Laser scribing device

Abstract

The utility model discloses a laser scribing device, and belongs to the technical field of photovoltaic cell processing equipment. The laser scribing device comprises a laser device and a bearing table, the laser device carries out laser scribing on the perovskite battery piece located on the bearing table, a cooling pipeline extending in a bow shape is arranged in the bearing table, and the cooling pipeline is connected with a refrigerating machine. The refrigerating machine is used for providing a cooling medium for the cooling pipeline so as to cool the perovskite battery piece to be subjected to laser scribing and placed on the bearing table. Through the above arrangement, material damage caused by laser to the perovskite cell during laser scribing can be significantly reduced.

Description

Technical Field

[0001] The embodiments of this application relate to the field of photovoltaic cell processing equipment technology, and more specifically, this application relates to a laser scribing device. Background Technology

[0002] Perovskite solar cells possess numerous advantages, including high photoelectric conversion efficiency, simple manufacturing process, and low production cost, leading to their extensive research and application in recent years. In the photovoltaic module manufacturing process, laser scribing is required on perovskite solar cells. However, the residual heat energy generated by the laser pulse flows laterally, causing decomposition of the perovskite excitation layer and resulting in material damage. Currently, the industry strives to minimize heat damage to perovskite solar cells through careful adjustment of laser parameters, but a balance between effective laser scribing and the degree of material damage remains challenging. Summary of the Invention

[0003] This application aims to at least solve one of the technical problems existing in the prior art. To this end, this application provides a sheet adjustment mechanism and method, which can promptly pair up isolated sheets appearing on the conveyor line, ensuring that the sheets flow into subsequent equipment for corresponding processing while in pairs.

[0004] To solve the above problems, the technical solution adopted in this application is as follows:

[0005] A laser scribing apparatus is disclosed for scribing perovskite solar cells. The apparatus includes a laser and a support stage. The laser is mounted above the support stage, which supports the perovskite solar cells to be scribed. The laser scribes the perovskite solar cells on the support stage. The support stage has an arc-shaped cooling pipe that is connected to a chiller. The chiller provides a cooling medium to the cooling pipe to cool the perovskite solar cells placed on the support stage.

[0006] The laser scribing apparatus provided in this application has a cooling pipe arranged in an arc shape inside the support stage, and the cooling pipe is connected to a refrigeration unit. The refrigeration unit can be, for example, an ultra-low temperature cascade refrigeration unit with a cooling limit temperature of -250°C. During laser scribing, cooling is applied to the support stage through the cooling pipe, thereby effectively reducing the heat generated by laser processing and reducing material damage during laser scribing.

[0007] Optionally, the bearing surface array of the bearing stage is provided with multiple first through holes, and the bearing stage is also provided with an air cavity. The air cavity is connected to the multiple first through holes and is also connected to an air source device. The first through holes are used to adsorb the perovskite solar cell to be laser-etched.

[0008] A first through hole connected to the air cavity is provided on the support platform, so that the air source equipment can generate negative pressure through the air cavity to facilitate the adsorption and fixation of the perovskite solar cell and prevent it from shifting due to mechanical vibration or other reasons during laser scribing.

[0009] Optionally, at least two first through holes are embedded with first check pipes. The first check pipes are used to restrict the unidirectional flow of airflow in the first through hole so as to cooperate with the air source equipment to adsorb the perovskite solar cell to be laser-etched.

[0010] By setting check pipes in some of the first through holes to restrict the unidirectional flow of gas, depending on the type of gas pressure (high pressure or negative pressure) provided by the gas source equipment, some of the first through holes can only have an adsorption function, while the remaining first through holes can apply both adsorption and buoyancy functions.

[0011] Optionally, the number of first through holes with embedded first check tubes is greater than the number of first through holes without embedded first check tubes, and the two are staggered. The first through holes without embedded first check tubes are used in conjunction with the gas source equipment to adsorb the perovskite solar cells to be laser-etched or to blow up the perovskite solar cells that have been laser-etched.

[0012] By setting the number of first through holes with embedded first check tubes to be higher than the number of first through holes without embedded first check tubes, more first through holes have only adsorption function, while fewer first through holes have adsorption or blowing function, thus avoiding too many first through holes with blowing function, which would cause the perovskite solar cell to be blown off and cause collision damage.

[0013] Optionally, the first through hole is provided with an internal thread, and the outer surface of the first check tube is provided with an external thread that matches the internal thread. The first check tube is fixed in the corresponding first through hole by threaded engagement. The first check tube includes a support section, a receiving section, and a limiting section arranged and connected from bottom to top. The inner diameter of the support section is smaller than the inner diameter of the receiving section to form a support ring. The first check tube also includes a spring and a plug ball. The spring and the plug ball are both arranged in the channel of the support section. One end of the spring abuts against the support ring, and the outer diameter of the plug ball is larger than the inner diameter of the limiting section. The other end of the spring abuts the plug ball against one end of the limiting section.

[0014] By setting the first through hole and the first check pipe to be threaded, the first check pipe is easy to install and has excellent airtightness after installation; by setting the spring and the plug ball, the structure is simple, the cost is low, the maintenance is easy, and it can achieve the function of restricting the unidirectional flow of air.

[0015] Optionally, at least one first through hole is embedded with a second check pipe, which is used to restrict the unidirectional flow of air in the first through hole, so as to cooperate with the air source equipment to complete the laser-etched perovskite solar cell by blowing.

[0016] By embedding a second check pipe into a portion of the first through hole, depending on the type of air pressure (high pressure or negative pressure) provided by the air source equipment, a portion of the first through hole can only have an adsorption function, while the remaining portion of the first through hole can apply both adsorption and buoyancy functions.

[0017] Optionally, the number of first through holes with embedded second check tubes is less than the number of first through holes without embedded second check tubes, and the two are staggered. The first through holes without embedded second check tubes are used in conjunction with the gas source equipment to adsorb the perovskite solar cells to be laser-etched or to blow up the perovskite solar cells that have been laser-etched.

[0018] By setting the number of first through holes with embedded second check tubes to be lower than the number of first through holes without embedded second check tubes, more first through holes have only adsorption function, while fewer first through holes have adsorption or blowing function, thus avoiding too many first through holes with blowing function, which would cause the perovskite solar cell to be blown off and cause collision damage.

[0019] Optionally, the first through hole is provided with an internal thread, and the outer surface of the second check tube is provided with an external thread that matches the internal thread. The second check tube is fixed in the corresponding first through hole by threaded engagement. The second check tube includes a support section, a receiving section, and a limiting section arranged and connected from top to bottom. The inner diameter of the support section is smaller than the inner diameter of the receiving section to form a support ring. The second check tube also includes a spring and a plug ball. The spring and the plug ball are both arranged in the channel of the support section. One end of the spring abuts against the support ring, and the outer diameter of the plug ball is larger than the inner diameter of the limiting section. The other end of the spring abuts the plug ball against one end of the limiting section.

[0020] By setting the first through hole and the second check pipe to be threaded, the first check pipe is easy to install and has excellent airtightness after installation; by setting the spring and the plug ball, the structure is simple, the cost is low, the maintenance is easy, and it can achieve the function of restricting the unidirectional flow of air.

[0021] Optionally, the laser scribing mechanism also includes a lifting mechanism and multiple top columns. The lifting mechanism is connected to the support platform, and the surface of the support platform is also arrayed with multiple top column holes. Each top column hole is used to accommodate one top column. The multiple top columns are all set on the drive end of the lifting mechanism. The lifting mechanism is used to drive the top column to rise vertically in the corresponding top column hole to a first predetermined height higher than the surface of the support platform, or to drive the top column to lower vertically in the corresponding top column hole to a second predetermined height not higher than the surface of the support platform.

[0022] By setting up a lifting mechanism and a top column connected to the lifting mechanism, the top column can be raised or lowered through the top column hole, thereby supporting the perovskite solar cell or avoiding it.

[0023] Optionally, the laser scribing apparatus further includes a first moving mechanism, with a support stage disposed at the drive end of the first moving mechanism, the first moving mechanism being used to drive the support stage to move in the horizontal direction;

[0024] And / or, the laser scribing apparatus includes a second moving mechanism, with a laser disposed on the drive end of the second moving mechanism, the second moving mechanism being used to drive the laser to move in a horizontal direction.

[0025] By setting up a first moving mechanism and a second moving mechanism, the laser and the perovskite solar cell can be moved relative to each other to successfully complete the laser scribing.

[0026] Optionally, the surface of the support platform is a smooth, flat surface and is made of copper, aluminum, or an alloy of at least one of these materials.

[0027] By setting the surface of the support stage to a smooth and flat surface, the perovskite solar cells can be flatly attached to the support stage surface, which is conducive to laser scribing. Using copper, aluminum or their alloys as the material of the support stage surface has excellent thermal conductivity, which facilitates the cooling of the perovskite solar cells. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the laser scribing device in this application from a certain perspective;

[0029] Figure 2 This is a cross-sectional structural diagram of the present application from a certain perspective;

[0030] Figure 3 This is a schematic diagram of the overall structure of the laser scribing device of this application from a certain perspective;

[0031] Figure 4 This is a schematic diagram of the structure of the first or second check valve.

[0032] exist Figure 1-4 middle:

[0033] 1. Laser; 2. Perovskite solar cell;

[0034] 3. Support platform; 30. First through hole; 31. Cooling pipes;

[0035] 32. First check valve; 321. Support section; 322. Reception section; 323. Limiting section; 3221. Spring; 3222. Ball blocker; Detailed Implementation

[0036] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0037] In the manufacturing process of perovskite solar cells, there is a step that requires laser scribing. However, the residual heat energy generated by the laser pulse flows laterally, causing decomposition of the perovskite excitation layer and resulting in material damage. Currently, the industry is trying to adjust the laser parameters to minimize heat damage to the material while performing laser scribing on perovskite solar cells, but it is difficult to balance the laser scribing effect with the degree of material damage.

[0038] To solve this problem, such as Figure 1-3 As shown, the technical solution adopted in this application is as follows:

[0039] A laser scribing apparatus is disclosed for scribing perovskite solar cell 2. The apparatus includes a laser 1 and a support stage 3. The laser 1 is mounted above the support stage 3, which supports the perovskite solar cell 2 to be scribed. The laser 1 scribes the perovskite solar cell 2 on the support stage 3. The support stage 3 is provided with a cooling pipe 31 extending horizontally in an arc shape. The cooling pipe 31 is connected to a chiller, which provides a cooling medium to the cooling pipe 31 to cool the perovskite solar cell 2 placed on the support stage 3.

[0040] The laser scribing apparatus provided in this application has a cooling pipe 31 arranged in an arc shape inside the support stage 3, and the cooling pipe 31 is connected to a cryostat. The cryostat can be, for example, an ultra-low temperature cascade cryostat, with a cooling limit temperature of about -250°C. When performing laser scribing, the cryostat introduces a cooling medium into the cooling pipe 31 to ultimately apply a cooling effect to the support stage 3, thereby effectively reducing the heat generated by laser processing and reducing material damage during laser scribing.

[0041] To prevent the perovskite solar cell 2 from moving unexpectedly on the support platform 3, such as Figure 3 As shown, the bearing surface of the bearing platform 3 can be arrayed with multiple first through holes 30. The bearing platform 3 also has an air cavity that connects all the first through holes 30. The air cavity is also connected to an air source device located in the workshop. The air source device provides a vacuum effect to the air cavity, thereby allowing the first through holes 30 to adsorb and fix the perovskite solar cell 2 to be laser-etched.

[0042] The gas source equipment mentioned in this application includes air pumps, air tanks, air pipelines, and various valves with different functions. It can at least apply negative pressure to the air chamber to create a predetermined vacuum inside the air chamber. Furthermore, the gas source equipment can also apply high pressure to the air chamber.

[0043] As one possible implementation, such as Figure 2 As shown, at least two first through holes 30 are embedded with first check pipes 32. The first check pipes 32 are used to restrict the unidirectional flow of airflow within the first through hole 30, so as to cooperate with the gas source device to adsorb the perovskite solar cell 2 to be laser-etched. By setting check pipes that restrict the unidirectional flow of gas in some of the first through holes 30, the first through holes 30 with or without first check pipes 32 can have different functions depending on the type of gas pressure (high pressure or negative pressure) provided by the gas source device. That is, when the gas source device provides high pressure to the gas chamber, only the first through holes 30 without first check pipes 32 blow air upward, causing the perovskite solar cell 2 to be blown up and separated from the surface of the support platform 3; when the gas source device provides negative pressure to the gas chamber, all the first through holes 30 apply negative pressure to the perovskite solar cell 2 located on the surface of the support platform 3 for adsorption.

[0044] Furthermore, the number of first through holes 30 with embedded first check valves 32 is greater than the number of first through holes 30 without embedded first check valves 32, and the two are arranged alternately. The first through holes 30 without embedded first check valves 32 cooperate with the air source equipment to adsorb the perovskite solar cell 2 to be laser-etched or to blow up the perovskite solar cell 2 after laser etching. By controlling the number of first through holes 30 with embedded first check valves 32 and without embedded first check valves 32, the number of first through holes 30 during air blowing is reduced, avoiding excessive air blowing that causes the perovskite solar cell 2 to float, shift, and eventually collide.

[0045] Furthermore, the first through hole 30 has an internal thread, and the outer surface of the first check tube 32 has an external thread that matches the internal thread. The first check tube 32 is fixed in the corresponding first through hole 30 through threaded engagement. After the threads are engaged, it will have excellent airtightness and a stable connection effect. Figure 4As shown, the first check pipe 32 includes a support section 321, a receiving section 322, and a limiting section 323 arranged and connected sequentially from bottom to top. The inner diameter of the channel of the support section 321 is smaller than the inner diameter of the channel of the receiving section 322 to form a support ring. The first check pipe 32 also includes a spring 3221 and a ball plug 3222. Both the spring 3221 and the ball plug 3222 are disposed in the channel of the support section 321. One end of the spring 3221 abuts against the support ring, and the outer diameter of the ball plug 3222 is larger than the inner diameter of the limiting section 323. The other end of the spring 3221 presses the ball plug 3222 against one end of the limiting section 323. This arrangement makes the first check pipe 32 simple in structure, low in cost, easy to maintain, and able to restrict the airflow to flow only in one direction (along the direction of the compression spring 3221).

[0046] For a similar or identical purpose, in another feasible embodiment, at least one first through hole 30 is embedded with a second check pipe, which is used to restrict the unidirectional flow of airflow to cooperate with the air source equipment to blow and float the perovskite solar cell 2 to complete the laser marking.

[0047] Similar to the function of the first check pipe 32, by setting a second check pipe in part of the first through hole 30 to restrict the unidirectional flow of gas, the first through hole 30 with or without the second check pipe can also have different functions depending on the type of gas pressure (high pressure or negative pressure) provided by the gas source equipment. That is, when the gas source equipment provides high pressure to the gas chamber, only the first through hole 30 with the second check pipe blows air upward, causing the perovskite solar cell 2 to be blown up and separated from the surface of the support platform 3; when the gas source equipment provides negative pressure to the gas chamber, the first through hole 30 without the second check pipe applies negative pressure to the perovskite solar cell 2 located on the surface of the support platform 3 for adsorption. It can be seen that the first check pipe 32 and the second check pipe restrict the airflow in opposite directions.

[0048] Furthermore, the number of first through holes 30 with embedded second check tubes is less than the number of first through holes 30 without embedded second check tubes, and the two are staggered. The first through holes 30 without embedded second check tubes cooperate with the air source equipment to adsorb the perovskite solar cell 2 to be laser-etched or to blow up the perovskite solar cell 2 after laser etching. This arrangement will reduce the number of first through holes 30 during air blowing, avoiding excessive air blowing through the first through holes 30, which would cause the perovskite solar cell 2 to float, shift, and eventually collide.

[0049] Optionally, the first through hole 30 has an internal thread, and the outer surface of the second check tube has an external thread that matches the internal thread. The second check tube is fixed in the corresponding first through hole 30 by the threaded engagement. The second check tube includes a support section 321, a receiving section 322, and a limiting section 323 arranged and connected from top to bottom. The inner diameter of the support section 321 is smaller than the inner diameter of the receiving section 322 to form a support ring. The second check tube also includes a spring 3221 and a plug ball 3222. Both the spring 3221 and the plug ball 3222 are arranged in the channel of the support section 321. One end of the spring 3221 abuts against the support ring, and the outer diameter of the plug ball 3222 is larger than the inner diameter of the limiting section 323. The other end of the spring 3221 presses the plug ball 3222 against one end of the limiting section 323. The structure of the second check tube is basically the same as that of the first check tube 32, except that the airflow direction is restricted in the opposite direction. The effect will not be described in detail.

[0050] Optionally, the laser marking mechanism also includes a lifting mechanism and multiple top columns. The lifting mechanism is connected to the support platform 3. The surface of the support platform 3 is also arrayed with multiple top column holes, each for accommodating one top column. The multiple top columns are all mounted on the drive end of the lifting mechanism. The lifting mechanism is used to drive the top columns vertically up to a first predetermined height above the surface of the support platform 3 within the corresponding top column hole, or to drive the top columns vertically down to a second predetermined height not higher than the surface of the support platform 3 within the corresponding top column hole. By setting up the lifting mechanism and the multiple top columns driven by the lifting mechanism, the multiple top columns can be raised or lowered from the top column holes, respectively achieving the raising and supporting of the perovskite solar cell 2 or the lowering and avoiding of the perovskite solar cell 2 in different application scenarios.

[0051] To successfully complete laser marking, a relative displacement between the support platform 3 and the laser 1 is required. As a feasible embodiment, the laser marking device also includes a first moving mechanism. The support platform 3 is disposed at the driving end of the first moving mechanism, which is used to drive the support platform 3 to move in the horizontal direction.

[0052] And / or, the laser scribing apparatus includes a second moving mechanism, wherein the laser 1 is disposed on the drive end of the second moving mechanism, and the second moving mechanism is used to drive the laser 1 to move in the horizontal direction.

[0053] As a feasible embodiment, the surface of the support stage 3 is a smooth and flat surface that fits the shape of the perovskite solar cell 2, avoiding damage to the perovskite solar cell 2 and facilitating laser scribing by the laser 1; on the other hand, the surface of the support stage 3 is made of metal, specifically copper, aluminum or an alloy of at least one of them, so that the surface of the support stage 3 has suitable thermal conductivity, which facilitates cooling of the perovskite solar cell 2.

[0054] Several embodiments have been illustrated above, and at least two of them can be combined arbitrarily without conflict, which will not be elaborated further. In the above description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0055] Based on the above description of this application, those skilled in the art will also understand that the terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are based on the orientation or positional relationship shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the solution of this application and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms should not be understood or interpreted as a limitation on the solution of this application.

[0056] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0057] While numerous embodiments of this application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will arise for those skilled in the art without departing from the spirit and intent of this application. It should be understood that various alternatives to the embodiments of this application described herein may be employed in the practice of this application. The appended claims are intended to define the scope of protection of this application and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A laser scribing device, characterized in that, The laser scribing device is used to scribble perovskite solar cells. The laser scribing device includes a laser and a support platform. The laser is mounted above the support platform, which is used to support the perovskite solar cells to be scribed by the laser. The laser scribing device performs laser scribing on the perovskite solar cells on the support platform. The support platform is provided with an arc-shaped cooling pipe, which is connected to a refrigeration unit. The refrigeration unit is used to provide a cooling medium to the cooling pipe to cool the perovskite solar cells placed on the support platform to be scribed by the laser.

2. The laser scribing apparatus according to claim 1, characterized in that, The bearing surface array of the bearing platform is provided with a plurality of first through holes, and the bearing platform is also provided with an air cavity, which is connected to the plurality of first through holes and is also connected to an air source device. The first through holes are used to adsorb the perovskite solar cell to be laser-scribed.

3. The laser scribing apparatus according to claim 2, characterized in that, At least two of the first through holes are embedded with first check pipes. The first check pipes are used to restrict the unidirectional flow of airflow in the first through hole, so as to cooperate with the air source device to adsorb the perovskite solar cell to be laser-etched.

4. The laser scribing apparatus according to claim 3, characterized in that, The number of first through holes with the first check tube embedded is greater than the number of first through holes without the first check tube embedded, and the two are staggered. The first through holes without the first check tube embedded cooperate with the gas source device to adsorb the perovskite solar cell to be laser-etched or to blow up the perovskite solar cell after laser-etching.

5. The laser scribing apparatus according to claim 3, characterized in that, The first through hole has an internal thread, and the outer surface of the first check tube has an external thread that matches the internal thread. The first check tube is fixed in the corresponding first through hole by threaded engagement. The first check tube includes a support section, a receiving section, and a limiting section arranged and connected from bottom to top. The inner diameter of the support section is smaller than the inner diameter of the receiving section to form a support ring. The first check tube also includes a spring and a plug ball. The spring and the plug ball are both arranged in the channel of the support section. One end of the spring abuts against the support ring. The outer diameter of the plug ball is larger than the inner diameter of the limiting section. The other end of the spring abuts the plug ball against one end of the limiting section.

6. The laser scribing apparatus according to claim 2, characterized in that, At least one of the first through holes is embedded with a second check pipe, which is used to restrict the unidirectional flow of air in the first through hole, so as to cooperate with the air source device to complete the laser-etched perovskite solar cell by blowing.

7. The laser scribing apparatus according to claim 6, characterized in that, The number of first through holes with the second check tube embedded is less than the number of first through holes without the second check tube embedded, and the two are staggered. The first through holes without the second check tube embedded cooperate with the gas source device to adsorb the perovskite solar cell to be laser-etched or to blow up the perovskite solar cell after laser-etching.

8. The laser scribing apparatus according to claim 6, characterized in that, The first through hole has an internal thread, and the outer surface of the second check tube has an external thread that matches the internal thread. The second check tube is fixed in the corresponding first through hole by threaded engagement. The second check tube includes a support section, a receiving section, and a limiting section arranged and connected from top to bottom. The inner diameter of the support section is smaller than the inner diameter of the receiving section to form a support ring. The second check tube also includes a spring and a plug ball. The spring and the plug ball are both arranged in the channel of the support section. One end of the spring abuts against the support ring. The outer diameter of the plug ball is larger than the inner diameter of the limiting section. The other end of the spring abuts the plug ball against one end of the limiting section.

9. The laser scribing apparatus according to claim 1, characterized in that, The laser marking mechanism further includes a lifting mechanism and multiple top columns. The lifting mechanism is connected to the support platform. The surface of the support platform is also arrayed with multiple top column holes. Each top column hole is used to accommodate one top column. The multiple top columns are all disposed on the drive end of the lifting mechanism. The lifting mechanism is used to drive the top column to rise vertically in the corresponding top column hole to a first predetermined height higher than the surface of the support platform, or to drive the top column to lower vertically in the corresponding top column hole to a second predetermined height not higher than the surface of the support platform.

10. The laser scribing apparatus according to claim 1, characterized in that, The laser scribing device further includes a first moving mechanism, and the support platform is disposed at the drive end of the first moving mechanism. The first moving mechanism is used to drive the support platform to move in the horizontal direction. And / or, the laser scribing apparatus includes a second moving mechanism, the laser being disposed on the drive end of the second moving mechanism, the second moving mechanism being used to drive the laser to move in a horizontal direction.

11. The laser scribing apparatus according to claim 1, characterized in that, The surface of the support platform is smooth and flat, and the material is copper, aluminum, or an alloy of at least one of them.

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