Polishing pad chamfering device
By designing a polishing pad chamfering device, an automated chamfering process was achieved, solving the safety and consistency issues in existing technologies and improving the flatness and efficiency of the polishing pad edges.
Patent Information
- Application Number
- CN202520485058.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-19
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-03-19
AI Technical Summary
Existing polishing pad chamfering technology relies on manual operation, which poses safety hazards, is inefficient, has poor consistency, and makes it difficult to guarantee the flatness of the polishing pad edges.
Design a polishing pad chamfering device, including a mounting base, a position angle adjustment device and a blade head, which automatically adjusts the blade angle and position through a mechanized method, and achieves stable cutting by combining the rotation of the polishing machine table.
It improves the efficiency and edge smoothness of polishing pad chamfering, ensures chamfering consistency, and enhances safety by avoiding the instability and safety risks of manual operation.
Smart Images
Figure CN223849015U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor substrate processing, especially relates to a polishing pad chamfer device. BACKGROUND
[0002] Chemical mechanical polishing (CMP) is a key link in the process of substrate wafer processing, mainly for wafer between polishing liquid and polishing pad, through chemical reaction and mechanical grinding synergistic effect, realize wafer nanometer level planarization key technology.
[0003] The above process, the first step needs to paste polishing pad, and the polishing pad is tightly attached to the polishing machine big dish, to ensure that the polishing pad is tight and flat, and the surface has no bubble phenomenon, then the excess edge of the polishing pad is chamfered, so that the edge of the polishing pad is attached to the edge of the big dish. The existing polishing pad chamfering technology is completed manually by the operator, that is, the operator holds the blade with both hands, cuts the edge of the polishing pad with the blade until the edge of the polishing pad is attached to the edge of the big dish, and then rotates around the big dish, that is, the chamfering work is completed. The disadvantages are that the chamfering is manually processed, the hand holding is unstable, the action is not coherent, the edge of the polishing pad is rough and uneven, the hand is cut, the safety cannot be effectively guaranteed, in addition, the chamfering operation mode of each person and the understanding of chamfering are different, and the consistency of the chamfering of the polishing pad cannot be guaranteed. Therefore, it is an urgent problem to design a safe, efficient and convenient chamfering tool. UTILITY MODEL CONTENTS
[0004] The utility model aims at providing a polishing pad chamfer device, so that it can safely and efficiently chamfer the polishing pad, and improve the edge smoothness and consistency of the chamfered polishing pad.
[0005] In order to achieve the above object, the utility model provides the following technical scheme:
[0006] A polishing pad chamfer device comprises:
[0007] The mounting and fixing base is used for being detachably fixed at a preset position;
[0008] The position angle adjusting device is connected to the first end of the mounting and fixing base;
[0009] The cutter head comprises a mounting frame, a fixing component and a blade, the mounting frame is connected to the second end of the position angle adjusting device, the fixing component is adjustably arranged on the mounting frame, and the blade is detachably arranged on the fixing component.
[0010] In an embodiment of the present application, the position angle adjusting device comprises a first locking mechanism and a plurality of universal rods, two adjacent universal rods are connected by the first locking mechanism, when the first locking mechanism is in a locked state, the two adjacent universal rods are relatively fixed, when the first locking mechanism is in a relaxed state, the two adjacent universal rods can rotate relative to each other, and the two universal rods at the two ends of the position angle adjusting device are connected with the mounting frame and the mounting fixed base respectively.
[0011] In an embodiment of the present application, the first locking mechanism comprises a first locking screw and a first locking nut, one end of the first locking screw is arranged in one of the two adjacent universal rods, the other end of the first locking screw passes through the other of the two adjacent universal rods and is threadedly connected with the first locking nut, when the first locking nut is in close contact with the universal rod, the first locking mechanism is in a locked state, and when there is a gap between the first locking nut and the universal rod, the first locking mechanism is in a relaxed state.
[0012] In an embodiment of the present application, the universal rod and the mounting fixed base are rotatably connected through a universal ball joint, the universal ball joint comprises a ball head arranged in one of the universal rod and the mounting fixed base and a ball bowl arranged in the other of the universal rod and the mounting fixed base, and the ball head is rotatably embedded in the ball bowl.
[0013] And / or, the universal rod and the mounting frame are rotatably connected through a universal ball joint, the universal ball joint comprises a ball head arranged in one of the universal rod and the mounting frame and a ball bowl arranged in the other of the universal rod and the mounting frame, and the ball head is rotatably embedded in the ball bowl.
[0014] In an embodiment of the present application, the universal ball joint further comprises a second locking mechanism, the second locking mechanism comprises a locking sleeve, a plurality of expansion and contraction joints are arranged on the circumference of the ball bowl, the expansion and contraction joints extend along the axial direction of the ball bowl, the outer wall surface of the ball bowl is provided with external threads, the locking sleeve is provided with internal threads, and the locking sleeve is threadedly connected with the ball bowl.
[0015] In one embodiment of the present application, the fixing component comprises a fixing plate, a threaded fastener and a third locking mechanism, the fixing plate is rotatably arranged on the mounting frame through a rotating shaft, a plurality of first fixing holes are arranged on the fixing plate along the axial direction of the rotating shaft, the threaded fastener passes through the first fixing hole to clamp and fix the blade on the fixing plate, and the third locking mechanism is arranged on one end of the rotating shaft.
[0016] In one embodiment of the present application, the fixing component comprises two fixing plates, one of the fixing plates is rotatably arranged on the mounting frame through the rotating shaft, a plurality of first fixing holes are arranged on the two fixing plates respectively, a plurality of second fixing holes are arranged on the blade, and the threaded fastener passes through the first fixing hole on one of the fixing plates, the second fixing hole on the blade and the first fixing hole on the other fixing plate in sequence, so that the two fixing plates clamp and fix the blade.
[0017] In one embodiment of the present application, the third locking mechanism comprises a second locking screw and a second locking nut, the second locking screw is coaxially connected with the rotating shaft, and the second locking screw extends out of the mounting frame, the second locking nut is threadedly connected with the second locking screw, when the second locking nut is in close contact with the mounting frame, the third locking mechanism is in the locked state, and when there is a gap between the second locking nut and the mounting frame, the third locking mechanism is in the relaxed state.
[0018] In one embodiment of the present application, the mounting and fixing base is a magnetic base.
[0019] In one embodiment of the present application, the mounting frame comprises a bottom plate and two side plates arranged at both ends of the bottom plate, the bottom plate and the two side plates form a containing groove for containing the fixing component and the blade, and the bottom plate is connected with the position and angle adjusting device.
[0020] As can be seen from the above technical solutions, the polishing pad chamfering device disclosed in the present application comprises a mounting and fixing base, a position and angle adjusting device and a tool bit, the mounting and fixing base is used for being detachably fixed at a preset position, the first end of the position and angle adjusting device is connected to the mounting and fixing base, the tool bit comprises a mounting frame, a fixing component and a blade, the mounting frame is connected to the second end of the position and angle adjusting device, the fixing component is angularly adjustably arranged on the mounting frame, and the blade is detachably arranged on the fixing component.
[0021] In the chamfering of the polishing pad, first, the polishing pad is pasted on the polishing machine's table tray, ensuring that the polishing pad is tight, flat, and the surface has no bubble phenomenon, then the polishing pad chamfering device is fixed on one side of the table tray through the installation fixed base, such as the installation fixed base can be fixed on the polishing machine's table wall, the position and angle of the cutter head are adjusted through the position angle adjusting device, and finally the angle of the cutter blade is adjusted, so that the cutter blade can cut into the polishing pad at the appropriate angle, when the polishing pad chamfering device is adjusted, the table tray is started to rotate, and after one revolution of the table tray, the polishing pad chamfering is completed.
[0022] Through the above polishing pad chamfering device, during the chamfering of the polishing pad, the cutter blade can always remain stable, and combined with the uniform rotation of the table tray, the chamfering efficiency is higher and stable cutting can be realized without stopping, so that the edge smoothness of the polished polishing pad can be effectively improved, and the chamfering cutting process is not affected by the understanding, experience and operation mode of the operator, the consistency of the polishing pad chamfering can be ensured, and during the chamfering cutting process, the operator does not need to approach the cutter blade, which can prevent the cutter blade from cutting the operator and improve the safety of the chamfering operation. BRIEF DESCRIPTION OF DRAWINGS
[0023] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0024] Figure 1 The structure diagram of the polishing pad chamfering device provided by the embodiment of the present application is shown in the figure.
[0025] Figure 2 The working state diagram of the polishing pad chamfering device provided by the embodiment of the present application is shown in the figure.
[0026] Figure 3 The local enlarged diagram of the cutter head position of the polishing pad chamfering device provided by the embodiment of the present application is shown in the figure.
[0027] Figure 4 The local enlarged diagram of the installation fixed base position of the polishing pad chamfering device provided by the embodiment of the present application is shown in the figure.
[0028] In the figure:
[0029] 100 is a mounting fixed base; 200 is a position angle adjusting device; 210 is a universal rod; 220 is a first locking mechanism; 221 is a first locking screw; 222 is a first locking nut; 300 is a cutter head; 310 is a mounting frame; 320 is a fixed component; 330 is a blade; 400 is a universal ball joint; 410 is a ball head; 420 is a ball bowl; 500 is a polishing pad; 600 is a machine table large plate; 700 is a machine table wall. DETAILED DESCRIPTION
[0030] The core of the polishing pad chamfering device is to provide a polishing pad chamfering device, which can safely and efficiently chamfer the polishing pad, and improve the edge smoothness and consistency of the chamfered polishing pad.
[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0032] Please refer to Figure 1 , Figure 1 The structure of the polishing pad chamfering device provided in the embodiments of the present application is shown in the figure.
[0033] The polishing pad chamfering device disclosed in the embodiments of the present application comprises a mounting fixed base 100, a position angle adjusting device 200 and a cutter head 300.
[0034] The mounting fixed base 100 is used to be detachably fixed at a preset position, and the mounting fixed base 100 can be fixed at the preset position by magnetic attraction, clamping and the like. The preset position refers to the fixed component 320 close to the machine table large plate 600 of the polishing machine, such as the machine table wall 700 of the polishing machine.
[0035] The position angle adjusting device 200 can adjust the position of the cutter head 300, and can also adjust the angle of the cutter head 300. The position angle adjusting device 200 can adopt various structures, such as metal shaped hose, folding rod and the like. The first end of the position angle adjusting device 200 is connected to the mounting fixed base 100.
[0036] The tool bit 300 comprises a mounting frame 310 connected to the second end of the position angle adjusting device 200, a fixing component 320 angularly adjustably arranged on the mounting frame 310, and a blade 330 detachably arranged on the fixing component 320, and the blade 330 is detachably connected with the fixing component 320, so that the blade 330 can be replaced after being used for a period of time to ensure the smoothness of the cutting surface.
[0037] When the polishing pad 500 is chamfered, referring to Figure 2 , first, the polishing pad 500 is pasted on the machine table 600 of the polishing machine to ensure that the polishing pad 500 is tight and flat and the surface is free of bubbles, then the polishing pad chamfering device is fixed to one side of the machine table 600 through the mounting and fixing base 100, for example, the mounting and fixing base 100 can be fixed to the machine table wall 700 of the polishing machine, the position and angle of the tool bit 300 are adjusted through the position angle adjusting device 200, and finally the angle of the blade 330 is adjusted to enable the blade 330 to cut into the polishing pad 500 at a suitable angle, after the polishing pad chamfering device is adjusted, the machine table 600 is started to rotate, and after the machine table 600 rotates for one round, the polishing pad 500 is chamfered.
[0038] Compared with the prior art, the polishing pad chamfering device provided in the embodiment of the utility model can ensure that the blade 330 remains stable during the chamfering process of the polishing pad 500, and in combination with the uniform rotation of the machine table 600, the chamfering efficiency is higher and stable cutting without interruption can be realized, so that the smoothness of the edge of the polishing pad 500 after chamfering can be effectively improved, and the chamfering cutting process is not affected by the understanding, experience and operation mode of the operator, the consistency of the chamfering of the polishing pad 500 can be ensured, and during the chamfering cutting process, the operator does not need to approach the blade 330, the operator can be prevented from being cut by the blade 330, and the safety of the chamfering operation is improved.
[0039] Specifically, as Figure 1 and Figure 3As shown, in an embodiment of the present application, the position angle adjusting device 200 comprises a first locking mechanism 220 and a plurality of universal rods 210, two adjacent universal rods 210 are connected through the first locking mechanism 220, when the first locking mechanism 220 is in a locking state, the two adjacent universal rods 210 are relatively fixed, that is, the first locking mechanism 220 can increase the pressure between the fitting surfaces of the two universal rods 210 by applying a force to the two universal rods 210, and the relative fixation of the two universal rods 210 is realized by using friction, when the first locking mechanism 220 is in a relaxed state, the two adjacent universal rods 210 can rotate relative to each other, that is, when the first locking mechanism 220 is in a relaxed state, the pressure between the two universal rods 210 decreases, and the friction also decreases, so that the two universal rods 210 can rotate relative to each other. Of course, the locking and relaxing of the first locking mechanism 220 is not limited to using friction, and other ways can also be used to achieve locking.
[0040] It can be predicted that when the external force increases to a certain extent, the two universal rods 210 will still rotate relative to each other by using friction locking. Therefore, in order to further improve the stability between the two universal rods 210 in the locked state, in another embodiment of the present application, one of the fitting surfaces of the two adjacent universal rods 210 is provided with a plurality of first wedge teeth around the first locking mechanism 220, and the other of the fitting surfaces of the two adjacent universal rods 210 is provided with a plurality of second wedge teeth around the first locking mechanism 220. When the first locking mechanism 220 is in a locking state, the first wedge teeth and the second wedge teeth are embedded with each other to prevent the two adjacent universal rods 210 from rotating, and when the first locking mechanism 220 is in a relaxed state, the fitting surfaces of the two adjacent universal rods 210 can be separated from each other, so that the first wedge teeth and the second wedge teeth can be separated from each other, so that the two adjacent universal rods 210 can rotate relative to each other.
[0041] In the above embodiment, the number of universal rods 210 included in the position angle adjusting device 200 can be 2, 3, 4, 5, 6, …, and the number of universal rods 210 and the length of a single universal rod 210 can be adjusted according to the distance between the preset position and the machine table 600.
[0042] It should be noted that the two universal rods 210 located at both ends of the position angle adjusting device 200 are respectively connected with the mounting frame 310 and the mounting fixed base 100, that is, the ends of the two universal rods 210 far away from the adjacent universal rods 210 at both ends of the position angle adjusting device 200 are respectively connected with the mounting frame 310 and the mounting fixed base 100.
[0043] As Figure 1 and Figure 3As shown, in an embodiment of the present application, the first locking mechanism 220 comprises a first locking screw 221 and a first locking nut 222, one end of the first locking screw 221 is arranged in one of the two adjacent universal rods 210, the other end of the first locking screw 221 passes through the other of the two adjacent universal rods 210 and is threadedly connected with the first locking nut 222, when the first locking nut 222 is in close contact with the universal rod 210, the first locking mechanism 220 is in a locked state, when there is a gap between the first locking nut 222 and the universal rod 210, the first locking mechanism 220 is in a relaxed state, in order to facilitate the operator to operate, the first locking nut 222 has a structure convenient for the operator to exert force, for example, the first locking nut 222 can be a butterfly nut, or the first locking nut 222 can have a larger diameter and a plurality of grooves or protrusions arranged on the outer peripheral surface to facilitate the operator to exert force.
[0044] In order to further improve the flexibility of the polishing pad chamfering device and facilitate the adjustment of the position of the tool head 300, in an embodiment of the present application, as shown in Figure 4 The universal rod 210 and the mounting and fixing base 100 are rotatably connected through the universal ball joint 400, the universal ball joint 400 comprises a ball head 410 arranged in one of the two of the universal rod 210 and the mounting and fixing base 100 and a ball bowl 420 arranged in the other of the two of the universal rod 210 and the mounting and fixing base 100, the ball head 410 is rotatably embedded in the ball bowl 420, and / or the universal rod 210 and the mounting frame 310 are rotatably connected through the universal ball joint 400, the universal ball joint 400 comprises a ball head 410 arranged in one of the two of the universal rod 210 and the mounting frame 310 and a ball bowl 420 arranged in the other of the two of the universal rod 210 and the mounting frame 310, the ball head 410 is rotatably embedded in the ball bowl 420.
[0045] That is, at least one of the mounting and fixing base 100 and the tool head 300 is connected with the position and angle adjusting device 200 through the universal ball joint 400, so that the angle of the tool head 300 can be conveniently adjusted in actual application.
[0046] In order to keep the universal ball joint 400 stable during actual operation, in an embodiment of the present application, the universal ball joint 400 further comprises a second locking mechanism, the second locking mechanism comprises a locking sleeve, a plurality of expansion and contraction joints are arranged on the circumference of the ball bowl 420, the expansion and contraction joints extend along the axial direction of the ball bowl 420, the outer circumferential wall surface of the ball bowl 420 is provided with external threads, the locking sleeve is provided with internal threads, the locking sleeve is threadedly connected with the ball bowl 420, when the locking sleeve is tightened, the ball bowl 420 is stressed so that the expansion and contraction joints are contracted, the ball bowl 420 clamps the ball head 410, preventing the ball head 410 from rotating relative to the ball bowl 420 during chamfering operation.
[0047] AsFigure 3 As shown, in one embodiment of this application, the fixing component 320 includes a fixing plate, a threaded fastener, and a third locking mechanism. The fixing plate is rotatably mounted on the mounting frame 310 via a rotating shaft. The fixing plate has a plurality of first fixing holes spaced apart along the axial direction of the rotating shaft. The threaded fastener passes through the first fixing holes to clamp and fix the blade 330 to the fixing plate. The third locking mechanism is located at one end of the rotating shaft. When the third locking mechanism is in the locked state, the rotating shaft is fixed relative to the mounting frame 310. When the third locking mechanism is in the unlocked state, the rotating shaft can rotate relative to the mounting frame 310.
[0048] To further optimize the above technical solution, the fixing component 320 includes two fixing plates. One fixing plate is rotatably mounted on the mounting frame 310 via a rotating shaft. The two fixing plates are respectively provided with multiple first fixing holes, and the blade 330 is provided with multiple second fixing holes. Threaded fasteners pass through the first fixing holes on one fixing plate, the second fixing holes on the blade 330, and the first fixing holes on the other fixing plate in sequence, so that the two fixing plates clamp and fix the blade 330. The two fixing plates clamp the blade 330 from both sides, leaving only the cutting edge of the blade 330 exposed, which can improve the strength of the blade 330 and reduce the occurrence of the blade 330 breaking during the cutting process.
[0049] Specifically, in one embodiment of this application, the third locking mechanism includes a second locking screw and a second locking nut. The second locking screw is coaxially connected to the rotating shaft and extends through the mounting frame 310. The second locking nut is threadedly engaged with the second locking screw. When the second locking nut is in close contact with the mounting frame 310, the third locking mechanism is in a locked state. When there is a gap between the second locking nut and the mounting frame 310, the third locking mechanism is in a relaxed state. To facilitate the operation of the second locking nut by the operator, a structure that facilitates the operator's application of force can be provided on the second locking nut. For example, the second locking nut can be a wing nut, or the diameter of the second locking nut can be close to the width of the operator's palm. Multiple grooves or protrusions are provided circumferentially on the outer circumferential surface of the second locking nut to facilitate the operator's application of force.
[0050] like Figure 1 and Figure 4 As shown, in one embodiment of this application, the mounting base 100 is a magnetic meter base. The magnetic meter base includes a main body, a permanent magnet, and a knob. The main body is mainly composed of electrical soft iron. Soft iron is relative to hard iron. Soft iron has almost no magnetism after the external magnetic field is removed, while hard iron can retain a large amount of magnetism after being magnetized by an external magnetic field. Two pieces of electrical soft iron form a cavity for the permanent magnet to rotate within. The two pieces of electrical soft iron are separated by a non-magnetic material separator, which includes, but is not limited to, brass. The permanent magnet is connected to the knob and can rotate within the cavity as the knob rotates.Figure 4 As shown, when the knob is turned to the ON position, the N and S poles of the permanent magnet are connected to one piece of soft iron, at which time the soft iron is magnetized, and the mounting base 100 can be attached to a component made of ferromagnetic material such as the machine table wall 700, and when the knob is turned to the OFF position, the N and S poles of the permanent magnet are connected to two pieces of soft iron, forming a closed magnetic circuit, at which time the mounting base 100 has no magnetic properties and can be easily removed from the component made of ferromagnetic material such as the machine table wall 700.
[0051] As shown, Figure 3 In one embodiment of the present application, the mounting frame 310 includes a bottom plate and two side plates arranged at both ends of the bottom plate, the bottom plate and the two side plates form a containing groove for containing the fixing component 320 and the blade 330, the bottom plate is connected to the position angle adjusting device 200, and the blade 330 and the fixing component 320 are arranged at the end of the two side plates away from the bottom plate.
[0052] As shown in the present application and claims, unless the context clearly indicates otherwise, the words "one", "an", "a", and / or "the" do not mean a single number, but also include a plurality. Generally speaking, the terms "comprise" and "include" only indicate the inclusion of the steps and elements explicitly identified, and these steps and elements do not constitute an exclusive list, and the method or device can also include other steps or elements. The element defined by the phrase "comprising a" does not exclude the presence of another identical element in the process, method, product or device.
[0053] In the description of the present application, unless otherwise explicitly limited, the words such as arrangement, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.
[0054] It should be noted that each embodiment in the present specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be mutually referred to.
[0055] In the description of the present application, unless otherwise explicitly limited, the words such as arrangement, installation, connection, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution. It should be noted that each embodiment in the present specification is described in a progressive manner, and each embodiment focuses on the differences from other embodiments, and the same or similar parts between the embodiments can be mutually referred to.
Claims
1. A polishing pad chamfering device, comprising: The utility model relates to a kind of position angle adjusting device and tool head, including: Mounting fixed base (100) for detachably fixed in preset position; Position angle adjusting device (200), the first end of the position angle adjusting device (200) is connected to the mounting fixed base (100); Tool head (300), the tool head (300) includes mounting frame (310), fixed component (320) and blade (330), the mounting frame (310) is connected to the second end of the position angle adjusting device (200), the fixed component (320) is angularly adjustably arranged in the mounting frame (310), and the blade (330) is detachably arranged in the fixed component (320).
2. The polishing pad chamfering device of claim 1, wherein The position angle adjusting device (200) includes first locking mechanism (220) and multiple universal rods (210), and the first locking mechanism (220) is connected between two adjacent universal rods (210), when the first locking mechanism (220) is in locking state, two adjacent universal rods (210) are relatively fixed, when the first locking mechanism (220) is in relaxation state, two adjacent universal rods (210) can be relatively rotated, and the two universal rods (210) at both ends of the position angle adjusting device (200) are connected with the mounting frame (310) and the mounting fixed base (100) respectively.
3. The polishing pad beveling device of claim 2, wherein, The first locking mechanism (220) includes first locking screw (221) and first locking nut (222), one end of the first locking screw (221) is arranged in one of two adjacent universal rods (210), the other end of the first locking screw (221) passes through the other of two adjacent universal rods (210) and is threadedly connected with the first locking nut (222), when the first locking nut (222) is in close contact with the universal rod (210), the first locking mechanism (220) is in locking state, and when there is gap between the first locking nut (222) and the universal rod (210), the first locking mechanism (220) is in relaxation state.
4. The polishing pad chamfering device of claim 2 or 3, wherein, The universal rod (210) and the mounting fixed base (100) are rotatably connected through universal ball joint (400), the universal ball joint (400) includes ball head (410) arranged in one of the universal rod (210) and the mounting fixed base (100) and ball bowl (420) arranged in the other of the universal rod (210) and the mounting fixed base (100), the ball head (410) is rotatably embedded in the ball bowl (420); And / or, the universal rod (210) is rotatably connected with the mounting frame (310) through a universal ball joint (400), the universal ball joint (400) comprises a ball head (410) arranged in one of the universal rod (210) and the mounting frame (310) and a ball bowl (420) arranged in the other one of the universal rod (210) and the mounting frame (310), and the ball head (410) is rotatably embedded in the ball bowl (420).
5. The polishing pad beveling device of claim 4, wherein, The universal ball joint (400) further comprises a second locking mechanism, the second locking mechanism comprises a locking sleeve, a plurality of expansion and contraction joints are arranged on the circumference of the ball bowl (420), the expansion and contraction joints extend along the axial direction of the ball bowl (420), the outer wall surface of the ball bowl (420) is provided with external threads, and the locking sleeve is provided with internal threads, and the locking sleeve is threadedly matched with the ball bowl (420).
6. The polishing pad chamfering device of any of claims 1-3, wherein, The fixing component (320) comprises a fixing plate, a threaded fastener and a third locking mechanism, the fixing plate is rotatably arranged on the mounting frame (310) through a rotating shaft, a plurality of first fixing holes are arranged on the fixing plate along the axial direction of the rotating shaft, the threaded fastener clamps and fixes the blade (330) to the fixing plate through the first fixing holes, and the third locking mechanism is arranged at one end of the rotating shaft. When the third locking mechanism is in a locked state, the rotating shaft is fixed relative to the mounting frame (310), and when the third locking mechanism is in a relaxed state, the rotating shaft can rotate relative to the mounting frame (310).
7. The polishing pad beveling device of claim 6, wherein, The fixing component (320) comprises two fixing plates, one of the fixing plates is rotatably arranged on the mounting frame (310) through the rotating shaft, a plurality of first fixing holes are arranged on the two fixing plates respectively, a plurality of second fixing holes are arranged on the blade (330), and the threaded fastener sequentially passes through the first fixing holes on one of the fixing plates, the second fixing holes on the blade (330) and the first fixing holes on the other fixing plate, so that the two fixing plates clamp and fix the blade (330).
8. The polishing pad beveling device of claim 6, wherein, The third locking mechanism comprises a second locking screw and a second locking nut, the second locking screw is coaxially connected with the rotating shaft, and the second locking screw extends out of the mounting frame (310), the second locking nut is threadedly matched with the second locking screw, and when the second locking nut is in close contact with the mounting frame (310), the third locking mechanism is in a locked state, and when there is a gap between the second locking nut and the mounting frame (310), the third locking mechanism is in a relaxed state.
9. The polishing pad chamfering device of any of claims 1-3, wherein, The mounting and fixing base (100) is a magnetic watch base.
10. The polishing pad chamfering device of any of claims 1-3, wherein, The mounting frame (310) comprises a bottom plate and two side plates arranged at both ends of the bottom plate, the bottom plate and the two side plates enclose a containing groove for containing the fixing component (320) and the blade (330), and the bottom plate is connected with the position and angle adjusting device (200).