Exhaust pipe dust treatment equipment

Abstract

The utility model discloses exhaust pipe dust treatment equipment which comprises a base body, an interlayer cylinder is arranged on the upper portion of the base body, a bottom plate of the interlayer cylinder is positioned at a certain height on the base body, so that the bottom of the interlayer cylinder forms an overhead space in the base body, an inner cylinder and a center cylinder are arranged in the interlayer cylinder, the inner cylinder forms a cavity for gas to penetrate through, and the center cylinder is arranged in the cavity. And the inner cylinder and the central cylinder form an isolated contact surface which exchanges heat with gas. The exhaust pipe dust treatment equipment can be conveniently connected to the tail end of an exhaust pipeline, so that heated gas dust can be quickly condensed on the inner walls of a copper pipe and a cooling device of the equipment when being cooled, and the gas dust is prevented from being attached to the inner wall of the exhaust pipeline, so that the pipeline is blocked, and a vacuum pump is prevented from being shut down. By using the device, the problem that the exhaust pipeline is blocked by dust is solved, the operation cycle of the vacuum pump is prolonged, and the productivity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum equipment technical field, specifically is a kind of exhaust pipe dust treatment equipment. BACKGROUND

[0002] Toxic and harmful gas is discharged in the process of semiconductor process, and the generated toxic and harmful gas will generate dust before being treated, and the generated dust has adhesion and corrosivity, and long-time dust will be left on the inner wall of exhaust pipeline, causing the exhaust pipeline to be blocked, causing the vacuum pump to stop, and there is a hidden danger of safety accident.

[0003] In view of the above, it is necessary to provide an exhaust pipe dust treatment equipment to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at solving the above-mentioned technical problem, and provides an exhaust pipe dust treatment equipment.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an exhaust pipe dust treatment equipment, including base body, the upper portion of base body is equipped with partition cylinder, the bottom plate of partition cylinder is positioned at a certain height on base body, so that the bottom part forms an overhead space in base body, and the inner cylinder and the center cylinder are provided in the partition cylinder, the inner cylinder forms a chamber for gas to pass through, and the inner cylinder and the center cylinder form an isolated contact surface for heat exchange with the gas.

[0006] Further, the diameter of the inner cylinder is smaller than the diameter of the partition cylinder, and the inner cylinder and the partition cylinder are coaxially arranged to form a sleeve interlayer therebetween, and the sleeve interlayer is provided with heat exchange coil.

[0007] Further, the heat exchange coil is arranged on the outer wall of the inner cylinder in a wall-hugging manner, and the two ends of the heat exchange coil pass through the bottom plate downward to form a first water inlet and a first water outlet in the overhead space.

[0008] Further, the center cylinder is a hollow cylindrical body, and the upper and lower ends of the center cylinder are blind ends, and the lower end is taken as a blind end by the bottom plate, and the center cylinder is provided with an insertion pipe, the upper end of the insertion pipe extends to the upper blind end, and the lower end penetrates the bottom plate to form a second water outlet, and the bottom plate is provided with a second water inlet connected to the center cylinder.

[0009] Further, the partition cylinder is also provided with an air inlet pipe and an air outlet pipe, one end of the air inlet pipe penetrates the bottom plate to communicate with the partition cylinder, and the air inlet pipe is provided with an elbow in the middle part, so that the other end of the air inlet pipe forms a side air inlet, and the air outlet pipe is arranged at the top of the partition cylinder, and the air outlet pipe communicates with the partition cylinder.

[0010] Further, the bottom of the base body is provided with universal wheels, and the bottom of the base body is provided with support feet capable of adjusting height.

[0011] Compared with the prior art, the exhaust pipe dust treatment equipment has the advantages that: the exhaust pipe dust treatment equipment can be conveniently connected at the end of the exhaust pipe, so that the heated gas dust can be quickly condensed on the inner wall of the copper pipe and the cooling device of the equipment when it is cooled, thereby preventing the gas dust from adhering to the inner wall of the exhaust pipe and causing pipeline blockage, and avoiding causing the vacuum pump to stop. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 is a structural schematic view of the exhaust pipe dust treatment equipment of the utility model;

[0013] In the figure: 1, base body; 2, partition layer cylinder; 3, bottom plate; 4, overhead space; 5, inner cylinder; 6, center cylinder; 7, sleeve sandwich; 8, heat exchange coil; 9, first water inlet; 10, first water outlet; 11, insertion pipe; 12, second water outlet; 13, second water inlet; 14, air inlet pipe; 15, air outlet pipe; 16, elbow; 17, universal wheel; 18, support foot. DETAILED DESCRIPTION

[0014] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments.

[0015] The specific implementation of the utility model will be further described below with reference to the drawings. The same parts are denoted by the same reference numerals.

[0016] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "transverse", "upper", "lower", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is the orientation or positional relationship shown based on the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more. In addition, the term "includes" and any variations thereof are intended to cover non-exclusive inclusion.

[0017] An exhaust pipe dust treatment equipment, as shown in Figure 1 The base body 1 is provided with a partition cylinder 2 at the upper portion, and the bottom plate 3 of the partition cylinder 2 is positioned at a certain height on the base body 1, so that the bottom portion forms an overhead space 4 in the base body 1. The arrangement of the space can facilitate the arrangement of pipelines at the bottom portion.

[0018] The inner cylinder 5 forms a chamber for gas to pass through, and the inner cylinder 5 and the center cylinder 6 form an isolated contact surface for heat exchange with the gas. In use, the center cylinder 6 and the inner cylinder 5 are made of copper material, and the inner cylinder 5 and the center cylinder 6 are cooled and form a low-temperature surface.

[0019] The diameter of the inner cylinder 5 is smaller than the diameter of the partition cylinder 2, and the inner cylinder 5 is coaxially arranged with the partition cylinder 2, so that a sleeve interlayer 7 is formed between the two. The sleeve interlayer 7 is provided with a heat exchange coil 8. The heat exchange coil 8 is arranged on the outer wall of the inner cylinder 5 in a wall-hugging manner, and the two ends of the heat exchange coil 8 pass through the bottom plate 3 downwardly in the overhead space 4 to form a first water inlet 9 and a first water outlet 10.

[0020] Further, the center cylinder 6 is a hollow cylindrical cylinder, and the upper and lower ends of the center cylinder 6 are blind ends, and the lower end is taken as the blind end of the bottom plate 3. The center cylinder 6 is provided with an insertion pipe 11, the upper end of the insertion pipe 11 extends to the upper blind end, the lower end penetrates through the bottom plate 3 and is provided with a second water outlet 12, and the bottom plate 3 is provided with a second water inlet 13 communicated to the center cylinder 6.

[0021] When in use, cold water is injected into the heat exchange coil 8 and the center cylinder 6 to produce low temperature on the surface of the copper pipe, and the heated gas dust passes through the device, and the gas dust is quickly condensed on the surface of the copper pipe and the cooling device when it is cooled, so that the dust is treated.

[0022] Specifically, the partition cylinder 2 is further provided with an air inlet pipe 14 and an air outlet pipe 15, one end of the air inlet pipe 14 penetrates through the bottom plate 3 and communicates with the partition cylinder 2, and a bend 16 is arranged in the middle of the air inlet pipe 14, so that the other end of the air inlet pipe 14 forms a side air inlet, and the air outlet pipe 15 is arranged at the top of the partition cylinder 2 and communicates with the partition cylinder 2. The air inlet pipe and the air outlet pipe are convenient to connect.

[0023] The bottom of the base body 1 is provided with universal wheels 17, and the bottom of the base body 1 is provided with support feet 18 which can adjust the height. The universal wheels 17 can facilitate the movement of the whole device, and when the device is moved to a predetermined position, the whole device is supported by adjusting the nuts on the support feet 18, so as to avoid the movement of the whole device.

[0024] The working principle of the device is mainly that the surface of the copper pipe and the cooling device inside the copper pipe produces low temperature, so that the heated gas dust is quickly attached to the surface of the copper pipe and the cooling device inside the copper pipe when it is cooled, so as to achieve the effect of treating the gas dust. When the dust on the surface of the copper pipe and the cooling device inside the copper pipe in the device condenses too much, the copper pipe and the cooling device inside the copper pipe in the device can be cleaned regularly.

[0025] The gas dust enters from the air inlet pipe 14 and exits from the air outlet pipe 15, the cold water enters from the first water inlet 9 and exits from the first water outlet 10, so that the surface of the copper pipe produces low temperature, and the passing heated gas dust can be quickly condensed, the water enters from the second water inlet 13 and exits from the second water outlet 12, so that the surface of the center cylinder 6 produces low temperature, and the passing heated gas dust can be quickly condensed. When the dust in the device condenses too much, the device can be cleaned regularly, thereby saving cost for customers and improving production efficiency.

[0026] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered in the protection scope of the present application.

Claims

1. An exhaust duct dust handling apparatus, characterised in that, The utility model provides a kind of gas heating device, including pedestal body (1), is equipped with partition cylinder (2) on the upper portion of pedestal body (1), the bottom plate (3) of partition cylinder (2) is positioned on a certain height on pedestal body (1), and its bottom forms overhead space (4) in pedestal body (1), is equipped with inner cylinder (5), center cylinder (6) in partition cylinder (2), the inner cylinder (5) forms the chamber for gas to pass through, and inner cylinder (5), center cylinder (6) form the isolated contact surface with gas to exchange heat.

2. A dust handling apparatus for exhaust ducts according to claim 1, characterized in that, The diameter of the inner cylinder (5) is less than the diameter of the partition cylinder (2), and the inner cylinder (5) is coaxially arranged with the partition cylinder (2) to form a sleeve interlayer (7) therebetween, and the sleeve interlayer (7) is provided with a heat exchange coil (8).

3. A dust handling apparatus for an exhaust duct as claimed in claim 2, wherein, The heat exchange coil (8) is arranged on the outer wall of the inner cylinder (5) in a wall-hugging manner, and the two ends of the heat exchange coil (8) pass through the bottom plate (3) downwardly to form a first water inlet (9) and a first water outlet (10) in the overhead space (4).

4. The exhaust duct dust handling apparatus of claim 1 wherein, The center cylinder (6) is a hollow cylindrical body, and the upper and lower ends of the center cylinder (6) are blind ends, with the bottom plate (3) as the lower blind end, and the center cylinder (6) is provided with an insertion pipe (11) extending to the upper blind end and having a second water outlet (12) at the lower end penetrating through the bottom plate (3) and a second water inlet (13) penetrating through the bottom plate (3) and communicating with the center cylinder (6).

5. A dust handling apparatus for exhaust ducts according to claim 1, characterized in that, The partition cylinder (2) is further provided with an air inlet pipe (14) and an air outlet pipe (15), one end of the air inlet pipe (14) penetrates through the bottom plate (3) and communicates with the partition cylinder (2), and the air inlet pipe (14) is provided with an elbow (16) at the middle portion to form a side air inlet at the other end of the air inlet pipe (14), and the air outlet pipe (15) is arranged at the top of the partition cylinder (2) and communicates with the partition cylinder (2).

6. A dust handling apparatus for exhaust ducts according to claim 1, characterized in that, The bottom of the pedestal body (1) is provided with universal wheels (17), and the bottom of the pedestal body (1) is provided with height-adjustable supporting legs (18).

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