array centered on the central axis of the fixed table.

[0010] Preferably, the positioning table is movably connected to the limiting rod, and the fixing sleeve is threadedly connected to the limiting rod.

[0011] Preferably, the electric push rod has a top diameter smaller than a bottom hole diameter of the holding disc, and the limiting rods are arranged in a rectangular array centered on the central axis of the holding disc.

[0012] Preferably, the filter screen is tightly attached to the outer wall of the bottom of the holding disc, and the positioning rod is inserted into the bottom of the holding disc.

[0013] Preferably, the clamping sleeve is U-shaped, and the clamping sleeve is clamped to the positioning table.

[0014] Compared with the prior art, the device has the following beneficial effects:

[0015] 1. The device has the fixed table, the rotating motor, the rotating disc and the holding disc, and the SIC round crystal to be cleaned is placed in the holding disc, then the rotating motor is started to drive the rotating disc to rotate, then the pressure pump is started to draw the cleaning liquid, and the SIC round crystal surface is washed by the washing nozzle, the rotating disc and the holding disc can be rotated to wash a batch of SIC round crystals, the washing effect is improved, and the cleaning efficiency is greatly improved.

[0016] 2. The device has the limiting rod, the positioning table, the fixing sleeve, the power motor and the electric push rod, the positioning table is sleeved with the limiting rod, then the fixing sleeve is threadedly fixed, when the SIC round crystal surface is cleaned, the power motor is started to drive the electric push rod to push upward, the cleaned SIC round crystal is pushed out, automatic material withdrawal is realized, and the subsequent replacement of the new SIC round crystal for cleaning is facilitated.

[0017] 3. The device has the filter screen, the positioning rod and the clamping sleeve, the filter screen is inserted into the bottom of the holding disc through the positioning rod, and then the clamping sleeve is clamped to the positioning table, when the SIC round crystal surface is washed by the washing liquid, the impurities adhered to the surface are mixed into the washing liquid, the impurities are filtered by the filter screen, the washing liquid can be recycled and reused, and the cleaning cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 is a structural schematic view of the front appearance of the device;

[0019] Figure 2The structure schematic view of the surrounding assembly details of the containing disc is shown in the utility model.

[0020] Figure 3 The structure schematic view of the surrounding assembly split of the electric push rod is shown in the utility model.

[0021] Figure 4 The structure schematic view of the surrounding assembly split of the filter screen is shown in the utility model.

[0022] In the figure: 1, device base; 2, drain groove; 3, water guide pipe; 4, pressure pump; 5, flushing nozzle; 6, fixed platform; 7, rotary motor; 8, rotating disc; 9, containing disc; 10, limiting rod; 11, positioning platform; 12, fixed sleeve; 13, power motor; 14, electric push rod; 15, filter screen; 16, positioning rod; 17, clamping sleeve. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are used only for explaining the utility model and cannot be understood as limiting the utility model.

[0024] The embodiments of the utility model will be described below according to the overall structure of the utility model.

[0025] Please refer to Figures 1-4 A SIC single-sided cleaning device, including device base 1, the bottom of device base 1 is provided with drain groove 2, the side wall of base 1 is installed with water guide pipe 3, the outer wall of water guide pipe 3 is installed with pressure pump 4, the outer wall of pressure pump 4 is installed with flushing nozzle 5, the top of device base 1 is installed with fixed platform 6, the bottom of fixed platform 6 is installed with rotary motor 7, the top of rotary motor 7 is installed with rotating disc 8, the side wall of rotating disc 8 is installed with containing disc 9, drain groove 2 is arranged in annular array around the central axis of device base 1, and water tank 2 corresponds to the position of water guide pipe 3, rotating disc 8 and fixed platform 6 constitute a rotating structure through rotary motor 7, and containing disc 9 is arranged in annular array around the central axis of fixed platform 6, through the setting of fixed platform 6, rotary motor 7, rotating disc 8 and containing disc 9, the SIC round crystal needing to be cleaned is placed in containing disc 9, then the rotating disc 8 is driven to rotate through the start of rotary motor 7, then the pressure pump 4 is started to extract cleaning liquid, and the SIC round crystal surface is flushed through flushing nozzle 5, and the rotating setting of rotating disc 8 and containing disc 9 can carry out batch flushing, improve the flushing effect, and greatly improve the cleaning efficiency.

[0026] Please refer to Figures 1-4The application discloses a single-face cleaning device for SIC, and the bottom of a containing disc 9 is provided with a limiting rod 10, the outer wall of the limiting rod 10 is provided with a positioning table 11, the outer wall of the limiting rod 10 is provided with a fixing sleeve 12, the bottom of the positioning table 11 is provided with a power motor 13, the top of the power motor 13 is provided with an electric push rod 14, the positioning table 11 is movably connected with the limiting rod 10, the fixing sleeve 12 is threadedly connected with the limiting rod 10, the diameter of the top of the electric push rod 14 is smaller than the diameter of the bottom hole of the containing disc 9, and the limiting rod 10 is arranged in a rectangular array and takes the central axis of the containing disc 9 as the center, the positioning table 11 is sleeved with the limiting rod 10 through the limiting rod 10, the positioning table 11, the fixing sleeve 12, the power motor 13 and the electric push rod 14, and then the positioning table 11 is fixed through the fixing sleeve 12, when the surface cleaning of the SIC wafer is completed, the SIC wafer is pushed up and ejected through the power motor 13 and the electric push rod 14, the automatic material ejection is realized, and the subsequent replacement of the new SIC wafer for continuous cleaning is facilitated.

[0027] Please refer to Figures 1-4 The application discloses a single-face cleaning device for SIC, and the bottom of a containing disc 9 is provided with a limiting rod 10, the outer wall of the limiting rod 10 is provided with a positioning table 11, the outer wall of the limiting rod 10 is provided with a fixing sleeve 12, the bottom of the positioning table 11 is provided with a power motor 13, the top of the power motor 13 is provided with an electric push rod 14, the positioning table 11 is movably connected with the limiting rod 10, the fixing sleeve 12 is threadedly connected with the limiting rod 10, the diameter of the top of the electric push rod 14 is smaller than the diameter of the bottom hole of the containing disc 9, and the limiting rod 10 is arranged in a rectangular array and takes the central axis of the containing disc 9 as the center, the positioning table 11 is sleeved with the limiting rod 10 through the limiting rod 10, the positioning table 11, the fixing sleeve 12, the power motor 13 and the electric push rod 14, and then the positioning table 11 is fixed through the fixing sleeve 12, when the surface cleaning of the SIC wafer is completed, the SIC wafer is pushed up and ejected through the power motor 13 and the electric push rod 14, the automatic material ejection is realized, and the subsequent replacement of the new SIC wafer for continuous cleaning is facilitated.

[0028] Working principle: in use, first, the device is moved to the required position, then the filter screen 15 is inserted into the bottom of the containing disc 9 through the positioning rod 16, then the positioning table 11 is sleeved with the limiting rod 10, then it is fixed through the fixed sleeve 12, at this time, the clamping sleeve 17 is clamped and fixed with the positioning table 11, then the SIC round crystal to be cleaned is placed in the containing disc 9, then the rotating motor 7 is started to drive the rotating disc 8 to rotate, then the pressure pump 4 is started to extract the cleaning liquid, and the SIC round crystal surface is washed through the flushing nozzle 5, while the rotating setting of the rotating disc 8 and the containing disc 9 can carry out batch flushing, which improves the flushing effect and greatly improves the cleaning efficiency, while the impurities adhered to the surface of the SIC round crystal are mixed into the flushing liquid during the surface cleaning process, the impurities are filtered through the setting of the filter screen 15, so that the cleaning liquid can be recycled and reused, which reduces the cleaning cost, when the surface cleaning of the SIC round crystal is completed, the power motor 13 is started to drive the electric push rod 14 to push upward, so as to push out the cleaned SIC round crystal, realize automatic material withdrawal, and facilitate subsequent replacement of new SIC round crystal for continuous cleaning, so that the use process of the device is completed, and the contents not described in detail in the specification belong to the prior art known to those skilled in the art.

[0029] Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A SIC single side cleaning device comprising a device base (1), characterized in that: The bottom of the device base (1) is provided with a drainage groove (2), the sidewall of the base (1) is provided with a water guide pipe (3), the outer wall of the water guide pipe (3) is provided with a pressure pump (4), the outer wall of the pressure pump (4) is provided with a flushing nozzle (5), the top of the device base (1) is provided with a fixed table (6), the bottom of the fixed table (6) is provided with a rotary motor (7), the top of the rotary motor (7) is provided with a rotating disc (8), the sidewall of the rotating disc (8) is provided with a containing disc (9); The bottom of the containing disc (9) is provided with a limiting rod (10), the outer wall of the limiting rod (10) is provided with a positioning table (11), the outer wall of the limiting rod (10) is provided with a fixed sleeve (12), the bottom of the positioning table (11) is provided with a power motor (13), the top of the power motor (13) is provided with an electric push rod (14); The bottom of the containing disc (9) is provided with a filter screen (15), the top of the filter screen (15) is provided with a positioning rod (16), the bottom of the filter screen (15) is provided with a clamping sleeve (17).

2. A single-sided cleaning apparatus according to claim 1, wherein: The drainage groove (2) is arranged in a ring array around the central axis of the device base (1), and the water groove (2) corresponds in position to the water guide pipe (3).

3. The SIC single side cleaning device according to claim 1, wherein: The rotating disc (8) and the fixed table (6) constitute a rotating structure through the rotary motor (7), and the containing disc (9) is arranged in a ring array around the central axis of the fixed table (6).

4. The SIC single side cleaning apparatus according to claim 1, wherein: The positioning table (11) is movably connected with the limiting rod (10), and the fixed sleeve (12) is threadedly connected with the limiting rod (10).

5. The SIC single side cleaning apparatus according to claim 1, wherein: The diameter of the top of the electric push rod (14) is smaller than the diameter of the bottom hole of the containing disc (9), and the limiting rod (10) is arranged in a rectangular array around the central axis of the containing disc (9).

6. A single-sided cleaning apparatus according to claim 1, wherein: The filter screen (15) is tightly attached to the outer wall of the bottom of the containing disc (9), and the positioning rod (16) is inserted into the bottom of the containing disc (9).

7. The SIC single side cleaning device of claim 1, wherein: The clamping sleeve (17) is in a U shape, and the clamping sleeve (17) is clampedly connected with the positioning table (11).

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