Piezoresistive MEMS pressure sensor for gearbox

Abstract

The utility model discloses a piezoresistive MEMS pressure sensor for a gearbox, and relates to the technical field of pressure sensors for passenger car gearbox clutch systems, the piezoresistive MEMS pressure sensor comprises a connector, a base and a shell which are connected in sequence, and a ceramic circuit assembly is installed in a cavity formed by the connector and the base in a matched mode. A piezoresistive MEMS pressure chip used for detecting oil pressure is installed on the ceramic circuit assembly, a through hole used for containing the piezoresistive MEMS pressure chip is formed in the base, and an oil passing hole corresponding to the piezoresistive MEMS pressure chip in position is formed in the shell. According to the utility model, the piezoresistive MEMS pressure chip is applied to the field of passenger car gearbox oil pressure measurement for the first time, and the manufacturing cost of the gearbox oil pressure sensor is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to passenger car gearbox clutch system pressure sensor technical field, especially a kind of piezoresistive MEMS pressure sensor for gearbox. BACKGROUND

[0002] Current commonly used gearbox oil pressure sensor is capacitive pressure sensor, its principle is that when the oil pressure in gearbox changes, it will cause the distance between positive and negative poles of capacitive pressure sensor inside to change, and then change capacitance value. Because fluid in gearbox clutch system has characteristics such as high temperature and strong corrosion, therefore the pressure sensitive unit of existing capacitive pressure sensor is often protected by sputtering film or glass micro-melting technology, so that the manufacturing cost of existing capacitive pressure sensor for gearbox is high.

[0003] Therefore, how to provide a kind of oil pressure sensor for gearbox with high temperature resistance and corrosion resistance and low manufacturing cost becomes a difficult problem to be solved by the technical personnel in the field. INVENTION CONTENTS

[0004] The utility model aims at providing a kind of piezoresistive MEMS pressure sensor for gearbox, solves the problem of high manufacturing cost of existing capacitive pressure sensor.

[0005] To solve the above technical problems, the utility model adopts the following technical scheme:

[0006] The utility model provides a kind of piezoresistive MEMS pressure sensor for gearbox, including connector, base and shell connected in sequence, ceramic circuit assembly is installed in the cavity formed by the cooperation of the connector and the base, piezoresistive MEMS pressure chip for detecting oil pressure is installed on the ceramic circuit assembly, through hole for placing the piezoresistive MEMS pressure chip is provided on the base, oil hole corresponding with the position of the piezoresistive MEMS pressure chip is opened on the shell.

[0007] Optionally, the connector and the base are snap connected, and the bottom of the connector is provided with snap fastener positions symmetrically on both sides.

[0008] Optionally, the base is provided with snap fastener bones symmetrically at both ends, the snap fastener bones correspond to the snap fastener positions, the through hole is arranged at the center of the base, and profiled gaskets for sealing are arranged around the through hole, and the ceramic circuit assembly is placed on the profiled gaskets.

[0009] Optionally, the base and the shell are press riveted, and the facing surfaces of the base and the shell are respectively provided with mounting convex points and mounting concave points for limiting, and the base is further provided with grounding hole positions.

[0010] Optionally, the oil hole is arranged at the center of the shell.

[0011] Optionally, the ceramic circuit assembly comprises a ceramic circuit substrate, the ceramic circuit substrate is placed on the profiled gasket, a first spring, a signal adjusting chip and a resistance-capacitance electronic component are respectively mounted on the top surface of the ceramic circuit substrate, the piezoresistive MEMS pressure chip is welded at the bottom center of the ceramic circuit substrate through a tin ball, and a second spring is further mounted on the bottom of the ceramic circuit substrate.

[0012] The piezoresistive MEMS pressure chip is electrically connected through the ceramic circuit substrate and the signal adjusting chip, and the signal adjusting chip is electrically connected with the resistance-capacitance electronic component and the first spring in sequence through the ceramic circuit substrate.

[0013] The first spring is electrically connected with the connector, and the second spring is electrically connected with the shell after passing through the grounding hole.

[0014] Optionally, the piezoresistive MEMS pressure chip is coated with high-temperature-resistant and corrosion-resistant protective glue.

[0015] Optionally, a threaded column for connecting a gearbox is integrally formed at the bottom center of the shell, and an O-shaped ring for sealing is arranged at the threaded end of the threaded column.

[0016] Optionally, a wiring jack is arranged at the top of the connector.

[0017] Compared with the prior art, the beneficial technical effects of the utility model are as follows:

[0018] 1) The piezoresistive MEMS pressure chip is first applied in the field of passenger car gearbox oil pressure measurement, thereby reducing the manufacturing cost of the gearbox oil pressure sensor.

[0019] 2) The protective glue with high-temperature resistance and corrosion resistance is coated around the piezoresistive MEMS pressure chip, so that the piezoresistive MEMS pressure chip can be applied in a high-temperature and high-corrosion environment, thereby prolonging the service life of the piezoresistive MEMS pressure chip. BRIEF DESCRIPTION OF DRAWINGS

[0020] The utility model will be further described in connection with the drawings.

[0021] Figure 1 It is the explosion structure schematic view of the utility model variable speed gearbox piezoresistive MEMS pressure sensor;

[0022] Figure 2 It is the front view of the utility model variable speed gearbox piezoresistive MEMS pressure sensor;

[0023] Figure 3 It is the explosion structure schematic view of the ceramic circuit assembly of the utility model;

[0024] Figure 4 It is the overhead view of the ceramic circuit assembly of the utility model;

[0025] Figure 5 It is the bottom view of the ceramic circuit assembly of the utility model;

[0026] Figure 6 It is the piezoresistive MEMS pressure chip structure schematic view of the utility model;

[0027] Figure 7 It is the ceramic circuit assembly structure schematic view of the utility model;

[0028] Figure 8 It is the overhead view of the base of the utility model;

[0029] Figure 9 It is the base and ceramic circuit assembly connection relation schematic view of the utility model;

[0030] Figure 10 It is the overhead view of the connector of the utility model;

[0031] Figure 11 It is the connector structure schematic view of the utility model;

[0032] Figure 12 It is the connector and base connection relation schematic view of the utility model;

[0033] Figure 13 It is the overhead view of the shell of the utility model;

[0034] Figure 14 It is the shell structure schematic view of the utility model.

[0035] Mark explanation: 1, connector;2, base;3, shell;4, ceramic circuit assembly;

[0036] 11, buckle buckle position;

[0037] 21, through hole;22, buckle insertion bone;23, special-shaped gasket;24, installation convex point;25, ground hole position;

[0038] 31, oil hole;32, installation concave point;33, O ring.

[0039] 41, piezoresistive MEMS pressure chip;42, ceramic circuit substrate;43, first elastic sheet;44, signal regulating chip;45, resistance and capacitance class electronic component;46, second elastic sheet;47, protective glue;48, tin ball. Specific implementation

[0040] In order to make the technical problems, technical schemes and beneficial effects to be solved by the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and embodiments.

[0041] As shown in Figures 1-14 A kind of piezoresistive MEMS pressure sensor for gearbox, including connector 1, base 2 and shell 3 connected in sequence, ceramic circuit assembly 4 is installed in the cavity formed by the cooperation of the connector 1 and the base 2, piezoresistive MEMS pressure chip 41 for detecting oil pressure is installed on the ceramic circuit assembly 4, through hole 21 for placing the piezoresistive MEMS pressure chip 41 is provided on the base 2, oil hole 31 corresponding to the position of the piezoresistive MEMS pressure chip 41 is opened on the shell 3.

[0042] Specifically, the connector 1 and the base 2 are snap connected, and the bottom of the connector 1 is symmetrically provided with a snap buckle position 11.

[0043] Specifically, the base 2 is symmetrically provided with a snap buckle insertion bone 22 at both ends, the snap buckle insertion bone 22 corresponds to the snap buckle position 11, the through hole 21 is arranged at the center of the base 2, and a special-shaped gasket 23 for sealing is arranged around the through hole 21, and the ceramic circuit assembly 4 is placed on the special-shaped gasket 23.

[0044] Specifically, the base 2 and the shell 3 are press riveted, and the facing surfaces of the base 2 and the shell 3 are respectively provided with a mounting convex point 24 and a mounting concave point 32 for limiting, and the base 2 is further provided with a grounding hole position 25.

[0045] Specifically, the oil hole 31 is arranged at the center of the shell 3.

[0046] Specifically, the ceramic circuit assembly 4 includes a ceramic circuit substrate 42, the ceramic circuit substrate 42 is placed on the special-shaped gasket 23, a first spring 43, a signal adjusting chip 44 and a resistance-capacitance electronic component 45 are respectively mounted on the top surface of the ceramic circuit substrate 42, the piezoresistive MEMS pressure chip 41 is welded at the bottom center of the ceramic circuit substrate 42 through a tin ball 48, and a second spring 46 is further mounted at the bottom of the ceramic circuit substrate 42.

[0047] The piezoresistive MEMS pressure chip 41 is electrically connected through the ceramic circuit substrate 42 and the signal adjusting chip 44, and the signal adjusting chip 44 is electrically connected with the resistance-capacitance electronic component 45 and the first spring 43 in sequence through the ceramic circuit substrate 42.

[0048] The first elastic sheet 43 is electrically connected with the connector 1, and the second elastic sheet 46 is electrically connected with the shell 3 after passing through the grounding hole 25.

[0049] The signal conditioning chip 44 amplifies and compensates the electrical signal output by the piezoresistive MEMS pressure chip 41.

[0050] Specifically, the piezoresistive MEMS pressure chip 41 is coated with a high-temperature-resistant and corrosion-resistant protective glue 47.

[0051] In specific implementation, the protective glue is used to protect the piezoresistive MEMS pressure chip 41 through a dispensing process.

[0052] Specifically, a threaded column for connecting a gearbox is integrally formed at the bottom center of the shell 3, and an O-ring 33 for sealing is arranged at the threaded end of the threaded column.

[0053] Specifically, a wiring jack is arranged at the top of the connector 1, and the connector 1 is electrically connected with a passenger vehicle controller through the wiring jack.

[0054] The installation process of the utility model is as follows:

[0055] Firstly, the special-shaped gasket 23 is placed at the through hole 21 on the base 2, secondly, the second elastic sheet 46 on the ceramic circuit assembly 4 is aligned with the grounding hole 25 on the base 2, and then the ceramic circuit assembly 4 is placed on the special-shaped gasket 23.

[0056] Then, the base 2 is buckled and connected at the bottom end of the connector 1, finally, the mounting convex point 24 on the base 2 is aligned with the mounting concave point 32 on the shell 3, and then the shell 3 is rivet-connected on the base 2, thereby completing the installation of the piezoresistive MEMS pressure sensor for the gearbox.

[0057] It should be noted that, in this document, the terms such as first and second are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or sequence between the entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0058] The above-described embodiments are merely preferred modes of the present application, and are not intended to limit the scope of the present application, and various modifications and improvements to the technical solutions of the present application made by those of ordinary skill in the art without departing from the design spirit of the present application shall fall within the protection scope of the present application as defined by the claims.

Claims

1. A piezoresistive MEMS pressure sensor for a gearbox, characterized by: The application relates to a connector (1), a base (2) and a shell (3) connected in sequence, wherein a ceramic circuit assembly (4) is arranged in a cavity formed by the connector (1) and the base (2), a piezoresistive MEMS pressure chip (41) for detecting oil pressure is arranged on the ceramic circuit assembly (4), a through hole (21) for placing the piezoresistive MEMS pressure chip (41) is arranged on the base (2), and an oil passage hole (31) corresponding to the position of the piezoresistive MEMS pressure chip (41) is arranged on the shell (3).

2. The piezoresistive MEMS pressure sensor for a gearbox according to claim 1, characterized in that: The connector (1) and the base (2) are snap-connected, and snap-fastening positions (11) are symmetrically arranged on the bottom of the connector (1).

3. The piezoresistive MEMS pressure sensor for a gearbox according to claim 2, characterized in that: Snap-inserting bones (22) are symmetrically arranged at the two ends of the base (2), the snap-inserting bones (22) correspond to the snap-fastening positions (11), the through hole (21) is arranged at the center of the base (2), a special-shaped gasket (23) for sealing is arranged around the through hole (21), and the ceramic circuit assembly (4) is placed on the special-shaped gasket (23).

4. The piezoresistive MEMS pressure sensor for a gearbox according to claim 3, characterized in that: The base (2) and the shell (3) are press-riveted, installation convex points (24) and installation concave points (32) for limiting are respectively arranged on the opposite surfaces of the base (2) and the shell (3), and a grounding hole position (25) is further arranged on the base (2).

5. The piezoresistive MEMS pressure sensor for a gearbox according to claim 4, characterized in that: The oil passage hole (31) is arranged at the center of the shell (3).

6. The piezoresistive MEMS pressure sensor for a gearbox according to claim 5, characterized in that: The ceramic circuit assembly (4) comprises a ceramic circuit substrate (42), the ceramic circuit substrate (42) is placed on the special-shaped gasket (23), a first spring piece (43), a signal adjusting chip (44) and a resistance-capacitance electronic component (45) are respectively arranged on the top surface of the ceramic circuit substrate (42), the piezoresistive MEMS pressure chip (41) is welded to the bottom center of the ceramic circuit substrate (42) through a tin ball (48), and a second spring piece (46) is further arranged on the bottom of the ceramic circuit substrate (42). The piezoresistive MEMS pressure chip (41) is electrically connected through the ceramic circuit substrate (42) and the signal adjusting chip (44), the signal adjusting chip (44) is electrically connected to the resistance-capacitance electronic component (45), the first spring piece (43) and the ceramic circuit substrate (42) in sequence. The first spring piece (43) is electrically connected to the connector (1), and the second spring piece (46) is electrically connected to the shell (3) after passing through the grounding hole position (25).

7. The piezoresistive MEMS pressure sensor for a gearbox according to claim 6, characterized in that: The piezoresistive MEMS pressure chip (41) is coated with high-temperature-resistant and corrosion-resistant protective glue (47) around.

8. The piezoresistive MEMS pressure sensor for a gearbox of claim 1, wherein: A threaded column for connecting a gearbox is integrally formed at the bottom center of the shell (3), and an O-shaped ring (33) for sealing is arranged at the threaded end of the threaded column.

9. The piezoresistive MEMS pressure sensor for a gearbox of claim 1, wherein: A wiring jack is arranged at the top of the connector (1).

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