Crystal growth lifting mechanism based on portal frame structure

Abstract

The utility model discloses a crystal growth lifting mechanism based on a portal frame structure, which relates to the technical field of crystal growth equipment, comprises a main bracket, and is characterized in that two groups of portal frame side frames are arranged above the main bracket, and a portal frame cross frame is welded between the two groups of portal frame side frames; a lifting and rotating assembly capable of stably lifting and rotating a seed crystal shaft is arranged at the top end of the portal frame transverse frame. The crystal growth lifting mechanism based on the portal frame structure is provided with a mounting plate, a lead screw power head, a flange type magnetic fluid hollow shaft assembly, a water circulation rotating joint and a columnar weighing sensor, when the crystal growth lifting mechanism is used, a first ball screw rotates, a lifting platform plate moves up and down, and a hollow shaft drives a rigid seed crystal shaft below to synchronously rotate at a constant speed; on the three groups of uniformly distributed columnar weighing sensors, the weight of crystals can be conveniently monitored, the stable lifting and rotating function is realized, and the problem that the device does not have the stable lifting and rotating function is solved.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, specifically a crystal growth pulling mechanism based on a gantry structure. Background Technology

[0002] During the growth of semiconductor material crystals, a gantry-type lifting mechanism is usually used to lift the seed crystal shaft, which facilitates monitoring and removal of the crystal.

[0003] Currently, most seed crystal shaft lifting mechanisms on the market use single-axis drive. The center of gravity of the seed crystal shaft and the drive component form a single cantilever structure. The seed crystal shaft is prone to vibration when rotating or lifting over a large span, which can lead to crystal growth defects. In addition, traditional lifting mechanisms are fixed to the furnace chamber or furnace cover, making it difficult to remove large-sized crystals. Seed crystal shafts that have rotation, lifting and cooling functions at the same time lack weighing function, making it inconvenient to track the crystal growth process. Furthermore, their gantry span is large, and they use dual motors to independently drive the lead screws on the two columns. The synchronization and stability of the lifting of the two lead screws are insufficient, leaving room for further improvement.

[0004] Now, a novel crystal growth pulling mechanism based on a gantry structure is proposed to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a crystal growth pulling mechanism based on a gantry structure to solve the problem mentioned in the background art of not having a stable lifting and rotation function.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a crystal growth and pulling mechanism based on a gantry structure, comprising a main support, two sets of gantry side frames arranged above the main support, a gantry cross frame welded between the two sets of gantry side frames, a small furnace cover body arranged below the gantry cross frame, a servo motor mounted on the right side of the top of the gantry cross frame, a second commutator arranged on the left side of the servo motor, a third guide rail mounting column fixedly connected to the right side of the bottom of the gantry cross frame, a second slide rail fixedly connected to the left side of the third guide rail mounting column, a second lead screw support bearing bracket fixedly connected to the bottom end of the third guide rail mounting column, and a second lead screw support bearing bracket movably connected between the second lead screw support bearing bracket and the second commutator. A ball screw is provided, and a second slider is sleeved on the outside of the second ball screw. A lifting frame is fixedly connected between the small furnace cover body and the second slider. A third slide rail is fixedly connected to both sides of the top of the main support. A third slider is fixedly connected to the bottom of the gantry side frame. A front limit block is fixedly connected to the front end of the third slide rail. A rear limit block is fixedly connected to the rear end of the third slide rail. A buffer pad is glued to the front end of the rear limit block. A locking screw is fixedly connected to the top of the rear end of the third slider. A first locking nut and a second locking nut are sleeved on the outside of the locking screw. A pre-limiting impact post is fixedly connected to the bottom of the rear end of the third slider. A lifting and rotating assembly that can stably lift and rotate the seed crystal shaft is provided at the top of the gantry cross frame.

[0007] The lifting and rotating assembly includes a mounting plate, which is fixedly connected to the middle position of the gantry frame crossbeam. A first guide rail mounting column and a second guide rail mounting column are respectively provided on the left and right sides of the mounting plate. A first slide rail is fixedly connected to the inner surface of each of the first and second guide rail mounting columns. A first screw support bearing bracket is fixedly connected to the top of each of the first and second guide rail mounting columns. Screw drive heads are respectively installed on both sides of the top of the mounting plate. A first ball screw is movably connected between the screw drive head and the first screw support bearing bracket. An upper limit switch is fixedly connected to the top of the front end of the second guide rail mounting column, and a lower limit switch is fixedly connected to the bottom of the front end of the second guide rail mounting column. A first drive motor is installed on the left side of the top of the mounting plate. Two sets of first commutators are installed at the front end of the top. A first elastic coupling is provided between the first drive motor and the first commutator. A second elastic coupling is provided between the two sets of first commutators. A rigid seed crystal shaft is vertically arranged inside the mounting plate. A lifting platform plate is provided above the mounting plate. First sliders are fixedly connected to the left and right sides of the lifting platform plate respectively. A limit stop block is fixedly connected to the left side of the front end of the lifting platform plate. A flange-type magnetic fluid hollow shaft assembly is provided above the lifting platform plate. A second drive motor is installed at the front end of the lifting platform plate. A belt is provided between the second drive motor and the flange-type magnetic fluid hollow shaft assembly. A water circulation rotary joint is threaded to the top of the flange-type magnetic fluid hollow shaft assembly. Three sets of columnar weighing sensors are installed at the top of the lifting platform plate.

[0008] As a further technical solution of this utility model, the lifting platform plate is provided with two sets of screw flange nuts that are compatible with the first ball screw, and the first slider is compatible with the first slide rail.

[0009] As a further technical solution of this utility model, the output end of the first commutator is connected to the lead screw power head, and the bottom ends of the first guide rail mounting column and the second guide rail mounting column are respectively fixedly connected to the top end of the gantry frame crossbeam.

[0010] As a further technical solution of this utility model, the top end of the columnar weighing sensor is connected to the bottom end of the flange-type magnetic fluid hollow shaft assembly, and the rigid seed crystal shaft and the flange-type magnetic fluid hollow shaft assembly are connected by a flange.

[0011] As a further technical solution of this utility model, the output end of the servo motor is connected to the input end of the second commutator, and the second slider and the second slide rail are adapted to each other.

[0012] As a further technical solution of this utility model, the shape and size of the inside of the small furnace cover body are adapted to the shape and size of the outside of the rigid seed crystal shaft, and the small furnace cover body can slide up and down along the outside of the rigid seed crystal shaft.

[0013] As a further technical solution of this utility model, the third slide rail and the third slider are adapted to each other, and the third slider can slide back and forth along the outside of the third slide rail.

[0014] As a further technical solution of this utility model, the rear limiting block has a screw hole inside that allows the locking screw to pass through, and the threads inside the first locking nut and the second locking nut match the threads outside the locking screw.

[0015] Compared with the prior art, the beneficial effects of this utility model are: the crystal growth lifting mechanism based on the gantry structure not only realizes the function of stable lifting and rotation, but also realizes the function of easy opening of the cover and crystal picking, and also realizes the function of easy forward and backward movement of the gantry.

[0016] (1) The system comprises a mounting plate, a lead screw power head, a first guide rail mounting column, a first slide rail, a first lead screw support bearing bracket, a first ball screw, an upper limit switch, a second guide rail mounting column, a lower limit switch, a first drive motor, a first flexible coupling, a first commutator, a second flexible coupling, a rigid seed crystal shaft, a lifting platform plate, a first slider, a limit switch block, a second drive motor, a belt, a flange-type magnetic fluid hollow shaft assembly, a water circulation rotary joint, and a columnar weighing sensor. In use, the first drive motor transmits power to the lead screw power head through the first flexible coupling, the first commutator, and the second flexible coupling, driving the first... When a ball screw rotates, the lifting platform plate moves up and down. The flange-type magnetic fluid hollow shaft assembly, together with the rigid seed crystal shaft at the bottom, moves up and down synchronously. Cooling water enters the rigid seed crystal shaft through the water circulation rotary joint and the flange-type magnetic fluid hollow shaft assembly to cool it and assist crystallization. The second drive motor can drive the hollow shaft inside the flange-type magnetic fluid hollow shaft assembly to rotate via a belt. The hollow shaft drives the rigid seed crystal shaft below to rotate synchronously and uniformly. At the same time, the weight of the rigid seed crystal shaft and the flange-type magnetic fluid hollow shaft assembly directly acts on three sets of evenly distributed columnar weighing sensors, which facilitates the monitoring of the weight of the crystallization and realizes the function of stable lifting and rotation.

[0017] (2) By setting up a servo motor, a third guide rail mounting column, a second slide rail, a second screw support bearing bracket, a second ball screw, a second slider, a second commutator and a lifting frame, when it is necessary to open the cover to take out the crystal, the servo motor drives the second ball screw to rotate through the second commutator, and the second slider moves up along the second slide rail on the third guide rail mounting column. The lifting frame lifts the main body of the small furnace cover, thus realizing the function of facilitating the opening of the cover to take out the crystal.

[0018] (3) By setting a third slide rail, a third slider, a front limit block, a rear limit block, a buffer pad, a locking screw, a first locking nut, a second locking nut and a pre-limiting impact post, when in use, the locking screw on the back of the third slider passes through the rear limit block and is locked by the first locking nut and the second locking nut. The pre-limiting impact post presses against the buffer pad to achieve buffering. When the gantry needs to be moved, the second locking nut is removed and the gantry is pushed directly. The gantry, together with the third slider at the bottom, slides along the third slide rail, realizing the function of facilitating the forward and backward movement of the gantry. Attached Figure Description

[0019] Figure 1 This is a front view structural diagram of the present utility model;

[0020] Figure 2 This is a front view structural diagram of the gantry crossbeam of this utility model;

[0021] Figure 3 This is a front view structural diagram of the main body of the small furnace cover of this utility model;

[0022] Figure 4 This is a side view of the structure of this utility model;

[0023] Figure 5 This is a side view enlarged structural diagram of the gantry frame in its natural state according to this utility model;

[0024] Figure 6 This is a side-view enlarged structural diagram of the gantry frame in the locked state of this utility model.

[0025] In the diagram: 1. Main support; 2. Gantry side frame; 3. Gantry cross frame; 4. Mounting plate; 5. Lead screw power head; 6. First guide rail mounting column; 7. First slide rail; 8. First lead screw support bearing bracket; 9. First ball screw; 10. Upper limit switch; 11. Second guide rail mounting column; 12. Lower limit switch; 13. First drive motor; 14. First flexible coupling; 15. First commutator; 16. Second flexible coupling; 17. Rigid seed crystal shaft; 18. Lifting platform plate; 19. First slider; 20. Limit switch block; 21. Second drive motor; 22. Belt; 3. Flange-type magnetic fluid hollow shaft assembly; 24. Water circulation rotary joint; 25. Columnar weighing sensor; 26. Small furnace cover body; 27. Servo motor; 28. Third guide rail mounting column; 29. ​​Second slide rail; 30. Second screw support bearing bracket; 31. Second ball screw; 32. Second slider; 33. Second commutator; 34. Lifting frame; 35. Third slide rail; 36. Third slider; 37. Front limit stop; 38. Rear limit stop; 39. Buffer pad; 40. Locking screw; 41. First locking nut; 42. Second locking nut; 43. Pre-limiting impact post. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Example: Please refer to Figure 1-6 A crystal growth pulling mechanism based on a gantry structure includes a main support 1, two sets of gantry side frames 2 are arranged above the main support 1, a gantry cross frame 3 is welded between the two sets of gantry side frames 2, a small furnace cover body 26 is arranged below the gantry cross frame 3, and a pulling and rotating assembly that can stably pull and rotate the seed crystal axis is arranged at the top of the gantry cross frame 3.

[0028] Please see Figure 1-6 A crystal growth lifting mechanism based on a gantry structure also includes a lifting rotation assembly. The lifting rotation assembly includes a mounting plate 4, which is fixedly connected to the middle position of the gantry crossbeam 3. A first guide rail mounting column 6 and a second guide rail mounting column 11 are respectively provided on the left and right sides of the mounting plate 4. A first slide rail 7 is fixedly connected to the inner sides of the first guide rail mounting column 6 and the second guide rail mounting column 11. A first lead screw support bearing bracket 8 is fixedly connected to the top of the first guide rail mounting column 6 and the second guide rail mounting column 11. A lead screw power head 5 is installed on both sides of the top of the mounting plate 4. A first ball screw 9 is movably connected between the lead screw power head 5 and the first lead screw support bearing bracket 8. An upper limit device 10 is fixedly connected to the top of the front end of the second guide rail mounting column 11, and a lower limit device 12 is fixedly connected to the bottom of the front end of the second guide rail mounting column 11. A first drive motor 1 is installed on the left side of the top of the mounting plate 4. 3. Two sets of first commutators 15 are installed at the front end of the top of the mounting plate 4. A first elastic coupling 14 is provided between the first drive motor 13 and the first commutator 15. A second elastic coupling 16 is provided between the two sets of first commutators 15. A rigid seed crystal shaft 17 is vertically arranged inside the mounting plate 4. A lifting platform plate 18 is provided above the mounting plate 4. First sliders 19 are fixedly connected to the left and right sides of the lifting platform plate 18 respectively. A limit block 20 is fixedly connected to the left side of the front end of the lifting platform plate 18. A flange-type magnetic fluid hollow shaft assembly 23 is provided above the lifting platform plate 18. A second drive motor 21 is installed at the front end of the lifting platform plate 18. A belt 22 is provided between the second drive motor 21 and the flange-type magnetic fluid hollow shaft assembly 23. A water circulation rotary joint 24 is threadedly connected to the top end of the flange-type magnetic fluid hollow shaft assembly 23. Three sets of columnar weighing sensors 25 are installed at the top end of the lifting platform plate 18.

[0029] The lifting platform plate 18 is equipped with two sets of screw flange nuts that are compatible with the first ball screw 9. The first slider 19 is compatible with the first slide rail 7. The output end of the first commutator 15 is connected to the screw power head 5. The bottom ends of the first guide rail mounting column 6 and the second guide rail mounting column 11 are fixedly connected to the top end of the gantry frame 3, respectively. The top end of the column-shaped load cell 25 is connected to the bottom end of the flange-type magnetic fluid hollow shaft assembly 23. The rigid seed crystal shaft 17 and the flange-type magnetic fluid hollow shaft assembly 23 are connected by a flange, which can stably lift and rotate while monitoring weight information.

[0030] Specifically, such as Figure 1 and Figure 2 As shown, the first drive motor 13 transmits power to the lead screw power head 5 through the first flexible coupling 14, the first commutator 15, and the second flexible coupling 16, driving the first ball screw 9 to rotate. The lifting platform plate 18 then moves up and down, and the flange-type magnetic fluid hollow shaft assembly 23, together with the rigid seed crystal shaft 17 at the bottom, moves up and down synchronously. Cooling water enters the rigid seed crystal shaft 17 along the water circulation rotary joint 24 and the flange-type magnetic fluid hollow shaft assembly 23 to cool it and assist crystallization. The second drive motor 21 can drive the hollow shaft inside the flange-type magnetic fluid hollow shaft assembly 23 to rotate through the belt 22. The hollow shaft drives the rigid seed crystal shaft 17 below to rotate synchronously and uniformly. At the same time, the weight of the rigid seed crystal shaft 17 and the flange-type magnetic fluid hollow shaft assembly 23 directly acts on three sets of evenly distributed columnar weighing sensors 25, which facilitates the monitoring of the weight of the crystallization.

[0031] A servo motor 27 is installed on the right side of the top of the gantry frame 3. A second commutator 33 is set on the left side of the servo motor 27. A third guide rail mounting column 28 is fixedly connected to the right side of the bottom of the gantry frame 3. A second slide rail 29 is fixedly connected to the left side of the third guide rail mounting column 28. A second lead screw support bearing bracket 30 is fixedly connected to the bottom end of the third guide rail mounting column 28. A second ball screw 31 is movably connected between the second lead screw support bearing bracket 30 and the second commutator 33. A second slider 32 is sleeved on the outside of the second ball screw 31. A lifting frame 34 is fixedly connected between the small furnace cover body 26 and the second slider 32. The output end of the servo motor 27 is connected to the input end of the second commutator 33. The second slider 32 and the second slide rail 29 are adapted to each other. The shape and size inside the small furnace cover body 26 are adapted to the shape and size outside the rigid seed crystal shaft 17. The small furnace cover body 26 can slide up and down along the outside of the rigid seed crystal shaft 17, which is convenient for opening the cover and taking out the crystal.

[0032] Specifically, such as Figure 1 and Figure 3As shown, the servo motor 27 drives the second ball screw 31 to rotate through the second commutator 33, and the second slider 32 moves upward along the second slide rail 29 on the third guide rail mounting column 28, and lifts the small furnace cover body 26 through the lifting frame 34.

[0033] The main support 1 has a third slide rail 35 fixedly connected to both sides of the top. The gantry side frame 2 has a third slider 36 fixedly connected to the bottom. The front end of the third slide rail 35 has a front limit block 37 fixedly connected to the front end. The rear end of the third slide rail 35 has a rear limit block 38 fixedly connected to the rear end. The front end of the rear limit block 38 has a buffer pad 39 glued to it. The top of the rear end of the third slider 36 has a locking screw 40 fixedly connected to it. The locking screw 40 has a first locking nut 41 and a second locking nut 42 sleeved on its outside. The bottom of the rear end of the third slider 36 has a pre-limiting impact post 43 fixedly connected to it. The third slide rail 35 and the third slider 36 are compatible. The third slider 36 can slide back and forth along the outside of the third slide rail 35. The rear limit block 38 has a screw hole inside that allows the locking screw 40 to pass through. The threads inside the first locking nut 41 and the second locking nut 42 match the threads outside the locking screw 40, which facilitates the movement and locking of the gantry.

[0034] Specifically, such as Figure 1 , Figure 4 , Figure 5 and Figure 6 As shown, when locked, the locking screw 40 on the back of the third slider 36 passes through the back limit block 38 and is locked by the first locking nut 41 and the second locking nut 42. The pre-limiting impact post 43 presses against the buffer pad 39 to achieve buffering. When the gantry needs to be moved, the second locking nut 42 is removed and the gantry is pushed directly. The gantry, together with the third slider 36 at the bottom, slides along the third slide rail 35.

[0035] Working principle: When this utility model is in use, firstly, the first drive motor 13 transmits power to the lead screw power head 5 through the first flexible coupling 14, the first commutator 15, and the second flexible coupling 16, driving the first ball screw 9 to rotate. The lifting platform plate 18 then moves up and down, and the flange-type magnetic fluid hollow shaft assembly 23, together with the rigid seed crystal shaft 17 at the bottom, moves up and down synchronously. Cooling water enters the rigid seed crystal shaft 17 along the water circulation rotary joint 24 and the flange-type magnetic fluid hollow shaft assembly 23 to cool it and assist crystallization. The second drive motor 21 can drive the hollow shaft inside the flange-type magnetic fluid hollow shaft assembly 23 to rotate through the belt 22. The hollow shaft drives the rigid seed crystal shaft 17 below to rotate synchronously and uniformly. At the same time, the weight of the rigid seed crystal shaft 17 and the flange-type magnetic fluid hollow shaft assembly 23 directly acts on three sets of evenly distributed columnar weighing sensors 25, which facilitates the monitoring of the weight of the crystallization. When it is necessary to open the cover to retrieve the crystal, the servo motor 27 drives the second ball screw 31 to rotate through the second commutator 33. The second slider 32 then moves upward along the second slide rail 29 on the third guide rail mounting column 28, and the lifting frame 34 lifts the small furnace cover body 26. The locking screw 40 on the back of the third slider 36 passes through the rear limit block 38 and is locked by the first locking nut 41 and the second locking nut 42. The pre-limiting impact column 43 presses against the buffer pad 39 to achieve buffering. When it is necessary to move the gantry, the second locking nut 42 is removed and the gantry is pushed directly. The gantry, together with the third slider 36 at the bottom, slides along the third slide rail 35.

[0036] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A crystal growth and pulling mechanism based on a gantry structure, comprising a main support (1), characterized in that: Two sets of gantry side frames (2) are provided above the main support (1). A gantry cross frame (3) is welded between the two sets of gantry side frames (2). A small furnace cover body (26) is provided below the gantry cross frame (3). A servo motor (27) is installed on the right side of the top of the gantry cross frame (3). A second commutator (33) is provided on the left side of the servo motor (27). A third guide rail mounting column (28) is fixedly connected to the right side of the bottom of the gantry cross frame (3). A second slide rail (29) is fixedly connected to the left side of the third guide rail mounting column (28). A second screw support bearing bracket (30) is fixedly connected to the bottom end of the third guide rail mounting column (28). A second ball screw (31) is movably connected between the second ball screw support bearing bracket (30) and the second commutator (33). A second slider (32) is sleeved on the outside of the second ball screw (31). A lifting frame (34) is fixedly connected between the main body (26) of the small furnace cover and the second slider (32). A third slide rail (35) is fixedly connected to both sides of the top of the main support (1). A third slider (36) is fixedly connected to the bottom of the side frame (2) of the gantry frame. A front limit block (37) is fixedly connected to the front end of the third slide rail (35). A rear limit block (38) is fixedly connected to the rear end of the third slide rail (35). A buffer pad (39) is glued to the front end of the rear limit block (38). A locking screw (40) is fixedly connected to the top of the rear end of the third slider (36). A first locking nut (41) and a second locking nut (42) are sleeved on the outside of the locking screw (40). A pre-limiting impact column (43) is fixedly connected to the bottom of the rear end of the third slider (36). A lifting and rotating assembly that can stably lift and rotate the seed crystal shaft is provided at the top of the gantry frame (3). The lifting and rotating assembly includes a mounting plate (4), which is fixedly connected to the middle position of the gantry frame (3). A first guide rail mounting column (6) and a second guide rail mounting column (11) are respectively provided on the left and right sides of the mounting plate (4). A first slide rail (7) is fixedly connected to the inner surface of the first guide rail mounting column (6) and the second guide rail mounting column (11). A first lead screw support bearing bracket is fixedly connected to the top of the first guide rail mounting column (6) and the second guide rail mounting column (11). 8) A lead screw power head (5) is installed on both sides of the top of the mounting plate (4). A first ball screw (9) is movably connected between the lead screw power head (5) and the first lead screw support bearing bracket (8). An upper limit device (10) is fixedly connected to the top of the front end of the second guide rail mounting column (11). A lower limit device (12) is fixedly connected to the bottom of the front end of the second guide rail mounting column (11). A first drive motor (13) is installed on the left side of the top of the mounting plate (4). Two [unclear text - possibly related to a motor or motor] are installed at the front end of the top of the mounting plate (4). A first commutator (15) is provided in the first set, and a first flexible coupling (14) is provided between the first drive motor (13) and the first commutator (15). A second flexible coupling (16) is provided between the two sets of first commutators (15). A rigid seed crystal shaft (17) is vertically provided inside the mounting plate (4). A lifting platform plate (18) is provided above the mounting plate (4). A first slider (19) is fixedly connected to the left and right sides of the lifting platform plate (18). The left side of the front end of the lifting platform plate (18) is fixedly connected to... Connected to the limit stop block (20), a flange-type magnetic fluid hollow shaft assembly (23) is provided above the lifting platform plate (18). A second drive motor (21) is installed at the front end of the lifting platform plate (18). A belt (22) is provided between the second drive motor (21) and the flange-type magnetic fluid hollow shaft assembly (23). A water circulation rotary joint (24) is threaded to the top end of the flange-type magnetic fluid hollow shaft assembly (23). Three sets of columnar weighing sensors (25) are installed at the top end of the lifting platform plate (18).

2. The crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The lifting platform plate (18) is equipped with two sets of screw flange nuts that are compatible with the first ball screw (9), and the first slider (19) is compatible with the first slide rail (7).

3. The crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The output end of the first commutator (15) is connected to the lead screw power head (5), and the bottom ends of the first guide rail mounting column (6) and the second guide rail mounting column (11) are fixedly connected to the top end of the gantry frame (3).

4. The crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The top end of the columnar weighing sensor (25) is connected to the bottom end of the flange-type magnetic fluid hollow shaft assembly (23), and the rigid seed crystal shaft (17) and the flange-type magnetic fluid hollow shaft assembly (23) are connected by a flange.

5. A crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The output end of the servo motor (27) is connected to the input end of the second commutator (33), and the second slider (32) and the second slide rail (29) are adapted to each other.

6. The crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The shape and size of the inside of the small furnace cover body (26) are adapted to the shape and size of the outside of the rigid seed crystal shaft (17), and the small furnace cover body (26) can slide up and down along the outside of the rigid seed crystal shaft (17).

7. A crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The third slide rail (35) and the third slider (36) are adapted to each other, and the third slider (36) can slide back and forth along the outside of the third slide rail (35).

8. A crystal growth and pulling mechanism based on a gantry structure according to claim 1, characterized in that: The rear limiting block (38) has a screw hole inside that allows the locking screw (40) to pass through. The threads inside the first locking nut (41) and the second locking nut (42) match the threads outside the locking screw (40).

Images