Chip multi-surface detection jig

Abstract

The utility model discloses a chip multi-surface detection tool comprising an upper plate and a lower plate which are stacked and fixed; a mounting groove is formed in the middle of the upper plate, corner prisms are arranged in the mounting groove, and a to-be-tested chip is accommodated between the corner prisms; a placing groove is formed in the middle of the lower plate, a placing table is arranged in the middle of the placing groove, and a to-be-tested chip is placed on the top of the placing table. According to the utility model, the upper plate and the lower plate are stacked to form the detection jig, the chip to be detected is adsorbed on the placing table, the corner prisms are symmetrically arranged around the placing table, the nondestructive detection process of the appearance of the upper surface and four side surfaces of the chip can be quickly realized through the visual system arranged above, and the detection efficiency and the detection precision are effectively improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection technical field, concretely relates to a chip multi -surface detection fixture. BACKGROUND

[0002] In order to guarantee the yield of insulated gate bipolar transistor (IGBT) device, before mounting the chip, the bare chip used must be screened for defects and tested for performance, and then the electrical parameters and functions of the bare chip are verified, and the bare chip not meeting the requirements is accurately screened out, so as to guarantee the quality and performance reliability of the supply product and reduce the yield loss in the production process of IGBT device.

[0003] The chip usually needs to be detected on the upper surface and four sides, and the existing appearance detection fixture for IGBT device chip needs to adjust the position and angle of the camera through the multi-axis sliding module after detecting one side, so as to detect the other side, which makes the detection process more complicated, the detection time is longer, and the detection efficiency is lower. UTILITARY MODEL CONTENTS

[0004] The utility model discloses a kind of chip multi -surface detection fixtures to solve above-mentioned problems.

[0005] The utility model discloses the following technical solutions in order to achieve the above purposes, comprising:

[0006] Upper plate and lower plate, the upper plate and the lower plate are stacked and fixed;

[0007] The upper plate is provided with corner prism in middle part, and the corner prism is used to accommodate the chip to be measured between the corner prism;

[0008] The lower plate is provided with placing groove in middle part, and the placing groove is provided with placing table in middle part, and the placing table is used to place the chip to be measured on top.

[0009] As further description of the above technical solutions, the upper plate is provided with first connecting hole, and the first connecting hole is used to connect the upper plate and the lower plate.

[0010] As further description of the above technical solutions, the upper plate is provided with first fixed hole, and the first fixed hole is used to fix the upper plate and the lower plate.

[0011] As further description of the above technical solutions, the corner prism is symmetrically provided with multiple groups, and the bottom of the corner prism is attached to the bottom of the placement table.

[0012] As further description of the above technical solutions, the lower plate is provided with a second connecting hole for connecting the upper plate and the lower plate.

[0013] As further description of the above technical solutions, the lower plate is provided with a second fixing hole for fixing the upper plate and the lower plate.

[0014] As further description of the above technical solutions, the lower plate is provided with a vacuum joint on one side, and the vacuum joint is connected with a suction pump.

[0015] As further description of the above technical solutions, the placement table is provided with an adsorption hole in the middle, and the adsorption hole is used for adsorbing and fixing the to-be-tested chip.

[0016] As further description of the above technical solutions, the adsorption hole comprises a first adsorption hole and a second adsorption hole, and the second adsorption hole is annularly arranged around the first adsorption hole.

[0017] As further description of the above technical solutions, the lower plate is provided with an air suction groove, and the air suction groove is respectively communicated with the vacuum joint and the adsorption hole.

[0018] The beneficial effects of the present application are as follows:

[0019] The upper plate and the lower plate are stacked to form a detection jig, the to-be-tested chip is adsorbed on the placement table, and the corner prisms are symmetrically arranged around the placement table. The visual system detection system provided above can quickly realize the non-destructive detection process of the upper surface and the four side surfaces of the chip, and effectively improve the detection efficiency and detection accuracy.

[0020] In order to more clearly illustrate the structural features and effects of the present application, the present application will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 is a structural schematic view of the chip multi-surface detection jig of the present application;

[0022] Figure 2 is a front view of the chip multi-surface detection jig of the present application;

[0023] Figure 3 is a side view of the chip multi-surface detection jig of the present application;

[0024] Figure 4 is a top view of the chip multi-surface detection jig of the present application;

[0025] Figure 5 is Figure 1 a structural diagram of a lower plate;

[0026] Figure 6 is a front view of a multi-face detection jig and a vision system detection system;

[0027] Figure 7 is a side view of a multi-face detection jig and a vision system detection system;

[0028] Figure 8 is a top view of a multi-face detection jig and a vision system detection system.

[0029] Reference signs:

[0030] 1, upper plate; 11, mounting groove; 12, corner prism; 13, first connecting hole; 14, first fixing hole; 2, lower plate; 21, placing groove; 22, placing table; 23, second connecting hole; 24, second fixing hole; 25, suction hole; 251, first suction hole; 252, second suction hole; 26, air suction groove; 3, chip to be detected; 4, vacuum joint; 5, X-axis movement assembly; 6, Y-axis movement assembly; 7, Z-axis movement assembly; 8, camera; 9, lens; 10, light source. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model.

[0032] As Figure 1 - Figure 8 shown, in one embodiment, a chip multi-face detection jig comprises: an upper plate 1 and a lower plate 2, the upper plate 1 and the lower plate 2 are fixedly stacked so that the chip to be detected 3 placed on the lower plate 2 can be detected by the corner prism 12 on the upper plate 1.

[0033] Among them, the upper plate 1 is provided with a first connecting hole 13, the connecting hole is used to connect the upper plate 1 and the lower plate 2 together through a proper connecting assembly (fixing screw or fixing bolt), so as to ensure the structural stability and safety of the two during use; the upper plate 1 is also provided with a first fixing hole 14, which is used to fix the upper plate 1 and the lower plate 2 on a moving platform or a sliding assembly.

[0034] Similarly, the lower plate 2 is provided with a second connecting hole 23, the connecting hole is used to connect the upper plate 1 and the lower plate 2 together through a proper connecting assembly (fixing screw or fixing bolt), so as to ensure the structural stability and safety of the two during use; the lower plate 2 is also provided with a second fixing hole 24, which is used to fix the upper plate 1 and the lower plate 2 on a moving platform or a sliding assembly.

[0035] Please continue to refer to Figure 1 - Figure 8 In the embodiment, the upper plate 1 is provided with a mounting groove 11 in the middle, and a plurality of corner prisms 12 are symmetrically arranged in the mounting groove 11. The corner prisms 12 are used to accommodate the chip 3 to be tested, so that the chip 3 to be tested is fixed at the placement position of the upper plate 1 and is not easy to deviate, effectively avoiding test errors. Specifically, the bottom of the corner prism 12 is attached to the bottom of the placement table 22.

[0036] Similarly, the lower plate 2 is provided with a placement groove 21 in the middle, and a placement table 22 is arranged in the middle of the placement groove 21. The top of the placement table 22 is used to place the chip 3 to be tested. Specifically, the placement table 22 is provided with a suction hole 25 in the middle, which is used to fix the chip 3 to be tested by vacuum negative pressure suction.

[0037] It needs to be pointed out that the suction hole 25 includes a first suction hole 251 and a second suction hole 252, so that more uniform and effective suction force distribution can be provided during the suction process, thereby further enhancing the fixation of the chip 3 to be tested and avoiding displacement of the chip due to insufficient local suction force. Specifically, the second suction hole 252 is arranged around the first suction hole 251, the first suction hole 251 suctions the center of the chip, and the second suction hole 252 suctions the edge of the chip, so that the chip will not be displaced during the detection process.

[0038] Further, the lower plate 2 is provided with a vacuum connector 4 on one side, and the vacuum connector 4 is connected with a suction pump. When the suction pump works, the gas in the lower plate 2 can be sucked out, thereby generating negative pressure to firmly adsorb the chip 3 to be tested on the placement table 22. Specifically, the lower plate 2 is provided with a suction groove 26, which is in communication with the vacuum connector 4 and the suction hole 25. When the suction pump works, the negative pressure generated by the vacuum connector 4 will be transmitted to the suction hole 25 along the suction groove 26, thereby generating suction force to firmly adsorb the chip 3 to be tested on the surface of the placement table 22.

[0039] Exemplarily, the detection jig is provided below with an X-axis motion assembly 5 and a Y-axis motion assembly 6, so that the detection jig can be precisely adjusted in two directions. Specifically, the detection jig is detachably mounted on the Y-axis motion assembly 6 to realize movement along the Y-axis direction, and the Y-axis motion assembly 6 is detachably mounted on the X-axis motion assembly 5 to realize movement along the X-axis direction; so that the detection jig can be accurately positioned to the specified area, greatly improving the test efficiency and accuracy.

[0040] Further, a Z-axis movement assembly 7 is arranged above the detection jig, and a visual system detection system is detachably installed on the Z-axis movement assembly 7, the visual system detection system comprising a camera 8, a lens 9 and a light source 10, the camera 8 being connected to the lens 9 at the bottom, and the light source 10 being arranged below the lens 9 for providing sufficient illumination to ensure the image quality in the detection process, so that the camera 8 can detect the appearance of the to-be-detected chip 3 placed on the detection jig through the lens 9.

[0041] Working principle:

[0042] The upper plate 1 and the lower plate 2 are stacked to form the detection jig, the to-be-detected chip 3 is adsorbed on the placement table 22, the corner prisms 12 are symmetrically arranged around the placement table 22, the to-be-detected chip 3 is fixed by vacuumizing through the air suction groove 26 after starting the air suction pump, and the detection jig is moved to be directly below the lens 9 by moving the X-axis movement assembly 5 and the Y-axis movement assembly 6; then the camera 8 and the lens 9 are moved downward by the Z-axis movement assembly 7, and the light source 10 irradiates the to-be-detected chip 3 and the surrounding corner prisms 12 to perform nondestructive detection on the upper surface and the four side surfaces of the chip.

[0043] Through the above technical solution, the detection jig can quickly realize the nondestructive detection process of the upper surface and the four side surfaces of the chip through the visual system detection system arranged above, and the detection efficiency and the detection accuracy are effectively improved.

[0044] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A chip multi-face detection jig, characterized in that, Include: Upper plate (1) and lower plate (2), the upper plate (1) and the lower plate (2) are stacked and fixed; The middle part of the upper plate (1) is provided with a mounting groove (11), the mounting groove (11) is provided with a corner prism (12), and the corner prisms (12) are used for accommodating the to-be-tested chip (3); The middle part of the lower plate (2) is provided with a placing groove (21), the middle part of the placing groove (21) is provided with a placing table (22), and the top of the placing table (22) is used for placing the to-be-tested chip (3).

2. The chip multi-face detection jig according to claim 1, wherein The upper plate (1) is provided with a first connecting hole (13), and the first connecting hole (13) is used for connecting the upper plate (1) and the lower plate (2).

3. The chip multi-face detection jig according to claim 2, wherein The upper plate (1) is provided with a first fixing hole (14), and the first fixing hole (14) is used for fixing the upper plate (1) and the lower plate (2).

4. The chip multi-face detection tool of claim 1, wherein, The corner prisms (12) are symmetrically provided with a plurality of groups, and the bottom of the corner prism (12) is attached to the bottom of the placing table (22).

5. The chip multi-face detection tool of claim 1, wherein, The lower plate (2) is provided with a second connecting hole (23), and the second connecting hole (23) is used for connecting the upper plate (1) and the lower plate (2).

6. The chip multi-face detection jig according to claim 5, wherein The lower plate (2) is provided with a second fixing hole (24), and the second fixing hole (24) is used for fixing the upper plate (1) and the lower plate (2).

7. The chip multi-face detection jig according to claim 5, wherein A vacuum connector (4) is installed on one side of the lower plate (2), and the vacuum connector (4) is connected with a suction pump.

8. The chip multi-face detection tool of claim 1, wherein, The middle part of the placing table (22) is provided with a suction hole (25), and the suction hole (25) is used for adsorbing and fixing the to-be-tested chip (3).

9. The chip multi-face detection tool of claim 8, wherein, The suction hole (25) includes a first suction hole (251) and a second suction hole (252), and the second suction hole (252) is annularly arranged around the first suction hole (251).

10. The chip multi-face detection tool of claim 1, wherein, The lower plate (2) is provided with an air suction groove (26), and the air suction groove (26) is respectively communicated with the vacuum connector (4) and the suction hole (25).

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