Gate valve and vacuum coating equipment

Abstract

The utility model discloses a gate valve and vacuum coating equipment. The gate valve comprises a valve plate, a driving assembly and a valve plate rotating assembly, the valve plate rotating assembly comprises a swing arm, a valve plate seat and an elastic piece. The swing arm is connected with the output end of the driving assembly; the valve plate seat is hinged with the swing arm and is connected with the valve plate; the elastic piece is arranged on the swing arm and extends to abut against the end face, corresponding to the swing arm, of the valve plate base. When the valve plate rotating assembly drives the valve plate to rotate towards the position close to the sealing face and make contact with the sealing face, the sealing face generates extrusion force on the valve plate and the elastic piece, and the elastic piece generates elastic force opposite to the extrusion force in direction. When the extrusion force generated by the sealing face to the valve plate and the elastic piece is larger than the elastic force generated by the elastic piece, the valve plate rotates towards the position away from the sealing face. By means of the self-adaptive adjusting function of the elastic piece, even if machining errors exist, it can be guaranteed that the good sealing state is always kept between the valve plate and the sealing face, and the reliability of a whole gate valve system is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating and sealing technology, specifically to a valve and vacuum coating equipment. Background Technology

[0002] Continuous vacuum coating equipment typically consists of multiple chambers. During the actual coating process, the required vacuum levels differ between chambers, necessitating the design of sealing structures between them. When the workpiece is transferred from the first chamber to the second, the valve opens; after the transfer, the valve closes. The sealing ring on the valve fits snugly against the chamber, achieving a seal. At this point, the valve needs to maintain the vacuum gradient between the chambers to ensure a stable atmosphere within the chambers during coating, which affects both coating quality and efficiency.

[0003] Currently, a large number of valves are used in the vacuum coating field. The performance of these valves directly affects the coating operation of the coating equipment; therefore, a reliable valve is an effective guarantee for the stable operation of the coating equipment. Most existing valves use a sealing plate with an embedded sealing ring for sealing. Due to manufacturing errors and deformations, the valve plate and sealing surface are not perfectly parallel when the valve is closed. This causes part of the sealing ring to contact the sealing surface first, resulting in friction and scratching of the sealing ring. Furthermore, because the valve plate and sealing surface are not parallel, some sealing rings may be compressed too much, damaging them, while others may be compressed too little, failing to achieve a proper seal. Therefore, a compensation device is needed to solve this problem. Utility Model Content

[0004] In view of this, the present invention provides a valve and a vacuum coating equipment to solve the problems that traditional valves often suffer from severe wear of the sealing ring, excessive or insufficient compression of the sealing ring, difficulty in ensuring sealing effect, and short service life of the sealing ring due to errors in machining and installation.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] In a first aspect, this utility model provides a gate valve, comprising:

[0007] A valve plate, wherein a first sealing element is provided on the side of the valve plate near the sealing surface;

[0008] A drive component, the drive component being adapted to provide a driving force;

[0009] A valve plate rotation assembly is provided, wherein the valve plate rotation assembly is connected to the output end of a drive assembly and drives the valve plate to rotate under the drive of the drive assembly; the valve plate rotation assembly includes a rocker arm, a valve plate seat, and an elastic element; the rocker arm is connected to the output end of the drive assembly; the valve plate seat is hinged to the rocker arm and is adapted to be connected to the valve plate; the elastic element is disposed on the rocker arm and extends to abut against the end face of the valve plate seat corresponding to the rocker arm;

[0010] When the valve plate rotating assembly drives the valve plate to rotate closer to the sealing surface and contact the sealing surface, the sealing surface generates a compressive force on the valve plate and the elastic element, and the elastic element generates an elastic force in the opposite direction to the compressive force to limit the rotation of the valve plate; when the compressive force generated by the sealing surface on the valve plate and the elastic element is greater than the elastic force generated by the elastic element, the valve plate rotates away from the sealing surface to adjust the position between the valve plate and the sealing surface.

[0011] The beneficial effects of the aforementioned vacuum-coated valve are as follows: When the valve plate is closed, it contacts the sealing surface. If the sealing surface and the valve plate are not perfectly parallel, the side that contacts first will generate compressive force. If the compressive force is too large, it will directly act on the sealing ring of the valve plate, causing pressure damage to the sealing ring. In this embodiment, when the compressive force is greater than the elastic force of the elastic element, the valve plate will overcome the elastic force of the elastic element, and the elastic element will contract. At this time, the position of the valve plate subjected to excessive compressive force from the sealing surface will rotate to the side away from the sealing surface, thereby reducing the compression of the sealing ring of the valve plate, thus avoiding excessive friction, scratches, and pressure damage to the sealing ring, and extending the service life of the sealing ring.

[0012] The elastic element provides appropriate elasticity when the valve plate contacts the sealing surface, enabling the valve plate to automatically adjust its position during the closing process. This ensures more uniform contact between the sealing ring on the valve plate and the sealing surface, which not only improves the sealing effect but also effectively avoids excessive or insufficient compression of the local sealing ring.

[0013] The self-adjusting function of the elastic element ensures that a good seal is always maintained between the valve plate and the sealing surface, even if there are machining or installation errors, thus improving the reliability and stability of the entire valve system.

[0014] The technical solution has been further optimized by providing a notch on the swing arm;

[0015] The valve plate seat includes a connecting plate and a connecting ring. The connecting ring is disposed in the notch and is hinged to the swing arm through a hinge assembly. The side of the connecting plate is disposed opposite to the side of the swing arm, and the side of the connecting plate facing away from the swing arm is connected to the valve plate.

[0016] The technical solution is further optimized, wherein the elastic element includes at least one plunger; at least one plunger positioning hole is provided on the swing arm, and the plunger is positioned in the plunger positioning hole;

[0017] The plunger comprises a plunger body, a plunger ball and a spring, the plunger body is provided with a plunger cavity, the spring is arranged in the plunger cavity, one end of the spring is connected with the inner wall of the plunger cavity, the other end of the spring is connected with the plunger ball, and the plunger ball abuts on the end face of the connecting plate corresponding to the swing arm.

[0018] The beneficial effects of the above technical scheme are as follows: the shaft and the swing arm are connected by a key, the swing arm and the valve plate seat are designed to be rotatably connected, the swing arm and the valve plate seat are fixed by the plunger, the valve plate seat and the valve plate are connected by screws, and finally the power is transmitted to the valve plate to realize the overturning of the valve plate by 0-90°. The spring in the plunger structure can provide adjustable elastic force. When the valve plate contacts the sealing surface, the spring can be compressed or released when subjected to extrusion force, which helps to ensure that the valve plate can be adaptively attached to the sealing surface and improve the sealing effect. The rolling contact between the plunger ball and the end face of the connecting plate and the swing arm reduces the sliding friction and reduces the risk of wear. Compared with the traditional planar contact mode, the rolling contact can significantly reduce the wear between the components.

[0019] Further optimization of the technical scheme, the connecting ring and the swing arm are provided with pin holes corresponding to each other; the hinge assembly comprises a pin shaft, the pin shaft passes through the pin holes of the connecting ring and the swing arm, and one end of the pin shaft is provided with a first check ring.

[0020] Further optimization of the technical scheme, the driving assembly comprises:

[0021] A shaft assembly is connected with the swing arm.

[0022] A driving structure is connected with the shaft assembly, and the driving structure is adapted to drive the shaft assembly to rotate, thereby driving the swing arm to rotate.

[0023] Further optimization of the technical scheme, the shaft assembly comprises a shaft, an oil seal assembly, a crankshaft and a floating joint; the shaft passes through the swing arm and is connected with the swing arm, the shaft is rotatably arranged on a support, and the support is adapted to be connected with the frame assembly; the shaft passes through the frame assembly and is sealed by the oil seal assembly; the end of the shaft is connected with the crankshaft, and the crankshaft is connected with the output end of the driving structure through the floating joint.

[0024] Further optimization of the technical scheme, the oil seal assembly comprises an oil seal sleeve, an oil seal, a second check ring and a second sealing element, the two ends of the oil seal sleeve are respectively provided with oil seals, the shaft passes through the oil seal sleeve and is sealed by the oil seal, one end of the oil seal sleeve is connected with the frame assembly, and the end face of the oil seal sleeve connected with the frame assembly is provided with a second sealing element.

[0025] The beneficial effects of the above technical solution are as follows: the use of oil seal assembly to replace the traditional magnetic fluid plus coupling design for sealing, the shaft is directly connected to the crankshaft, reducing the use of couplings and reducing the volume of vacuum valve in the vacuum chamber, without affecting the production cycle, and the use of oil seal assembly in this embodiment provides reliable double oil seal protection.

[0026] To further optimize the technical solution, the rotating shaft is rotatably mounted on the support via an oil-free bushing.

[0027] The beneficial effects of the above technical solution are as follows: This utility model uses a shouldered oil-free bushing instead of a traditional bearing design, reducing the need for regular maintenance of the vacuum valve, such as regular lubrication of the bearings, thus lowering maintenance costs. At the same time, this design also enhances the valve's impact resistance and positioning function, further improving the system's durability.

[0028] Secondly, this utility model also provides a vacuum coating apparatus, comprising:

[0029] A frame assembly, comprising a frame and at least one panel group, one side of the panel group being a sealing surface, the panel group being disposed within the frame and dividing the frame into at least two vacuum chambers, the panel group being provided with an opening suitable for connecting two adjacent vacuum chambers;

[0030] At least one of the aforementioned valves is disposed at an opening position of the panel assembly to control the communication between two adjacent vacuum chambers.

[0031] To further optimize the technical solution, the panel assembly includes a first panel and a second panel, both of which have openings. The valve is correspondingly positioned at the opening of the first panel, and the opening of the second panel is smaller than the opening of the first panel. Attached Figure Description

[0032] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0033] Figure 1 A schematic diagram of the overall valve provided by this utility model;

[0034] Figure 2 Assembly drawing of the valve and vacuum chamber provided for this utility model;

[0035] Figure 3The utility model provides a partial enlarged view of the valve plate rotating assembly in the gate valve.

[0036] Figure 4 The utility model provides a disassembly drawing of the valve plate rotating assembly in the gate valve.

[0037] Figure 5 For Figure 3 The sectional view of the plunger at A-A after compression (plunger bead retraction);

[0038] Figure 6 For Figure 3 The sectional view of the plunger at A-A without compression (plunger bead extension);

[0039] Figure 7 For Figure 1 The sectional view of the oil seal assembly at D-D;

[0040] Figure 8 For Figure 3 The sectional view of the oilless bushing at C-C.

[0041] Reference signs:

[0042] 1, drive assembly, 11, cylinder, 12, cylinder fixed seat, 13, rotating shaft assembly, 131, floating joint, 132, crankshaft, 133, rotating shaft, 134, support, 135, oil seal, 136, oil seal cover, 137, second check ring, 138, second sealing element;

[0043] 2, valve plate rotating assembly, 21, swing arm, 22, valve plate seat, 221, connecting plate, 222, connecting ring, 232, pin shaft, 233, first check ring, 234, gasket, 235, oilless bushing, 24, plunger, 241, plunger body, 242, plunger bead;

[0044] 3, valve plate, 31, first sealing element;

[0045] 4, frame assembly, 41, first panel, 42, second panel, 43, frame, 44, first vacuum chamber, 45, second vacuum chamber. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical scheme and advantage of the utility model embodiment clearer, the technical scheme in the utility model embodiment will be described clearly and completely in combination with the drawings in the utility model embodiment, obviously, the described embodiment is a part of the embodiment of the utility model, rather than all the embodiment. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0047] The continuous vacuum coating equipment is generally composed of multiple chambers, and the vacuum degrees required between the chambers are different in the actual coating process, so the sealing structure must be designed between the chambers. When the coated object is transferred from the first vacuum chamber to the second vacuum chamber, the door valve is opened, and after the coated object is transferred from the first vacuum chamber to the second vacuum chamber, the door valve is closed. The sealing ring on the door valve is attached to the chamber to achieve sealing, and at this time the door valve needs to maintain the vacuum gradient between the chambers to ensure the stability of the atmosphere in the chamber during coating, which affects the coating quality and coating efficiency.

[0048] At present, a large number of door valves are used in the field of vacuum coating, and the performance of the door valve affects the coating work of the coating equipment, so a reliable door valve is an effective guarantee for the stable operation of the coating equipment. Most of the existing door valves adopt the sealing of the sealing valve plate inlaid with the sealing ring, due to the machining error and deformation of the door valve, when the door valve is closed, the valve plate and the sealing surface are not in a completely parallel state, which will cause a part of the sealing ring to contact the sealing surface first, at this time the friction between the sealing ring and the sealing surface will occur, and the sealing ring will be scratched. And due to the non-parallelism of the valve plate and the sealing surface, a part of the sealing ring will be compressed too much, damaging the sealing ring, and the other part of the sealing ring will be compressed too little, failing to achieve the sealing effect.

[0049] Therefore, the utility model provides a door valve, when the valve plate is closed, the side which contacts the sealing surface first will be subjected to extrusion force, when the extrusion force is greater than the elastic force provided by the plunger, the valve plate will rotate with the valve plate seat around the hinge and the swing arm, the rotation can offset the wear of the sealing ring, and avoid the excessive compression of the sealing ring damaging the sealing ring.

[0050] The first aspect of the utility model and the second aspect of the utility model are described in detail below. Figures 1 to 8

[0051] ​According to the embodiment of the utility model, first, a gate valve is provided, which comprises a valve plate 3, a driving assembly 1 and a valve plate rotating assembly 2. The side of the valve plate 3 close to the sealing surface is provided with a first sealing element 31, which can be a sealing ring. The driving assembly 1 is adapted to provide driving force. The valve plate rotating assembly 2 is connected with the output end of the driving assembly 1 and drives the valve plate 3 to rotate under the driving of the driving assembly 1. The valve plate rotating assembly 2 comprises a swing arm 21, a valve plate seat 22 and an elastic element. The swing arm 21 is connected with the output end of the driving assembly 1. The valve plate seat 22 is hinged with the swing arm 21, and the valve plate seat 22 is connected with the valve plate 3. More specifically, the valve plate seat 22 is connected with the valve plate 3 by means of screws. The elastic element is arranged on the swing arm 21 and extends to abut on the end face of the valve plate seat 22 corresponding to the swing arm 21. When the valve plate 3 is driven by the valve plate rotating assembly 2 to rotate to the position close to the sealing surface and contacts the sealing surface, the sealing surface exerts a pressing force on the valve plate 3 and the elastic element, and the elastic element generates an elastic force opposite to the pressing force direction to limit the rotation of the valve plate 3. When the pressing force exerted by the sealing surface on the valve plate 3 and the elastic element is greater than the elastic force generated by the elastic element, the valve plate 3 rotates to the position away from the sealing surface to adjust the position between the valve plate 3 and the sealing surface.

[0052] In the embodiment, when the valve plate 3 is closed, the valve plate 3 contacts the sealing surface. If the sealing surface and the valve plate 3 are not in a completely parallel state, the side that contacts first will generate a pressing force. If the pressing force is too large, it will directly act on the sealing ring of the valve plate 3, causing the compression loss of the sealing ring. However, in the embodiment, when the pressing force is greater than the elastic force of the elastic element, the valve plate 3 will overcome the elastic force of the elastic element, and the elastic element will contract. At this time, the position of the valve plate 3 subjected to the excessive pressing force of the sealing surface rotates to the side away from the sealing surface, thereby reducing the compression amount of the sealing ring of the valve plate 3, avoiding excessive friction, scratching and compression loss of the sealing ring, and prolonging the service life of the sealing ring.

[0053] The elastic element can provide appropriate elastic force when the valve plate 3 contacts the sealing surface, so that the valve plate 3 can automatically adjust the position during the closing process, ensuring that the contact between the sealing ring on the valve plate 3 and the sealing surface is more uniform. This not only improves the sealing effect, but also effectively avoids the situation of excessive compression or insufficient compression of the local sealing ring.

[0054] Through the self-adaptive adjustment function of the elastic element, even if there are machining errors or installation errors, the valve plate 3 and the sealing surface can always maintain a good sealing state, improving the reliability and stability of the entire gate valve system.

[0055] In some embodiments, the swing arm 21 is provided with an opening. The valve plate seat 22 comprises a connecting plate 221 and a connecting ring 222. The connecting ring 222 is arranged in the opening and is hinged with the swing arm 21 through a hinge assembly. The side surface of the connecting plate 221 is arranged opposite to the side surface of the swing arm 21, and the side surface of the connecting plate 221 facing away from the swing arm 21 is connected with the valve plate 3.

[0056] In some embodiments, the elastic member includes at least one plunger 24. The swing arm 21 is provided with at least one plunger positioning hole, and the plunger 24 is positioned into the plunger positioning hole. The plunger 24 penetrates the plunger positioning hole provided on the swing arm 21 and abuts against the valve plate seat 22. The plunger 24 includes a plunger body 241, a plunger bead 242, and a spring. The plunger body 241 is provided with a plunger cavity, and the spring is arranged in the plunger cavity. One end of the spring is connected with the inner wall of the plunger cavity, and the other end of the spring is connected with the plunger bead 242. The plunger bead 242 abuts against the end face of the connecting plate 221 corresponding to the swing arm 21.

[0057] In the present embodiment, the shaft 133 is key-connected with the swing arm 21. The swing arm 21 and the valve plate seat 22 are designed to be rotatably hinged, and the swing arm 21 and the valve plate seat 22 are fixed by the plunger. The valve plate seat 22 and the valve plate 3 are connected by screws, and finally the power is transmitted to the valve plate 3 to realize the overturning of the valve plate 3 by 0-90°. The spring in the plunger structure can provide adjustable elastic force. When the valve plate 3 contacts the sealing surface, the spring can be compressed or released when subjected to extrusion force, which helps to ensure that the valve plate 3 can be adaptively attached to the sealing surface, thereby improving the sealing effect. The rolling contact between the plunger bead 242 and the end face of the connecting plate 221 and the swing arm 21 reduces the sliding friction and reduces the risk of wear. Compared with the traditional planar contact mode, the rolling contact can significantly reduce the wear between components.

[0058] As a preferred embodiment, the swing arm 21 is provided with a plurality of plunger positioning holes, and the plunger positioning holes are arranged at intervals. Correspondingly, the plunger 24 is provided with a plurality of plunger positioning holes. The arrangement of the plurality of plungers 24 can uniformly distribute the extrusion force between the valve plate seat 22 and the swing arm 21, avoid local stress concentration, and further improve the sealing effect and the durability of the system.

[0059] In some embodiments, the connecting ring 222 and the swing arm 21 are provided with pin holes corresponding to each other. The hinge assembly includes a pin shaft 232, which penetrates the pin holes of the connecting ring 222 and the swing arm 21. The swing arm 21 and the connecting ring 222 are provided with a gasket 234. One end of the pin shaft 232 is provided with a first retainer ring 233 and is fixed with the first retainer ring 233, thereby hingedly connecting the connecting ring 222 and the swing arm 21.

[0060] In some embodiments, the driving assembly 1 includes a shaft assembly 13 and a driving structure. The shaft assembly 13 is connected with the swing arm 21. The driving structure is connected with the shaft assembly 13, and the driving structure is adapted to drive the shaft assembly 13 to rotate, thereby driving the swing arm 21 to rotate.

[0061] The rotating shaft assembly 13 comprises a rotating shaft 133, an oil seal assembly, a crank shaft 132 and a floating joint 131. The rotating shaft 133 passes through the rotating shaft through hole on the swing arm 21 and is keyed connected with the swing arm 21, the rotating shaft 133 is rotatably arranged on a support 134 which is adapted to be connected with the frame assembly 4. The rotating shaft 133 passes through the frame assembly 4 and is sealed with the frame assembly 4 through the oil seal assembly. The end of the rotating shaft 133 is connected with the crank shaft 132 through a connecting key, and the crank shaft 132 is connected with the output end of the driving structure through the floating joint 131.

[0062] More specifically, the swing arm 21 in the embodiment is provided with a support 134 on each side, and the positions of the two ends of the rotating shaft 133 in the vacuum chamber are also provided with a support 134, so as to realize the stable positioning of the rotating shaft 133.

[0063] Combining Figure 7 As shown, the oil seal assembly comprises an oil seal sleeve 136, an oil seal 135, a second blocking ring 137 and a second sealing member 138, the two ends of the oil seal sleeve 136 are respectively provided with the oil seal 135, the rotating shaft 133 passes through the oil seal sleeve 136 and is directly connected with the crank shaft 132, so as to reduce the use of the shaft coupling, the position where the rotating shaft 133 passes through the oil seal sleeve 136 is sealed through the oil seal 135, one end of the oil seal sleeve 136 is connected with the frame assembly 4, the end surface of the oil seal sleeve 136 connected with the frame assembly 4 is provided with the second sealing member 138, and the second sealing member 138 is a sealing ring.

[0064] The existing vacuum door valve generally uses magnetic fluid as a dynamic sealing device, and drives the transmission into the vacuum cavity through the magnetic fluid. In this way, a shaft coupling is needed to connect the magnetic fluid and the rotating shaft, so as to realize the rotation of the valve plate 3. The magnetic fluid is expensive, and the shaft coupling needs to occupy additional space. The increase of the volume of the vacuum chamber will affect the overall production rhythm of the coating equipment. In order to save cost and space, the oil seal assembly is used to replace the traditional design of magnetic fluid plus shaft coupling for sealing in the embodiment, the rotating shaft 133 is directly connected with the crank shaft 132, the use of the shaft coupling is reduced, the volume of the vacuum door valve in the vacuum chamber is also reduced, which will not affect the production rhythm, and the oil seal assembly is used to provide reliable double oil seal protection.

[0065] The existing vacuum door valve generally uses a bearing to realize the support and rotation of the shaft, and impact will occur when the door valve starts and stops. In order to solve this problem, the swing arm 21 in the embodiment is provided with a floating joint 131, and the rotating shaft 133 is connected with the output end of the driving structure through the floating joint 131. Figure 4 and Figure 8As shown, in this embodiment, the rotating shaft 133 is rotatably mounted on the support 134 via an oil-free bushing 235. More specifically, the oil-free bushing 235 is fitted onto the outside of the rotating shaft 133, and the support 134 is fitted onto the outside of the oil-free bushing 235. The oil-free bushing 235 has the advantages of being impact-resistant and requiring no lubrication. In this embodiment, a shouldered oil-free bushing 235 is used instead of the traditional bearing design, reducing the need for regular maintenance of the vacuum valve, such as regular lubrication of the bearings, thus lowering maintenance costs. At the same time, this design also enhances the valve's impact resistance and positioning function, further improving the system's durability. The shouldered oil-free bushings 235 on both sides of the swing arm 21 cooperate with the support 134 to position the swing arm 21, thereby positioning the vacuum valve and facilitating its installation.

[0066] The drive structure includes two cylinders 11. In addition to cylinders 11, other structures can also be used in the drive structure. When cylinders 11 are used in the drive structure, both ends of the rotating shaft 133 extend out of the frame assembly 4 and are equipped with crankshafts 132 and floating joints 131. The two floating joints 131 are respectively connected to the telescopic ends of the two cylinders 11. A cylinder fixing seat 12 is fixed on the side of the cylinder 11 away from the cylinder piston rod. The cylinder fixing seat 12 is fixed on the cavity wall of the vacuum chamber.

[0067] According to an embodiment of the present invention, in a second aspect, a vacuum coating apparatus is provided, including a frame assembly 4 and at least one gate valve. The frame assembly 4 includes a frame 43 and at least one panel assembly. One side of the panel assembly is a sealing surface. The panel assembly is disposed within the frame 43 and divides the frame 43 into at least two vacuum chambers. The panel assembly has an opening suitable for connecting two adjacent vacuum chambers. The opening can be rectangular or of other shapes. The gate valve is correspondingly disposed at the opening of the panel assembly to control the connection between the two adjacent vacuum chambers.

[0068] In some embodiments, the panel assembly includes a first panel 41 and a second panel 42. The first panel 41 is located in a first vacuum chamber 44, and the second panel 42 is located in a second vacuum chamber 45. The first vacuum chamber 44 and the second vacuum chamber 45 are adjacent to each other and separated by a vacuum valve. Both the first panel 41 and the second panel 42 have openings, and the valve is correspondingly located at the opening of the first panel 41. More specifically, the support 134 in the valve is fixed to the first panel 41, and the opening size of the second panel 42 is smaller than that of the first panel 41, thereby ensuring a sealing effect between the two vacuum chambers. The first panel 41 and the second panel 42 together form a sealing surface. When the vacuum valve is closed, the valve plate 3 contacts the sealing surface. When the vacuum valve is open, the valve plate 3 moves away from the sealing surface.

[0069] The working principle of the valve in the above-mentioned vacuum coating equipment is as follows:

[0070] When the cylinder 11 is vented and the cylinder piston rod is retracted, the valve plate 3 is rotated in the opposite direction through the force transmission process described above, so that the sealing ring on the valve plate 3 is tightly attached to the sealing surface, thereby sealing the vacuum chamber.

[0071] When the cylinder 11 is vented and the cylinder piston rod is retracted, the valve plate 3 is rotated in the opposite direction through the force transmission process described above, so that the sealing ring on the valve plate 3 is tightly attached to the sealing surface, thereby sealing the vacuum chamber.

[0072] When the valve plate 3 is closed, the plunger 24 abuts against the connecting plate 221 of the valve plate seat 22, at this time, there are two fixed points between the swing arm 21 and the valve plate seat 22; during the opening and closing process of the valve plate 3, the plunger 24 is retracted under force and does not abut against the connecting plate 221, at this time, the only remaining fixed point between the swing arm 21 and the valve plate seat 22 is the connection between the connecting ring 222 and the pin shaft 232, and the swing arm 21 and the valve plate seat 22 can rotate relative to each other around the pin shaft 232. Specifically, due to the machining error or installation error of the chamber, the sealing surface and the valve plate 3 are not in a completely parallel state when the valve plate 3 is about to close, but have a certain angle, which causes the upper and lower parts of the gate valve sealing ring to not contact the sealing surface at the same time, so that the part that contacts the sealing surface first rubs, causing a part of the sealing ring to be compressed too much and damage the sealing ring, and a part of the compression is too small to guarantee the sealing performance. In this embodiment, the side of the valve plate 3 that first contacts the sealing surface will be subjected to a pressing force, when this pressing force is greater than the elastic force provided by the plunger 24, the plunger 24 is retracted and no longer abuts against the connecting plate 221 of the valve plate seat 22, and the valve plate 3 will rotate with the valve plate seat 22 around the hinge between the swing arm 21, which avoids the sealing ring from being damaged by excessive compression.

[0073] Obviously, the above embodiments are only examples for the purpose of clear illustration, and are not intended to limit the embodiments. Based on the above description, those skilled in the art can make other different forms of changes or modifications. Here, it is not necessary and impossible to exhaust all the embodiments. The obvious changes or modifications derived therefrom are still within the protection scope of the present application.

Claims

1. A gate valve, characterized by The utility model relates to a valve plate driving device, which comprises: a valve plate (3) provided with a first sealing element (31) on the side close to the sealing surface; a driving assembly (1) adapted to provide driving force; a valve plate rotating assembly (2) connected with the output end of the driving assembly (1) and driven by the driving assembly (1) to rotate the valve plate (3); the valve plate rotating assembly (2) comprises a swing arm (21), a valve plate seat (22) and an elastic element; the swing arm (21) is connected with the output end of the driving assembly (1); the valve plate seat (22) is hingedly connected with the swing arm (21), and the valve plate seat (22) is connected with the valve plate (3); the elastic element is arranged on the swing arm (21) and extends to abut on the end face of the valve plate seat (22) corresponding to the swing arm (21). When the valve plate rotating assembly (2) drives the valve plate (3) to rotate to the position close to the sealing surface and contacts the sealing surface, the sealing surface exerts a pressing force on the valve plate (3) and the elastic element, and the elastic element generates an elastic force opposite to the direction of the pressing force to limit the rotation of the valve plate (3); when the pressing force exerted by the sealing surface on the valve plate (3) and the elastic element is greater than the elastic force generated by the elastic element, the valve plate (3) rotates to the position away from the sealing surface to adjust the position between the valve plate (3) and the sealing surface.

2. The gate valve of claim 1, wherein, The swing arm (21) is provided with an opening; The valve plate seat (22) comprises a connecting plate (221) and a connecting ring (222); the connecting ring (222) is arranged in the opening and is hingedly connected with the swing arm (21) through a hinge assembly; the side of the connecting plate (221) is opposite to the side of the swing arm (21); and the side of the connecting plate (221) facing away from the swing arm (21) is connected with the valve plate (3).

3. The gate valve of claim 2, wherein, The elastic element comprises at least one plunger (24); the swing arm (21) is provided with at least one plunger positioning hole, and the plunger (24) is positioned in the plunger positioning hole. The plunger (24) comprises a plunger body (241), a plunger bead (242) and a spring; the plunger body (241) is provided with a plunger cavity; the spring is arranged in the plunger cavity; one end of the spring is connected with the inner wall of the plunger cavity; the other end of the spring is connected with the plunger bead (242); and the plunger bead (242) abuts on the end face of the connecting plate (221) corresponding to the swing arm (21).

4. The gate valve of claim 2, wherein, The connecting ring (222) and the swing arm (21) are provided with pin holes corresponding to each other; the hinge assembly comprises a pin shaft (232); the pin shaft (232) penetrates through the pin holes of the connecting ring (222) and the swing arm (21); and one end of the pin shaft (232) is provided with a first stop ring (233).

5. Gate valve according to any of claims 1 - 4, characterized in that The driving assembly (1) comprises: a rotating shaft assembly (13) connected with the swing arm (21); a driving structure connected with the rotating shaft assembly (13) and adapted to drive the rotating shaft assembly (13) to rotate and further drive the swing arm (21) to rotate.

6. The gate valve of claim 5, wherein, The rotating shaft assembly (13) comprises a rotating shaft (133), an oil seal assembly, a crank shaft (132) and a floating joint (131); the rotating shaft (133) passes through the swing arm (21) and is connected with the swing arm (21), the rotating shaft (133) is rotatably arranged on a support (134), the support (134) is adapted to be connected with the frame assembly (4); the rotating shaft (133) passes through the frame assembly (4) and is sealed with the frame assembly (4) by the oil seal assembly; the end of the rotating shaft (133) is connected with the crank shaft (132), and the crank shaft (132) is connected with the output end of the driving structure through the floating joint (131).

7. The gate valve of claim 6, wherein, The oil seal assembly comprises an oil seal sleeve (136), an oil seal (135), a second check ring (137) and a second sealing element (138), both ends of the oil seal sleeve (136) are respectively provided with the oil seal (135), the rotating shaft (133) passes through the oil seal sleeve (136) and is sealed by the oil seal (135), one end of the oil seal sleeve (136) is connected with the frame assembly (4), and the end face of the oil seal sleeve (136) connected with the frame assembly (4) is provided with the second sealing element (138).

8. The gate valve of claim 6, wherein, The rotating shaft (133) is rotatably arranged on the support (134) through the oil-free bushing (235).

9. A vacuum coating apparatus, characterized by, Comprise: The frame assembly (4) comprises a frame (43) and at least one panel group, one side of the panel group is a sealing surface, the panel group is arranged in the frame (43) and divides the frame (43) into at least two vacuum chambers, and the panel group is provided with an opening adapted to communicate adjacent two vacuum chambers; At least one door valve according to any one of claims 1-8 is arranged at the opening position of the sealing surface of the panel group to control the communication of adjacent two vacuum chambers.

10. The vacuum coating apparatus according to claim 9, wherein The panel group comprises a first panel (41) and a second panel (42), the first panel (41) and the second panel (42) are provided with openings, the door valve is arranged at the opening position of the first panel (41), and the size of the opening of the second panel (42) is smaller than that of the first panel (41).

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