Anti-static wrapping shaft body structure of semiconductor cleaning equipment

Abstract

The utility model relates to the field of anti-static wrapping shaft bodies, in particular to an anti-static wrapping shaft body structure of semiconductor cleaning equipment. Comprising a connecting shaft and a connecting structure, two shells are arranged on the surface of the connecting shaft, the surface of the connecting shaft is sleeved with the shells, the two shells are connected through the connecting structure, the connecting structure is arranged at one end of each shell, the connecting structure comprises an auxiliary groove, and the auxiliary grooves are formed in the shells; the auxiliary groove is slidably connected with a fixing ring, the end, away from the auxiliary groove, of the shell is slidably connected with a connecting ring, the inner wall of the connecting ring is fixedly connected with a clamping ring, the clamping ring is connected with the shell in a clamped mode, and the inner wall of the fixing ring is slidably connected with an insertion block. The anti-static wrapping shaft body structure of the semiconductor cleaning equipment has the advantages that the wrapping outer shell can be conveniently replaced, when the outer shell is damaged or aged, only the outer shell needs to be replaced, the whole shaft body does not need to be replaced, and therefore maintenance and replacement cost is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to anti -static coating shaft body field especially relates to a semiconductor cleaning equipment anti -static coating shaft body structure. BACKGROUND

[0002] The anti -static coating shaft body is a kind of shaft body with the function of preventing static electricity accumulation, it is usually used in the environment needing to avoid static interference or protect sensitive electronic equipment. Its outer layer is usually coated with antistatic material, which can effectively guide static electricity away, thereby reducing the harm of static electricity to equipment or operating personnel.

[0003] Prior art such as the utility model with announcement number CN215101023U, the patent discloses a transmission shaft that prevents sticking and static electricity, the patent adopts the transmission of glue base material, the surface of the transmission shaft is equipped with cladding layer, the cladding layer is formed by being wrapped and cladded on the surface of transmission shaft using antistatic polytetrafluoroethylene material, the outer surface of cladding layer is smooth, and the thickness of cladding layer is large. The utility model not only makes the transmission shaft obtain the effect of preventing sticking and static electricity, and the cladding layer is thick, firmly adhered, not easy to fall off, durable, helps to produce copper-clad plate bonding sheet, is suitable for use in multiple environments, simple structure, convenient to make, and strong practicality.

[0004] The inventor found in daily life that the shell of the anti-static coating shaft body in the prior art is usually closely combined with the internal components, and the disassembly and replacement of the coating shell can require relatively complex operation, increasing the difficulty of maintenance and repair. If the coating shell is damaged or worn, it is difficult to replace the shell alone and the entire shaft body needs to be replaced, which can result in higher repair or replacement cost. The process of replacing the coating shell can be relatively cumbersome, resulting in prolonged equipment downtime and affecting production efficiency, especially in the case of frequent maintenance or replacement of the shell.

[0005] The present application provides another technical solution to solve the technical problem, aiming to provide multiple problem-solving scheme choices for those skilled in the art. UTILITY MODEL CONTENT

[0006] The utility model aims at solving the shortcomings in the prior art.

[0007] In order to solve the above technical problems, the utility model provides a kind of semiconductor cleaning equipment anti-static coating shaft body structure, comprising: connecting shaft and connecting structure, the surface of connecting shaft is provided with two housings, the housing is sleeved on the surface of connecting shaft, two the housing is connected by connecting structure, one end of the housing is equipped with connecting structure, the connecting structure includes auxiliary groove, the auxiliary groove is opened on the housing, the auxiliary groove is slidably connected with fixed ring, the end of the housing away from auxiliary groove is slidably connected with connecting ring, the inner wall of connecting ring is fixedly connected with snap ring, the snap ring is clamped with housing, the inner wall of fixed ring is slidably connected with plug, the end of plug away from housing is fixedly connected with auxiliary block, the end of housing close to plug is equipped with two connecting grooves, the connecting groove is slidably connected with plug, the bottom wall of connecting groove is fixedly connected with iron sheet, the end of plug close to iron sheet is fixedly connected with magnetic sheet, and the magnetic sheet is adsorbed with iron sheet.

[0008] The effect achieved by the above components is that when the housing and the connecting shaft need to be connected, the housing is pulled to move, the two housings are wrapped on the connecting shaft, then the connecting ring is pulled to move, the connecting ring drives the snap ring to move, then the connecting ring is sleeved on the two housings, then the fixed ring is sleeved on the auxiliary groove at the other end of the housing, then the auxiliary block is pulled to move, the auxiliary block drives the plug to move, the plug connecting groove and the fixed ring are aligned, then the plug is inserted into the fixed ring and the connecting groove, and then the magnetic sheet and the iron sheet are adsorbed and fixed.

[0009] Preferably, the two ends of the auxiliary block are provided with a plurality of notches, and the plurality of notches are uniformly distributed on the auxiliary block.

[0010] The effect achieved by the above components is that the notches can increase the friction between the hand and the auxiliary block, to avoid sliding when pulling the auxiliary block.

[0011] Preferably, the inner wall of the connecting groove is fixedly connected with an anti-skid sleeve, and the anti-skid sleeve is a rubber sleeve.

[0012] The effect achieved by the above components is that the anti-skid sleeve can increase the friction between the plug and the connecting groove, to avoid sliding when inserting the plug into the connecting groove.

[0013] Preferably, the cross section of the snap ring is annular, and the snap ring is a rubber ring.

[0014] The effect achieved by the above components is that the rubber material has a certain elasticity, which can facilitate the snap ring to be clamped into the housing.

[0015] Preferably, the cross section of the fixed ring is annular, and the fixed ring is a plastic ring.

[0016] The effect achieved by the above component is that the plastic material has a relatively low cost, which can reduce the manufacturing cost of the fixing ring, and the plastic can be electrostatically isolated.

[0017] Preferably, the cross section of the plug is rectangular, and the plug is a stainless steel block.

[0018] The effect achieved by the above component is that the stainless steel material can increase the service life of the plug and avoid rusting of the plug during use.

[0019] Compared with the related art, the semiconductor cleaning equipment anti-static coated shaft body structure has the following beneficial effects:

[0020] By setting the connecting structure, the shell of the anti-static coated shaft body in the prior art is usually tightly combined with the internal components, and the disassembly and replacement of the coated shell may require relatively complex operations, increasing the difficulty of maintenance and repair. If the coated shell is damaged or worn, it is difficult to replace the shell alone and the entire shaft body needs to be replaced, which will result in higher repair or replacement costs. The process of replacing the coated shell can be relatively cumbersome, resulting in an extended equipment downtime, thereby affecting the production efficiency. In particular, in the case of frequent maintenance or replacement of the shell, the device achieves the effect of easily replacing the coated shell, and only the shell needs to be replaced without replacing the entire shaft body when the shell is damaged or aged, thereby saving the maintenance and replacement costs. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 A structure diagram of the semiconductor cleaning equipment anti-static coated shaft body structure is provided.

[0022] Figure 2 A Figure 1 A connecting structure diagram is shown.

[0023] Figure 3 A Figure 2 A partial structure diagram is shown.

[0024] Figure 4 A Figure 2 A local structure diagram is shown.

[0025] Figure 5 A Figure 4 An enlarged view of A is shown.

[0026] Reference numerals in the drawing: 1, connecting shaft; 2, shell; 3, connecting structure; 301, connecting ring; 302, fixing ring; 303, auxiliary block; 304, clasp; 305, notch; 306, plug; 307, magnetic sheet; 308, iron sheet; 309, anti-skid sleeve; 310, connecting groove; 311, auxiliary groove. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model and are not used to limit the utility model.

[0028] The specific implementation of the utility model will be described in detail below in combination with specific examples.

[0029] Please refer to Figures 1 to 5 The utility model embodiment provides a kind of semiconductor cleaning equipment anti-static coating shaft body structure, comprising: connecting shaft 1 and connecting structure 3, the surface of connecting shaft 1 is provided with two housings 2, housing 2 is sleeved on the surface of connecting shaft 1, two housings 2 are connected by means of connecting structure 3, and one end of housing 2 is equipped with connecting structure 3.

[0030] In the embodiment of the utility model, please refer to Figures 1 to 5The connecting structure 3 comprises an auxiliary groove 311 formed on the shell 2, the auxiliary groove 311 is slidably connected with a fixing ring 302, one end of the shell 2 away from the auxiliary groove 311 is slidably connected with a connecting ring 301, the inner wall of the connecting ring 301 is fixedly connected with a clamping ring 304, the clamping ring 304 is clamped with the shell 2, the inner wall of the fixing ring 302 is slidably connected with an insertion block 306, one end of the insertion block 306 away from the shell 2 is fixedly connected with an auxiliary block 303, two connecting grooves 310 are formed on one end of the shell 2 close to the insertion block 306, the connecting grooves 310 are slidably connected with the insertion block 306, the bottom wall of the connecting groove 310 is fixedly connected with an iron sheet 308, one end of the insertion block 306 close to the iron sheet 308 is fixedly connected with a magnetic sheet 307, and the magnetic sheet 307 is adsorbed with the iron sheet 308. When the shell 2 needs to be connected with the connecting shaft 1, the shell 2 is pulled to move, the two shells 2 are wrapped on the connecting shaft 1, then the connecting ring 301 is pulled to move, the connecting ring 301 drives the clamping ring 304 to move, then the connecting ring 301 is sleeved on the two shells 2, then the fixing ring 302 is sleeved on the other end of the shell 2, then the auxiliary block 303 is pulled to move, the auxiliary block 303 drives the insertion block 306 to move, the insertion block 306 is connected with the connecting groove 310 and the fixing ring 302, then the insertion block 306 is inserted into the fixing ring 302 and the connecting groove 310, then the magnetic sheet 307 is adsorbed with the iron sheet 308, and the two ends of the auxiliary block 303 are provided with a plurality of slot 305, which are evenly distributed on the auxiliary block 303. The slot 305 can increase the friction between the hand and the auxiliary block 303, so that the auxiliary block 303 is not slipped when being pulled, the inner wall of the connecting groove 310 is fixedly connected with an anti-skid sleeve 309, and the anti-skid sleeve 309 is a rubber sleeve. The anti-skid sleeve 309 can increase the friction between the insertion block 306 and the connecting groove 310, so that the insertion block 306 is not slipped when being inserted into the connecting groove 310, the cross section of the clamping ring 304 is annular, and the clamping ring 304 is a rubber ring. The rubber material has a certain elasticity, which can conveniently clamp the clamping ring 304 into the shell 2, the cross section of the fixing ring 302 is annular, and the fixing ring 302 is a plastic ring. The plastic material has a relatively low cost, which can reduce the manufacturing cost of the fixing ring 302, and the plastic can be electrostatically isolated, the cross section of the insertion block 306 is rectangular, and the insertion block 306 is a stainless steel block. The stainless steel material can increase the service life of the insertion block 306, so that the insertion block 306 is not rusted when being used;

[0031] The working principle of the anti-static coated shaft body structure of the semiconductor cleaning equipment is as follows: when it is needed to connect the shell 2 and the connecting shaft 1, the shell 2 is pulled to move, the two shells 2 are coated on the connecting shaft 1, then the connecting ring 301 is pulled to move, the connecting ring 301 drives the clamping ring 304 to move, then the connecting ring 301 is sleeved on the two shells 2, then the fixing ring 302 is sleeved on the auxiliary groove 311 at the other end of the shell 2, then the auxiliary block 303 is pulled to move, the auxiliary block 303 drives the plug block 306 to move, the plug block 306 connecting groove 310 and the fixing ring 302 are aligned, then the plug block 306 is inserted into the fixing ring 302 and the connecting groove 310, then the magnetic sheet 307 and the iron sheet 308 are adsorbed and fixed, the slot 305 can increase the friction force between the hand and the auxiliary block 303, sliding of the auxiliary block 303 during pulling is avoided, the anti-skid sleeve 309 can increase the friction force between the plug block 306 and the connecting groove 310, sliding of the plug block 306 during insertion into the connecting groove 310 is avoided, the rubber material has certain elasticity, the clamping ring 304 can be conveniently clamped into the shell 2, the plastic material can reduce the manufacturing cost of the fixing ring 302, and the plastic material can be used for static isolation, the stainless steel material can increase the service life of the plug block 306, and rust of the plug block 306 during use is avoided.

[0032] The circuit and the control involved in the utility model are prior art, and too much repetition is not performed herein.

[0033] The above is only an embodiment of the utility model, and does not limit the patent range of the utility model, and equivalent structures or equivalent process transformations using the contents of the utility model specification and drawings, or direct or indirect application in other related technical fields are also included in the patent protection range of the utility model.

Claims

1. A semiconductor cleaning equipment anti-static coated shaft body structure, characterized in that, Include: Connecting shaft (1) and connecting structure (3), the surface of the connecting shaft (1) is provided with two shells (2), the shell (2) is sleeved on the surface of the connecting shaft (1), two the shell (2) is connected by connecting structure (3), one end of the shell (2) is provided with connecting structure (3), the connecting structure (3) includes auxiliary slot (311), the auxiliary slot (311) is opened on the shell (2), the auxiliary slot (311) is slidably connected with the fixing ring (302), the end of the shell (2) away from the auxiliary slot (311) is slidably connected with the connecting ring (301), the inner wall of the connecting ring (301) is fixedly connected with the clamping ring (304), the clamping ring (304) is connected with the shell (2), the inner wall of the fixing ring (302) is slidably connected with the plug-in block (306), one end of the plug-in block (306) away from the shell (2) is fixedly connected with the auxiliary block (303), the shell (2) is opened in the end close to the plug-in block (306) two connecting grooves (310), the connecting groove (310) is slidably connected with the plug-in block (306), the bottom wall of the connecting groove (310) is fixedly connected with the iron sheet (308), one end of the plug-in block (306) close to the iron sheet (308) is fixedly connected with the magnetic sheet (307), the magnetic sheet (307) is adsorbed with the iron sheet (308).

2. The anti-static coated shaft structure of a semiconductor cleaning apparatus according to claim 1, wherein, The both ends of the auxiliary block (303) are provided with a plurality of slots (305), a plurality of the slots (305) are evenly distributed on the auxiliary block (303).

3. The anti-static coated shaft structure of a semiconductor cleaning apparatus according to claim 1, wherein, The inner wall of the connecting groove (310) is fixedly connected with the anti-skid sleeve (309), and the anti-skid sleeve (309) is a rubber sleeve.

4. The anti-static coated shaft structure of a semiconductor cleaning apparatus according to claim 1, wherein, The cross section of the clamping ring (304) is circular, and the clamping ring (304) is a rubber ring.

5. The anti-static coated shaft structure of a semiconductor cleaning apparatus according to claim 1, wherein, The cross section of the fixing ring (302) is circular, and the fixing ring (302) is a plastic ring.

6. The anti-static coated shaft structure of a semiconductor cleaning apparatus according to claim 1, wherein, The cross section of the plug-in block (306) is rectangular, and the plug-in block (306) is a stainless steel block.

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