Two-dimensional photonic crystal lattice spacing measuring device
By designing a two-dimensional photonic crystal lattice spacing measurement device and calculating the lattice spacing using the diameter of the laser diffraction ring, the problem of measurement difficulties in the existing technology is solved, and a simple and accurate measurement effect is achieved.
Patent Information
- Application Number
- CN202520063230.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-10
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-01-10
AI Technical Summary
Measuring the lattice spacing of two-dimensional photonic crystals is difficult in existing technologies, especially due to the high dependence on measuring instruments and the large errors in manual calculations.
A two-dimensional photonic crystal lattice spacing measurement device is used, including a base, support, stage, camera, laser and controller. The lattice spacing is calculated by the diameter of the laser diffraction ring, which is simplified to electronic calculation.
It enables simple and accurate measurement of the lattice spacing of two-dimensional photonic crystals, reducing reliance on large instruments and minimizing errors from manual calculations.
Smart Images
Figure CN223856411U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present disclosure relates to the technical field of photonic crystals, and particularly relates to a two-dimensional photonic crystal lattice spacing measuring device. BACKGROUND
[0002] A photonic crystal is a crystal with a periodically varying dielectric constant. When a photon propagates in the photonic crystal, it is modulated due to the existence of Bragg scattering, resulting in the formation of a band structure of photon energy. A gap appears between the bands, i.e., a photonic band gap, and photons with wavelengths distributed in the photonic band gap cannot propagate.
[0003] Photonic crystals can be divided into one-dimensional photonic crystals, two-dimensional photonic crystals and three-dimensional photonic crystals according to the dimension of the periodically varying dielectric constant. The lattice spacing of a two-dimensional photonic crystal is very small, and it is difficult to measure.
[0004] When measuring the lattice spacing of a two-dimensional photonic crystal, a large and delicate measuring instrument such as a scanning electron microscope can be used for measurement, but this measurement method has a high dependence on the measuring instrument. In addition, the lattice spacing of a two-dimensional photonic crystal can also be measured by manually measuring the Debye ring diameter. Specifically, a two-dimensional photonic crystal will form a Debye ring on the projection plane under the irradiation of monochromatic vertical incident light. According to the specific relationship between the Debye ring diameter, the distance between the two-dimensional photonic crystal and the projection plane, and the two-dimensional photonic crystal periodic lattice spacing, manual calculation can be performed to obtain the lattice spacing of the two-dimensional photonic crystal, but this scheme has a large amount of manual calculation and a large error. UTILITY MODEL CONTENT
[0005] Therefore, the embodiments of the present disclosure provide a two-dimensional photonic crystal lattice spacing measuring device to solve the technical problem that the lattice spacing of a two-dimensional photonic crystal is difficult to measure in the prior art.
[0006] To achieve the above object, the technical scheme adopted by the present disclosure is as follows:
[0007] The first aspect of the embodiments of the present disclosure provides a two-dimensional photonic crystal lattice spacing measuring device, which comprises a base including a projection plane; a vertically arranged support, the bottom of the support being fixedly connected with the base, and a scale being arranged on the support; a stage being detachably fixedly connected with the support through a first clamping piece, the first clamping piece being capable of moving up and down within the range of the scale, the stage having a stage plane parallel to the projection plane, a first through hole being arranged on the stage, a to-be-measured sensor being arranged above the stage plane, the to-be-measured sensor comprising a two-dimensional photonic crystal; a first camera and a second camera being arranged between the stage and the base, the first camera and the second camera being arranged on the same horizontal plane and being equidistant from the first through hole; a transparent cover plate being arranged above the to-be-measured sensor, the transparent cover plate having a detection opening arranged thereon, the detection opening being used for applying a stimulus to the two-dimensional photonic crystal; a laser being fixedly connected with the support through a second clamping piece, an outgoing light beam of the laser being perpendicular to the stage plane, the outgoing light beam forming a diffraction ring on the projection plane after passing through the first through hole; and a controller being communicatively connected with the first camera and the second camera through the lead wires of the first camera and the second camera, the controller being capable of obtaining a diffraction diameter of the diffraction ring according to the data output by the first camera and the second camera, and obtaining the lattice spacing of the two-dimensional photonic crystal based on the diffraction diameter.
[0008] In some embodiments, the wavelength range of the laser light source of the laser is 400 nm to 650 nm.
[0009] In some embodiments, the controller is an embedded device, which is provided with an input keyboard and a display screen, or is provided with a touch screen.
[0010] In some embodiments, the embedded device is fixedly installed on the support.
[0011] In some embodiments, the diameter of the first through hole ranges from 1 mm to 5 mm.
[0012] In some embodiments, the transparent cover plate is detachably fixedly connected with the support through a connecting rod capable of rotating around the support, and the connecting rod is capable of moving up and down along the support.
[0013] In some embodiments, the stage comprises a flat-bottomed recess having a depth ranging from 1 mm to 5 mm, and the flat-bottomed recess can accommodate the transparent cover plate.
[0014] In some embodiments, the measuring device further comprises an enclosed box body, the enclosed box body being located between the stage and the base, and the first camera and the second camera being symmetrically arranged on the top surface inside the enclosed box body.
[0015] In some embodiments, the transparent cover plate is detachably fixedly connected with the object table, the transparent cover plate is capable of rotating relative to the object table and the height of the transparent cover plate relative to the object table is capable of being adjusted.
[0016] In some embodiments, the base is a gray surface base, a black surface base or a white surface base.
[0017] Compared with the prior art, the technical scheme in the embodiment of the present disclosure has the beneficial effects that: the technical scheme in the embodiment of the present disclosure can conveniently obtain the lattice spacing by setting the first camera and the second camera to shoot the diffraction ring of the laser and setting the controller to obtain the diffraction diameter obtained by shooting, and the lattice spacing can be obtained without manual calculation, compared with using a scanning electron microscope or manually calculating the lattice spacing, the technical scheme in the embodiment of the present disclosure can simply and accurately measure the lattice spacing of the two-dimensional photonic crystal. BRIEF DESCRIPTION OF DRAWINGS
[0018] In order to more clearly illustrate the technical scheme in the embodiment of the present disclosure, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present disclosure, and other drawings can be obtained by those skilled in the art without creative labor.
[0019] Figure 1 is a schematic diagram of a two-dimensional photonic crystal lattice spacing measurement device provided by the embodiment of the present disclosure;
[0020] Figure 2 is a top view of an object table provided by the embodiment of the present disclosure;
[0021] Figure 3 is a side view of an object table provided by the embodiment of the present disclosure;
[0022] Figure 4 is a schematic diagram of a transparent cover plate provided by the embodiment of the present disclosure;
[0023] Figure 5 is a schematic diagram of a scanning electron microscope image of a two-dimensional photonic crystal array provided by the embodiment of the present disclosure;
[0024] Figure 6 is a measurement schematic diagram of the lattice spacing of a two-dimensional photonic crystal provided by the embodiment of the present disclosure.
[0025] Figure 7 is a schematic diagram of another two-dimensional photonic crystal lattice spacing measurement device provided by the embodiment of the present disclosure. DETAILED DESCRIPTION
[0026] In order to make the technical problems to be solved by the present disclosure, technical solutions and beneficial effects clearer, the present disclosure will be further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present disclosure and not used to limit the present disclosure.
[0027] The two-dimensional photonic crystal lattice spacing measuring device according to the embodiments of the present disclosure will be described in detail below in combination with the drawings.
[0028] Figure 1 is a schematic diagram of a two-dimensional photonic crystal lattice spacing measuring device provided by the embodiments of the present disclosure; Figure 2 is a top view of an object table provided by the embodiments of the present disclosure; Figure 3 is a side view of an object table provided by the embodiments of the present disclosure; Figure 4 is a schematic diagram of a transparent cover plate provided by the embodiments of the present disclosure;
[0029] Figure 5 is a schematic diagram of a scanning electron microscope image of a two-dimensional photonic crystal array provided by the embodiments of the present disclosure; Figure 6 is a schematic diagram of measuring the lattice spacing of a two-dimensional photonic crystal provided by the embodiments of the present disclosure; Figure 7 is a schematic diagram of another two-dimensional photonic crystal lattice spacing measuring device provided by the embodiments of the present disclosure. The two-dimensional photonic crystal lattice spacing measuring device provided by the embodiments of the present disclosure will be described below in combination with Figure 1 and Figure 7 .
[0030] As Figure 1As shown, the two-dimensional photonic crystal lattice spacing measuring device of this embodiment includes: a base 101, including a projection plane; a vertically arranged support 102, the bottom of which is fixedly connected to the base, and a scale 107 is provided on the support; a stage 103, which is detachably fixedly connected to the support via a first clamping member, the first clamping member being able to move up and down within the scale range, the stage having a loading plane parallel to the projection plane, a first through hole provided on the stage, and a sensor to be measured, including a two-dimensional photonic crystal, is disposed above the loading plane; a first camera 1041 and a second camera 1042, disposed between the stage and the base, the first camera and the second camera being configured... On the same horizontal plane, and equidistant from the first through-hole; a transparent cover plate, positioned above the sensor under test, with a detection opening for applying stimulation to the two-dimensional photonic crystal; a laser 105, fixedly connected to the support via a second clamping member, the laser beam perpendicular to the object plane, forming a diffraction ring on the projection plane after passing through the first through-hole; a controller, communicatively connected to the first and second cameras via leads, capable of obtaining the diffraction diameter of the diffraction ring based on the data output from the first and second cameras, and thus determining the lattice spacing of the two-dimensional photonic crystal based on the diffraction diameter. Specifically, the controller can be as follows: Figure 1 The electronic device 106 shown.
[0031] like Figure 1 As shown, the support is vertically positioned, while both the projection plane and the loading plane of the stage are horizontal. The laser, which can be a laser pointer, is fixed above the stage via a second clamping component at a fixed height. The laser beam emitted from the laser is emitted vertically downwards, passing through the detection opening in the transparent cover, through the sensor under test, and through the first through-hole in the stage, before being projected onto the projection plane of the base. The height of the projection plane is fixed, and the connection position between the first clamping component and the support can move within the range of the support's scale. By reading the data from the scale, the height difference between the stage and the projection plane, i.e., the distance h, can be determined.
[0032] The sensor under test is a two-dimensional photonic crystal sensor, which contains a two-dimensional photonic crystal. After the laser passes through the two-dimensional photonic crystal, it undergoes diffraction, forming a Debye diffraction ring on the projection plane, simply referred to as a diffraction ring or Debye ring. A first camera and a second camera can capture images of the projection plane, thus obtaining images of the diffraction ring. The first and second cameras can be embedded camera devices with embedded processors, which can directly output the diameter of the diffraction ring. The host computer data reading program executed by the embedded processor is obtained by modifying the basic program of the embedded camera device according to the actual detection requirements. By executing the host computer data reading program, the embedded camera device outputs detection data to the controller and other host computers.
[0033] In addition, the first camera and the second camera can also be common cameras which can output images of the diffraction ring, and the controller can perform image recognition according to the images output by the cameras to obtain the diameter of the diffraction ring. The controller is connected with the lead wires of the first camera and the second camera, and according to the data output by the first camera and the second camera, the controller can obtain the diameter D of the diffraction ring. The first camera and the second camera are symmetrically arranged on both sides of the axis passing through the first through hole, and the data collected by the two cameras are superimposed, so that the diameter of the diffraction ring can be obtained more accurately.
[0034] The wavelength λ of the laser emitted by the laser and the distance h between the object table and the projection plane can be pre-stored in the controller, and after the diameter D of the diffraction ring is obtained, the controller can obtain the lattice spacing of the two-dimensional photonic crystal by simple calculation according to the following formula (1) by using the set program:
[0035]
[0036] Wherein, λ is the wavelength of the laser, h is the distance between the object table and the projection plane, and D is the diameter of the diffraction ring.
[0037] The transparent cover plate with an opening on the object table is used to fix the two-dimensional photonic crystal sensor, so that it is always perpendicular to the laser beam, and the two-dimensional photonic crystal film of the two-dimensional photonic crystal sensor is prevented from being affected by the outside world and producing vibration or being in a non-horizontal state to affect the measurement results. The detection opening of the transparent cover plate with an opening is used to apply external stimuli such as volatile organic gases, organic compounds, acid / base solutions, etc. to the sensor to cause the lattice spacing of the sensor to change, thereby causing the diameter of the Debye diffraction ring to change.
[0038] In the embodiments of the present disclosure, according to the causal relationship between the external stimulus and the lattice spacing of the two-dimensional photonic crystal, the sensing and detection path of “external signal stimulus→change of the lattice spacing of the two-dimensional photonic crystal→change of the diameter of the Debye diffraction ring→reflection of the change of the lattice spacing of the two-dimensional photonic crystal→combination of the relationship between the lattice spacing of the two-dimensional photonic crystal, the diameter of the Debye diffraction ring and the external signal stimulus→digitalization of the stimulus signal” can be realized, so that the digital output of the detection signal of the two-dimensional photonic crystal sensor can be used for real-time display and sensing.
[0039] Specifically, by collecting the diameter of the diffraction ring, the correlation between the lattice spacing of the two-dimensional photonic crystal and the diameter of the diffraction ring is written into the program, and the lattice spacing information of the two-dimensional photonic crystal is directly output. After the external stimulus is applied to the two-dimensional photonic crystal sensor to cause the change of the lattice spacing, the stimulus information can be directly obtained according to the digital output of the detection signal of the two-dimensional photonic crystal sensor. The technical scheme of the embodiments of the present disclosure can be applied to the measurement of the lattice spacing of the two-dimensional photonic crystal and various sensing and detection based on the Debye diffraction of the two-dimensional photonic crystal.
[0040] The connection between the transparent cover plate and the objective table is adjustable up and down, so that the distance between them can be adjusted according to the thickness of the two-dimensional photonic crystal film. Specifically, the transparent cover plate can be detachably fixed to the support through a connecting rod capable of rotating around the support, and the connecting rod can move up and down along the support. In addition, the transparent cover plate can also be detachably fixed to the objective table through a fixed rotating shaft, and the transparent cover plate can rotate around the rotating shaft relative to the objective table and can be raised and lowered on the rotating shaft, so that the height of the transparent cover plate relative to the objective table can be adjusted. Before placing the sensor to be tested on the objective table, the transparent cover plate is removed from above the objective table, and after placing the sensor to be tested on the objective table, the transparent cover plate is moved above the objective table and covers the sensor to be tested.
[0041] In the embodiment of the present disclosure, the wavelength range of the laser light source of the laser can be selected from 400 nm to 650 nm, and the laser can emit laser of different wavelengths according to requirements, thereby breaking the limitation of single wavelength light source on different detection requirements.
[0042] After placing the two-dimensional photonic crystal sensor on the objective table, the height of the objective table is set and the appropriate laser wavelength range is selected according to the actual test requirements, and then the two-dimensional photonic crystal sensor is fixed with a transparent cover plate with an opening. The detection opening in the middle of the transparent cover plate with an opening is the placement position of the two-dimensional photonic crystal sensor, which is a plane perpendicular to the laser beam. When measuring the lattice spacing, the laser wavelength λ and the distance h between the objective table and the base are input into the computer or the embedded device, the embedded camera acquires the Debye diffraction ring diameter D and transmits it to the computer or the embedded device, and the computer or the embedded device calculates the corresponding lattice spacing information through the program and converts it into a digital stimulation signal. The technical scheme of the embodiment of the present disclosure directly calculates the lattice spacing of the two-dimensional photonic crystal through the electronic device, which is simple to operate and has high accuracy without the need for large scanning electron microscope equipment.
[0043] In the embodiment of the present disclosure, in order to achieve better shooting effect, a closed box body can be arranged between the objective table and the base. As shown in Figure 1 The measurement device further comprises a closed box body 108 located between the objective table and the base, and the first camera and the second camera are symmetrically arranged on the top surface inside the closed box body, so that the image of the diffraction ring can be shot downward.
[0044] In addition, the color of the laser is generally red, blue and green, so the shooting effect can be improved by setting the color of the base other than red, blue and green. Specifically, the base can be a gray surface base, a black surface base or a white surface base.
[0045] As shown in Figure 2 andFigure 3 The outer diameter of the stage can range from 30 mm to 100 mm, the outer wall thickness can range from 1 mm to 10 mm, and the thickness can range from 6 mm to 20 mm. The diameter of the first through hole 201 can range from 1 mm to 5 mm. Specifically, the stage can have a flat-bottomed recess with a depth ranging from 1 mm to 5 mm, which can accommodate the transparent cover plate, and the bottom of the flat-bottomed recess is the stage plane. For example, the stage can be set to have an outer diameter of 50 mm, an outer wall thickness of 5 mm, an inner recess of 3 mm, and a thickness of 10 mm. The diameter of the first through hole can be set to 3 mm, which allows the laser beam to pass through. The smaller the diameter, the thinner the laser beam passing through, the smaller and more accurate the diffraction ring obtained, and the smaller the error in the measured Debye diffraction ring diameter, thereby making the measurement result more accurate. In addition, the first through hole can be located at the most central position of the stage, and the laser and the center of the projection plane are on a straight line, so that the laser beam directly passes through the center of the first through hole to the center of the projection plane.
[0046] As shown in Figure 4 The transparent cover plate 401 is a circular structure with a circular detection opening in the center. The outer diameter of the circular structure is smaller than the diameter of the flat-bottomed recess of the stage, so that the transparent cover plate can be flatly covered above the sensor to be measured. The transparent cover plate can be a glass sheet, and is not limited thereto.
[0047] In one embodiment, taking a two-dimensional photonic crystal sensor based on colloidal microspheres as an example, as shown in Figure 5 As shown in Figure 6 Based on the laser light propagation path as shown in , a green laser with a wavelength of 532 nm can be selected, the distance h between the sensor and the base is 8 cm, and these two data are input into the controller. The Debye diffraction ring diameter of 19.3 cm obtained by the controller is calculated according to formula (1), and the lattice spacing is 797.9 nm. Compared with the lattice spacing detected by the scanning electron microscope, the accuracy of the detection result of the detection scheme of the embodiment of the present disclosure is as high as 99.5% or more. It can be seen that the two-dimensional photonic crystal lattice spacing measuring device of the embodiment of the present disclosure can accurately detect and output the lattice spacing of the two-dimensional photonic crystal.
[0048] In the embodiment of the present disclosure, the controller can be an embedded device. The embedded device is provided with an input keyboard and a display screen, or the embedded device is provided with a touch screen for human-computer interaction, and the wavelength λ of the laser emitted by the laser and the distance h between the stage and the projection plane are input into the embedded device.
[0049] As shown in Figure 6As shown, the embedded device 606 can be fixedly installed on a support, and can be arranged between the scale and the second clamping member, so as to facilitate observation. Figure 7 As shown, the embedded device 706 can also not be fixedly installed on a support, and can be placed on a table top, for example, to facilitate an operator to record data in a sitting position. Further, the embedded device can be connected to a computer through wired communication or wireless communication, so as to facilitate a user to record statistical data using the computer.
[0050] The two-dimensional photonic crystal lattice spacing measuring device provided by the embodiment of the present disclosure can be used to conveniently obtain the lattice spacing by setting the first camera and the second camera to shoot the diffraction ring of the laser and setting the controller to obtain the diffraction diameter obtained by shooting, and the lattice spacing can be obtained without manual calculation. Compared with the lattice spacing obtained by using a scanning electron microscope or manual calculation, the technical solution of the embodiment of the present disclosure can be used to simply and accurately measure the lattice spacing of the two-dimensional photonic crystal.
[0051] The above merely describes the preferred embodiments of the present disclosure and should not be used to limit the present disclosure, and any modification, equivalent replacement and improvement made within the spirit and principle of the present disclosure shall be included in the protection scope of the present disclosure.
Claims
1. A device for measuring the lattice spacing of a two-dimensional photonic crystal, characterized in that, The two-dimensional photonic crystal lattice spacing measuring device comprises: a base comprising a projection plane; a vertically arranged support, the bottom of the support being fixedly connected to the base, the support being provided with a scale; a stage being detachably fixedly connected to the support through a first clamping member, the first clamping member being capable of moving up and down within the range of the scale, the stage having a stage plane parallel to the projection plane, the stage being provided with a first through hole, a to-be-measured sensor being arranged above the stage plane, the to-be-measured sensor comprising a two-dimensional photonic crystal; a first camera and a second camera being arranged between the stage and the base, the first camera and the second camera being arranged on the same horizontal plane and being equidistant from the first through hole; a transparent cover plate being arranged above the to-be-measured sensor, the transparent cover plate being provided with a detection opening, the detection opening being used to apply a stimulus to the two-dimensional photonic crystal; a laser being fixedly connected to the support through a second clamping member, the laser having an outgoing light beam perpendicular to the stage plane, the outgoing light beam forming a diffraction ring on the projection plane after passing through the first through hole; a controller being communicatively connected to the first camera and the second camera through the lead wires of the first camera and the second camera, the controller being capable of obtaining the diffraction diameter of the diffraction ring according to the data output by the first camera and the second camera, and obtaining the lattice spacing of the two-dimensional photonic crystal based on the diffraction diameter.
2. The two-dimensional photonic crystal lattice pitch measurement apparatus according to claim 1, characterized by The wavelength range of the laser light source of the laser is 400nm to 650nm.
3. The two-dimensional photonic crystal lattice pitch measurement apparatus according to claim 1, characterized by The controller is an embedded device, the embedded device being provided with an input keyboard and a display screen, or the embedded device being provided with a touch screen.
4. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 3, characterized by The embedded device is fixedly installed on the support.
5. The two-dimensional photonic crystal lattice pitch measurement apparatus according to claim 1, wherein The diameter of the first through hole ranges from 1mm to 5mm.
6. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 1, wherein The transparent cover plate is detachably fixedly connected to the support through a connecting rod capable of rotating around the support, the connecting rod being capable of moving up and down along the support.
7. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 1, wherein The stage comprises a flat-bottomed recess having a depth ranging from 1mm to 5mm, the flat-bottomed recess being capable of accommodating the transparent cover plate.
8. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 1, wherein The measuring device further comprises an enclosed box, the enclosed box being located between the stage and the base, the first camera and the second camera being symmetrically arranged on the top surface inside the enclosed box.
9. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 1, wherein, The transparent cover plate is detachably fixedly connected to the stage, the transparent cover plate being capable of rotating relative to the stage and the height of the transparent cover plate relative to the stage being adjustable.
10. The two-dimensional photonic crystal lattice spacing measurement apparatus according to claim 1, wherein, The base is a gray surface base, a black surface base or a white surface base.