Crucible, vacuum furnace source, and vacuum processing system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a crucible, a vacuum furnace source and a vacuum treatment system. A crucible comprises a crucible main body and a flow guide part. And the crucible main body is used for carrying a source material. And the flow guide part is positioned at the far end of the crucible main body, is communicated with the crucible main body, is used for allowing a beam evaporated from a source material to pass through, and comprises a flow guide pyrolytic boron nitride (PBN) body layer and a flow guide heat conduction layer. And the diversion pyrolytic boron nitride (PBN) body layer is positioned on the inner side of the diversion part. And the diversion heat conduction layer covers the outer wall of the diversion PBN body layer and is used for blocking and conducting heat to the diversion PBN body layer.

Description

Technical Field

[0001] This disclosure relates to the field of vacuum equipment technology, and in particular to a crucible, a vacuum furnace source, and a vacuum processing system. Background Technology

[0002] Thin film deposition techniques, such as molecular beam epitaxy (MBE), have stringent requirements for the grown samples, including high quality, low defect density, and precisely adjustable composition. The source furnace crucible used must meet the characteristics of high temperature resistance, stability, and resistance to decomposition, and must not easily react chemically with the source material. Utility Model Content

[0003] This disclosure provides a crucible, comprising:

[0004] The crucible body is used to hold the source material; and

[0005] A flow guiding section, located at the distal end of the crucible body and connected to the crucible body, is used to allow the beam of vaporized source material to pass through. The flow guiding section includes:

[0006] A pyrolytic boron nitride (PBN) body layer is located inside the pyrolytic portion; and a heat-conducting layer covers the outer wall of the pyrolytic PBN body layer to block and conduct heat to the pyrolytic PBN body layer.

[0007] In some embodiments of this disclosure, the flow guiding portion further includes a flow guiding cover layer that covers the flow guiding and heat conducting layer.

[0008] In some embodiments of this disclosure, the thermally conductive layer includes a thermally conductive pyrolytic graphite (PG) layer; and / or

[0009] The flow-guiding overlay includes the flow-guiding PBN overlay.

[0010] In some embodiments of this disclosure, the crucible body includes a main PBN body layer located inside the crucible body, and the main PBN body layer and the flow-guiding PBN body layer are continuously connected.

[0011] In some embodiments of this disclosure, the crucible body further includes: a body heat-conducting layer, covering the outer wall of the body PBN body layer, for blocking and conducting heat to the body PBN body layer.

[0012] In some embodiments of this disclosure, the crucible body further includes: a body covering layer covering the body heat-conducting layer.

[0013] In some embodiments of this disclosure, the main thermally conductive layer includes a main PG thermally conductive layer; and / or

[0014] The main overlay layer includes the main PBN overlay layer.

[0015] In some embodiments of this disclosure, the crucible is a bottle-shaped crucible, and the flow guiding portion includes the bottle-mouth-shaped portion of the bottle-shaped crucible; or

[0016] The crucible is a conical crucible, and the flow guiding part includes the open part of the conical crucible.

[0017] This disclosure provides a vacuum furnace source, including:

[0018] The crucible according to any embodiment of this disclosure; and

[0019] A heating element, located on the outside of the crucible, is used to provide heat to the crucible.

[0020] This disclosure provides a vacuum processing system, including:

[0021] Vacuum cavity; and

[0022] According to any embodiment of the present disclosure, the vacuum furnace source is vacuum-sealed to a vacuum chamber, so that material evaporated from the crucible of the vacuum furnace source enters the vacuum chamber.

[0023] The crucibles, vacuum furnaces, and vacuum processing systems according to some embodiments of this disclosure can bring beneficial technical effects. For example, the crucibles, vacuum furnaces, and vacuum processing systems of some embodiments of this disclosure are designed with a flow-guiding and heat-conducting layer covering the outer wall of the flow-guiding PBN body layer. This is used to block infrared rays from external heat sources from penetrating the flow-guiding PBN body layer, suppressing heat loss caused by the high infrared transmittance of the flow-guiding PBN body layer, and also conducting heat to the flow-guiding PBN body layer, thereby maintaining the temperature of the flow-guiding PBN body layer and preventing the evaporation beam of the source material from condensing when passing through the flow-guiding section, thus improving the quality of the grown material. As another example, the crucibles, vacuum furnaces, and vacuum processing systems of some embodiments of this disclosure use a flow-guiding covering layer to cover the flow-guiding and heat-conducting layer, which can prevent thermally volatile components of the flow-guiding and heat-conducting layer from causing contamination of the grown material and the vacuum system (e.g., the MBE system), thereby safely solving the risk of condensation of the source material in the flow-guiding section. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 A schematic diagram of the structure of a crucible according to some embodiments of the present disclosure is shown.

[0026] Figure 2 A schematic diagram of the structure of a crucible according to other embodiments of the present disclosure is shown.

[0027] Figure 3 A schematic diagram of the structure of a crucible according to other embodiments of the present disclosure is shown.

[0028] Figure 4 A schematic diagram of the structure of a vacuum furnace source according to some embodiments of the present disclosure is shown.

[0029] Figure 5 A schematic diagram of a vacuum processing system according to some embodiments of the present disclosure is shown. In the above figures, the reference numerals respectively indicate:

[0030] 10000-Vacuum Processing System

[0031] 1000-Vacuum Furnace Source

[0032] 100, 100a, 100b, 100c - Crucible

[0033] 110a, 110b, 110c - Crucible body

[0034] 111b-Main PBN Body Layer

[0035] 112b - Main thermal conductive layer

[0036] 1121b - Main PG thermal conductive layer

[0037] 113b - Main Covering Layer

[0038] 1131b - Main PBN Overlay

[0039] 120a, 120b, 120c - Airflow guiding section

[0040] 121a, 121b, 121c - PBN Body Layer

[0041] 122a, 122b, 122c - Thermal Conducting Layer

[0042] 1221a-Flow-Guiding PG Thermal Conductive Layer

[0043] 123a, 123b, 123c - Flow guiding cover layer

[0044] 1231a-Flow Guided PBN Covering Layer

[0045] 200-heater

[0046] 2000-Vacuum Chamber Detailed Implementation

[0047] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.

[0048] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," "bottom," "horizontal," and "longitudinal," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly, for example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two elements. In the description of this disclosure, "distal" or "farside" refers to one end or side that extends into a vacuum environment (e.g., a vacuum chamber), while "proximal" or "proximal" is the end or side opposite to "distal" or "farside" (e.g., one end or side away from the vacuum chamber, or one end or side within the vacuum chamber that is closer to the vacuum chamber wall, etc.). Alternatively, the end or side closer to the drive device is called the proximal or proximal end, and the end or side farther from the drive device is called the distal or distal end. Those skilled in the art will understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0049] Figure 1 A schematic diagram of the structure of crucible 100a according to some embodiments of the present disclosure is shown.

[0050] like Figure 1 As shown, in some embodiments of this disclosure, crucible 100a may include a crucible body 110a and a flow guiding portion 120a. The crucible body 110a can be used to hold source material. The flow guiding portion 120a, located at the distal end of the crucible body 110a and communicating with it, allows a beam of material evaporated from the source material to pass through. The flow guiding portion 120a may include a flow guiding pyrolytic boron nitride (PBN) body layer 121a and a flow guiding thermally conductive layer 122a. The flow guiding PBN body layer 121a is located inside the flow guiding portion 120a. The flow guiding thermally conductive layer 122a covers the outer wall of the flow guiding PBN body layer 121a and serves to block and conduct heat to the flow guiding PBN body layer 121a.

[0051] PBN possesses excellent properties such as high purity, high temperature stability, high thermal conductivity, electrical insulation, chemical stability, low coefficient of thermal expansion, and thermal shock resistance. However, PBN has a high transmittance of infrared light, which easily leads to condensation when the beam of evaporating source material passes through the guiding PBN body layer 121a. Therefore, in some embodiments of this disclosure, a heat-conducting guiding layer 122a is designed to cover the outer wall of the guiding PBN body layer 121a to block infrared light from external heat sources from penetrating the guiding PBN body layer 121a, suppressing heat loss caused by the high infrared transmittance of the guiding PBN body layer 121a. Furthermore, it can conduct heat to the guiding PBN body layer 121a, thereby maintaining the temperature of the guiding PBN body layer 121a and preventing the evaporating beam of the source material from condensing when passing through the guiding portion 120a, thus improving the quality of the grown material.

[0052] In some embodiments of this disclosure, the heat-conducting and flow-guiding layer 122a can be disposed in a layered form on the outside of the flow-guiding PBN body layer 121a by means of coating, bonding, etc., to cover the outer wall of the flow-guiding PBN body layer 121a. In some embodiments, the heat-conducting and flow-guiding layer 122a can completely cover the outer wall of the flow-guiding PBN body layer 121a, improving the uniformity of temperature distribution in the flow-guiding PBN body layer 121a and improving the stability of the beam passing through when the source material evaporates. Furthermore, when the heat-conducting and flow-guiding layer 122a completely covers the outer wall of the flow-guiding PBN body layer 121a, the flow-guiding portion 120a not only has a simpler structure but also has high reliability and stability, enabling stable operation for a long time.

[0053] like Figure 1 As shown, in some embodiments of this disclosure, the flow guiding portion 120a may further include a flow guiding cover layer 123a covering the flow guiding and heat conducting layer 122a.

[0054] In some embodiments of this disclosure, the flow-guiding cover layer 123a may be disposed in a layered form on the outside of the flow-guiding and heat-conducting layer 122a by means of coating, bonding, etc., to cover the flow-guiding and heat-conducting layer 122a. In some embodiments, the flow-guiding cover layer 123a may completely cover the outer wall of the flow-guiding and heat-conducting layer 122a.

[0055] In some embodiments of this disclosure, the thermal stability of the flow-guiding capping layer 123a is higher than that of the flow-guiding and heat-conducting layer 122a. The flow-guiding capping layer 123a covers the flow-guiding and heat-conducting layer 122a to prevent the escape of other atoms (e.g., carbon atoms) after the thermally induced volatilization of the flow-guiding and heat-conducting layer 122a, which could contaminate the growth material and the vacuum system (e.g., the MBE system), thereby safely addressing the risk of condensation of the source material in the flow-guiding section 120a.

[0056] In some embodiments of this disclosure, the heat-conducting layer 122a may include a heat-conducting pyrolytic graphite (PG) layer 1221a.

[0057] In some embodiments of this disclosure, the heat-conducting PG layer 1221a can be disposed in a layered form on the outside of the heat-conducting PBN body layer 121a by means of coating, bonding, etc., to cover the outer wall of the heat-conducting PG layer 1221a. In some embodiments, the heat-conducting PG layer 1221a can completely cover the outer wall of the heat-conducting PBN body layer 121.

[0058] PG is a special material with high purity, high thermal conductivity, good thermal stability, low coefficient of thermal expansion, and good chemical stability. The flow-guiding portion 120a with the flow-guiding PG thermally conductive layer 1221a can prevent infrared rays from penetrating the flow-guiding PBN body layer 121a and conduct heat to the flow-guiding PBN body layer 121a, thus preventing the source material from condensing in the flow-guiding portion 120a.

[0059] In some embodiments of this disclosure, the flow guiding overlay 123a may include the flow guiding PBN overlay 1231a.

[0060] In some embodiments of this disclosure, the flow-guiding PBN cover layer 1231a can be disposed in a layered form on the outside of the flow-guiding and heat-conducting layer 122a by means of coating, bonding, etc., to cover the flow-guiding and heat-conducting layer 122a. In some embodiments, the flow-guiding PBN cover layer 1231a can completely cover the outer wall of the flow-guiding and heat-conducting layer 122a, better protecting the cavity from contamination and preventing the flow-guiding and heat-conducting layer 122a from thermally volatilizing other atoms when heated, for example, preventing the flow-guiding PG heat-conducting layer 1221a from evaporating carbon atoms under high temperature heating.

[0061] In some embodiments of this disclosure, the flow-conducting PBN body layer 121a is covered by the flow-conducting and heat-conducting layer 122a and the flow-conducting and heat-conducting layer 123 is covered by the flow-conducting and heat-conducting layer 122a. This can make it difficult for infrared rays to penetrate the flow-conducting PBN body layer 121a and can also prevent the flow-conducting and heat-conducting layer 122a from evaporating other atoms when heated, thus avoiding contamination of the growth material and vacuum system (e.g., MBE system).

[0062] Figure 2 A schematic diagram of the structure of crucible 100b according to other embodiments of the present disclosure is shown.

[0063] like Figure 2 As shown, in some embodiments of this disclosure, the crucible 100b may include a crucible body 110b and a flow guiding portion 120b. The flow guiding portion 120b may include a flow guiding PBN body layer 121b and a flow guiding and heat-conducting layer 122b. The flow guiding portion 120b may also include a flow guiding cover layer 123b covering the flow guiding and heat-conducting layer 122b. The specific structure is similar to... Figure 1 The flow guide section 120a shown here will not be described in detail here.

[0064] like Figure 2 As shown, in some embodiments of this disclosure, the crucible body 110b may include a main PBN body layer 111b located inside the crucible body 110b. The main PBN body layer 111b may be continuously connected to the flow-guiding PBN body layer 121b.

[0065] Those skilled in the art will understand that the continuous connection between the main PBN body layer 111b and the flow-guiding PBN body layer 121b can be achieved by forming the main PBN body layer 111b and the flow-guiding PBN body layer 121b separately and then connecting them, or by forming the main PBN body layer 111b and the flow-guiding PBN body layer 121b integrally. Similarly, as... Figure 1 As shown, the crucible body 110a may also include a main PBN body layer, for example, forming a single-layer main PBN body layer. The crucible body 110a may be continuously connected to the flow-guiding PBN body layer 121a.

[0066] like Figure 2 As shown, in some embodiments of this disclosure, the crucible body 110b may further include a body heat-conducting layer 112b. The body heat-conducting layer 112b may cover the outer wall of the body PBN body layer 111b to block and conduct heat to the body PBN body layer 111b.

[0067] Because PBN has high infrared transmittance, when heating the source material in the crucible, the transmitted infrared light directly heats the source material inside the crucible body 110b, causing the source material temperature to be higher than the crucible body 110b temperature. During the process of the source material forming a molecular beam and escaping out of the crucible, it is more likely to condense when it encounters the cooler crucible body 110b cavity wall. When this condensation falls back to the source material liquid surface, it can easily lead to instability of the liquid surface and affect the uniformity of the source material, resulting in defects in the deposited material. Therefore, in some embodiments of this disclosure, a thermally conductive layer 112b is used to cover the outer wall of the main PBN body layer 111b to prevent infrared light penetration, thereby conducting heat to the main PBN body layer 111b, ensuring that the main PBN body layer 111b is fully heated, and then conducting the heat to the source material in the crucible body 110b. This prevents the temperature of the crucible body 110b from falling below the source material temperature, thus preventing the source material from condensing on the wall of the crucible body 110b and improving the quality of the grown material.

[0068] In some embodiments of this disclosure, the main thermally conductive layer 112b can be disposed in a layered form on the outside of the main PBN body layer 111b by means of coating, bonding, etc., to cover the outer wall of the main PBN body layer 111b. In some embodiments, the main thermally conductive layer 112b can completely cover the outer wall of the main PBN body layer 111b, improving the uniformity of temperature distribution in the main PBN body layer 111 and improving the stability during the evaporation of the source material. Furthermore, when the main thermally conductive layer 112b completely covers the outer wall of the main PBN body layer 111b, the crucible body 110b not only has a simpler structure but also has high reliability and stability, enabling stable operation for a long time.

[0069] like Figure 2 As shown, in some embodiments of this disclosure, the crucible body 110b may further include a body covering layer 113b. The body covering layer 113b may cover the body heat-conducting layer 112b.

[0070] In some embodiments of this disclosure, the thermal stability of the main cover layer 113b is higher than that of the main thermally conductive layer 112b, in order to prevent other atoms (e.g., carbon atoms) from escaping after the thermally induced volatilization of the main thermally conductive layer 112b, which would cause contamination of the growth material and the vacuum system (e.g., the MBE system).

[0071] like Figure 2 As shown, in some embodiments of this disclosure, the main thermal conductive layer 112b may include the main PG thermal conductive layer 1121b.

[0072] like Figure 2 As shown, in some embodiments of this disclosure, the main PG thermal conductive layer 1121b can be disposed in a layered form on the outside of the main PBN body layer 111 by means of coating, bonding, etc., to cover the outer wall of the main PBN body layer 111. In some embodiments, the main PG thermal conductive layer 1121b can completely cover the outer wall of the main PBN body layer 111.

[0073] like Figure 2 As shown, in some embodiments of this disclosure, the main body overlay 113b may include the main body PBN overlay 1131b.

[0074] like Figure 2 As shown, in some embodiments of this disclosure, the main PBN cover layer 1131b can be disposed in a layered form on the outside of the main heat-conducting layer 112b by means of coating, bonding, etc., to cover the main heat-conducting layer 112b. In some embodiments, the main PBN cover layer 1131b can completely cover the outer wall of the main heat-conducting layer 112b to prevent carbon atoms from evaporating when the main heat-conducting layer 112b is heated, and to better protect the cavity from contamination.

[0075] like Figure 2 As shown, those skilled in the art will understand that the flow-guiding PBN body layer 121b and the main PBN body layer 111b can be integrally formed, and can be integrally covered to form the flow-guiding and heat-conducting layer 122b and the body heat-conducting layer 112b.

[0076] like Figure 2 As shown, in some embodiments of this disclosure, the main PBN body layer 111b is covered by the main thermally conductive layer 112b and the main PBN cover layer 1131b is covered by the main thermally conductive layer 112b. This ensures that infrared rays cannot penetrate the main PBN body layer 111b and also avoids the evaporation of carbon atoms in the main thermally conductive layer 112b when heated, which would cause contamination of the growth material and the vacuum system (e.g., the MBE system). This safely solves the risk of source material condensation in the crucible.

[0077] In some embodiments of this disclosure, the crucible may be a bottle-shaped crucible (e.g., Figure 1 The crucible 100a shown Figure 2 The crucible 100b shown. The flow guide section (e.g., Figure 1 The flow guide section 120a shown Figure 2 The flow guide portion 120b shown may include the mouth portion of a bottle-shaped crucible.

[0078] Bottle-shaped crucibles (e.g., Figure 1 The crucible 100a shown Figure 2 The crucible 100b shown has a large volume, a stable molten source material liquid surface, and good thermal uniformity, which meets the requirements of the MBE system for material growth. However, due to the flow-guiding PBN body layer (e.g., Figure 1 The flow-guiding PBN body layer 121a shown Figure 2 The high infrared transmittance of the flow-guiding PBN body layer 121b shown, and the flow-guiding portion of the bottle-shaped crucible (e.g., Figure 1 The flow guide section 120a shown Figure 2 Due to factors such as the narrow opening of the guide section 120b shown, the beam of evaporated source material is more prone to condensation as it passes through. Therefore, the guide PBN body layer (e.g., Figure 1 The flow-guiding PBN body layer 121a shown Figure 2 The outer wall of the shown flow-guiding PBN body layer 121b can be covered with a flow-guiding and heat-conducting layer (e.g., Figure 1 The heat-conducting and heat-conducting layer 122a shown Figure 2 The heat-conducting and flow-guiding layer 122b is shown.

[0079] Figure 3 A schematic diagram of the structure of crucible 100c according to other embodiments of the present disclosure is shown.

[0080] like Figure 3 As shown, in some other embodiments of this disclosure, the crucible 100c can be a conical crucible 100c. The flow guiding portion 120c can include the open portion of the conical crucible. Due to the high infrared transmittance of the flow guiding PBN body layer 121c, and due to airflow and heat dissipation effects, the beam of source material evaporation is more prone to condensation when passing through the flow guiding portion 120c of the conical crucible 100c. Therefore, the outer wall of the flow guiding PBN body layer 121c can be covered with a flow guiding and heat-conducting layer 122c.

[0081] like Figure 3 As shown, in some other embodiments of this disclosure, the flow guiding portion 120 may further include a flow guiding cover layer 123c covering the flow guiding and heat conducting layer 122c.

[0082] like Figure 3 As shown, in some other embodiments of this disclosure, the crucible body 110c may include a main PBN body layer, a main thermally conductive layer, and a main covering layer (not shown in detail in the figures). The specific structure is similar to... Figure 2 The crucible body 110b shown here will not be described in detail here.

[0083] like Figure 3 As shown, those skilled in the art will understand that the flow-guiding PBN body layer 121c and the main PBN body layer can be integrally formed, and can be integrally covered to form the flow-guiding and heat-conducting layer 122c and the body heat-conducting layer.

[0084] Figure 4 A schematic diagram of the structure of a vacuum furnace source 1000 according to other embodiments of the present disclosure is shown.

[0085] like Figure 4 As shown, in some other embodiments of this disclosure, the vacuum furnace source 1000 may include the crucible 100 according to any embodiment of this disclosure (e.g., Figure 1 The crucible 100a shown Figure 2 The crucible 100b shown Figure 3 The crucible 100c and heating assembly 200 are shown. The heating assembly 200 can be disposed on the outside of the crucible 100 for providing heat to the crucible 100.

[0086] Figure 5 A schematic diagram of the structure of a vacuum processing system 10000 according to some embodiments of the present disclosure is shown.

[0087] like Figure 5 As shown, in some embodiments of this disclosure, the vacuum processing system 10000 may include a vacuum chamber 2000 (e.g., an MBE vacuum chamber) and a vacuum furnace source 1000 according to any embodiment of this disclosure (e.g., Figure 4The vacuum furnace source 1000 is shown. The vacuum furnace source 1000 can be vacuum-sealed connected to the vacuum chamber 2000, such that the crucible (e.g., from the vacuum furnace source 1000) can be vacuum-sealed from the vacuum chamber 2000. Figure 1 The crucible 100a shown Figure 2 The crucible 100b shown Figure 3 The material evaporated in the crucible 100c shown is introduced into the vacuum chamber 2000 for vacuum processing, such as coating, testing, etc.

[0088] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A crucible, characterized in that, include: The crucible body is used to hold the source material. as well as A flow guiding section, located at the distal end of the crucible body and in communication with the crucible body, is used to allow the beam of vaporized material from the source material to pass through. The flow guiding section includes: A flow-guiding pyrolytic boron nitride (PBN) body layer is located inside the flow-guiding portion; as well as A heat-conducting layer covers the outer wall of the heat-conducting pyrolytic boron nitride (PBN) body layer and is used to block and conduct heat to the heat-conducting pyrolytic boron nitride (PBN) body layer.

2. The crucible according to claim 1, characterized in that, The flow guiding section also includes a flow guiding cover layer that covers the flow guiding and heat conducting layer.

3. The crucible according to claim 2, characterized in that, The heat-conducting and thermally conductive layer includes a heat-conducting pyrolytic graphite (PG) layer; and / or The flow-guiding overlay includes a flow-guiding PBN overlay.

4. The crucible according to claim 1, characterized in that, The crucible body includes a main PBN body layer located inside the crucible body, and the main PBN body layer is continuously connected to the flow-conducting pyrolytic boron nitride (PBN) body layer.

5. The crucible according to claim 4, characterized in that, The crucible body also includes: The main heat-conducting layer covers the outer wall of the main PBN body layer and is used to block and conduct heat to the main PBN body layer.

6. The crucible according to claim 5, characterized in that, The crucible body also includes: A main body covering layer that covers the main body thermal conductive layer.

7. The crucible according to claim 6, characterized in that, The main thermal conductive layer includes a main PG thermal conductive layer; and / or The main overlay layer includes a main PBN overlay layer.

8. The crucible according to claim 1, characterized in that, The crucible is a bottle-shaped crucible, and the flow guiding portion includes the bottle-mouth-shaped portion of the bottle-shaped crucible; or The crucible is a conical crucible, and the flow guiding part includes the open portion of the conical crucible.

9. A vacuum furnace source, characterized in that, include: The crucible according to any one of claims 1-8; as well as A heating element, disposed on the outside of the crucible, is used to provide heat to the crucible.

10. A vacuum processing system, characterized in that, include: Vacuum cavity; as well as According to claim 9, the vacuum furnace source is vacuum-sealed to the vacuum chamber, so that material evaporated from the crucible of the vacuum furnace source enters the vacuum chamber.

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