Bottom plate assembly for single crystal furnace and single crystal furnace

Abstract

The utility model provides a bottom plate assembly for a single crystal furnace and the single crystal furnace. The bottom plate assembly for the single crystal furnace comprises a bottom plate part, wherein a gas guide channel is formed in the bottom of the bottom plate part; the air guide cover covers an inlet of the air guide channel, only one opening is formed in the side direction of the air guide cover, an air guide space is formed between the air guide cover and the surface of the bottom plate part, and the opening is communicated with the air guide channel through the air guide space. The gas guide cover solves the problem that heat loss of a crucible is easily caused when the gas guide cover is used in the prior art.

Description

Technical Field

[0001] This utility model relates to the field of hot zone technology for single crystal furnaces, and more specifically, to a base plate assembly for a single crystal furnace and a single crystal furnace. Background Technology

[0002] In the field of single crystal furnace hot zone technology, the design and performance of the gas guide hood are crucial factors in ensuring the quality and efficiency of single crystal material growth. Traditional gas guide hoods have their exhaust ports directly aligned with the bottom of the hot zone crucible. As the core component for single crystal growth, the crucible requires extremely precise temperature control at high temperatures to promote uniform single crystal growth. However, conventional gas guide hoods have multiple openings, some connected to the gas guide cylinder and others corresponding to the bottom of the crucible. During exhaust, the gas passing through the bottom of the crucible carries away a significant amount of heat, and thermal radiation directly enters the exhaust cylinder through multiple openings in the gas guide hood and is rapidly dissipated into the environment via connected pipes. This not only reduces the bottom insulation performance but also increases the energy demand of the heating components, thereby increasing the energy consumption and production cost of the single crystal furnace. Furthermore, the airflow guidance of conventional gas guide hoods also poses safety hazards. During the single crystal growth process, the generation of volatile substances is unavoidable. When these substances circulate in the furnace, if they are directly blown around the electrodes by the airflow of the gas guide hood, they are prone to arcing at high temperatures, which can damage the electrodes and graphite parts. In severe cases, it can even cause equipment failure, resulting in huge economic losses and safety risks.

[0003] As can be seen from the above, the existing technology has the problem that the use of the gas guide hood can easily cause heat loss from the crucible. Utility Model Content

[0004] The main objective of this invention is to provide a base plate assembly and a single crystal furnace for use in a single crystal furnace, so as to solve the problem that heat loss from the crucible is easily caused when the gas guide hood is used in the prior art.

[0005] To achieve the above objectives, according to one aspect of the present invention, a bottom plate assembly for a single crystal furnace is provided, comprising: a bottom plate portion, wherein a gas guiding channel is provided at the bottom of the bottom plate portion; a gas guiding hood, wherein the gas guiding hood covers the inlet of the gas guiding channel, the gas guiding hood having only one opening on its side, a gas guiding space is formed between the gas guiding hood and the surface of the bottom plate portion, and the opening communicates with the gas guiding channel through the gas guiding space.

[0006] Furthermore, the opening is positioned facing the edge of the base plate.

[0007] Furthermore, the air guide shroud is partially installed within the air guide channel.

[0008] Furthermore, the air guide hood includes a connecting part and a main body part connected in sequence. The connecting part is disposed in the air guide channel, and the inlet of the air guide channel is located in the area of ​​the main body part projected onto the base plate.

[0009] Furthermore, the main body includes: a top plate, which is spaced apart from the bottom plate to form a first distance L1; and a side plate, which is disposed at the bottom of the top plate, is U-shaped and has an opening, and has a connecting part connected to the end of the side plate away from the top plate.

[0010] Furthermore, the first distance L1 and the diameter D of the air guide channel satisfy the following condition: 9>D / L1>4.

[0011] Furthermore, a second distance L2 is formed between the opening and the edge of the bottom plate, and the minimum distance L3 from the opening to the edge of the air duct inlet satisfies the following condition with respect to the second distance L2: 6>L2 / L3>4.

[0012] Furthermore, the angle between the orientation of the air duct opening and the line connecting the center of the base plate to the air duct is between 0° and 15°.

[0013] Furthermore, there are two air guide channels and two corresponding air guide hoods, with the openings of the two air guide hoods facing away from each other.

[0014] According to another aspect of the present invention, the present invention also provides a single crystal furnace, comprising: a crucible; a heat-insulating cylinder; and a bottom plate assembly, wherein the bottom plate assembly is the aforementioned bottom plate assembly, the bottom plate assembly is disposed inside the heat-insulating cylinder, and a receiving space is formed between the heat-insulating cylinder and the bottom plate assembly, the crucible is disposed in the receiving space, and the gas guide hood of the bottom plate assembly is spaced apart from the inner wall of the heat-insulating cylinder, the opening of the gas guide hood facing the inner wall of the heat-insulating cylinder.

[0015] The present invention utilizes a base plate assembly comprising a base plate portion and a gas guide hood. A gas guide channel is provided at the bottom of the base plate portion, and the gas guide hood covers the entrance of the gas guide channel. The gas guide hood has only one side opening, forming a gas guide space between the gas guide hood and the surface of the base plate portion. The opening communicates with the gas guide channel through the gas guide space. By placing the gas guide hood at the entrance of the gas guide channel, when the single crystal furnace needs to exhaust gas, the gas can only enter the gas guide space and then the gas guide channel through the side opening. The gas guide hood provides heat insulation, preventing heat from the bottom of the crucible from being directly lost through thermal radiation into the gas guide channel during the use of the single crystal furnace. Compared to the traditional method of setting multiple openings in the gas guide hood, this application improves the heat preservation effect of the crucible and solves the problem of heat loss from the crucible during the use of the gas guide hood in the prior art. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 A schematic diagram of the single crystal furnace in an embodiment of this utility model is shown at one angle; and

[0018] Figure 2 An exploded view of a single crystal furnace in an embodiment of this utility model is shown;

[0019] Figure 3 This diagram shows a single crystal furnace in an embodiment of the present invention from another angle.

[0020] Figure 4 It shows Figure 3 Cross-sectional view of AA;

[0021] Figure 5 A schematic diagram of the structure of the base plate and the air guide shroud in an embodiment of this utility model is shown.

[0022] Figure 6 A schematic diagram showing the dimensions and structure of the base plate portion according to an embodiment of the present invention is provided.

[0023] Figure 7 A schematic diagram of the structure of the air guide cover according to an embodiment of the present invention is shown.

[0024] The above figures include the following reference numerals:

[0025] 10. Base plate; 11. Air guide channel; 20. Air guide hood; 21. Connecting part; 22. Main body; 221. Side plate; 222. Top plate; 30. Opening; 40. Air guide space; 50. Crucible; 60. Insulation cylinder; 70. Reception space; 80. Support rod; 90. Icon. Detailed Implementation

[0026] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0027] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0028] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0029] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0030] To address the problem of heat loss from the crucible caused by the use of gas guide hoods in existing technologies, this invention provides a base plate assembly for a single crystal furnace and a single crystal furnace.

[0031] like Figures 1 to 7 As shown, the single crystal furnace includes a base plate assembly, a crucible 50, a heat insulation cylinder 60, and a support rod 80. The support rod 80 passes through the base plate assembly, which is housed within the heat insulation cylinder 60, forming a receiving space 70 between the heat insulation cylinder 60 and the base plate assembly. The crucible 50 is housed within the receiving space 70 and contacts the end of the support rod 80 located within the receiving space 70, thus supporting the crucible 50.

[0032] The following section provides a detailed explanation of the single crystal furnace and the base plate assembly.

[0033] like Figures 1 to 7 As shown, the base plate assembly for a single crystal furnace includes a base plate portion 10 and a gas guide hood 20. A gas guide channel 11 is provided at the bottom of the base plate portion 10. The gas guide hood 20 covers the inlet of the gas guide channel 11, and the gas guide hood 20 has only one side opening 30. A gas guide space 40 is formed between the gas guide hood 20 and the surface of the base plate portion 10, and the opening 30 communicates with the gas guide channel 11 through the gas guide space 40.

[0034] By covering the entrance of the gas guide shroud 20 at the gas guide channel 11, the gas from the single crystal furnace can only enter the gas guide space 40 and then the gas guide channel 11 through the side opening 30 when exhaust is required. The gas guide shroud 20 can play a role in heat insulation, preventing the heat at the bottom of the crucible 50 from being directly lost through heat radiation into the gas guide channel 11 when the single crystal furnace is in use. Compared with the traditional method of setting multiple openings 30 in the gas guide shroud 20, this application can improve the heat preservation effect of the crucible.

[0035] In this embodiment, in order to further optimize the gas flow path in the single crystal furnace, the opening 30 is set toward the edge of the bottom plate 10.

[0036] Specifically, the gas guide hood 20 is spaced apart from the edge of the base plate 10, and the opening 30 is also spaced apart from the edge of the base plate 10, so that after gas is injected above the crucible 50, the gas gradually reaches the edge of the base plate 10 and enters the opening 30 along the edge.

[0037] In this embodiment, the air guide hood 20 and the inner wall of the heat preservation cylinder 60 are spaced apart, and the opening 30 of the air guide hood 20 faces the inner wall of the heat preservation cylinder 60.

[0038] Specifically, a gap is formed between the inner walls of the crucible 50 and the insulation cylinder 60. When the single crystal furnace starts working, an inert gas, such as argon, is injected downwards from above the insulation cylinder 60. The gas moves downwards along the gap between the inner walls of the crucible 50 and the insulation cylinder 60, reaching the bottom of the containing space 70 and above the bottom plate 10. It then enters the gas guiding space 40 through the opening 30 and finally enters the gas guiding channel 11 and is discharged. The way the opening 30 faces the inner wall of the insulation cylinder 60 ensures that the gas, as it enters the opening 30 along the gap, does not pass through the bottom of the crucible 50, or passes through it less, thus preventing heat loss at the bottom of the crucible 50 caused by gas flowing there. It can be understood that with the opening 30 facing the insulation cylinder 60, the movement of the gas within the containing space 70 is similar to the movement of water through two drain outlets at the bottom of a pool, forming a "vortex" that guides the gas towards the opening 30.

[0039] In this embodiment, to further prevent gas movement at the opening 30 from carrying away heat from the bottom of the crucible 50, the projection portion of the gas guide shroud 20 on the base plate 10 is located outside the projection area of ​​the crucible 50 on the base plate 10 (see reference). Figure 3 The gas guide shroud 20 has an opening 30 in its extended portion, thereby preventing the gas "vortex" formed at the opening 30 from being located at the bottom of the crucible 50 and causing the heat at the bottom of the crucible 50 to be carried away.

[0040] In this embodiment, the angle between the orientation of the opening 30 of the air guide shroud 20 and the line connecting the center of the base plate portion 10 to the air guide shroud 20 is between 0° and 15°.

[0041] Specifically, the line connecting the center of the base plate 10 to the gas guide shroud 20 is the same line connecting the center of the base plate 10 to the gas guide channel 11. An exhaust area will be formed at the opening 30. The convergence position of the gas in the containment space 70 (the gas "vortex" formed) will be different depending on the angle of the angle. If the angle is too large, the gas exhaust area will overlap with the crucible 50, which will cause the heat at the bottom of the crucible 50 to be lost.

[0042] Furthermore, the base plate assembly also includes electrodes (not shown in the figure). The electrodes are positioned on the side of the base plate 10 facing the crucible 50. The electrodes generate heat to provide sufficient heat to the interior of the single crystal furnace, primarily through resistance heating. When current passes through the electrodes, they generate heat, which is crucial for maintaining a high-temperature environment during single crystal growth, melting the raw material (such as silicon), and keeping it at a stable temperature. The electrodes are in direct or indirect contact with the crucible 50, ensuring that heat is transferred uniformly and efficiently to the melt. During the single crystal preparation process, volatiles are generated in the crucible 50. The movement of the gas carries these volatiles. An excessively large angle can cause the opening 30 to approach the electrode, making it easier for the gas-driven volatiles to approach the electrode, thus posing a risk of electrode arcing and a significant safety hazard.

[0043] In this embodiment, the orientation of the opening 30 is parallel and collinear with the line connecting the center of the bottom plate portion 10 and the air guide hood 20, i.e., the included angle is 0°.

[0044] In this embodiment, there are two air guide channels 11 and two air guide covers 20, which are arranged in a one-to-one correspondence, and the openings 30 of the two air guide covers 20 face away from each other.

[0045] Specifically, the line connecting the two air ducts 20 passes through the center of the base plate 10 (see reference). Figure 5 The openings 30 of the two gas guide hoods 20 face the inner wall of the insulation cylinder 60. Electrodes are provided on both sides or one side of the gas guide hoods 20. The way the openings 30 are opposite to each other can prevent the gas from getting close to the electrodes during the gas flow process, thus improving safety.

[0046] In this embodiment, there are four electrodes, with one electrode on each side of each gas guide hood 20. Traditional gas guide hoods use multiple openings, some of which correspond to the electrodes. Therefore, when gas is discharged, gas enters the gas guide cylinder through multiple openings, posing a risk of the gas blowing volatiles to the electrodes and causing sparks between the electrodes and the graphite components. In contrast, the two gas guide hoods 20 of this invention have only one opening 30, and the opening 30 is oriented away from the electrodes, which greatly avoids the gas at the opening 30 blowing volatiles to the electrodes.

[0047] like Figure 5 and Figure 7 As shown, an icon 90 is provided on the air guide cover 20, and the icon 90 is drawn along the extension direction of the air guide space 40. When installing the two air guide covers 20, the installation direction is determined by the icon 90 to avoid deviation in the installation angle. Optionally, the base plate 10 is also provided with additional positioning marking lines, which are set by corresponding to the icon 90 and the positioning marking lines to improve the accuracy of installation.

[0048] In this embodiment, in order to improve the installation effect of the air guide cover 20, the air guide cover 20 is partially disposed in the air guide channel 11.

[0049] Specifically, the air guide hood 20 extends into the air guide channel 11. By nesting the air guide hood 20 and the air guide channel 11, the connection effect between the air guide hood 20 and the base plate 10 can be improved.

[0050] like Figure 4 and Figure 7 As shown, the air guide hood 20 includes a connecting part 21 and a main body part 22 connected in sequence. The connecting part 21 is disposed in the air guide channel 11, and the inlet of the air guide channel 11 is located in the area of ​​the main body part 22 projected onto the bottom plate part 10.

[0051] Specifically, the connecting part 21 is located below the main body 22, extending into the air guide channel 11 and connecting to the inner wall of the air guide channel 11. The connecting part 21 is an arc-shaped segment that fits the inner wall of the air guide channel 11. The air guide channel 11 is located at the end of the main body 22 away from the opening 30, and an air guide space 40 is formed between the main body 22 and the bottom plate 10. The opening 30 and the inlet of the air guide channel 11 are located at opposite ends of the air guide space 40.

[0052] In this embodiment, the connecting part 21 is provided with a thread on the side facing the inner wall of the air guide channel 11, thereby realizing the threaded connection between the connecting part 21 and the air guide channel 11.

[0053] In one embodiment of this invention (not shown), the connecting portion 21 engages with the air guide channel 11. One of the air guide channel 11 and the connecting portion 21 is provided with a limiting groove, and the other with a limiting protrusion, thereby achieving the engagement.

[0054] like Figure 7 As shown, the main body 22 includes a top plate 222 and a side plate 221. The top plate 222 is spaced apart from the bottom plate 10 and forms a first distance L1. The side plate 221 is disposed at the bottom of the top plate 222, and the side plate 221 is U-shaped and forms an opening 30. A connecting part 21 is connected to the end of the side plate 221 away from the top plate 222.

[0055] Specifically, an icon 90 is provided on the side of the top plate 222 facing away from the gas guiding channel 11. One end of the side plate 221 forms an opening 30, and the other end of the side plate 221 surrounds the inlet of the gas guiding channel 11, forming a gas guiding space 40 with the top plate 222. The two ends of the gas guiding space 40 are the opening 30 and the gas guiding channel 11, respectively. The side plate 221 can guide the gas, preventing the gas from moving in a chaotic direction and manner near the gas guiding hood 20, which would cause volatiles to be blown towards the electrodes. This improves the heat preservation performance and production safety of the single crystal furnace thermal field, and reduces energy consumption and production costs.

[0056] In this embodiment, the first distance L1 and the diameter D of the air guide channel 11 satisfy the following condition: 9>D / L1>4.

[0057] Specifically, if the first distance L1 is too large, the top plate 222 will be close to the bottom of the crucible 50 and will easily carry away the heat from the bottom of the crucible 50; if the first distance L1 is too small, the opening 30 will be too small, and the gas will not be able to enter the gas guiding space 40 quickly, which will lead to excessive pressure in the single crystal furnace. In addition, the volatiles brought by the gas will also easily accumulate at the opening 30, which will cause the potential for electrode arcing.

[0058] like Figure 6 As shown, a second distance L2 is formed between the opening 30 and the edge of the bottom plate 10. The minimum distance L3 from the opening 30 to the edge of the inlet of the air guide channel 11 satisfies the following condition with respect to the second distance L2: 6>L2 / L3>4.

[0059] Specifically, if the second distance L2 between the opening 30 and the edge of the base plate 10 is too large, the area of ​​the air guide shroud 20 covering the opening of the air guide channel 11 will be small, and some heat will directly enter the air guide channel 11 through thermal radiation; if the second distance L2 is too small, it will be difficult for gas to enter the opening 30.

[0060] From the above description, it can be seen that the above embodiments of this utility model achieve the following technical effects: By setting a bottom plate assembly for a single crystal furnace including a bottom plate portion 10 and a gas guide hood 20, a gas guide channel 11 is provided at the bottom of the bottom plate portion 10, and the gas guide hood 20 is covered at the entrance of the gas guide channel 11. The gas guide hood 20 has only one side opening 30, and a gas guide space 40 is formed between the gas guide hood 20 and the surface of the bottom plate portion 10. The opening 30 is connected to the gas guide channel 11 through the gas guide space 40. By covering the entrance of the gas guide channel 11 with the gas guide hood 20, when the single crystal furnace needs to exhaust gas, the gas can only enter the gas guide space 40 through the side opening 30 and then enter the gas guide channel 11. The setting of the gas guide hood 20 can play a role in heat insulation, preventing the heat at the bottom of the crucible 50 from being directly lost through the gas guide channel 11 in the form of thermal radiation when the single crystal furnace is in use. Compared with the traditional method of setting multiple openings 30 in the gas guide hood 20, this application can improve the heat preservation effect of the crucible.

[0061] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0062] It should be noted that the terms "upper" and "lower," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0063] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A base plate assembly for a single crystal furnace, characterized in that, include: The bottom plate (10) is provided with an air guide channel (11) at its bottom; An air guide hood (20) is provided to cover the entrance of the air guide channel (11). The air guide hood (20) has only one opening (30) on its side. An air guide space (40) is formed between the air guide hood (20) and the surface of the bottom plate (10). The opening (30) is connected to the air guide channel (11) through the air guide space (40).

2. The base plate assembly for a single crystal furnace according to claim 1, characterized in that, The opening (30) is provided facing the edge of the base plate portion (10).

3. The base plate assembly for a single crystal furnace according to claim 1, characterized in that, The air guide shroud (20) is partially disposed within the air guide channel (11).

4. The base plate assembly for a single crystal furnace according to claim 3, characterized in that, The air guide hood (20) includes a connecting part (21) and a main body part (22) connected in sequence. The connecting part (21) is disposed in the air guide channel (11), and the entrance of the air guide channel (11) is located in the area of ​​the main body part (22) projected onto the bottom plate part (10).

5. The base plate assembly for a single crystal furnace according to claim 4, characterized in that, The main body (22) includes: A top plate (222) is provided at a distance L1 from the bottom plate (10); Side plate (221) is disposed at the bottom of the top plate (222). The side plate (221) is U-shaped and forms the opening (30). The connecting part (21) is connected to the end of the side plate (221) away from the top plate (222).

6. The base plate assembly for a single crystal furnace according to claim 5, characterized in that, The first distance L1 and the diameter D of the air guide channel (11) satisfy the following condition: 9>D / L1>4.

7. The base plate assembly for a single crystal furnace according to claim 4, characterized in that, The opening (30) is spaced apart from the edge of the bottom plate (10) to form a second distance L2. The minimum distance L3 from the opening (30) to the edge of the inlet of the air guide channel (11) satisfies the following condition with respect to the second distance L2: 6>L2 / L3>4.

8. The base plate assembly for a single crystal furnace according to claim 1, characterized in that, The angle between the orientation of the opening (30) of the air guide (20) and the line connecting the center of the base plate (10) to the air guide (20) is between 0° and 15°.

9. The base plate assembly for a single crystal furnace according to claim 1, characterized in that, The air guide channel (11) and the air guide cover (20) are both two and are arranged in a one-to-one correspondence, and the openings (30) of the two air guide covers (20) are facing away from each other.

10. A single crystal furnace, characterized in that, include: Crucible (50); Insulated container (60); A base plate assembly, wherein the base plate assembly is any one of claims 1 to 9, the base plate assembly is disposed inside the insulation cylinder (60), and a receiving space (70) is formed between the insulation cylinder (60) and the base plate assembly, the crucible (50) is disposed in the receiving space (70), the gas guide hood (20) of the base plate assembly is spaced apart from the inner wall of the insulation cylinder (60), and the opening (30) of the gas guide hood (20) faces the inner wall of the insulation cylinder (60).

Images