Pipeline structure for air draft

Abstract

The pipeline structure for air draft comprises a pipe body, the pipe body is provided with an arc-shaped bent portion, a ventilation pipeline penetrating through the two ends of the pipe body is arranged in the pipe body, an upper ventilation opening and a lower ventilation opening are formed in the pipe body, and a movable baffle is arranged at the position, close to the lower ventilation opening, in the pipe body. The movable baffle is movably installed in the ventilation pipeline through an adjusting mechanism, the rotating angle of the movable baffle in the ventilation pipeline is controlled through the adjusting mechanism, and the air volume in the ventilation pipeline is controlled. According to the pipeline structure for air draft, the rotating angle of the movable baffle in the pipeline is adjusted through the adjusting mechanism, a worm and gear structure is adopted to drive the movable baffle to rotate, the accuracy and stability of angle adjustment are guaranteed, components can be finely adjusted to the needed precise angle, the high-precision angle adjustment requirement is met, and the practicability is high. Therefore, the uniform air volume of a plurality of pipelines on the equipment can be controlled.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, specifically a duct structure for ventilation. Background Technology

[0002] In the semiconductor manufacturing industry, to ensure a clean production environment and stable equipment operation, semiconductor equipment is typically equipped with multiple exhaust ducts to remove waste gases, heat, and particulate matter generated during production. However, the current situation where multiple exhaust ducts cannot achieve uniform airflow regulation has brought a series of significant problems to semiconductor production. For example, differences in airflow can cause pressure fluctuations within the duct system. This unstable pressure environment may affect the normal operation of some pressure-sensitive semiconductor equipment. Furthermore, inconsistent airflow from multiple ducts may prevent the heat dissipation requirements of some equipment from being met. Moreover, the inconsistent airflow from multiple ducts makes it difficult to quickly and accurately diagnose the problem when ventilation issues or equipment malfunctions occur. Utility Model Content

[0003] The purpose of this utility model is to provide a duct structure for ventilation in order to solve the technical problems in the background art.

[0004] To achieve the aforementioned objectives, this utility model provides the following technical solution:

[0005] A ventilation duct structure includes a pipe body with an arc-shaped bend. The pipe body has a ventilation duct extending through both ends, forming an upper ventilation opening and a lower ventilation opening. A movable baffle is provided in the pipe body near the lower ventilation opening. The movable baffle is movably installed in the ventilation duct by an adjustment mechanism. The adjustment mechanism controls the angle of rotation of the movable baffle in the ventilation duct to control the air volume in the ventilation duct.

[0006] The adjusting mechanism includes a rotating shaft, a first mounting block, a second mounting block, and a worm gear assembly. The movable baffle is fixed on the rotating shaft. The left and right ends of the rotating shaft are rotatably connected to the side walls of the tube body, respectively. The axis of the rotating shaft is perpendicular to the center of the tube body. The first and second mounting blocks are fixed to the outer side walls of the tube body, respectively. The left and right ends of the rotating shaft pass through the first and second mounting blocks, respectively. The worm gear assembly includes a worm wheel and a worm. The worm wheel is fixed on one side of the rotating shaft and coaxially mounted with the rotating shaft. The worm is threaded above the worm wheel. Both the worm wheel and the worm are inside the second mounting block. A knob is installed at one end of the worm, and the knob is located outside the second mounting block.

[0007] A first sealing gasket is provided between the first mounting block and the outer wall of the pipe body, and a second sealing gasket is provided between the second mounting block and the outer wall of the pipe body.

[0008] The longitudinal section of the ventilation duct is rectangular, and the movable baffle matches the longitudinal section structure of the ventilation duct.

[0009] The rotating shaft is fixedly installed to the movable baffle by screws.

[0010] Compared with existing technologies, the exhaust pipe structure of this application utilizes an adjustment mechanism to adjust the rotation angle of the movable baffle within the pipe. A worm gear structure drives the movable baffle to rotate, ensuring the accuracy and stability of the angle adjustment. This allows for precise adjustment of components to the required accurate angle, meeting high-precision angle adjustment needs. Consequently, it can control the uniform airflow of several pipes on the equipment. This unified exhaust system ensures that the exhaust gas generated by the equipment is fully collected and effectively treated, guaranteeing that pollutants emitted into the atmosphere meet stringent environmental standards and contributing to the stability of the equipment's operating environment. Attached Figure Description

[0011] Figure 1 : A three-dimensional structural diagram of this application;

[0012] Figure 2 Another perspective view of the structure of this application;

[0013] Figure 3 Installation structure diagram of movable baffle and adjustment mechanism;

[0014] Figure 4 Adjust the three-dimensional structure diagram of the mechanism;

[0015] Figure 5 : A schematic diagram illustrating the effect of using this application. Detailed Implementation

[0016] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0017] Specific Implementation Example 1: Please refer to Figures 1 to 5 In this embodiment of the present invention, a duct structure for ventilation includes a pipe body 1, which has an arc-shaped bend 101. A ventilation duct 104 extends through both ends of the pipe body 1, forming an upper ventilation opening 102 and a lower ventilation opening 103. A movable baffle 2 is located near the lower ventilation opening 103 within the pipe body 1. The movable baffle 2 is movably installed within the ventilation duct 104 via an adjusting mechanism 3. The adjusting mechanism 3 controls the angle of rotation of the movable baffle 2 within the ventilation duct 104, thereby controlling the airflow within the ventilation duct 104. The longitudinal cross-section of the ventilation duct 104 is rectangular, and the movable baffle 2 matches the longitudinal cross-sectional structure of the ventilation duct 104.

[0018] In this application, the adjusting mechanism 3 includes a rotating shaft 303, a first mounting block 301, a second mounting block 302, and a worm gear assembly 304. A movable baffle 2 is fixed to the rotating shaft 303. The left and right ends of the rotating shaft 303 are rotatably connected to the side walls of the tube body 1, respectively. The axis of the rotating shaft 303 is perpendicular to the center of the tube body 1. The first mounting block 301 and the second mounting block 302 are respectively fixed to the outer side walls of the tube body 1. The left and right ends of the rotating shaft 303 pass through the first mounting block 303. Within mounting block 301 and the second mounting block 302, the worm gear assembly 304 includes a worm gear 304-1 and a worm 304-2. The worm gear 304-1 is fixed to one side of the rotating shaft 303 and coaxially mounted with it. The worm 304-2 is threaded onto the top of the worm gear 304-1. Both the worm gear 304-1 and the worm 304-2 are located within the second mounting block 302. A knob is mounted on one end of the worm 304-2, located on the outside of the second mounting block 302. The structure of the worm gear 304-1 and worm 304-2 is used to adjust the rotation angle of the rotating shaft 303. The structure of the worm gear 304-1 and worm 304-2 is relatively compact, occupying little space and effectively reducing the overall area occupied by the adjustment mechanism. Furthermore, the compact structure allows for the adjustment of the rotation angle within a limited space, which is beneficial for the miniaturization and integration of the equipment, while also reducing the overall weight of the equipment.

[0019] In this application, a first sealing gasket 306 is provided between the first mounting block 301 and the outer wall of the tube body 1, and a second sealing gasket 307 is provided between the second mounting block 302 and the outer wall of the tube body 1. The first mounting block 301 and the second mounting block 302 are used to protect the rotating shaft 303 and the worm gear assembly 304.

[0020] The rotating shaft 303 is fixedly installed to the movable baffle 2 by screws. In this embodiment, the axis of the rotating shaft 303 overlaps with the center of the movable baffle 2, and the rotating shaft 303 is fixedly installed to the movable baffle 2 by several screws.

[0021] Compared with existing technologies, the exhaust pipe structure of this application utilizes an adjustment mechanism to adjust the rotation angle of the movable baffle within the pipe. A worm gear structure drives the movable baffle to rotate, ensuring the accuracy and stability of the angle adjustment. This allows for precise adjustment of components to the required accurate angle, meeting high-precision angle adjustment needs. Consequently, it can control the uniform airflow of several pipes on the equipment. This unified exhaust system ensures that the exhaust gas generated by the equipment is fully collected and effectively treated, guaranteeing that pollutants emitted into the atmosphere meet stringent environmental standards and contributing to the stability of the equipment's operating environment.

[0022] It will be apparent to those skilled in the art that this invention is not limited to the details of the foregoing exemplary embodiments, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0023] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A duct structure for ventilation, characterized in that: The device includes a pipe body with an arc-shaped bend. The pipe body contains a ventilation duct that runs through both ends, forming an upper ventilation opening and a lower ventilation opening. A movable baffle is provided in the pipe body near the lower ventilation opening. The movable baffle is movably installed in the ventilation duct by an adjustment mechanism. The adjustment mechanism controls the angle of rotation of the movable baffle in the ventilation duct, thereby controlling the airflow in the ventilation duct.

2. The duct structure for ventilation according to claim 1, characterized in that: The adjusting mechanism includes a rotating shaft, a first mounting block, a second mounting block, and a worm gear assembly. The movable baffle is fixed on the rotating shaft. The left and right ends of the rotating shaft are rotatably connected to the side walls of the tube body, respectively. The axis of the rotating shaft is perpendicular to the center of the tube body. The first and second mounting blocks are fixed to the outer side walls of the tube body, respectively. The left and right ends of the rotating shaft pass through the first and second mounting blocks, respectively. The worm gear assembly includes a worm wheel and a worm. The worm wheel is fixed on one side of the rotating shaft and coaxially mounted with the rotating shaft. The worm is threaded above the worm wheel. Both the worm wheel and the worm are inside the second mounting block. A knob is installed at one end of the worm, and the knob is located outside the second mounting block.

3. The duct structure for ventilation according to claim 2, characterized in that: A first sealing gasket is provided between the first mounting block and the outer wall of the pipe body, and a second sealing gasket is provided between the second mounting block and the outer wall of the pipe body.

4. The duct structure for ventilation according to claim 3, characterized in that: The longitudinal section of the ventilation duct is rectangular, and the movable baffle matches the longitudinal section structure of the ventilation duct.

5. The duct structure for ventilation according to claim 4, characterized in that: The rotating shaft is fixedly installed to the movable baffle by screws.

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