Wet process chain type equipment

Abstract

The utility model discloses wet process chain type equipment, and relates to the field of battery piece process equipment. The wet chain type equipment comprises a transmission gear set, a sheet feeding roller shaft, an isolation plate and a lubricating system, the transmission gear set and the sheet feeding roller shaft are located on the two sides of the isolation plate respectively, one end of the sheet feeding roller shaft penetrates through the isolation plate to be connected with the gear set, and the lubricating system is used for lubricating the gear set. According to the wet process chain type equipment, the transmission gear set can be lubricated, and pollution to the process environment can be avoided.

Description

Technical Field

[0001] This utility model relates to the field of battery cell manufacturing equipment, and more specifically, to a wet chain-type equipment. Background Technology

[0002] Currently, in the photovoltaic industry, wet processes mostly use chain equipment, which typically employs a transmission gear set to drive roller shafts to transport silicon wafers.

[0003] In commercially available chain conveyors, the transmission gear set and roller shaft are in the same process environment. To avoid contaminating the process environment, the transmission gear set is not lubricated, resulting in severe wear of the gear set and affecting the service life of the chain conveyor. Utility Model Content

[0004] The purpose of this invention is to provide a wet chain-type device that can lubricate the transmission gear set and avoid causing pollution to the process environment.

[0005] The embodiments of this utility model provide a technical solution:

[0006] A wet-process chain-type device includes a transmission gear set, a feeding roller shaft, an isolation plate, and a lubrication system. The transmission gear set and the feeding roller shaft are respectively located on both sides of the isolation plate, and one end of the feeding roller shaft passes through the isolation plate and is connected to the gear set. The lubrication system is used to lubricate the gear set.

[0007] In an optional embodiment, the lubrication system includes a dripping element and a receiving element located on the side of the transmission gear set on the isolation plate. The dripping element and the receiving element are respectively disposed on the upper and lower sides of the transmission gear set. The dripping element is used to drip lubricant to the transmission gear set, and the receiving element is used to receive the lubricant dripping from the transmission gear set.

[0008] In an optional embodiment, the lubrication system further includes a return assembly, through which the dripping element is connected to the receiving element, and the return assembly is used to deliver the lubricating fluid received by the receiving element to the dripping element.

[0009] In an optional embodiment, the reflux assembly includes a reflux pipe and a reflux pump. One end of the reflux pipe is connected to the dripping component, and the other end is connected to the receiving component. The reflux pump is disposed in the reflux pipe and is used to pump lubricant to the dripping component.

[0010] In an optional embodiment, the transmission gear set includes a plurality of gears arranged sequentially in a first direction, and any two adjacent gears mesh with each other. The dripping element has a main channel for accommodating lubricating fluid and a plurality of dripping holes communicating with the main channel, and the plurality of dripping holes are arranged sequentially in the first direction.

[0011] In an optional embodiment, the main flow channel has an open end for the lubricating liquid to flow into the main flow channel and a closed end, and the plurality of drip holes are arranged in sequence between the open end and the closed end.

[0012] In an optional embodiment, the aperture of any two adjacent drip holes closer to the open end is smaller than the aperture of any two adjacent drip holes farther away from the open end.

[0013] In an optional embodiment, the spacer plate is provided with a clearance hole, one end of the sheet feeding roller shaft passes through the clearance hole and is connected with the transmission gear set, and the outer side wall of the sheet feeding roller shaft is sealed with the hole wall of the clearance hole.

[0014] Compared with the prior art, the wet chain type equipment provided by the present application has the transmission gear set and the sheet feeding roller shaft on the two sides of the spacer plate, that is, the spacer plate separates the transmission gear set and the sheet feeding roller shaft, the sheet feeding roller shaft transports the silicon wafer in the process environment, and the transmission gear set is isolated from the process environment by the spacer plate and is lubricated by the lubricating system. Therefore, the wet chain type equipment provided by the present application has the following beneficial effects: it can lubricate the transmission gear set and can also avoid causing pollution to the process environment. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0016] Figure 1 The structure schematic diagram of the wet chain type equipment part structure provided by the embodiment of the present application in a first perspective view;

[0017] Figure 2 The structure schematic diagram of the wet chain type equipment part structure provided by the embodiment of the present application in a second perspective view.

[0018] Figure legend: 100-wet chain type equipment; 110-transmission gear set; 120-sheet feeding roller shaft; 130-spacer plate; 140-lubricating system; 141-drip member; 1411-drip hole; 1412-open end; 1413-closed end; 142-liquid receiving member; 143-backflow pipe; 144-backflow pump. DETAILED DESCRIPTION

[0019] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0021] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0022] In the description of the present application, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the product of the present application is used, or the orientation or positional relationship commonly understood by those skilled in the art, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0023] In addition, the terms "first", "second" and the like are only used for differentiation in description, and cannot be understood as indicating or implying relative importance.

[0024] In the description of the present application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "provided", "connected" and the like should be understood broadly, for example, "connected" can be fixedly connected, or detachably connected, or integrally connected; can be mechanically connected, or electrically connected; can be directly connected, or indirectly connected through an intermediate medium, or the internal communication of two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0025] The specific embodiments of the present application will be described in detail below in conjunction with the drawings.

[0026] Embodiments

[0027] Please refer toFigure 1 and Figure 2 , Figure 1 Fig. 1 shows a structural schematic diagram of a wet chain type device provided by the embodiment in a first perspective view, Figure 2 Fig. 2 shows a structural schematic diagram of the wet chain type device in a second perspective view.

[0028] The wet chain type device provided by the embodiment is applied to a silicon wafer wet processing process, and can clean, etch, deposit and so on the surface of the silicon wafer through a series of chemical solutions to achieve a required process effect.

[0029] In the embodiment, the wet chain type device 100 comprises a transmission gear set 110, a wafer feeding roller shaft 120, an isolation plate 130 and a lubricating system 140, the transmission gear set 110 and the wafer feeding roller shaft 120 are respectively located at two sides of the isolation plate 130, one end of the wafer feeding roller shaft 120 penetrates through the isolation plate 130 and is connected with the gear set, and the lubricating system 140 is used for lubricating the gear set.

[0030] The number of the wafer feeding roller shaft 120 is multiple, and the wafer feeding roller shafts 120 are usually arranged in sequence and side by side, in actual application, the transmission gear set 110 is connected with a driving device such as a motor, and drives the multiple wafer feeding roller shafts 120 to rotate, so that the wafer feeding roller shafts 120 can realize the conveying of the silicon wafer and complete the processing of the silicon wafer in the conveying process.

[0031] The environment where the wafer feeding roller shaft 120 is located is a process environment, and the process environment contains chemical solutions meeting process requirements. In the embodiment, the transmission gear set 110 and the wafer feeding roller shaft 120 are respectively located at two sides of the isolation plate 130, which is equivalent to that the isolation plate 130 isolates the transmission gear set 110 from the process environment, so that the transmission gear set 110 is lubricated by the lubricating system 140 outside the process environment, and the lubricating liquid in the lubricating system 140 can avoid polluting the chemical solutions in the process environment.

[0032] It can be seen that the wet chain type device 100 provided by the embodiment can realize the lubrication of the transmission gear set 110 and avoid the pollution of the process environment.

[0033] In the embodiment, the lubricating system 140 comprises a dripping liquid piece 141 and a liquid receiving piece 142 located at one side of the transmission gear set 110 of the isolation plate 130, the dripping liquid piece 141 and the liquid receiving piece 142 are respectively arranged on the upper and lower sides of the transmission gear set 110, the dripping liquid piece 141 is used for dripping lubricating liquid to the transmission gear set 110, and the liquid receiving piece 142 has a basin cavity structure with an opening upward, and is used for receiving the lubricating liquid dripping from the transmission gear set 110.

[0034] The drip member 141 can be connected to an external lubricating liquid supply, so that the incoming lubricating liquid is dripped on the transmission gear set 110 to lubricate the transmission gear set 110, and the excess lubricating liquid can drip off the transmission gear set 110 and be collected by the liquid receiving member 142.

[0035] In order to reduce costs and improve lubrication efficiency, in the embodiment, the lubricating system 140 further comprises a return assembly, the drip member 141 is connected to the liquid receiving member 142 through the return assembly, and the return assembly is used to deliver the lubricating liquid collected by the liquid receiving member 142 to the drip member 141.

[0036] Specifically, the return assembly comprises a return pipe 143 and a return pump 144, one end of the return pipe 143 is connected to the drip member 141, the other end is connected to the liquid receiving member 142, and the return pump 144 is arranged in the return pipe 143 and used to pump the lubricating liquid to the drip member 141.

[0037] In actual application, when the return pump 144 is running, the lubricating liquid collected by the liquid receiving member 142 can be pumped back to the drip member 141 through the return pipe 143, and the lubricating liquid entering the drip member 141 can drip on the transmission gear set 110 again, so as to form a circulation of the lubricating liquid and realize continuous lubrication of the transmission gear set 110.

[0038] In other embodiments of the present application, a liquid level detection device can also be arranged on the liquid receiving member 142 to monitor the liquid level of the lubricating liquid collected in the basin structure of the liquid receiving member 142 in real time, and a control module can be arranged to adaptively adjust the frequency of the return pump 144 according to the liquid level. For example, when the liquid level collected by the liquid receiving member 142 reaches a set threshold value, it indicates that the frequency of the return pump 144 is too low, and the frequency of the return pump 144 can be controlled to be increased.

[0039] It can be understood that, in addition to lubricating the transmission gear set 110, the lubricating liquid can also dissipate heat from the transmission gear set 110. In another embodiment, a temperature detection device can also be arranged to monitor the temperature of the transmission gear set 110 in real time, and a control module can adaptively adjust the frequency of the return pump 144 according to the temperature data detected by the temperature detection device, so as to maintain the temperature of the transmission gear set 110 within an ideal range and ensure that the transmission process is stable and reliable.

[0040] For example, when the temperature detection device detects that the temperature of the transmission gear set 110 reaches a set threshold value, the frequency of the return pump 144 is controlled to be increased, so as to improve the dripping efficiency of the drip member 141, thereby improving the heat dissipation effect of the transmission gear set 110 and maintaining the temperature of the transmission gear set 110 within an ideal range. When the temperature detection device detects that the temperature of the transmission gear set 110 is relatively low, the frequency of the return pump 144 can be controlled to be reduced to reduce energy consumption.

[0041] In the embodiment, the transmission gear set 110 includes a plurality of gears arranged in sequence in the first direction, and any two adjacent gears are engaged, and the drip member 141 has a main flow channel accommodating lubricating liquid and a plurality of drip holes 1411 communicating with the main flow channel, and the plurality of drip holes 1411 are arranged in sequence in the first direction.

[0042] Figure 2 The direction indicated by the arrow X is the first direction, and it can be understood that the two gears connecting the adjacent two sheet feeding roller shafts 120 are arranged at intervals, and there is a gear with opposite rotation direction between them. The arrangement direction of the plurality of gears of the transmission gear set 110 is the same as the arrangement direction of the plurality of drip holes 1411 on the drip member 141, which can realize uniform lubrication of the plurality of gears and obtain better lubrication effect.

[0043] In the embodiment, the main flow channel has an open end 1412 and a closed end 1413, and the plurality of drip holes 1411 are arranged in sequence between the open end 1412 and the closed end 1413. The open end 1412 is connected with the end of the return pipe 143 away from the liquid receiving member 142, and when the return pump 144 operates, the lubricating liquid in the liquid receiving member 142 is pumped into the main flow channel of the drip member 141 through the return pipe 143 and flows from the open end 1412 to the closed end 1413. The lubricating liquid flows through the plurality of drip holes 1411 in sequence in the main flow channel and drips from the plurality of drip holes 1411, realizing lubrication of the transmission gear set 110.

[0044] In order to further improve the uniformity of lubrication, in the embodiment, the drip holes 1411 are circular, and the aperture of any two adjacent drip holes 1411, one closer to the open end 1412 is smaller than the aperture of the other farther away from the open end 1412. In other words, the area of the plurality of drip holes 1411 gradually increases from close to far from the open end 1412.

[0045] In order to ensure reliable isolation of the transmission gear set 110 and the process environment, in the embodiment, the isolation plate 130 is provided with a clearance hole, one end of the sheet feeding roller shaft 120 passes through the clearance hole and is connected with the transmission gear set 110, and the outer side wall of the sheet feeding roller shaft 120 is sealed with the hole wall of the clearance hole.

[0046] In summary, the wet chain type equipment 100 provided in the embodiment separates the transmission gear set 110 and the sheet feeding roller shaft 120 by the isolation plate 130, the sheet feeding roller shaft 120 transports silicon wafers in the process environment, and the transmission gear set 110 is isolated from the process environment by the isolation plate 130 and is lubricated by the lubrication system 140.

[0047] Therefore, the wet chain type equipment 100 provided by the utility model can lubricate the transmission gear set 110, and can also avoid pollution of the process environment.

[0048] The above merely describes preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A wet chain device, characterized in that, The transmission gear set (110) and the film feeding roller shaft (120) are respectively located on two sides of the isolation plate (130), and one end of the film feeding roller shaft (120) penetrates through the isolation plate (130) and is connected with the gear set, and the lubricating system (140) is used for lubricating the gear set.

2. The wet chain apparatus of claim 1, wherein, The lubricating system (140) comprises a dripping piece (141) and a liquid receiving piece (142) located on one side of the transmission gear set (110) of the isolation plate (130), the dripping piece (141) and the liquid receiving piece (142) are respectively arranged on the upper and lower sides of the transmission gear set (110), the dripping piece (141) is used for dripping lubricating liquid to the transmission gear set (110), and the liquid receiving piece (142) is used for receiving the lubricating liquid dripping from the transmission gear set (110).

3. The wet chain apparatus of claim 2, wherein, The lubricating system (140) further comprises a reflux assembly, the dripping piece (141) is connected with the liquid receiving piece (142) through the reflux assembly, and the reflux assembly is used for conveying the lubricating liquid received by the liquid receiving piece (142) to the dripping piece (141).

4. The wet chain apparatus of claim 3, wherein, The reflux assembly comprises a reflux pipe (143) and a reflux pump (144), one end of the reflux pipe (143) is connected with the dripping piece (141), the other end is connected with the liquid receiving piece (142), and the reflux pump (144) is arranged in the reflux pipe (143) and used for pumping lubricating liquid to the dripping piece (141).

5. The wet chain apparatus of claim 2, wherein, The transmission gear set (110) comprises a plurality of gears arranged in a first direction in sequence, and any two adjacent gears are engaged, the dripping piece (141) has a main flow channel accommodating lubricating liquid and a plurality of dripping holes (1411) in communication with the main flow channel, and the plurality of dripping holes (1411) are arranged in the first direction in sequence.

6. The wet chain apparatus of claim 5, wherein, The main flow channel has an open end (1412) and a closed end (1413), the open end (1412) is used for flowing lubricating liquid into the main flow channel, and the plurality of dripping holes (1411) are arranged in sequence between the open end (1412) and the closed end (1413).

7. The wet chain apparatus of claim 6, wherein, The aperture of any two adjacent dripping holes (1411) closer to the open end (1412) is smaller than the aperture of the one farther away from the open end (1412).

8. The wet chain apparatus of claim 1, wherein, The isolation plate (130) is provided with a clearance hole, one end of the film feeding roller shaft (120) penetrates through the clearance hole and is connected with the transmission gear set (110), and the outer side wall of the film feeding roller shaft (120) is sealed with the hole wall of the clearance hole.

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