Seeding device for czochralski silicon production

Abstract

The utility model provides a czochralski monocrystalline silicon production seeding device which comprises a seeding box, a clamping mechanism and a limiting mechanism, the seeding box is used for containing raw materials and melting the raw materials into melt, the clamping mechanism is arranged on the upper portion of the seeding box and used for clamping monocrystalline silicon, the limiting mechanism is connected with the clamping mechanism, and the clamping mechanism is used for clamping the monocrystalline silicon. The limiting device is used for limiting the positions of the clamping mechanism in the horizontal and vertical directions. When the seeding device for Czochralski monocrystalline silicon production is used for seeding, monocrystalline silicon is firstly clamped by the clamping mechanism, and the positions of the clamping mechanism in the horizontal direction and the vertical direction are limited by the limiting mechanism, so that the monocrystalline silicon can be accurately inserted into raw materials in the seeding box for seeding. Compared with the prior art, the seeding device disclosed by the utility model has the advantages that the limiting mechanism is adopted, so that the insertion position of monocrystalline silicon can be accurately controlled, and the blanking accuracy is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to single crystal silicon production and processing equipment technical field, especially relates to a straight pull single crystal silicon production seeding device. BACKGROUND

[0002] Single crystal silicon is a nonmetallic material, which is widely used in the production field of semiconductor materials, photovoltaic materials, heating materials and other products. Single crystal silicon needs to go through multiple steps such as mixing, heating, melting and seeding in the production process. A special seeding device is needed to process the raw materials when seeding.

[0003] The current seeding device is generally provided with two air cylinders and a single crystal silicon chuck. The lifting of the air cylinder is controlled to realize the lifting of the single crystal silicon chuck, so that the single crystal silicon is inserted into the crucible to realize seeding. However, the above structure cannot effectively limit the single crystal silicon chuck, thereby affecting the feeding accuracy.

[0004] Therefore, how to overcome the above technical defects is a problem to be solved by those skilled in the art. UTILITY MODEL CONTENT

[0005] Therefore, the purpose of the utility model is to provide a straight pull single crystal silicon production seeding device, which can effectively improve the feeding accuracy.

[0006] To achieve the above purpose, the utility model provides the following technical scheme:

[0007] A straight pull single crystal silicon production seeding device, comprising:

[0008] A seeding box for containing raw materials and melting the raw materials into molten liquid;

[0009] A clamping mechanism arranged at the upper part of the seeding box for clamping single crystal silicon;

[0010] A limiting mechanism connected with the clamping mechanism for limiting the position of the clamping mechanism in the horizontal and vertical directions.

[0011] Optionally, it further comprises a support frame, the seeding box is arranged at the lower part of the support frame, and the limiting mechanism and the clamping mechanism are both arranged at the upper part of the seeding box.

[0012] Optionally, the limiting mechanism comprises a horizontal limiting assembly and a vertical limiting assembly, one end of the horizontal limiting assembly is connected with the vertical limiting assembly, and the other end is connected with the clamping mechanism.

[0013] Optionally, the vertical limiting assembly comprises:

[0014] A fixed sleeve with one open end and the other closed end, the open end is fixed on the support frame.

[0015] A limiting sleeve is slidably sleeved in the fixing sleeve, and the limiting sleeve is connected with the horizontal limiting assembly;

[0016] A lifting member includes a hydraulic cylinder and a piston rod, the hydraulic cylinder is fixed to the closed end, one end of the piston rod is arranged in the hydraulic cylinder, and the other end is connected with the horizontal limiting assembly.

[0017] Optionally, the horizontal limiting assembly includes a mounting cover, a bidirectional screw rod and a moving member, the limiting sleeve and the lifting member are connected with the mounting cover, the bidirectional screw rod is rotatably arranged on the mounting cover, and the moving member is movably arranged on the bidirectional screw rod.

[0018] Optionally, the bidirectional screw rod includes a first threaded part and a second threaded part, the threaded directions of the first threaded part and the second threaded part are opposite.

[0019] The moving member includes a first threaded sleeve, a second threaded sleeve, a first connecting member and a second connecting member, the first threaded sleeve is connected with the first threaded part in a matched mode, the second threaded sleeve is connected with the second threaded part in a matched mode, the first connecting member is fixed to the first threaded sleeve, and the second connecting member is fixed to the second threaded sleeve.

[0020] Optionally, the center line of the piston rod is collinear with the center line of the mounting cover, and the center line of the fixing sleeve is collinear with the center line of the limiting sleeve.

[0021] Optionally, the mounting cover includes a top plate, a first side plate and a second side plate, the first side plate and the second side plate are arranged on two sides of the top plate respectively, mounting holes are arranged on the first side plate and the second side plate, the bidirectional screw rod is rotatably arranged in the mounting holes, and the limiting sleeve and the piston rod are connected with the top plate.

[0022] Optionally, the horizontal limiting assembly further includes a first knob and a second knob, the first knob and the second knob are arranged at two ends of the bidirectional screw rod respectively and are arranged outside the mounting cover.

[0023] Optionally, the clamping mechanism includes a first clamping plate and a second clamping plate, the first clamping plate is connected with the first connecting member, and the second clamping plate is connected with the second connecting member.

[0024] Optionally, the clamping mechanism further includes a first anti-skid pad and a second anti-skid pad, the first anti-skid pad is arranged on the inner side of the first clamping plate, and the second anti-skid pad is arranged on the inner side of the second clamping plate.

[0025] Optionally, the seed crystal box comprises:

[0026] A seed crystal box body for containing the raw material;

[0027] A mounting table arranged on the seed crystal box body;

[0028] A cover plate assembly arranged on the mounting table in an openable and closable manner to realize opening and closing of the seed crystal box body.

[0029] Optionally, the cover plate assembly is two and is arranged oppositely on two sides of the mounting table.

[0030] The cover plate assembly comprises a driving member, a linkage member and a cover plate body, one end of the linkage member is connected with the driving member, the other end is connected with the cover plate body, and the driving member can overturn the cover plate body through the linkage member to make the seed crystal box body open.

[0031] Optionally, the linkage member comprises a connecting sleeve, a connecting plate and a connecting arm, and the connecting sleeve, the connecting plate and the connecting arm are sequentially movably connected.

[0032] Optionally, the cover plate assembly further comprises a hinged plate, one end of the hinged plate is connected with the cover plate body, and the other end is hinged with the mounting table.

[0033] Optionally, the seed crystal box further comprises a fixing member, the fixing member is fixed on the seed crystal box body, and the driving member is fixed on the fixing member.

[0034] From the above technical solution, when the seed crystal is introduced by the seed crystal introduction device for producing straight-drawn single crystal silicon disclosed in the embodiment of the present application, the single crystal silicon is first clamped by the clamping mechanism, and the position of the clamping mechanism in the horizontal and vertical directions is limited by the limiting mechanism, so that the single crystal silicon can be accurately inserted into the raw material in the seed crystal box for seed crystal introduction.

[0035] Compared with the prior art, the seed crystal introduction device disclosed in the embodiment of the present application can accurately control the insertion position of the single crystal silicon, thereby greatly improving the precision of discharging. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only embodiments of the present application, and those skilled in the art can obtain other drawings according to the provided drawings without creative labor.

[0037] Figure 1The utility model discloses a main view of the crystal leading device for the production of the straight pulling single crystal silicon of the embodiment of the utility model.

[0038] Figure 2 The utility model discloses a main view of the straight limiting mechanism and the clamping mechanism of the embodiment of the utility model.

[0039] Figure 3 The utility model discloses a main view of the crystal leading box of the embodiment of the utility model.

[0040] Figure 4 The utility model discloses a Figure 3 The utility model discloses a

[0041] Figure 5 The utility model discloses a main view of the clamping mechanism and the transverse limiting component of the embodiment of the utility model.

[0042] Figure 6 The utility model discloses a top view of the cover plate subassembly of the embodiment of the utility model.

[0043] Figure 7 The utility model discloses a side view of the cover plate subassembly of the embodiment of the utility model.

[0044] Figure 8 The utility model discloses a side view of the clamping mechanism of the embodiment of the utility model.

[0045] Mark explanation:

[0046] 100, crystal leading box, 101, crystal leading box body, 102, installation platform, 103, cover plate subassembly, 1031, drive part, 1032, connecting sleeve, 1033, connecting plate, 1034, connecting arm, 1035, cover plate body, 1036, hinged plate, 104, fixed part, 200, clamping mechanism, 201, first clamping plate, 202, second clamping plate, 203, first antiskid pad, 204, second antiskid pad, 300, limiting mechanism, 301, fixed sleeve, 302, limiting sleeve, 303, hydraulic cylinder, 304, piston rod, 305, installation cover, 3051, top plate, 3052, first side plate, 3053, second side plate, 306, bidirectional screw rod, 307, first threaded sleeve, 308, second threaded sleeve, 309, first connecting piece, 310, second connecting piece, 311, first knob, 312, second knob, 400, support frame. Specific implementation

[0047] Therefore, the core of the utility model provides a crystal leading device for the production of the straight pulling single crystal silicon, which can effectively improve the feeding precision.

[0048] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor are within the protection scope of the present utility model. Please refer to Figures 1 to 8 .

[0049] Please refer to Figure 1 The crystal pulling device for producing straight-drawn single crystal silicon disclosed in the embodiments of the present utility model comprises a crystal pulling box 100, a clamping mechanism 200 and a limiting mechanism 300, wherein the crystal pulling box 100 is used for containing raw materials and melting the raw materials into molten liquid, the clamping mechanism 200 is arranged at the upper part of the crystal pulling box 100 and is used for clamping single crystal silicon, and the limiting mechanism 300 is connected with the clamping mechanism 200 and is used for limiting the position of the clamping mechanism 200 in the horizontal and vertical directions.

[0050] When the crystal pulling device for producing straight-drawn single crystal silicon disclosed in the embodiments of the present utility model is used to pull a crystal, the single crystal silicon is first clamped by the clamping mechanism 200, and the position of the clamping mechanism 200 in the horizontal and vertical directions is limited by the limiting mechanism 300, so that the single crystal silicon can be accurately inserted into the raw materials in the crystal pulling box 100 for pulling a crystal.

[0051] Compared with the prior art, the crystal pulling device disclosed in the embodiments of the present utility model can accurately control the insertion position of the single crystal silicon, thereby greatly improving the precision of discharging.

[0052] It should be noted that a heating seat is installed in the crystal pulling box 100, a crucible is installed on the heating seat, the raw materials are placed in the crucible, and the heating seat can be used to heat the crucible, thereby achieving the heating of the raw materials in the crucible.

[0053] As a further embodiment, the crystal pulling device for producing straight-drawn single crystal silicon disclosed in the embodiments of the present utility model further comprises a support frame 400, wherein the crystal pulling box 100 is arranged at the lower part of the support frame 400, and the limiting mechanism 300 and the clamping mechanism 200 are both correspondingly arranged at the upper part of the crystal pulling box 100.

[0054] The specific structure of the limiting mechanism 300 is not limited in the embodiments of the present utility model, and any structure meeting the use requirements of the present utility model is within the protection scope of the present utility model.

[0055] As one of the embodiments, the limiting mechanism 300 disclosed in the embodiments of the present utility model comprises a horizontal limiting assembly and a vertical limiting assembly, wherein one end of the horizontal limiting assembly is connected with the vertical limiting assembly, and the other end is connected with the clamping mechanism 200.

[0056] The vertical limiting mechanism 300 can enable the clamping mechanism 200 to be lifted to limit the position of the clamping mechanism 200 in the vertical direction; and the horizontal limiting assembly can enable the clamping mechanism 200 to move in the horizontal direction to limit the position of the clamping mechanism 200 in the horizontal direction.

[0057] The specific structure of the vertical limiting assembly is not limited in the embodiments of the utility model, and any structure meeting the use requirements of the utility model is within the protection scope of the utility model.

[0058] As one of the embodiments, refer to Figure 2 and Figure 5 The vertical limiting assembly disclosed in the embodiments of the utility model comprises a fixed sleeve 301, a limiting sleeve 302 and a lifting piece, one end of the fixed sleeve 301 is an open end, the other end is a closed end, the open end is fixed on a support frame 400, the limiting sleeve 302 is slidably sleeved in the fixed sleeve 301, and the limiting sleeve 302 is connected with a horizontal limiting assembly, and the lifting piece comprises a hydraulic cylinder 303 and a piston rod 304, the hydraulic cylinder 303 is fixed on the closed end, one end of the piston rod 304 is arranged in the hydraulic cylinder 303, and the other end is connected with the horizontal limiting assembly.

[0059] The hydraulic cylinder 303 is started, the piston rod 304 extends out of the hydraulic cylinder 303, the clamping mechanism 200 is driven by the horizontal limiting assembly to move towards the direction close to the crystal pulling box 100, at this time, the limiting sleeve 302 slides along the inner wall of the fixed sleeve 301, and under the action of the limiting sleeve 302, the horizontal limiting assembly can keep the stability in the lifting process, so that the phenomenon of shaking in the discharging process is prevented, and the precision of discharging is further improved.

[0060] The specific structure of the horizontal limiting assembly is not limited in the embodiments of the utility model, and any structure meeting the use requirements of the utility model is within the protection scope of the utility model.

[0061] As one of the embodiments, refer to 2, the horizontal limiting assembly disclosed in the embodiments of the utility model comprises a mounting cover 305, a bidirectional screw rod 306 and a moving piece, the limiting sleeve 302 and the lifting piece are connected with the mounting cover 305, the bidirectional screw rod 306 is rotatably mounted on the mounting cover 305, and the moving piece is movably arranged on the bidirectional screw rod 306.

[0062] Specifically, the bidirectional screw rod 306 comprises a first threaded part and a second threaded part, and the threaded directions of the first threaded part and the second threaded part are opposite.

[0063] The moving part comprises a first threaded sleeve 307, a second threaded sleeve 308, a first connecting part and a second connecting part, the first threaded sleeve 307 is connected with the first threaded part, the second threaded sleeve 308 is connected with the second threaded part, the first connecting part is fixed on the first threaded sleeve 307, and the second connecting part is fixed on the second threaded sleeve 308.

[0064] When the bidirectional screw rod 306 is started, the bidirectional screw rod 306 rotates forward or reversely, drives the first threaded sleeve 307 and the second threaded sleeve 308 to move towards the direction of relatively close, thereby driving the clamping mechanism 200 to clamp the monocrystalline silicon; conversely, the bidirectional screw rod 306 reversely or forwardly rotates, drives the first threaded sleeve 307 and the second threaded sleeve 308 to move towards the direction of relatively far away, thereby driving the clamping mechanism 200 to release the monocrystalline silicon.

[0065] In order to further improve the accuracy of discharging, the center line of the piston rod 304 is collinear with the center line of the mounting cover 305, and the center line of the fixed sleeve 301 is collinear with the center line of the limiting sleeve 302.

[0066] The specific structure of the mounting cover 305 is not limited in the embodiment of the utility model, and as long as the structure meeting the use requirement of the utility model is within the protection range of the utility model.

[0067] As one of the embodiments, please refer to Figure 5 The mounting cover 305 disclosed by the embodiment of the utility model comprises a top plate 3051, a first side plate 3052 and a second side plate 3053, the first side plate 3052 and the second side plate 3053 are respectively arranged on the two sides of the top plate 3051, mounting holes are formed in the first side plate 3052 and the second side plate 3053, the bidirectional screw rod 306 is rotatably mounted in the mounting holes, and the limiting sleeve 302 and the piston rod 304 are connected with the top plate 3051.

[0068] In order to conveniently realize the rotation of the bidirectional screw rod 306, the horizontal limiting assembly disclosed by the embodiment of the utility model further comprises a first knob 311 and a second knob 312, the first knob 311 and the second knob 312 are respectively arranged at the two ends of the bidirectional screw rod 306 and are arranged outside the mounting cover 305. The first knob 311 and the second knob 312 are simultaneously rotated, so that the bidirectional screw rod 306 can be rotated.

[0069] The specific structure of the clamping mechanism 200 is not limited in the embodiment of the utility model, and as long as the structure meeting the use requirement of the utility model is within the protection range of the utility model.

[0070] As one of the embodiments, please continue to refer to Figure 2 and Figure 5The clamping mechanism 200 disclosed by the embodiment of the utility model includes first clamping plate 201 and second clamping plate 202, wherein, first clamping plate 201 is connected with first connecting piece 309, and second clamping plate 202 is connected with second connecting piece 310.

[0071] When the bidirectional screw rod 306 is started, the first clamping plate 201 can realize horizontal movement along with the first connecting piece 309, and the second clamping plate 202 can realize horizontal movement along with the second connecting piece 310.

[0072] In order to prevent monocrystalline silicon from falling off in the process of discharging, the clamping mechanism disclosed by the embodiment of the utility model further includes first anti-skid pad 203 and second anti-skid pad 204, the first anti-skid pad 203 is arranged on the inner side of the first clamping plate 201, and the second anti-skid pad 204 is arranged on the inner side of the second clamping plate 202. In this way, the first anti-skid pad 203 and the second anti-skid pad 204 can improve the stability of the process of discharging monocrystalline silicon.

[0073] As a further embodiment, the top plate 3051 of the mounting cover 305 is further provided with a sliding groove, and the top ends of the first connecting piece 309 and the second connecting piece 310 can be slidably connected with the sliding groove. In this way, the first connecting piece 309 and the second connecting piece 310 can further improve the stability under the action of the sliding groove.

[0074] The embodiment of the utility model does not limit the specific structure of the crystal leading box 100, and any structure meeting the use requirements of the utility model is within the protection scope of the utility model.

[0075] As one of the embodiments, please refer to Figure 3 The crystal leading box 100 disclosed by the embodiment of the utility model includes a crystal leading box body 101, a mounting table 102 and a cover plate assembly 103, wherein the crystal leading box body 101 is used for containing raw materials, the mounting table 102 is arranged on the crystal leading box body 101, and the cover plate assembly 103 is arranged on the mounting table 102 in an openable and closable mode to realize the opening and closing of the crystal leading box body 101.

[0076] When the cover plate assembly 103 is opened, the monocrystalline silicon clamped by the clamping mechanism 200 can be inserted into the raw materials in the crystal leading box body 101 to realize crystal leading; when the cover plate assembly 103 is closed, the raw materials in the crystal leading box body 101 can realize the heat preservation effect.

[0077] The embodiment of the utility model does not limit the specific structure of the cover plate assembly 103, and any structure meeting the use requirements of the utility model is within the protection scope of the utility model.

[0078] The cover plate assembly 103 disclosed by the embodiment of the utility model is two, and is arranged on the two sides of the mounting table 102.

[0079] As a specific embodiment, refer to Figures 3-4 , Figures 6-8 The cover plate assembly 103 disclosed in the embodiment of the utility model comprises a driving member 1031, a linkage member and a cover plate body 1035, one end of the linkage member is connected with the driving member 1031, the other end is connected with the cover plate body 1035, and the driving member 1031 can overturn the cover plate body 1035 through the linkage member, so that the crystal pulling box body 101 is opened.

[0080] The driving member 1031 disclosed in the embodiment of the utility model can be a cylinder, can be a motor or can be other structures, as long as the structure meets the use requirements of the utility model, which is within the protection scope of the utility model.

[0081] As one of the embodiments, the cover plate assembly 103 disclosed in the embodiment of the utility model comprises a driving member 1031, a linkage member and a cover plate body 1035, wherein one end of the linkage member is connected with the driving member 1031, the other end is connected with the cover plate body 1035, and the driving member 1031 can overturn the cover plate body 1035 through the linkage member, so that the crystal pulling box body 101 is opened.

[0082] The specific structure of the linkage member is not limited in the embodiment of the utility model, as long as the structure meets the use requirements of the utility model, which is within the protection scope of the utility model.

[0083] As one of the embodiments, the linkage member disclosed in the embodiment of the utility model comprises a connecting sleeve 1032, a connecting plate 1033 and a connecting arm 1034, wherein the connecting sleeve 1032, the connecting plate 1033 and the connecting arm 1034 are sequentially movably connected.

[0084] The driving member 1031 is started, and the driving member 1031 sequentially drives the connecting sleeve 1032, the connecting plate 1033 and the connecting arm 1034 to act, so that the cover plate body 1035 is opened.

[0085] In order to make the opening and closing of the cover plate body 1035 more stable, the cover plate assembly 103 disclosed in the embodiment of the utility model further comprises a hinged plate 1036, one end of the hinged plate 1036 is connected with the cover plate body 1035, and the other end is hinged with the mounting table 102.

[0086] The mounting table 102 is provided with a groove, and the hinged plate 1036 is arranged in the groove.

[0087] When the cover plate body 1035 is turned up, the hinged plate 1036 also acts correspondingly, so that the opening of the cover plate body 1035 is more stable.

[0088] In order to facilitate the fixing of the driving member 1031, the crystal pulling box 100 further comprises a fixing member 104, which is fixed to the crystal pulling box body 101, and the driving member 1031 is fixed to the fixing member 104.

[0089] The fixing member 104 can be a fixing plate, a fixing sleeve or a fixing support, as long as the structure meets the requirements of the utility model.

[0090] As a preferred embodiment, the fixing member 104 is preferably a fixing sleeve, wherein the air cylinder is sleeved in the fixing sleeve, thereby saving space and making the structure of the whole crystal pulling device simpler and neater.

[0091] Finally, it should be noted that in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", "includes", "including" or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article or apparatus.

[0092] The various embodiments in the specification are described in a progressive manner, and each embodiment focuses on the difference from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.

[0093] The above description of the disclosed embodiments enables a person skilled in the art to implement or use the utility model. Various modifications to the embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. Therefore, the utility model will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A Czochralski single-crystal silicon production crystal-leading device, characterized in that, The utility model relates to a single crystal silicon pulling device, comprising: a crucible for containing raw materials and melting the raw materials into a melt; a clamping mechanism arranged at the upper part of the crucible for clamping single crystal silicon; a limiting mechanism connected with the clamping mechanism for limiting the position of the clamping mechanism in the horizontal and vertical directions.

2. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 1, wherein The utility model further comprises a support frame, the crucible is arranged at the lower part of the support frame, and the limiting mechanism and the clamping mechanism are both arranged at the upper part of the crucible.

3. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 2, wherein The limiting mechanism comprises a horizontal limiting assembly and a vertical limiting assembly, one end of the horizontal limiting assembly is connected with the vertical limiting assembly, and the other end is connected with the clamping mechanism.

4. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 3, wherein The vertical limiting assembly comprises: a fixed sleeve with an open end and a closed end, the open end being fixed to the support frame; a limiting sleeve slidably sleeved in the fixed sleeve, and the limiting sleeve being connected with the horizontal limiting assembly; a lifting member comprising a hydraulic cylinder and a piston rod, the hydraulic cylinder being fixed to the closed end, one end of the piston rod being arranged in the hydraulic cylinder, and the other end being connected with the horizontal limiting assembly.

5. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 4, wherein The horizontal limiting assembly comprises a mounting cover, a bidirectional screw rod and a moving member, the limiting sleeve and the lifting member being connected with the mounting cover, the bidirectional screw rod being rotatably mounted on the mounting cover, and the moving member being movably arranged on the bidirectional screw rod.

6. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 5, wherein The bidirectional screw rod comprises a first threaded part and a second threaded part, the screw directions of the first threaded part and the second threaded part being opposite. The moving member comprises a first threaded sleeve, a second threaded sleeve, a first connecting member and a second connecting member, the first threaded sleeve being connected with the first threaded part, the second threaded sleeve being connected with the second threaded part, the first connecting member being fixed to the first threaded sleeve, and the second connecting member being fixed to the second threaded sleeve.

7. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 6, wherein The center line of the piston rod is collinear with the center line of the mounting cover, and the center line of the fixed sleeve is collinear with the center line of the limiting sleeve.

8. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 5, wherein The mounting cover comprises a top plate, a first side plate and a second side plate, the first side plate and the second side plate being arranged at the two sides of the top plate respectively, mounting holes being formed in the first side plate and the second side plate, the bidirectional screw rod being rotatably mounted in the mounting holes, and the limiting sleeve and the piston rod being connected with the top plate.

9. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 5, wherein The horizontal limiting assembly further comprises a first knob and a second knob, the first knob and the second knob being arranged at the two ends of the bidirectional screw rod respectively and being placed outside the mounting cover.

10. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 6, wherein The clamping mechanism comprises a first clamping plate and a second clamping plate, the first clamping plate being connected with the first connecting member, and the second clamping plate being connected with the second connecting member.

11. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 10, wherein The clamping mechanism further comprises a first anti-skid pad and a second anti-skid pad, the first anti-skid pad being arranged at the inner side of the first clamping plate, and the second anti-skid pad being arranged at the inner side of the second clamping plate.

12. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 1, wherein The crucible comprises: a crucible body for containing the raw materials; a mounting table arranged on the crucible body; a cover plate assembly arranged on the mounting table and being openable and closable to realize the opening and closing of the crucible body.

13. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 12, wherein The cover plate assembly is two and oppositely arranged on two sides of the mounting table; The cover plate assembly comprises a driving member, a linkage member and a cover plate body, one end of the linkage member is connected with the driving member, the other end is connected with the cover plate body, the driving member can overturn the cover plate body through the linkage member, so that the crystal box body is opened.

14. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 13, wherein The linkage member comprises a connecting sleeve, a connecting plate and a connecting arm, the connecting sleeve, the connecting plate and the connecting arm are sequentially movably connected.

15. The seed introducing apparatus for producing a Czochralski silicon single crystal according to Claim 13, wherein The cover plate assembly further comprises a hinged plate, one end of the hinged plate is connected with the cover plate body, the other end is hinged with the mounting table.

16. The seed introducing apparatus for producing a Czochralski silicon single crystal according to claim 13, wherein The crystal box further comprises a fixing member, the fixing member is fixed on the crystal box body, and the driving member is fixed on the fixing member.

Images