Semiconductor fluorine-containing waste gas pipeline sealing connection structure

Abstract

The utility model relates to a sealing connection structure of a semiconductor fluorine-containing waste gas pipeline, which is structurally characterized in that raised turnups are arranged at the end parts of air pipe bodies, the inner walls of the air pipe bodies and the outer sides of the turnups are coated with ETFE coatings or FEP coatings, the turnups at the end parts of the two air pipe bodies are contacted and aligned, and a perfluoroether gasket is sleeved on the outer sides of the turnups, which are contacted and aligned, of the two air pipe bodies. The flange comprises a first flange piece and a second flange piece, the first flange piece and the second flange piece are connected to the outer side of the perfluoroether gasket and are tightly matched with the outer wall of the air pipe body, and the hoop is tightly clamped to the outer sides of the first flange piece and the second flange piece. Corrosion resistance can be achieved through coating of the ETFE / FEP coatings, the flanges are movably connected with the turnups at the connecting positions of the two air pipe bodies, the perfluoroether gaskets are added between the flanges and the two air pipe bodies, initial sealing is achieved through material elasticity, the perfluoroether gaskets are excellent in corrosion resistance and suitable for strong acid and strong alkali environments, and the service life of the pipeline can be prolonged. And finally, the hoop is locked, so that the joint has adjustability, and on-site quick disassembly and adjustment are facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to a pipeline sealing connection structure, concretely relates to a semiconductor industry high corrosive fluorine-containing waste gas conveying pipeline quick detachable sealing connection structure. BACKGROUND

[0002] In the semiconductor manufacturing process, fluorine-containing waste gas (such as NF3, SF6, etc.) with strong corrosiveness is generated. It cannot be transported using the traditional pipeline connection mode because it has the following defects: insufficient sealing: ordinary flange connection is easily corroded by fluoride, resulting in waste gas leakage; disassembly and assembly are complex, and the flange fixed by welding or bolts needs to be disassembled with special tools, so the maintenance efficiency is low; lack of coating protection: the inner wall of the air pipe lacks a fluorine-resistant coating and is easily corroded and perforated after long-term use.

[0003] CN219606359U discloses a pipeline connection device and a pipeline for transmitting corrosive media. However, its structure is complex and cannot be quickly disassembled, so it still cannot solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model provides a semiconductor fluorine-containing waste gas pipeline sealing connection structure, which aims to overcome the above-mentioned deficiencies of the prior art, realizes good corrosion resistance and quick disassembly and assembly under the premise of ensuring reliable sealing, and improves the maintenance efficiency.

[0005] The technical solution of the utility model is a semiconductor fluorine-containing waste gas pipeline sealing connection structure, which includes a flange, a clamp and a perfluoroether gasket arranged at the connection between the end portions of two air pipe bodies. The end portion of the air pipe body is provided with a raised edge, the inner wall of the air pipe body and the outer side of the raised edge are coated with ETFE coating or FEP coating, the raised edges of the end portions of the two air pipe bodies are in contact and aligned, the perfluoroether gasket is sleeved on the outer side of the raised edges of the two air pipe bodies in contact and alignment, the flange includes a first flange sheet and a second flange sheet, the first flange sheet and the second flange sheet are connected to each other on the outer side of the perfluoroether gasket and tightly fit with the outer wall of the air pipe body, and the clamp is tightly clamped on the outer side of the first flange sheet and the second flange sheet. The ETFE coating or FEP coating can realize corrosion resistance, the raised edges at the connection between the flange and the two air pipe bodies form a movable connection, and a perfluoroether gasket is added between them to realize initial sealing by using the elasticity of the material. The perfluoroether gasket has excellent corrosion resistance and is suitable for strong acid and strong alkali environments, which can prolong the service life of the pipeline. Finally, the clamp is locked to make the connection site adjustable, facilitating quick disassembly, installation and adjustment on site.

[0006] Preferably, the first flange sheet is provided with an annular protrusion, the second flange sheet is provided with an annular groove matched with the shape of the annular protrusion, and the annular protrusion of the first flange sheet is embeddedly connected with the annular groove of the second flange sheet. This can further improve the sealing performance of the connection site.

[0007] Preferably, the full fluorine ether gasket has a U-shaped groove inside, and the full fluorine ether gasket is sleeved outside the flange of the two wind pipe bodies in contact with each other through the groove.

[0008] Preferably, the clamp is a double half ring type vacuum clamp, and the flange and the full fluorine ether gasket are locked and compressed by a hydraulic tool to form a secondary seal.

[0009] Preferably, the first flange plate and the second flange plate are provided with flanges outside, and the inside of the clamp is matched with the flanges.

[0010] Preferably, the groove of the full fluorine ether gasket is provided with a sawtooth pattern inside, which can increase the friction with the surface of the flange and prevent the displacement of the full fluorine ether gasket.

[0011] Preferably, the flange of the first flange plate and the second flange plate is provided with an anti-skid knurl on the outer surface, which can prevent slipping when the vacuum clamp is locked.

[0012] The advantages of the utility model are: the structure is reasonable, ETFE / FEP coating on the pipeline and the double protection of the full fluorine ether gasket can effectively resist strong corrosive gases such as hydrofluoric acid; the interference fit of the groove of the full fluorine ether gasket and the compression seal of the clamp can effectively ensure the sealing reliability and the leakage rate is extremely low; the vacuum clamp is preferably used to realize rapid disassembly and assembly without special tools; and the utility model has good compatibility and is suitable for various standard air pipe sizes without special modification. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is an explosion structure schematic view of the semiconductor fluorine-containing waste gas pipeline sealing connection structure.

[0014] Figure 2 It is a connection section view of the semiconductor fluorine-containing waste gas pipeline sealing connection structure.

[0015] Figure 3 It is Figure 1 It is a structure schematic view of the wind pipe.

[0016] In the figure, 1 is a wind pipe body, 11 is a flange, 21 is a first flange plate, 22 is a second flange plate, 3 is a clamp, 4 is a full fluorine ether gasket, and 41 is a groove. DETAILED DESCRIPTION

[0017] The utility model will be further described in detail in combination with examples and specific embodiments.

[0018] For example, Figures 1-3As shown, a kind of semiconductor fluorine-containing waste gas pipeline sealing connection structure, its structure includes the flange of setting in the end connecting place of two air pipe body 1, clamp 3 and perfluoroether gasket 4, wherein the end of air pipe body 1 is provided with the flange 11 of protruding, air pipe body 1 inner wall and the outside of flange 11 are coated with ETFE coating or FEP coating, the flange 11 of two air pipe body 1 end is contacted and is aligned, perfluoroether gasket 4 is set on the outside of the flange 11 of two air pipe body 1 contact alignment, flange includes first flange sheet 21 and second flange sheet 22, first flange sheet 21 and second flange sheet 22 are connected with each other on the outside of perfluoroether gasket 4 and with the outer wall of air pipe body 1 tight fit, clamp 3 is tightly connected on the outside of first flange sheet 21 and second flange sheet 22.

[0019] According to the above structure, the inner wall of air pipe body 1 and the outside of flange 11 are coated with ETFE coating or FEP coating to achieve corrosion resistance, the flange formed by first flange sheet 21 and second flange sheet 22 is movably connected with the flange 11 at the connecting place of the two air pipe body 1, and perfluoroether gasket 4 is added between the two, perfluoroether gasket 4 realizes initial sealing by material elasticity, and finally locked by clamp 3, so that the connecting place has adjustability, which is convenient for on-site quick disassembly, installation and adjustment.

[0020] In specific design, the matching part of first flange sheet 21 and second flange sheet 22 with flange 11 can be preferably provided with a sealing ring to improve the air tightness between the two, and the diameter of the sealing ring should be slightly larger than the outer diameter of air pipe body 1 but smaller than the inner diameter of the flange.

[0021] An annular protrusion is provided on first flange sheet 21, and an annular groove matched with the shape of the annular protrusion is provided on second flange sheet 22, and the annular protrusion of first flange sheet 21 is embeddedly connected with the annular groove of second flange sheet 22, which can further improve the sealing performance of the connecting place.

[0022] U-shaped groove 41 is provided on the inner side of perfluoroether gasket 4, perfluoroether gasket 4 is sleeved on the outside of flange 11 of two air pipe body 1 contact alignment through groove 41, and the diameter of groove 41 is slightly larger than the diameter of flange 11. The flange tightly presses perfluoroether gasket 4 to form a radial sealing barrier to prevent medium leakage. Perfluoroether gasket 4 adopts perfluoroether rubber with excellent corrosion resistance, which is suitable for strong acid and strong alkali environment, and can prolong the service life of the pipeline.

[0023] The clamp 3 is preferably a double half-ring type vacuum clamp, which is locked by hydraulic tool, and the flange and perfluoroether gasket 4 are pressed to form secondary sealing.

[0024] A flange is preferably provided on the outer side of first flange sheet 21 and second flange sheet 22 as a whole, and the inner side of clamp 3 is matched with the shape of the flange, which can prevent axial displacement.

[0025] During installation, the flange of the two air pipe bodies 1 is connected with the flange, and after installation, it can be fine-tuned; the annular protrusion of the first flange sheet 21 and the annular groove of the second flange sheet 22 are embeddedly connected, and the elastic sealing of the perfluoroether gasket 4 realizes a double-sealing structure; the outer side is locked by the clamp 3, and can be quickly and one-key disassembled through the clamps, realizes the quick disassembly of the overall structure, and improves the maintenance efficiency.

[0026] As a preferred embodiment, the sealing ring section at the joint of the first flange sheet 21 and the second flange sheet 22 and the flange 11 is circular, the material is fluororubber, the diameter is 2-3mm, and is specifically used for compensating the assembly gap between the flange and the flange 11.

[0027] As a preferred embodiment, the inner side of the groove 41 of the perfluoroether gasket 4 is provided with a zigzag pattern, the pattern depth is 0.1-0.2mm, and is used for increasing the friction force with the surface of the flange 11 and preventing displacement of the perfluoroether gasket 4.

[0028] As a preferred embodiment, the sealing groove of the clamp 3 is a trapezoidal section, a sealing strip is arranged in the sealing groove, the groove width is 1.2 times the diameter of the sealing strip, and the sealing strip is ensured to be uniformly filled in the gap after being pressed.

[0029] As a preferred embodiment, the outer surface of the flange of the first flange sheet 21 and the second flange sheet 22 is provided with an anti-skid knurl, the knurl depth is 0.3-0.5mm, and the anti-skid knurl is used for preventing slipping when the vacuum clamp is locked.

[0030] The above structure can effectively resist strong corrosive gases such as hydrogen fluoride; the leakage rate is less than 1x10 -6 Pa·m³ / s; the clamp 3 is one-key locked and released, the disassembly time is less than or equal to 5 minutes, and no special tool is needed; and the compatibility is strong: the standard air pipe size (DN50 to DN300) can be adapted without special modification.

[0031] The above components are all prior art, and a person skilled in the art can use any model and existing design that can realize the corresponding functions.

[0032] The above is only a preferred embodiment of the utility model, and it should be pointed out that, for ordinary skilled persons in the art, without departing from the creative concept of the utility model, a number of deformations and improvements can be made, which all belong to the protection range of the utility model.

Claims

1. A sealing connection structure for a semiconductor fluorine-containing waste gas pipeline, characterized in that, The flange, the clamp (3) and the perfluoroether gasket (4) are arranged at the joint of the two duct bodies (1), wherein the end of the duct body (1) is provided with a raised flange (11), the inner wall of the duct body (1) and the outer side of the flange (11) are coated with ETFE coating or FEP coating, the flanges (11) of the two duct bodies (1) are in contact and alignment, the perfluoroether gasket (4) is sleeved on the outer side of the flanges (11) of the two duct bodies (1) in contact and alignment, the flange includes a first flange sheet (21) and a second flange sheet (22), the first flange sheet (21) and the second flange sheet (22) are connected to each other outside the perfluoroether gasket (4) and tightly fit with the outer wall of the duct body (1), and the clamp (3) is tightly clamped outside the first flange sheet (21) and the second flange sheet (22).

2. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 1, wherein The first flange sheet (21) is provided with an annular protrusion, the second flange sheet (22) is provided with an annular groove matched with the shape of the annular protrusion, and the annular protrusion of the first flange sheet (21) is embeddedly connected with the annular groove of the second flange sheet (22).

3. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 1, wherein The perfluoroether gasket (4) is provided with a U-shaped groove (41) inside, and the perfluoroether gasket (4) is sleeved on the outer side of the flanges (11) of the two duct bodies (1) in contact and alignment through the groove (41).

4. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 1, wherein The clamp (3) is a double-half-ring type vacuum clamp.

5. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 1, wherein The first flange sheet (21) and the second flange sheet (22) are provided with a flange outside, and the inner side of the clamp (3) is matched with the shape of the flange.

6. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 1, wherein The inner side of the groove (41) of the perfluoroether gasket (4) is provided with a zigzag pattern.

7. A semiconductor fluorine-containing exhaust gas pipe sealing connection structure according to claim 5, wherein The outer surface of the flange outside the first flange sheet (21) and the second flange sheet (22) is provided with an anti-skid knurling.

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