Probe structure for air pressure measurement and air pressure sensor

Abstract

The probe structure comprises a body and an air inlet connector, the air inlet connector is connected to one side of the body, an air collection chamber is arranged on one side, far away from the air inlet connector, of the body, the air inlet connector is provided with an air inlet channel and a diffusion channel, and the diffusion channel is communicated with the air inlet channel. The two ends of the diffusion channel are connected with the air inlet channel and the air collecting cavity respectively, the side, away from the diffusion channel, of the air collecting cavity is used for being connected with an air pressure measuring chip, the cross section area of the diffusion channel is enlarged in the direction from the air inlet channel to the air collecting cavity, and a flow stabilizing groove is formed in the side, close to the air inlet channel, of the air collecting cavity. The flow stabilizing groove is rotationally symmetrical about the axis of the air inlet channel. Interference on mainstream airflow is reduced, fidelity of air pressure information carried by the mainstream airflow can be improved, air pressure measurement precision is high, and the overall structure is compact and reliable.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of air pressure probe, especially a kind of probe structure and air pressure sensor for air pressure measurement. BACKGROUND

[0002] Air pressure measurement is widely used in meteorology, aerospace, industrial control and other fields, for detecting the gas pressure of environment or closed space, and air pressure sensor can collect air pressure signal and convert it into electrical signal or other form of information output, so as to realize air pressure measurement.

[0003] In the conventional technology, air pressure sensor mainly includes air pressure measurement chip and probe structure, and the probe structure is used to install the air pressure measurement chip, so as to form a protective effect. Although the probe structure can protect the air pressure measurement chip, the probe structure in the prior art will interfere with the airflow transmitted to the air pressure measurement chip, resulting in distortion of the air pressure information carried by the airflow finally transmitted to the air pressure measurement chip, and the reliability of air pressure measurement is insufficient. SUMMARY

[0004] The utility model at least solves one of the technical problems existing in the prior art. To this end, the utility model provides a kind of probe structure and air pressure sensor for air pressure measurement, which can effectively reduce the interference received by airflow, effectively ensure the fidelity of the air pressure information carried by airflow, and the reliability of air pressure measurement is high.

[0005] According to the first aspect embodiment of the utility model, a kind of probe structure for air pressure measurement, including body and intake connector, intake connector is connected to the side of body, the side of body away from intake connector is equipped with gas collection chamber, intake connector is equipped with inlet channel and diffusion channel, the both ends of diffusion channel are connected inlet channel and gas collection chamber respectively, gas collection chamber is used to connect air pressure measurement chip on the side away from diffusion channel, the cross-sectional area of diffusion channel expands along the direction of inlet channel to gas collection chamber, gas collection chamber is equipped with steady flow groove on the side close to inlet channel, steady flow groove is rotationally symmetrical about the axis of inlet channel, the depth of steady flow groove is H, inlet channel is circular channel hole, the radius of inlet channel is R, R≤H≤2R.

[0006] In the embodiment, steady flow groove is annular, and the axis of inlet channel passes through the center of steady flow groove.

[0007] In the embodiment, steady flow groove includes a plurality of groove units, and all the groove units are uniformly distributed around the axis of inlet channel.

[0008] In the embodiment, the groove wall of steady flow groove is provided with energy absorption texture.

[0009] In the embodiment, the filter screen is arranged in the gas collecting chamber and is connected to the middle part of the gas collecting chamber.

[0010] In the embodiment, the reinforcing groove is arranged on the side of the air inlet connector close to the body, the reinforcing groove is arranged on the circumferential surface of the air inlet connector, and the reinforcing flange is arranged on the side of the body close to the air inlet connector.

[0011] In the embodiment, the connector part is arranged on the side of the body away from the air inlet connector.

[0012] According to the second aspect of the utility model, the gas pressure sensor comprises the probe structure for gas pressure measurement of any one of the first aspect of the utility model, and further comprises a gas pressure measurement chip and a back cover, the back cover is connected to the side of the body away from the air inlet connector, the back cover is provided with a positioning cavity communicating with the gas collecting chamber, and the gas pressure measurement chip is arranged in the positioning cavity.

[0013] In the embodiment, the back cover is provided with the terminal lug on the side away from the air inlet connector.

[0014] The utility model discloses at least has following beneficial effect:

[0015] Through the gradually enlarged cross section of the diffusion channel, the airflow velocity can be reduced, the formation of laminar flow is promoted, the interference of turbulent flow on the gas pressure measurement can be effectively reduced, the measurement precision can be significantly improved, the laminar flow adhesion effect of the diffusion channel on the airflow is formed by the rotationally symmetrical recess structure of the steady flow groove, the vortex and noise in the airflow can be comprehensively and effectively captured, the vortex and noise can be converted into heat energy by the kinetic energy dissipation mode, the low-speed backflow gas can be formed, the main airflow in the gas collecting chamber can be effectively stabilized, the interference on the main airflow is reduced, the fidelity of the gas pressure information carried by the main airflow can be effectively improved, the airflow received by the connected gas pressure measurement chip is stable and reliable when being applied, and then the accuracy and reliability of the gas pressure measurement can be effectively improved, the gas pressure measurement precision is high. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and / or additional aspects and advantages of the utility model will become apparent and more readily appreciated from the following description of the embodiments, with reference to the following drawings, in which:

[0017] Figure 1 It is a three-dimensional structure schematic view of the probe structure for gas pressure measurement of the utility model embodiment;

[0018] Figure 2The utility model discloses a probe structure for air pressure measurement's stereogram structure schematic diagram under another visual angle of embodiment;

[0019] Figure 3 The utility model discloses a probe structure for air pressure measurement's exploded structure schematic diagram of embodiment;

[0020] Figure 4 The utility model discloses a probe structure for air pressure measurement's exploded structure schematic diagram under another application of embodiment;

[0021] Figure 5 The utility model discloses a probe structure for air pressure measurement's front view structure schematic diagram of embodiment;

[0022] Figure 6 It is the cross section structure schematic diagram along Figure 5 A-A';

[0023] Figure 7 It is the internal structure schematic diagram of the air pressure sensor of another embodiment of the utility model.

[0024] Reference signs:

[0025] Body 100, gas collecting chamber 110, steady flow groove 120, energy absorption texture 121, filter screen 130, reinforcing flange 140, connector part 150;

[0026] Air inlet joint 200, air inlet channel 210, diffusion channel 220, reinforcing groove 230;

[0027] Air pressure measurement chip 300;

[0028] Rear cover 400, positioning cavity 410, terminal lug 420. DETAILED DESCRIPTION

[0029] The embodiments of the utility model are described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the utility model, and cannot be understood as the limitation of the utility model.

[0030] In the description of the utility model, it needs to be understood that the orientation description, such as the orientation or position relation of up, down, left, right, front, back and the like, is based on the orientation or position relation shown in the drawings, only for the convenience of describing the utility model and simplifying the description, and is not indicative or implied that the indicated device or element must have a particular orientation, a particular orientation structure and operation, therefore, cannot be understood as the limitation of the utility model.

[0031] In the description of the utility model, if it is described that the line sleeve and the support are only used for distinguishing technical features for the purpose, it cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0032] In the description of the utility model, unless otherwise explicitly limited, the words such as setting, installation and connection should be understood in a broad sense, and the skilled in the art can determine the specific meaning of the above words in the utility model in combination with the specific content of the technical scheme.

[0033] The air pressure measurement is used for detecting the gas pressure of an environment or a sealed space, and the air pressure sensor can collect the air pressure signal and convert it into an electric signal or other forms of information output, so as to realize air pressure measurement. In the traditional technology, the air pressure sensor mainly includes an air pressure measurement chip and a probe structure, such as a MEMS chip and a pressure sensitive element, which is used for converting the air pressure signal into an electric signal, and the probe structure is used for installing the air pressure measurement chip, so as to form a protective effect. Although the probe structure can protect the air pressure measurement chip, the probe structure in the prior art will interfere with the airflow transmitted to the air pressure measurement chip, resulting in distortion of the air pressure information carried by the airflow finally transmitted to the air pressure measurement chip, and the reliability of the air pressure measurement is insufficient.

[0034] In the related art, some improved schemes only increase a buffer cavity to stabilize the airflow, but such a structure often causes response delay or increased airflow resistance, and cannot effectively handle vortex and noise interference, so it is difficult to balance the response speed and measurement accuracy. Therefore, there is an urgent need for a probe structure that can adapt to adjust the airflow state, suppress turbulent interference and maintain high-fidelity air pressure transmission and be applied to an air pressure sensor.

[0035] The following refers to the accompanying Figure 1 to the accompanying Figure 7 The probe structure for air pressure measurement and the air pressure sensor of the utility model embodiment can effectively reduce the interference on the airflow, can effectively ensure the fidelity of the air pressure information carried by the airflow, and have high reliability for air pressure measurement.

[0036] Referring to Figures 1 to 6The utility model discloses a first aspect embodiment's a kind of probe structure for air pressure measurement, including body 100 and intake joint 200, intake joint 200 is connected in the side of body 100, body 100 and intake joint 200 are integrally formed structure, can reduce assembly error, the side of body 100 away from intake joint 200 is equipped with gas collection chamber 110, intake joint 200 is equipped with air inlet channel 210 and diffusion channel 220, the both ends of diffusion channel 220 are connected air inlet channel 210 and gas collection chamber 110 respectively, to realize the intercommunication between air inlet channel 210 and gas collection chamber 110, the end of air inlet channel 210 away from diffusion channel 220 is used to connect target measurement space, the side of gas collection chamber 110 away from diffusion channel 220 is used to connect external air pressure measurement chip 300, the cross-sectional area of diffusion channel 220 gradually expands along the direction of air inlet channel 210 to gas collection chamber 110, when airflow enters through diffusion channel 220 from air inlet channel 210, due to the cross-sectional area of channel is increasing, according to Bernoulli effect, airflow speed drops, make flow more easily keep laminar flow state, to effectively reduce turbulence, in turn effectively reduce the interference caused by turbulence to air pressure measurement, when being applied to air pressure measurement, measurement precision is high, the side of gas collection chamber 110 close to air inlet channel 210 is equipped with steady flow groove 120, under the guidance of horn-shaped diffusion channel 220, the boundary portion of airflow stably adheres to channel wall and chamber wall, after entering gas collection chamber 110, the boundary portion of airflow can effectively reach steady flow groove 120, steady flow groove 120 can effectively capture vortex, noise and other unstable parts in airflow after entering gas collection channel, and these unstable airflow is converted into heat energy by the way of kinetic energy dissipation, and form low-speed backflow gas to gas collection chamber 110, to effectively suppress the interference caused by vortex and noise when air pressure measurement, the random swing of main airflow is small, can ensure the fidelity of air pressure input to gas collection chamber 110, the airflow stability of input finally reaching air pressure measurement chip 300 is high, can significantly improve the precision when being used for air pressure measurement, steady flow groove 120 is rotationally symmetrical about the axis of air inlet channel 210, the depth of steady flow groove 120 is H, air inlet channel 210 is circular channel hole, the channel wall of diffusion channel 220 is circular truncated cone circumferential face shape, the radius of air inlet channel 210 is R, R≤H≤2R, by setting the depth of steady flow groove 120 less than or equal to the diameter of air inlet channel 210, and the depth of steady flow groove 120 is greater than or equal to the radius of air inlet channel 210, while effectively suppressing vortex and noise interference, can effectively control the volume of dead zone, not only can ensure corresponding speed, but also can effectively control the volume of probe overall structure.

[0037] The pressure measuring chip can be a MEMS piezoresistive pressure sensitive chip, a capacitive pressure sensitive chip or other pressure sensitive element, MEMS refers to a micro-electro-mechanical system; the main body can be an invar structure, invar refers to a super invar alloy with a low expansion coefficient and stable structure.

[0038] By gradually expanding the cross-sectional area of the diffusion channel 220, the Bernoulli effect can reduce the airflow velocity, thereby promoting the formation of laminar flow, effectively reducing the interference of turbulent flow on air pressure measurement, significantly improving measurement accuracy, and the steady flow groove 120 is set as a rotationally symmetric recessed structure, which cooperates with the laminar flow attachment effect of the diffusion channel 220 to air flow, can effectively capture the vortex and noise in the air flow, and can convert the vortex and noise into heat energy through kinetic energy dissipation, thereby forming a low-speed backflow gas, which can effectively stabilize the main flow in the gas collection chamber 110, reduce the random swing of the main flow, reduce the interference received by the main flow, and effectively improve the fidelity of the air pressure information carried by the main flow, thereby ensuring that the air pressure measuring chip 300 connected in application receives stable and reliable air flow, thereby effectively improving the accuracy and reliability of air pressure measurement, and the air pressure measurement precision is high; through the depth optimization design of the steady flow groove 120, while ensuring the steady flow adjustment effect, the effective working volume of the steady flow groove 120 can be effectively ensured, which not only ensures the rapid response of the probe structure to air pressure, but also controls the compactness of the overall probe structure, which can effectively adapt to small-sized high-precision air pressure measurement applications, and can be applied in a wide range.

[0039] It can be understood that, referring to Figure 3 , the steady flow groove 120 is annularly surrounded around the air inlet channel 210, and the axis of the air inlet channel 210 is arranged in the center of the steady flow groove 120, which can ensure that the steady flow groove 120 has a consistent and high anti-interference absorption effect on air flow in all directions, thereby effectively improving the effect of air pressure measurement.

[0040] It can be understood that, referring to Figure 4 , the steady flow groove 120 includes a plurality of groove units, and all the groove units are uniformly distributed around the axis of the air inlet channel 210, so that all the groove units are rotationally symmetric about the axis of the air inlet channel 210.

[0041] It can be understood that the groove wall of the steady flow groove 120 is provided with energy absorption texture 121 for absorbing interference energy, wherein the energy absorption texture 121 can be a nano-level corrugated groove, which can further improve the vortex and noise dissipation effect, further improve the fidelity effect of air flow transmission, and effectively improve the reliability of the measurement result when used for air pressure measurement.

[0042] It can be understood that the filter screen 130 is arranged in the gas collecting chamber 110, the filter screen 130 is connected to the middle part of the gas collecting chamber 110, so as to separate the diffusion channel 220 and the external air pressure measuring chip 300, the filter screen 130 can reduce the influence of impurities in the input airflow on the air pressure measuring chip 300, can effectively prolong the service life of the air pressure measuring chip 300 matched in application, can further weaken the vortex and other adverse effects formed in the gas collecting chamber 110, and can effectively improve the measurement effect in air pressure measurement. Preferably, the filter screen 130 can be a sintered metal filter screen.

[0043] It can be understood that the air inlet joint 200 is surrounded by the reinforcing groove 230 on the side close to the body 100, the air inlet joint 200 is in a cylindrical structure, the reinforcing groove 230 surrounds the circumferential surface of the air inlet joint 200, the reinforcing groove 230 can effectively improve the structural stability of the air inlet joint 200 in multiple dimensions, and the reinforcing groove 230 can form a clamping structure for connecting a measurement object, the body 100 is provided with the reinforcing flange 140 on the side close to the air inlet joint 200, the reinforcing flange 140 surrounds the air inlet joint 200 in a ring shape, the reinforcing flange 140 can effectively improve the mechanical resistance of the overall probe structure, can effectively adapt to different application scenarios, and has a wide application range.

[0044] The circumferential surface of the body 100 is in a polygonal structure, for example, the circumferential surface of the body 100 surrounds a hexagonal structure, so that the body 100 has the shape of a nut, and is convenient to disassemble and assemble.

[0045] It can be understood that the side, away from the air inlet joint 200, of the body 100 is provided with a connector 150 for connecting other shell structures, the connector 150 is in a tubular structure, is used for connecting other shell structures in application, and the connector 150 can be provided with a clamping structure or a threaded structure for connection.

[0046] Referring to Figure 7 The utility model discloses a second aspect embodiment of a kind of air pressure sensor, including any one first aspect embodiment of the above probe structure for air pressure measurement, still include air pressure measuring chip 300 and back cover 400, back cover 400 is connected to the side, away from air inlet joint 200, of body 100, back cover 400 is provided with the positioning cavity 410 that communicates gas collecting chamber 110 in, air pressure measuring chip 300 is installed in positioning cavity 410, and the measurement part of air pressure measuring chip 300 is directly opposite gas collecting chamber 110, back cover 400 is used to cooperate body 100 to realize the comprehensive protection of air pressure measuring chip 300.

[0047] By utilizing the Bernoulli effect, the gradually enlarged cross-sectional area of the diffusion channel 220 can reduce the airflow speed, thereby promoting the formation of laminar flow, effectively reducing the interference of turbulent flow on the air pressure measurement, and significantly improving the measurement accuracy. The steady flow groove 120 is arranged as a rotationally symmetrical recess structure, which, in combination with the laminar flow attachment effect of the diffusion channel 220, can effectively capture the vortex and noise in the airflow. By converting the vortex and noise into heat energy through kinetic energy dissipation, low-speed backflow gas can be formed, which can effectively stabilize the main airflow in the gas collection chamber 110, reduce the random swing of the main airflow, reduce the interference on the main airflow, effectively improve the fidelity of the air pressure information carried by the main airflow, thereby ensuring the stability and reliability of the air flow received by the air pressure measurement chip 300, and effectively improving the accuracy and reliability of the air pressure measurement. The air pressure measurement accuracy of the air pressure sensor is high, and the measurement result is accurate and reliable. By optimizing the depth of the steady flow groove 120, the effective working volume of the steady flow groove 120 can be effectively ensured while ensuring the steady flow adjustment effect, which not only ensures the rapid response of the air pressure sensor to the air pressure, but also controls the compactness of the overall air pressure sensor, which can effectively adapt to small-sized high-precision air pressure measurement applications. The air pressure sensor has a wide range of applications.

[0048] It can be understood that the side of the back cover 400 away from the air inlet joint 200 is provided with a terminal head 420, and the terminal head 420 is used to realize the connection of the conductive circuit of the air pressure measurement chip 300. The terminal head 420 is generally arranged as a waterproof terminal head 420.

[0049] Although the embodiments of the utility model have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and purposes of the utility model, and the scope of the utility model is defined by the claims and their equivalents.

Claims

1. A probe structure for air pressure measurement, characterized by, The probe structure for gas pressure measurement comprises a body (100) and an air inlet joint (200), the air inlet joint (200) is connected to one side of the body (100), the side of the body (100) away from the air inlet joint (200) is provided with a gas collection chamber (110), the air inlet joint (200) is provided with an air inlet channel (210) and a diffusion channel (220), the two ends of the diffusion channel (220) are connected to the air inlet channel (210) and the gas collection chamber (110) respectively, the side of the gas collection chamber (110) away from the diffusion channel (220) is used for connecting a gas pressure measurement chip (300), the cross-sectional area of the diffusion channel (220) is enlarged along the direction from the air inlet channel (210) to the gas collection chamber (110), the side of the gas collection chamber (110) close to the air inlet channel (210) is provided with a flow stabilizing groove (120), the flow stabilizing groove (120) is rotationally symmetrical about the axis of the air inlet channel (210), the depth of the flow stabilizing groove (120) is H, the air inlet channel (210) is a circular channel hole, the radius of the air inlet channel (210) is R, R≤H≤2R.

2. A probe structure for air pressure measurement according to claim 1, characterized in that, The flow stabilizing groove (120) is circular ring-shaped, and the axis of the air inlet channel (210) passes through the center of the flow stabilizing groove (120).

3. A probe structure for air pressure measurement according to claim 1, characterized in that, The flow stabilizing groove (120) comprises a plurality of groove units, and all the groove units are uniformly distributed around the axis of the air inlet channel (210).

4. A probe structure for air pressure measurement according to claim 1, characterized in that, The groove wall of the flow stabilizing groove (120) is provided with energy absorption textures (121).

5. A probe structure for air pressure measurement according to claim 1, characterized in that, The gas collection chamber (110) is provided with a filter screen (130) in the middle part.

6. A probe structure for air pressure measurement according to claim 1, characterized in that, The air inlet joint (200) is provided with a reinforcing groove (230) on the side close to the body (100), the reinforcing groove (230) surrounds the circumferential surface of the air inlet joint (200), and the body (100) is provided with a reinforcing flange (140) on the side close to the air inlet joint (200).

7. A probe structure for air pressure measurement according to claim 1, characterized in that, The side of the body (100) away from the air inlet joint (200) is provided with a connector part (150).

8. A gas pressure sensor, characterized by The probe structure for gas pressure measurement comprises a body (100) and an air inlet joint (200), the air inlet joint (200) is connected to one side of the body (100), the side of the body (100) away from the air inlet joint (200) is provided with a gas collection chamber (110), the air inlet joint (200) is provided with an air inlet channel (210) and a diffusion channel (220), the two ends of the diffusion channel (220) are connected to the air inlet channel (210) and the gas collection chamber (110) respectively, the side of the body (100) away from the air inlet joint (200) is provided with a gas collection chamber (110), the air inlet joint (200) is provided with an air inlet channel (210) and a diffusion channel (220), the two ends of the diffusion channel (220) are connected to the air inlet channel (210) and the gas collection chamber (110) respectively, the side of the gas collection chamber (110) away from the diffusion channel (220) is used for connecting a gas pressure measurement chip (300), the cross-sectional area of the diffusion channel (220) is enlarged along the direction from the air inlet channel (210) to the gas collection chamber (110), the side of the gas collection chamber (110) close to the air inlet channel (210) is provided with a flow stabilizing groove (120), the flow stabilizing groove (120) is rotationally symmetrical about the axis of the air inlet channel (210), the depth of the flow stabilizing groove (120) is H, the air inlet channel (210) is a circular channel hole, the radius of the air inlet channel (210) is R, R≤H≤2R.

9. A gas pressure sensor according to claim 8, wherein The side of the body (100) away from the air inlet joint (200) is provided with a connector part (150).

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