Door cover lifting device of vacuum chamber

Abstract

The utility model discloses a door cover lifting device of a vacuum chamber. The door cover lifting device comprises a base, a lifting mechanism, a connecting assembly and a band-type brake mechanism. The lifting mechanism comprises a mounting base arranged on the base, a motor assembly arranged on the mounting base and a lifting table movably arranged on the mounting base, an output shaft of the motor assembly is connected to a lead screw, the lead screw is provided with a nut assembly in a threaded fit mode, and the nut assembly is connected to the lifting table; the connecting assembly is arranged on the lifting table and provided with a connecting mechanism connected with the door cover. The band-type brake mechanism is connected to the motor assembly and used for holding and locking the output shaft, the motor assembly is matched with the lead screw and the nut assembly so that the position of the lifting table can be accurately controlled, the height of the door cover can be accurately controlled, and control is convenient and flexible in an electric control mode.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment, and in particular to a door lifting device for a vacuum chamber. Background Technology

[0002] In vacuum equipment, the vacuum chamber consists of the chamber body, pipe interfaces, and operating door mechanism. The operating door mechanism of a vertical vacuum chamber uses a lifting door cover structure to control the opening and closing of the chamber door. In engineering practice, a pneumatic or hydraulic cylinder is generally used to drive the lifting and lowering of the door cover structure. This driving method often cannot effectively control the lifting position and speed of the door cover, which can lead to operational safety hazards when opening and closing the chamber door. The uncontrollable lifting torque can also easily cause the door cover to loosen and vacuum leakage. Furthermore, using a pneumatic or hydraulic cylinder requires a compressed air system or hydraulic system as a power source, increasing site setup costs. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a door lifting device for a vacuum chamber, which has the advantages of convenient control and high movement precision.

[0004] A vacuum chamber door lifting device according to a first aspect embodiment of the present invention includes a base, a lifting mechanism, a connecting assembly, and a brake mechanism; the lifting mechanism includes a mounting base disposed on the base, a motor assembly disposed on the mounting base, and a lifting platform movably disposed on the mounting base; the output shaft of the motor assembly is connected to a lead screw, the lead screw is threadedly fitted with a nut assembly, and the nut assembly is connected to the lifting platform; the connecting assembly is disposed on the lifting platform and has a connecting mechanism for connecting to the door cover; the brake mechanism is connected to the motor assembly and is used to clamp and lock the output shaft.

[0005] The vacuum chamber door lifting device according to the present utility model has at least the following advantages: the position of the lifting platform can be precisely controlled by the motor assembly in conjunction with the lead screw and nut assembly, thereby precisely controlling the height of the door cover, and the control is convenient and flexible through electronic control.

[0006] According to some embodiments of the present invention, the connecting assembly includes a vertical plate arranged in a vertical direction and a connecting plate arranged horizontally on the vertical plate, and the connecting mechanism is disposed on the connecting plate.

[0007] According to some embodiments of the present invention, the connecting assembly further includes a reinforcing plate, which connects the upright plate and the connecting plate.

[0008] According to some embodiments of the present invention, the connecting plate is provided with a clearance opening.

[0009] According to some embodiments of this utility model, the connecting mechanism is an electromagnetic chuck assembly.

[0010] According to some embodiments of the present invention, the base is provided with a cavity for installing the lead screw and the nut assembly, the cavity is provided with a protective plate that can cover the lead screw and the nut assembly, the lifting platform includes a connecting part disposed on the inner side of the protective plate and a first extension part and a second extension part extending outward from both sides of the connecting part, the connecting assembly is connected to the first extension part and the second extension part, so that a through hole corresponding to the protective plate is formed between the connecting assembly and the lifting platform.

[0011] According to some embodiments of the present invention, the connecting assembly is installed to the first extension and the second extension by a screw mechanism.

[0012] According to some embodiments of the present invention, one side of the connecting component is rotatably connected to the first extension, and the other side of the connecting component is connected to the second extension via a fastening mechanism.

[0013] According to some embodiments of the present invention, the fastening mechanism includes a screw rotatably connected to the second extension and a nut threadedly engaged with the screw, and the side of the connecting assembly is provided with a notch that allows the screw to enter laterally.

[0014] According to some embodiments of the present invention, the connecting component is rotatably connected to the first extension via a hinge mechanism. Attached Figure Description

[0015] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0016] Figure 1 This is a schematic diagram of the door cover lifting device of the vacuum chamber according to Embodiment 1 of this utility model;

[0017] Figure 2 This is a side view of the door lifting device of the vacuum chamber according to Embodiment 1 of this utility model;

[0018] Figure 3 This is an exploded view of the door cover lifting device of the vacuum chamber according to Embodiment 1 of this utility model;

[0019] Figure 4 This is a schematic diagram of the door cover lifting device of the vacuum chamber according to Embodiment 2 of this utility model;

[0020] Figure 5 This is a schematic diagram of the connecting assembly of the vacuum chamber door lifting device in Embodiment 2 of this utility model when it is rotated open;

[0021] Figure 6 This is a schematic diagram of the connection between the lifting platform and the connecting component in Embodiment 2 of this utility model.

[0022] Figure label:

[0023] Base 100;

[0024] Mounting base 210, motor assembly 220, lifting platform 230, connecting part 231, first extension part 232, second extension part 233, lead screw 240, nut assembly 250, protective plate 260;

[0025] Connecting component 300, notch 301, upright plate 310, connecting plate 320, clearance opening 321, reinforcing plate 330, electromagnetic chuck assembly 340, screw 350, nut 360, hinge mechanism 370;

[0026] Door cover 900. Detailed Implementation

[0027] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0028] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] In the description of this utility model, the use of "first" and "second" is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features or the order of the technical features.

[0030] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0031] The following is for reference. Figures 1 to 6 This invention describes a door cover lifting device for a vacuum chamber according to an embodiment of the present invention.

[0032] like Figures 1 to 5 As shown, the vacuum chamber door lifting device according to an embodiment of the present invention includes a base 100, a lifting mechanism, a connecting assembly 300, and a brake mechanism. The lifting mechanism includes a mounting base 210 disposed on the base 100, a motor assembly 220 disposed on the mounting base 210, and a lifting platform 230 movably disposed on the mounting base 210. The output shaft of the motor assembly 220 is connected to a lead screw 240, and the lead screw 240 is threadedly fitted with a nut assembly 250, which is connected to the lifting platform 230. The connecting assembly 300 is disposed on the lifting platform 230 and is provided with a connecting mechanism for connecting to the door cover 900. The brake mechanism is connected to the motor assembly 220 and is used to clamp and lock the output shaft.

[0033] The position of the lifting platform 230 can be precisely controlled by the motor assembly 220 in conjunction with the lead screw 240 and the nut assembly 250, thereby precisely controlling the height of the door cover 900. The control is convenient and flexible because it is controlled by electricity.

[0034] Specifically, the motor assembly 220, together with the lead screw 240 and nut assembly 250, can precisely control the movement position compared to the traditional cylinder and hydraulic cylinder drive methods. With the motor drive module, the speed and height of the lifting platform 230 can be easily controlled. Compared to the traditional cylinder and hydraulic cylinder drive methods, it is more flexible in application.

[0035] In some embodiments of this utility model, the door cover lifting device of the vacuum chamber further includes a motor driver control component. The motor component 220 is a servo motor drive unit, and the motor driver control component is equipped with a servo drive module, thereby realizing the control of the speed and height of the lifting platform 230.

[0036] Specifically, the motor driver control component also includes a programmable logic controller (PLC). The PLC, servo drive module, and servo motor drive unit form a servo control system, which can perform position control, speed control, or torque control on the door cover 900. The PLC generates position, speed, or torque control commands based on the input signals and program logic, and sends them to the servo drive module. The servo drive module is responsible for obtaining power for the entire device and controlling the movement of the servo motor drive unit according to the commands. The rotation of the servo motor drive unit provides torque to drive the door cover to rise and fall. The motor driver control component can also be equipped with an encoder to provide real-time feedback of position, speed, and torque information to the servo drive module. The servo drive module adjusts the control signals accordingly to ensure motion accuracy.

[0037] In some embodiments of this utility model, the servo control system is equipped with a torque control unit. The torque control unit determines the torque of the servo motor by monitoring the current, thereby controlling the pressure when the door is closed.

[0038] Specifically, when the user inputs an open signal, the door rises to the target position according to the user-preset endpoint position and rising speed to complete the opening action. When the user inputs a close signal, the door descends to the position where it just contacts the sealing ring according to the user-preset descending speed. The servo control system detects the increased torque, switches to torque control, and presses the door 90° against the sealing ring of the vacuum chamber according to the user-preset closing pressure to complete the closing action. In practical applications, users can adjust the preset parameters of the door control position, speed, and torque at any time according to actual use and safety requirements via commands, making it flexible and convenient to use.

[0039] In some embodiments of this utility model, the holding brake mechanism is located inside the motor assembly 220 and surrounds the output shaft of the motor assembly 220.

[0040] Specifically, the brake mechanism can be a commercially available hydraulic brake, electromagnetic brake, etc. It can achieve the effect of braking and locking by hydraulically or electrically driving the output shaft of the brake motor assembly 220, making the door cover 900 less prone to displacement and improving the stability and reliability of the mechanism.

[0041] like Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the connecting component 300 includes a vertical plate 310 arranged in the vertical direction and a connecting plate 320 arranged in the horizontal direction on the vertical plate 310. The connecting mechanism is provided on the connecting plate 320 to realize the connection with the door cover 900.

[0042] Specifically, the base 100 is a frame, the upright plate 310 is vertically set and installed on the lifting platform 230, and the connecting plate 320 extends outward from the upright plate 310 to form an extension arm that can be connected to the door cover 900.

[0043] like Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the connecting component 300 further includes a reinforcing plate 330, which connects the upright plate 310 and the connecting plate 320 to improve the connection strength between the upright plate 310 and the connecting plate 320.

[0044] Specifically, the reinforcing plate 330 is vertically set and perpendicularly connected to the upright plate 310 and the connecting plate 320, forming a connection structure similar to a spatial coordinate system, thereby improving the overall structural strength of the connecting component 300.

[0045] like Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the connecting plate 320 is provided with a clearance opening 321 to avoid the original lifting devices, pipe interfaces (not shown in the figure) on the door cover 900.

[0046] like Figure 1 , Figure 2 , Figure 4 and Figure 6 As shown, in some embodiments of this utility model, the connecting mechanism is an electromagnetic chuck assembly 340, which enables rapid gripping and release of the door cover 900.

[0047] Specifically, such as Figure 1 , Figure 3 , Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the connecting component 300 includes a vertical plate 310 arranged in the vertical direction and a connecting plate 320 arranged horizontally on the vertical plate 310. The electromagnetic chuck assembly 340 is disposed on the connecting plate 320 and corresponds to the upper end face of the door cover 900. When the connecting component 300 is driven to move downward by the lifting platform 230, the connecting plate 320 can be pressed against the upper part of the door cover 900 by the chuck assembly 340, thereby ensuring airtightness. When the connecting component 300 is driven to move upward by the lifting platform 230, the connecting plate 320 can drive the door cover 900 to move upward by the chuck assembly 340, thereby completing the opening action.

[0048] It is understood that in some embodiments of this utility model, the connecting mechanism may also be a screw connection mechanism, a plug-in mechanism, etc., which will not be described in detail here.

[0049] like Figure 1 , Figure 2 and Figure 4 As shown, in some embodiments of this utility model, the base 100 is provided with a cavity for mounting the lead screw 240 and the nut assembly 250. The cavity is provided with a protective plate 260 that can cover the lead screw 240 and the nut assembly 250. The lifting platform 230 includes a connecting portion 231 located inside the protective plate 260 and a first extension portion 232 and a second extension portion 233 extending outward from both sides of the connecting portion 231. The connecting assembly 300 is connected to the first extension portion 232 and the second extension portion 233 so that a through hole corresponding to the protective plate 260 is formed between the connecting assembly 300 and the lifting platform 230, so as to better protect the transmission components and ensure the normal lifting movement of the lifting platform 230 and the connecting assembly 300.

[0050] Specifically, the protective plate 260 has a clearance opening on the front for the first extension 232 and the second extension 233 to extend out, or the protective plate 260 has a clearance opening on the side for the two sides of the connecting part 231 to extend out. The clearance opening extends in the vertical direction to allow the lifting platform 230 to move up and down.

[0051] like Figure 1 , Figure 2 and Figure 3 As shown, in some embodiments of the present invention, the connecting component 300 is mounted to the first extension 232 and the second extension 233 by a screw mechanism (not shown in the figure).

[0052] like Figure 4 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, one side of the connecting component 300 is rotatably connected to the first extension 232, and the other side of the connecting component 300 is connected to the second extension 233 through a fastening mechanism. After opening the fastening mechanism, the connecting component 300 can be rotated open to facilitate maintenance or removal of the door cover 900.

[0053] Specifically, in actual production, when the workpiece placed in the vacuum chamber is large and needs to be hoisted, the fastening mechanism can be opened, the connecting assembly 300 can be rotated, and the door cover 900 can be moved away from the top of the vacuum chamber to facilitate hoisting.

[0054] like Figure 6 As shown, in some embodiments of this utility model, the fastening mechanism includes a screw 350 rotatably connected to the second extension 233 and a nut 360 threadedly engaged with the screw 350. The side of the connecting assembly 300 is provided with a notch 301 allowing the screw 350 to enter laterally. When the nut 360 is loosened, the screw 350 can be rotated outwards, causing the nut 360 to move away from the notch 301, thereby allowing the connecting assembly 300 to be rotated open. When the connecting assembly 300 needs to be reset, the connecting assembly 300 is rotated to a set position, the screw 350 is rotated into the notch 301, and the nut 360 is rotated, causing the nut 360 to press against the connecting assembly 300 and the second extension 233, thereby fixing the connecting assembly 300 and the second extension 233.

[0055] In some embodiments of this utility model, the nut 360 is provided with a handle, such as a ring or a butterfly shape, to facilitate turning the nut 360.

[0056] In some embodiments of this utility model, the connecting component 300 and the first extension 232 and the second extension 233 are respectively provided with corresponding holes and can be connected by screws. When the application scenario does not require rotating the connecting component 300, the connecting component 300 and the first extension 232 and the second extension 233 can be directly locked by screws to improve the stability of the mechanism.

[0057] like Figure 6 As shown, in some embodiments of the present invention, the connecting component 300 is rotatably connected to the first extension 232 via a hinge mechanism 370.

[0058] like Figure 6 As shown, in some embodiments of the present invention, the connecting component 300 includes a vertical plate 310 arranged in a vertical direction and a connecting plate 320 arranged horizontally on the vertical plate 310. One side of the vertical plate 310 is rotatably connected to the first extension 232 through a hinge mechanism 370, and a notch 301 is provided on the other side of the vertical plate 310.

[0059] It is conceivable that in some embodiments of this utility model, the fastening mechanism may also be a locking mechanism, etc., which will not be described in detail here.

[0060] Of course, this invention is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of this invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. A door lifting device for a vacuum chamber, characterized in that, include: Base (100); The lifting mechanism includes a mounting base (210) disposed on the base (100), a motor assembly (220) disposed on the mounting base (210), and a lifting platform (230) movably disposed on the mounting base (210). The output shaft of the motor assembly (220) is connected to a lead screw (240), and the lead screw (240) is provided with a nut assembly (250) through threaded engagement. The nut assembly (250) is connected to the lifting platform (230). A connecting component (300) is disposed on the lifting platform (230), and the connecting component (300) is provided with a connecting mechanism for connecting to the door cover (900); A brake mechanism, connected to the motor assembly (220), is used to clamp and lock the output shaft.

2. The door lifting device for a vacuum chamber according to claim 1, characterized in that, The connecting assembly (300) includes a vertical plate (310) arranged in a vertical direction and a connecting plate (320) arranged horizontally on the vertical plate (310), and the connecting mechanism is disposed on the connecting plate (320).

3. The vacuum chamber door lifting device according to claim 2, characterized in that, The connecting assembly (300) further includes a reinforcing plate (330) that connects the upright plate (310) and the connecting plate (320).

4. The door lifting device for a vacuum chamber according to claim 2, characterized in that, The connecting plate (320) is provided with a clearance opening (321).

5. The door lifting device for a vacuum chamber according to claim 2, characterized in that, The connecting mechanism is an electromagnetic chuck assembly (340).

6. The door lifting device for a vacuum chamber according to claim 1, characterized in that, The base (100) is provided with a cavity for mounting the lead screw (240) and the nut assembly (250). The cavity is provided with a protective plate (260) that can cover the lead screw (240) and the nut assembly (250). The lifting platform (230) includes a connecting part (231) located inside the protective plate (260) and a first extension part (232) and a second extension part (233) extending outward from both sides of the connecting part (231). The connecting assembly (300) is connected to the first extension part (232) and the second extension part (233) so that a through hole corresponding to the protective plate (260) is formed between the connecting assembly (300) and the lifting platform (230).

7. The door lifting device for a vacuum chamber according to claim 6, characterized in that, The connecting assembly (300) is mounted to the first extension (232) and the second extension (233) by a screw mechanism.

8. The door lifting device for a vacuum chamber according to claim 6, characterized in that, One side of the connecting component (300) is rotatably connected to the first extension (232), and the other side of the connecting component (300) is connected to the second extension (233) via a fastening mechanism.

9. The door lifting device for a vacuum chamber according to claim 8, characterized in that, The fastening mechanism includes a screw (350) rotatably connected to the second extension (233) and a nut (360) threadedly engaged with the screw (350). The side of the connecting assembly (300) is provided with a notch (301) that allows the screw (350) to enter laterally.

10. The door lifting device for a vacuum chamber according to claim 8, characterized in that, The connecting component (300) is rotatably connected to the first extension (232) via a hinge mechanism (370).

Images