Pipeline heating device of MOCVD (Metal Organic Chemical Vapor Deposition) equipment

Abstract

The utility model relates to a pipeline heating device of MOCVD (Metal Organic Chemical Vapor Deposition) equipment, which belongs to the technical field of pipeline heating and comprises an active heating device and an auxiliary heating device, the active heating device comprises a heating wire and a heating belt, the heating wire is spirally wound on the pipeline, and the heating belt is spirally wound on the pipeline and overlaid on the heating wire; the heating wire of the active heating device is spirally wound in the spiral groove of the pipeline, and the heating belt and the heating wire are spirally wound, so that a medium in the pipeline is uniformly heated, the heating belt plays a role in heating, the contact surface between the heating belt and the pipeline is large, and meanwhile, the heating belt plays a role in heat preservation; condensation of reaction products is prevented, internal blockage is avoided, production efficiency is improved, and stable transmission of gas is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to pipeline heating technical field, specifically point to a kind of pipeline heating device of MOCVD equipment. BACKGROUND

[0002] MOCVD is a new type of vapor phase epitaxy growth technology developed on the basis of vapor phase epitaxy growth (VPE). It is a metal organic chemical vapor deposition equipment. It is a new type of vapor phase epitaxy growth technology developed on the basis of vapor phase epitaxy growth, which can grow various III-V, II-VI compound semiconductors and their multi-component solid solution thin layer single crystal materials. MOCVD mainly relies on carrier gas (such as H2 / N2) mixed with liquid III element alkane and gaseous V element hydride through bubbler, transported to the reaction chamber, cracked into III element and V element on the high-temperature substrate, and then vapor phase epitaxy on the substrate surface to form III-V compound single crystal thin film material.

[0003] The existing MOCVD equipment has various pipelines for transporting various gases, but the existing pipelines do not have heating devices, which cannot maintain the temperature of the gas pipeline, and the reaction products condense, causing internal deposits or blockage, which cannot guarantee stable gas transmission. UTILITY MODEL CONTENT

[0004] The utility model solves the above technical problems and provides a pipeline heating device for MOCVD equipment.

[0005] To solve the above technical problems, the utility model provides the technical scheme:

[0006] A pipeline heating device for MOCVD equipment, comprising active heating devices and auxiliary heating devices.

[0007] The active heating device comprises heating wires and heating bands, the heating wires are spirally wound on the pipeline, and the heating bands are spirally wound on the pipeline and stacked on the heating wires.

[0008] The auxiliary heating device comprises two protective blocks, the two protective blocks are fixedly connected by bolts, an installation area is formed between the two protective blocks, and the pipeline can be stored in the installation area, a heat insulation layer is installed on the opposite surface of each protective block, and an auxiliary heating cavity for storing liquid is formed in the protective block.

[0009] Preferably, a spiral groove is formed on the outer side of the pipeline to match the installation of the heating wire.

[0010] Preferably, the winding directions of the heating bands and the heating wires are opposite.

[0011] Preferably, pipe mouths are mounted on both ends of the protection blocks and the pipe mouths are communicated with the auxiliary heating cavity.

[0012] Preferably, a plurality of connecting plates are oppositely mounted on both ends of the two protection blocks, and threaded holes are formed in the connecting plates.

[0013] Preferably, rubber layers are mounted on opposite surfaces of the two heat insulation layers.

[0014] Preferably, a heating pipe for heating liquid is mounted in the auxiliary heating cavity.

[0015] With the above structure, the utility model has the following advantages:

[0016] The utility model discloses a heating wire of active heating device is spirally wound in the spiral groove of pipeline, and heating band and heating wire are spirally wound, and the medium of pipeline is uniformly heated, the heating band plays heating, and the contact surface of heating band and pipeline is big, and the heat preservation effect is played simultaneously, the auxiliary heating device is heat preserved to pipeline, maintains the temperature of gas pipeline, prevents reaction product condensation, avoids internal blockage, improves production efficiency, and guarantees gas stable transmission.

[0017] The above summary is merely intended to illustrate the present description and is not intended to limit in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present utility model will be readily apparent to those skilled in the art by reference to the drawings and the following detailed description. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without any creative effort.

[0019] Figure 1 is a structural schematic diagram of the utility model;

[0020] Figure 2 is an installation schematic diagram of the auxiliary heating device of the utility model;

[0021] Figure 3 is an explosion diagram of the utility model;

[0022] Figure 4 is a sectional view of the protection block of the utility model.

[0023] As shown in the figure: 1, active heating device; 2, auxiliary heating device; 201, protective block; 202, installation area; 203, heat insulation layer; 204, auxiliary heating cavity; 3, heating wire; 4, heating belt; 5, pipeline; 6, spiral groove; 7, pipe opening; 8, connecting plate; 9, rubber layer. DETAILED DESCRIPTION

[0024] The embodiments of the present application are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0025] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0026] The present application will be further described in detail below in combination with the whole text.

[0027] In combination with the accompanying drawings Figures 1-4 A pipeline heating device of an MOCVD equipment, comprising an active heating device 1 and an auxiliary heating device 2, the utility model discloses through active heating device 1 carries out heating to pipeline 5, and through auxiliary heating device 2 carries out heat preservation to its pipeline 5, ensures the uniformity and stability of gas flow, through active heating device 1 and auxiliary heating device 2 to pipeline 5 even heating, avoids internal blockage, improves production efficiency.

[0028] In the specific implementation of the present application, Figure 2 And Figure 3As shown, the active heating device 1 comprises heating wires 3 and heating bands 4, the heating wires 3 are spirally wound on the pipeline 5, the heating bands 4 are spirally wound on the pipeline 5 and the heating bands 4 are superimposed on the heating wires 3; the outer side of the pipeline 5 is provided with a spiral groove 6 matched with the installation of the heating wires 3, and the winding directions of the heating bands 4 and the heating wires 3 are opposite. The heating bands 4 and the heating wires 3 are connected with an external power source through wires, so that the opening and closing of the heating bands 4 and the heating wires 3 are realized, the heating bands 4 and the heating wires 3 can heat the pipeline 5, the heating wires 3 are spirally wound in the spiral groove 6 of the pipeline 5, the heating bands 4 and the heating wires 3 are spirally wound, the winding directions of the heating bands 4 and the heating wires 3 are opposite and the heating bands 4 are superimposed on the outer side of the heating wires 3, so that the medium of the pipeline is uniformly heated, the heating bands 4 play a heating role, the contact surface between the heating bands 4 and the pipeline 5 is large, and a heat preservation effect is simultaneously achieved.

[0029] As shown in the specific implementation of the utility model, Figure 3 and Figure 4 As shown, the auxiliary heating device 2 comprises two protective blocks 201, the two protective blocks 201 are fixedly connected through bolts, an installation area 202 is formed between the two protective blocks 201 and the pipeline 5 can be stored in the installation area 202, heat insulation layers 203 are installed on the opposite surfaces of the two protective blocks 201, auxiliary heating cavities 204 for storing liquid are formed in the protective blocks 201, and pipe mouths 7 are installed at the two ends of the protective blocks 201 and communicate with the auxiliary heating cavities 204. Liquid can be injected into the auxiliary heating cavities 204 through the pipe mouths 7, the material of the heat insulation layers 203 can be selected from rubber plastic heat preservation cotton, rock wool, glass wool, aluminum silicate fiber cotton or aerogel, the aluminum silicate fiber cotton can resist high temperature up to 1200 DEG C and is suitable for high-temperature industrial environments. The aerogel has the lowest thermal conductivity, but has high cost, the liquid in the auxiliary heating cavities 204 can be selected from water, silicate-based liquid, polyurethane prepolymer or mineral oil-based high-temperature heat conducting oil, and can be selected according to the temperature of the pipeline 5.

[0030] A plurality of connecting plates 8 are installed at the two ends of the two protective blocks 201 in opposition, threaded holes are formed in the connecting plates 8, and the two protective blocks 201 are fixedly connected together through the threaded holes in the connecting plates 8 and bolts and nuts.

[0031] Specifically, rubber layers 9 are installed on the opposite surfaces of the two heat insulation layers 203, the rubber layers 9 play a protection role and also play a heat preservation role.

[0032] Specifically, heating pipes for heating liquid are installed in the auxiliary heating cavities 204. The heating pipes are prior art, can be connected with an external power source, and can heat the liquid in the auxiliary heating cavities 204 through the power source, so that the two protective blocks 201 play a heat preservation role on the pipeline 5.

[0033] The working principle of the utility model is as follows:

[0034] The heating band 4 and the heating wire 3 are connected with an external power source through wires to realize opening and closing of the heating band 4 and the heating wire 3, the heating band 4 and the heating wire 3 can heat the pipeline 5, the heating wire 3 is spirally wound in the spiral groove 6 of the pipeline 5, the heating band 4 and the heating wire 3 are spirally wound, the winding directions of the heating band 4 and the heating wire 3 are opposite and the heating band 4 is superposed on the outside of the heating wire 3, the bolt and the nut are fixedly connected together by the threaded holes on the connecting plate 8, the two protective blocks 201 are fixedly connected together, liquid is injected into the auxiliary heating cavity 204 through the pipe opening 7 to ensure that the medium of the pipeline is uniformly heated, the auxiliary heating device can heat preservation of the pipeline, maintain the temperature of the gas pipeline, prevent the reaction product from condensing, avoid internal blockage, improve production efficiency and ensure stable transmission of the gas.

[0035] The above describes the utility model and its implementation mode, and this description is not restrictive, and the shown in the full text is only one of the implementation modes of the utility model, and the actual structure is not limited thereto. In summary, if a person skilled in the art is inspired thereby, without departing from the creative purpose of the utility model, similar structure modes and embodiments are not creatively designed, which should belong to the protection scope of the utility model.

Claims

1. A pipe heating apparatus of an MOCVD apparatus, characterized by, The device comprises a main heating device (1) and an auxiliary heating device (2); The main heating device (1) comprises heating wires (3) and heating bands (4), the heating wires (3) are spirally wound on a pipeline (5), and the heating bands (4) are spirally wound on the pipeline (5) and superposed on the heating wires (3); The auxiliary heating device (2) comprises two protective blocks (201), the two protective blocks (201) are fixedly connected through bolts, an installation area (202) is formed between the two protective blocks (201), the pipeline (5) can be stored in the installation area (202), heat insulation layers (203) are installed on opposite surfaces of the two protective blocks (201), and auxiliary heating cavities (204) for storing liquid are formed in the protective blocks (201).

2. The pipe heating device of the MOCVD equipment according to claim 1, wherein: Spiral grooves (6) for installing the heating wires (3) are formed on the outer side of the pipeline (5).

3. The pipe heating device of the MOCVD equipment according to claim 1, wherein: The winding directions of the heating bands (4) and the heating wires (3) are opposite.

4. The pipe heating device of the MOCVD equipment according to claim 1, wherein: Tube openings (7) are installed at the two ends of the protective blocks (201) and communicate with the auxiliary heating cavities (204).

5. The pipe heating device of the MOCVD equipment according to claim 1, wherein: A plurality of connecting plates (8) are installed at the two ends of the two protective blocks (201) in a relative mode, and threaded holes are formed in the connecting plates (8).

6. The pipe heating device of the MOCVD equipment according to claim 1, wherein: Rubber layers (9) are installed on opposite surfaces of the two heat insulation layers (203).

7. The pipe heating device of the MOCVD equipment according to claim 1, wherein: Heating pipes for heating liquid are installed in the auxiliary heating cavities (204).

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