Auxiliary equipment for manufacturing crucible

Abstract

The utility model discloses crucible manufacturing auxiliary equipment which comprises a gas source, a gas pipeline and a pipeline moving mechanism, the gas pipeline is arranged on the pipeline moving mechanism, the first end of the gas pipeline is communicated with the gas source, and the second end of the gas pipeline is communicated with the pipeline moving mechanism. The pipeline moving mechanism is used for moving the second end of the gas pipeline into a crucible manufacturing area so as to blow in the gas source to replace air in the gas source, and after replacement is completed, the second end of the gas pipeline can be far away from the crucible manufacturing area. The crucible manufacturing auxiliary equipment can reduce the bubble expansion degree of the vacuum layer in the crucible, prolong the service life of the crucible, improve the single crystal drawing quality, avoid the loss of the gas pipeline, reduce the production cost and ensure the purity degree of the crucible.

Description

TECHNICAL FIELD

[0001] The utility model relates to a crucible manufacturing technical field more specifically, relate to a kind of crucible manufacturing auxiliary equipment. BACKGROUND

[0002] Quartz crucible can be used to draw large diameter single crystal silicon, and is an essential basic component for preparing solar cell and developing large-scale integrated circuit in photovoltaic and semiconductor industries. In the prior art, quartz crucible is generally manufactured by arc melting method. Due to the limitation of the purity of quartz sand itself and process conditions, the transparent layer formed contains a certain amount of micro-bubbles. The main improvement direction of the current quartz crucible is purity and service life. At present, the continuous crystal drawing time of a quartz crucible is between 300 hours and 400 hours. Therefore, after a period of use, the local bubbles in the transparent layer will expand seriously. If the content of micro-bubbles is too high, the micro-bubbles will easily burst after aggregation and expansion, which will aggravate the generation of local crystallization layer and cause quartz particles or other impurities to enter the silicon liquid, resulting in poor quality of crystal drawing. In more serious cases, it may also cause the crucible to leak silicon and be scrapped or cause the silicon rod to break, etc. Therefore, how to improve the expansion of the vacuum layer bubbles of the quartz crucible is an important problem to be solved. SUMMARY

[0003] To solve the above technical problems, the utility model provides a kind of crucible manufacturing auxiliary equipment, can reduce the degree of vacuum layer bubble expansion, prolong the service life of crucible, improve the quality of single crystal drawing.

[0004] The utility model provides a kind of crucible manufacturing auxiliary equipment, including gas source, gas pipeline and pipeline moving mechanism, wherein, the gas pipeline is arranged on the pipeline moving mechanism, and the first end of the gas pipeline is communicated to the gas source, the pipeline moving mechanism is used to move the second end of the gas pipeline to the crucible manufacturing area to blow into the gas source to replace the air therein, and after replacement is completed, the second end of the gas pipeline is away from the crucible manufacturing area.

[0005] Preferably, in the above-mentioned crucible manufacturing auxiliary equipment, the pipeline moving mechanism includes a pipeline rotating part and a pipeline translating part, wherein the pipeline rotating part is detachably fixed with the gas pipeline to realize the rotation of the gas pipeline, and the pipeline translating part is detachably fixed with the pipeline rotating part to realize the translation of the gas pipeline.

[0006] Preferably, in the auxiliary equipment for manufacturing the crucible, the pipeline translation component comprises a guide rail, a sliding block in sliding connection with the guide rail, and a support column fixed on the sliding block, and the pipeline rotation component comprises a rotating clamp in rotational connection with the support column and having an internal space for passing through the gas pipeline.

[0007] Preferably, in the auxiliary equipment for manufacturing the crucible, the pipeline moving mechanism further comprises a first air cylinder and a second air cylinder connected to the sliding block and the rotating clamp respectively, and the first air cylinder and the second air cylinder are electrically connected to a control component, the control component being configured to control the first air cylinder to drive the sliding block to translate so as to drive the gas pipeline to translate, and to control the second air cylinder to drive the rotating clamp to rotate so as to drive the gas pipeline to rotate.

[0008] Preferably, in the auxiliary equipment for manufacturing the crucible, the gas pipeline is further provided with a pipeline switch configured to control opening and closing of the gas pipeline.

[0009] Preferably, in the auxiliary equipment for manufacturing the crucible, the pipeline switch is further electrically connected to the control component, the control component being configured to open the pipeline switch when the second end of the gas pipeline moves into the crucible manufacturing area, and to close the pipeline switch when the second end of the gas pipeline moves away from the crucible manufacturing area.

[0010] Preferably, in the auxiliary equipment for manufacturing the crucible, the main body of the gas pipeline is a quartz tube.

[0011] Preferably, in the auxiliary equipment for manufacturing the crucible, the gas pipeline further comprises a hose in communication with one end of the quartz tube close to the gas source.

[0012] Preferably, in the auxiliary equipment for manufacturing the crucible, the gas pipeline further comprises a metal tube in communication with one end of the hose close to the gas source.

[0013] Preferably, in the auxiliary equipment for manufacturing the crucible, the gas source is hydrogen or helium.

[0014] From the above technical scheme can be seen, the utility model provides above -mentioned crucible manufacturing auxiliary equipment, because the gas pipeline in it is arranged on the pipeline moving mechanism, and the first end of this gas pipeline is communicated to the gas source, the pipeline moving mechanism is used for moving the second end of the gas pipeline to the crucible making area to blow into the gas source to replace the air therein, so that the air bubble in the crucibble can be avoided, the degree of vacuum layer air bubble expansion is reduced, the service life of the crucible is prolonged, the quality of single crystal drawing is improved, and after the replacement of the gas is completed, the second end of the gas pipeline is away from the crucible making area, so that the gas pipeline can be avoided to melt in the subsequent crucible melting process and make its material incorporate into the crucible to cause the purity of the crucible to reduce, the loss of the gas pipeline can also be avoided, and the production cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only the embodiments of the utility model, and those skilled in the art can obtain other drawings according to the provided drawings without creating creative labor.

[0016] Figure 1 It is the use state schematic drawing of the embodiment of the utility model to provide a kind of crucible manufacturing auxiliary equipment;

[0017] Figure 2 It is the structure diagram of the embodiment of the utility model to provide a kind of crucible manufacturing auxiliary equipment;

[0018] Figure 3 It is the schematic diagram of the crucible manufacturing auxiliary equipment of adoption multi-section pipeline. DETAILED DESCRIPTION

[0019] The core of the utility model is to provide a kind of crucible manufacturing auxiliary equipment, which can reduce the degree of vacuum layer air bubble expansion, prolong the service life of the crucible and improve the quality of single crystal drawing.

[0020] The technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model, and obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creating creative labor are within the protection scope of the utility model.

[0021] The embodiment of the utility model provided by a kind of crucible manufacturing auxiliary equipment as shown in Figure 1 The embodiment of the utility model provided by a kind of crucible manufacturing auxiliary equipment as shown in Figure 1This is a schematic diagram illustrating the usage state of an embodiment of an auxiliary device for crucible manufacturing provided by this utility model. The auxiliary device may include a gas source 1, a gas pipeline 2, and a pipeline moving mechanism 3. The gas pipeline 2 is mounted on the pipeline moving mechanism 3, which allows the gas pipeline 2 to move. This movement can be, but is not limited to, translation or rotation, as long as it changes the position of the gas pipeline 2. This is because different process steps require the gas pipeline 2 to be in different positions, and this pipeline moving mechanism 3 achieves this function. The first end of the gas pipeline 2 is connected to the gas source 1, allowing the gas source 1 to supply the corresponding gas to the gas pipeline 2. This mechanism can deliver gas supplied by gas source 1 to the location where the gas is needed. Specifically, the pipe moving mechanism 3 can move the second end 21 of the gas pipe 2 into the crucible making area 4 to blow in gas to replace the air in it. After replacement, the second end 21 of the gas pipe 2 is moved away from the crucible making area 4. It should be noted that the second end 21 of the gas pipe 2 is the free end, used to transfer the gas supplied by gas source 1 to the corresponding area, which is the crucible making area 4. This is because the crucible making area 4 needs to be free of air to avoid air bubbles remaining during the crucible making process. The pipe moving mechanism 3 enables the free movement of the second end 21 of the gas pipe 2. The gas pipe 2 can move as follows: Figure 2 As shown, the second end 21 is bent to a certain extent so that it can extend a certain distance into the crucible fabrication area 4. This allows for better gas replacement. Initially, the second end 21 can be moved to the crucible fabrication area 4 and rotated at a certain angle to extend it further into the area. High-pressure gas can be continuously blown in, but not limited to, to quickly replace the air already present in the crucible fabrication area 4. After a period of time, the replacement is complete. At this point, the second end 21 is still located in the crucible fabrication area 4. Subsequent process steps require heating the crucible fabrication area 4 to a higher temperature. The high temperature can melt the second end 21 of the gas pipe 2, causing the melt to fall into the crucible making area 4 and contaminate the crucible. It also leads to the waste of the gas pipe 2. To avoid this problem, the pipe moving mechanism 3 can be used to move the second end 21 of the gas pipe 2 away from the crucible making area 4 to avoid being melted by the high temperature environment of the crucible making area 4, ensuring the safety of the gas pipe 2 and better ensuring the purity of the material used to make the crucible. Before making the next crucible, the second end 21 of the gas pipe 2 can be moved to the crucible making area 4 again. This cycle can be repeated to ensure the purity of the crucible and avoid the waste caused by the gas pipe being burned.

[0022] From the above technical scheme can be seen, the utility model provides an embodiment of the above crucible manufacturing auxiliary equipment, because the gas pipeline is arranged on the pipeline moving mechanism, and the first end of the gas pipeline is communicated to the gas source, the pipeline moving mechanism is used for moving the second end of the gas pipeline to the crucible manufacturing area to blow the air in the gas source, so that the air bubble in the crucible can be avoided, the degree of vacuum layer air bubble expansion is reduced, the service life of the crucible is prolonged, the quality of single crystal drawing is improved, and after the gas replacement is completed, the second end of the gas pipeline is away from the crucible manufacturing area, so that the gas pipeline can be avoided to be melted in the subsequent crucible melting process and the material of the gas pipeline is mixed into the crucible to reduce the purity of the crucible, and the loss of the gas pipeline can also be avoided, and the production cost is reduced.

[0023] In one specific embodiment of the above-mentioned crucible manufacturing auxiliary equipment, referring to Figure 2 , Figure 2 The structure diagram of an embodiment of the crucible manufacturing auxiliary equipment provided by the utility model, the pipeline moving mechanism 3 can include a pipeline rotating part 31 and a pipeline translation part 32, wherein the pipeline rotating part 31 is detachably fixed with the gas pipeline 2 to realize the rotation of the gas pipeline 2, specifically, the gas pipeline 2 can be sleeved into the pipeline rotating part 31, and the detachable fixing mode between the two can ensure that it is more convenient to replace the gas pipeline when necessary, and the pipeline rotating part 31 can rotate the gas pipeline 2 around the central axis as the rotation axis, so that the second end 21 of the gas pipeline 2 can be rotated by 90° and then moved away from the above-mentioned crucible manufacturing area 4, avoiding being melted by the high temperature of the crucible manufacturing area 4 in the subsequent process and falling into the inside of the crucible, the pipeline rotating part 31 can control the pipeline rotation by using the movement of three sets of gears and gear chains, which can adopt the conventional pipeline rotation mode, and the pipeline translation part 32 can be detachably fixed with the pipeline rotating part 31 to realize the translation of the gas pipeline 2, and the detachable fixing of the two can also ensure that they are convenient to replace, in this case, the pipeline translation part 32 can drive the pipeline rotating part 31 to translate, thereby indirectly driving the above-mentioned gas pipeline 2 to translate, in the case shown in the figure, the gas pipeline 2 can be moved to the right after the gas replacement process, so that the second end 21 of the gas pipeline 2 continues to move away from the crucible manufacturing area 4 by a larger distance, thereby better avoiding the damage of the high temperature of the crucible manufacturing area 4, and the distance of the movement can be selected according to actual needs, which is not limited here. Figure 2

[0024] ​In a further embodiment, the pipe translation component 32 can specifically include a guide rail 321, a sliding block 322 in sliding connection with the guide rail 321, and a support column 323 fixed on the sliding block 322, in which case, the sliding block 322 slides horizontally on the guide rail 321 to drive the support column 323 to translate, and the support column 323 is fixed with the pipe rotation component 31, and the pipe rotation component 31 is internally fixed with the gas pipe 2, so that the sliding block 322 can finally drive the gas pipe 2 to move horizontally to make the gas pipe 2 close to or away from the crucible manufacturing area 4, and the pipe rotation component 31 can include a rotating clamp 311 in rotational connection with the support column 323 and internally space for passing through the gas pipe 2, and it is noted that the rotating clamp 311 is used to clamp the gas pipe 2 to maintain the relative stationary relationship between them, and when the rotating clamp 311 is rotated by external force, the gas pipe 2 can be correspondingly rotated to make the second end 21 of the gas pipe 2 close to or away from the crucible manufacturing area 4, and the specific rotation mode is not limited here.

[0025] In a further embodiment, the pipe translation component 32 can specifically include a guide rail 321, a sliding block 322 in sliding connection with the guide rail 321, and a support column 323 fixed on the sliding block 322, in which case, the sliding block 322 slides horizontally on the guide rail 321 to drive the support column 323 to translate, and the support column 323 is fixed with the pipe rotation component 31, and the pipe rotation component 31 is internally fixed with the gas pipe 2, so that the sliding block 322 can finally drive the gas pipe 2 to move horizontally to make the gas pipe 2 close to or away from the crucible manufacturing area 4, and the pipe rotation component 31 can include a rotating clamp 311 in rotational connection with the support column 323 and internally space for passing through the gas pipe 2, and it is noted that the rotating clamp 311 is used to clamp the gas pipe 2 to maintain the relative stationary relationship between them, and when the rotating clamp 311 is rotated by external force, the gas pipe 2 can be correspondingly rotated to make the second end 21 of the gas pipe 2 close to or away from the crucible manufacturing area 4, and the specific rotation mode is not limited here.

[0026] In a further embodiment, the pipe translation component 32 can specifically include a guide rail 321, a sliding block 322 in sliding connection with the guide rail 321, and a support column 323 fixed on the sliding block 322, in which case, the sliding block 322 slides horizontally on the guide rail 321 to drive the support column 323 to translate, and the support column 323 is fixed with the pipe rotation component 31, and the pipe rotation component 31 is internally fixed with the gas pipe 2, so that the sliding block 322 can finally drive the gas pipe 2 to move horizontally to make the gas pipe 2 close to or away from the crucible manufacturing area 4, and the pipe rotation component 31 can include a rotating clamp 311 in rotational connection with the support column 323 and internally space for passing through the gas pipe 2, and it is noted that the rotating clamp 311 is used to clamp the gas pipe 2 to maintain the relative stationary relationship between them, and when the rotating clamp 311 is rotated by external force, the gas pipe 2 can be correspondingly rotated to make the second end 21 of the gas pipe 2 close to or away from the crucible manufacturing area 4, and the specific rotation mode is not limited here. Figure 1The gas pipeline 2 can further be provided with a pipeline switch 5 for controlling the opening and closing of the gas pipeline 2. Specifically, the pipeline switch 5 can be an electromagnetic valve, but is not limited thereto. The pipeline switch 5 can be electrically connected to the control component 37 to be controlled thereby. The control component 37 is configured to open the pipeline switch 5 when the second end 21 of the gas pipeline 2 moves into the crucible manufacturing area 4, and to close the pipeline switch 5 when the second end 21 of the gas pipeline 2 moves away from the crucible manufacturing area 4. That is, the control component 37 can open or close the pipeline switch 5 according to corresponding instructions. In a specific example, when the second end 21 of the gas pipeline 2 is located in the crucible manufacturing area 4, the pipeline switch 5 can be controlled by the control component 37 to be opened, so that the gas source is connected to the crucible manufacturing area 4 to replace the air therein. After the replacement is completed, the control component 37 closes the pipeline switch 5, and then the rotation and translation of the gas pipeline 2 are performed in sequence, so that the second end 21 of the gas pipeline 2 moves away from the crucible manufacturing area 4 to avoid damage to the gas pipeline 2 caused by high temperature. It can be seen that the automation degree of the gas opening and closing control is further enhanced, the control is more accurate, and the waste of gas caused by the gas being always in the open state is avoided.

[0027] Reference Figure 3 , Figure 3As a schematic view of the auxiliary equipment for crucible manufacturing with multi-section pipe, on the basis of the above-mentioned various embodiments of the auxiliary equipment for crucible manufacturing, the main body of the above-mentioned gas pipe 2 can preferably be a quartz pipe 22, which can withstand higher temperature, so that the use of the quartz pipe near the crucible manufacturing area can have higher safety. On this basis, the above-mentioned gas pipe 2 can further include a hose 23 in communication with one end of the quartz pipe 22 near the gas source 1, which is flexible, so that the hose 23 can be used to form better buffering during the translation and rotation of the gas pipe 2, so as to avoid the collapse of the gas pipe 2. The selected material should ensure that it will not block the transmission of gas after deformation. Further, the above-mentioned gas pipe 2 can further include a metal pipe 24 in communication with one end of the above-mentioned hose 23 near the gas source 1, which has higher strength and can ensure more stable transmission of gas in its interior. Specifically, aluminum pipe, copper pipe, stainless steel pipe, etc. can be selected according to actual needs, which are not limited here. In addition, the above-mentioned gas source 1 can be selected as hydrogen or helium, both of which will not react with other substances around, so as not to introduce impurities into the crucible. Of course, other gases that meet this condition can also be selected according to actual needs, which are not limited here. Taking hydrogen as an example, hydrogen is introduced before the raw material is melted to replace the air in the space of the mold to reduce the air density, and hydrogen is continuously introduced during the melting process. Hydrogen can enter the sand layer when vacuumizing, and can replace the air in the quartz sand layer. It can be seen that through this gas replacement, the atmosphere environment of the quartz crucible before melting and during melting can be changed. Moreover, the volume expansion coefficient of hydrogen after heating is smaller than that of air, so the bubbles generated by hydrogen basically do not expand. It can be seen that this improves the volume expansion rate of the bubbles of the crucible and the influence of the gas elements in the bubbles on the quality of the crystal, and finally improves the quality of the crystal drawn by using the crucible.

[0028] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A crucible manufacturing auxiliary device characterized by comprising: The gas pipeline moving mechanism comprises a pipeline rotating part and a pipeline translating part, wherein the pipeline rotating part is detachably fixed with the gas pipeline to realize rotation of the gas pipeline, and the pipeline translating part is detachably fixed with the pipeline rotating part to realize translation of the gas pipeline.

2. The crucible manufacturing assistance device according to claim 1, characterized by, The pipeline translating part comprises a guide rail, a sliding block in sliding connection with the guide rail, and a support column fixed on the sliding block, and the pipeline rotating part comprises a rotating clamp in rotating connection with the support column and having an internal space for passing through the gas pipeline.

3. The crucible manufacturing assistance device according to claim 2, characterized by, The pipeline moving mechanism further comprises a first air cylinder and a second air cylinder connected to the sliding block and the rotating clamp respectively, and the first air cylinder and the second air cylinder are electrically connected to a control part, which is used to control the first air cylinder to drive the sliding block to translate to drive the gas pipeline to translate, and is used to control the second air cylinder to drive the rotating clamp to rotate to drive the gas pipeline to rotate.

4. The crucible manufacturing assistance device according to claim 3, characterized by, The gas pipeline is further provided with a pipeline switch for controlling opening and closing of the gas pipeline.

5. The crucible manufacturing assistance device according to claim 4, characterized by, The pipeline switch is further electrically connected to the control part, which is used to open the pipeline switch when the second end of the gas pipeline moves into the crucible manufacturing area, and is used to close the pipeline switch when the second end of the gas pipeline moves away from the crucible manufacturing area.

6. The crucible manufacturing assistance device according to claim 5, characterized by, The main body of the gas pipeline is a quartz tube.

7. The crucible manufacturing assistance device according to any one of claims 1 to 6, characterized by, The gas pipeline further comprises a hose in communication with one end of the quartz tube close to the gas source.

8. The crucible manufacturing assistance device according to claim 7, characterized by, The gas pipeline further comprises a metal tube in communication with one end of the hose close to the gas source.

9. The crucible manufacturing assistance apparatus according to claim 8, characterized by, The gas source is hydrogen or helium.

10. The crucible manufacturing aid of any one of claims 1 to 6, wherein ​

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