Protective cover for probe detection

Abstract

A protective cover for probe detection comprises a protective cover body, the bottom surface of the protective cover body is recessed inwards to form a groove, the periphery of the groove is provided with a plurality of positioning columns, the tops of the positioning columns are fixedly connected with the bottom of the protective cover body, a probe card is arranged below the protective cover body, the top of the probe card is provided with a protruding block, and the protruding block is fixedly connected with the bottom of the protective cover body. The cross section of the convex block is consistent with the cross section of the groove, the convex block is provided with a plurality of probe grooves, the probe grooves are provided with a plurality of holes, the periphery of the convex block is provided with a plurality of positioning holes, the positioning columns can be inserted into the positioning holes, the positioning columns are provided with fixing assemblies, the fixing assemblies comprise cavities and insertion blocks, and the insertion blocks are inserted into the cavities. Through the design of the inclined surface of the bottom surface of the insertion block and the spring, the fixing assembly can be adaptively fixed when the positioning column is inserted into the positioning hole, and the protection effect and the stability of the protection cover body are enhanced by rapidly connecting and fixing the protection cover body and the probe card.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the related technical field of protection cover, specifically relates to a protection cover for probe detection. BACKGROUND

[0002] Probe card is the necessary equipment in the wafer level detection in semiconductor manufacturing process, and is mainly used for realizing electrical test in wafer manufacturing process.With the continuous promotion of Moore's law, the semiconductor process node is continuously reduced, and the requirement of wafer test precision and efficiency is also improved, and the performance of probe card as the bridge between test system and wafer directly influences the accuracy, speed and cost of test.In daily work, there is the demand of overhauling probe card head, that is, the probe card head needs to be disassembled, after the probe card head is disassembled, it cannot be turned over, otherwise the needle will fall out, so at this time a protection cover is added to prevent the needle from falling out.But the protection cover and probe card are not stable in connection and fixation, so the protection cover cannot play the due protection role. UTILITY MODEL CONTENT

[0003] The utility model aims at providing a protection cover for probe detection to solve the problem of unstable connection and fixation of protection cover and probe card in use.

[0004] In order to achieve the above object, the utility model provides the following technical scheme:

[0005] A protection cover for probe detection, comprising:

[0006] The bottom surface of the protection cover body is recessed inward to form a groove, a plurality of positioning columns are arranged on the periphery of the groove, the top of the positioning column is fixedly connected with the bottom of the protection cover body, a probe card is arranged below the protection cover body, a protruding block is arranged on the top of the probe card, the cross section of the protruding block is consistent with the cross section of the groove, a plurality of probe grooves are arranged on the protruding block, a plurality of holes are arranged on the probe grooves, a plurality of positioning holes are arranged on the periphery of the protruding block, the positioning column can be inserted into the positioning hole, a fixing assembly is arranged on the positioning column, and the fixing assembly comprises a cavity and an insertion block.

[0007] As an optional implementation, two left-right symmetrical cavities are arranged in the positioning column, and an opening is arranged on the left surface and the right surface of the positioning column, and the opening is square.

[0008] As an optional implementation, a sliding groove is arranged on the inner side of the two cavities, the sliding groove is communicated with the cavity, the two sliding grooves are not communicated with each other, a limiting block is arranged in the cavity, and the limiting block can slide left and right in the cavity.

[0009] As an optional implementation form, the outer side of the limiting block is provided with an insertion block, the insertion block can pass through the opening, the bottom surface of the insertion block is provided with an inclined surface, and the inclined surface is located at the outer side of the opening.

[0010] As an optional implementation form, the inner side of the limiting block is provided with a sliding rod, the inner side end of the sliding rod is inserted into the sliding groove, the sliding rod can slide in the sliding groove, and the rod body of the sliding rod is sleeved with a spring.

[0011] As an optional implementation form, the top of the cavity is provided with a through hole one, the protective cover body is provided with a through hole two at a position corresponding to the through hole one, and the through hole two and the through hole one are communicated.

[0012] As an optional implementation form, the top of the limiting block is provided with a connecting rod, the top end of the connecting rod passes through the through hole one and the through hole two and is located above the protective cover body, and the top end of the connecting rod is provided with a sliding block.

[0013] As an optional implementation form, the top of the sliding block is provided with a pushing block, the bottom of the pushing block is fixedly connected with the top of the sliding block, the left and right sides of the inner walls of two opposite positioning holes on the probe card are provided with fixed grooves, the bottom surfaces of the fixed grooves are flush with the bottom surface of the positioning hole, and the top surfaces of the fixed grooves are lower than the top surface of the positioning hole.

[0014] Compared with the prior art, the protective cover for probe detection has the following advantages

[0015] Advantages:

[0016] 1. Rapid fixing: through the design of the inclined surface of the bottom surface of the insertion block and the spring, the fixing assembly can be fixed adaptively when the positioning column is inserted into the positioning hole, the protective cover body and the probe card are quickly connected and fixed, and the protection effect and stability of the protective cover body are improved.

[0017] 2. Improve convenience: the fixing assembly can complete the connection and disassembly between the protective cover body and the probe card without the aid of other tools, and the convenience of use is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a three-dimensional structure schematic view of the utility model.

[0019] Figure 2 It is a front cross-sectional plane structure schematic view of the protective cover body of the utility model.

[0020] Figure 3 It is a front cross-sectional plane structure schematic view of the fixing assembly of the utility model.

[0021] Figure 4This is a front cross-sectional planar structural diagram of the positioning hole of this utility model.

[0022] Figure 5 This is a three-dimensional structural diagram of the prototype of this utility model.

[0023] In the diagram: 1. Protective cover body; 2. Groove; 3. Positioning post; 4. Probe clip; 5. Protrusion; 6. Probe groove; 7. Hole; 8. Positioning hole; 9. Cavity; 10. Opening; 11. Slide groove; 12. Limiting block; 13. Insert block; 14. Inclined surface; 15. Slide rod; 16. Spring; 17. Through hole one; 18. Through hole two; 19. Connecting rod; 20. Sliding block; 21. Actuating block; 22. Fixing groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] This utility model provides, for example Figures 1-5 shown

[0026] A protective cover for probe detection includes a cover body 1. The bottom surface of the cover body 1 is recessed inward to form a groove 2. The groove 2 is square. Multiple positioning posts 3 are provided around the periphery of the groove 2, and the positioning posts 3 are evenly spaced. The tops of the positioning posts 3 are fixedly connected to the bottom of the cover body 1. A probe clip 4 is provided below the cover body 1. The cross-section of the cover body 1 and the probe clip 4 are identical. The top of the probe clip 4 has a protrusion 5, the cross-section of which is identical to the cross-section of the groove 2, so the protrusion 5 can fit into the groove 2. Inside, the protrusion 5 has multiple probe slots 6, and the probe slots 6 have multiple holes 7. The periphery of the protrusion 5 has multiple positioning holes 8, and each positioning hole 8 corresponds to a positioning post 3. The positioning post 3 can be inserted into the positioning hole 8. This arrangement allows the protective cover body 1 to be assembled onto the probe card 4 head in a preset orientation. The positioning post 3 has a fixing component, which is used to quickly connect and fix the protective cover body 1 and the probe card 4, improving the protective effect of the protective cover body 1. The fixing component includes a cavity 9 and an insert block 13. When the probe card 4 needs maintenance, the protective cover body 1 can be inserted into the positioning hole 8 through the positioning post 3, thus completing the assembly of the protective cover body 1 and the probe card 4. The protective cover body 1 prevents the needles inside the probe card 4 from falling out when flipped.

[0027] like Figure 2 and Figure 3As shown, two diagonal positioning columns 3 at the bottom of the protective cover body 1 are provided with two left-right symmetrical cavities 9, and the left and right sides of the positioning column 3 are provided with openings 10, which are square. Figure 3 As shown, the inner sides of the two cavities 9 are provided with sliding grooves 11, the diameter of the sliding groove 11 is smaller than the diameter of the cavity 9, the sliding groove 11 and the cavity 9 are communicated, the two sliding grooves 11 are not communicated with each other, and the cavity 9 is provided with a limiting block 12 which can only slide left and right in the cavity 9, and the limiting block 12 cannot move into the sliding groove 11. Figure 3 As shown, the outer side of the limiting block 12 is provided with an insertion block 13 which is fixedly connected with the limiting block 12, the insertion block 13 can pass through the opening 10, the bottom surface of the insertion block 13 is provided with an inclined surface 14 which is located outside the opening 10, when the positioning column 3 is inserted into the positioning hole 8, the insertion block 13 moves downward and contacts the barrier which makes the insertion block 13 retract into the cavity 9 through the inclined surface 14. Figure 3 As shown, the inner side of the limiting block 12 is provided with a sliding rod 15 which is fixedly connected with the inner side of the limiting block 12, the inner side end of the sliding rod 15 is inserted into the sliding groove 11 and can slide in the sliding groove 11, the setting of the sliding rod 15 can make the movement of the insertion block 13 and the limiting block 12 more stable, a spring 16 is sleeved on the rod body of the sliding rod 15, the diameter of the spring 16 is greater than the diameter of the sliding groove 11 and smaller than the diameter of the limiting block 12, and the spring 16 is located in the cavity 9 to support the limiting block 12. Figure 3 As shown, the top of the cavity 9 is provided with a through hole one 17, the bottom of the through hole one 17 is communicated with the top of the cavity 9, and the protective cover body 1 is provided with a through hole two 18 corresponding to the through hole one 17. The through hole two 18 penetrates the protective cover body 1, and the through hole two 18 is communicated with the through hole one 17. Figure 3 As shown, the top of the limiting block 12 is provided with a connecting rod 19, the bottom of the connecting rod 19 is fixedly connected with the top of the limiting block 12, the top end of the connecting rod 19 penetrates the through hole one 17 and the through hole two 18 and is located above the protective cover body 1, the top end of the connecting rod 19 is provided with a sliding block 20, the bottom of the sliding block 20 is fixedly connected with the top of the connecting rod 19, and the sliding block 20 is used to improve the stability of the movement of the connecting rod 19 and avoid the inclination of the connecting rod 19 when moving. Figure 3 and Figure 4As shown, the top of the slider 20 is provided with a knob 21, the bottom of the knob 21 is fixedly connected with the top of the slider 20, the left and right sides of the inner wall of the two diagonal positioning holes 8 on the probe card 4 are provided with fixed grooves 22, the bottom surface of the fixed groove 22 is flush with the bottom surface of the positioning hole 8, and the top surface height of the fixed groove 22 is lower than the top surface height of the positioning hole 8. In use, when the positioning column 3 at the bottom of the protective cover body 1 is inserted into the positioning hole 8, the inclined surface 14 of the insertion block 13 on the two diagonal positioning columns 3 will retract into the cavity 9 when contacting the inner wall of the positioning hole 8, at this time the positioning column 3 can continue to move downward, when the insertion block 13 enters the height range of the fixed groove 22, the insertion block 13 will move outward into the fixed groove 22 under the influence of the spring 16, at this time the protective cover body 1 will be fixed on the probe card 4 by the insertion block 13, and the fixing assembly on the two diagonal positioning columns 3 can be used to complete the fixing of the protective cover body 1. When it is necessary to remove the protective cover body 1, only two hands are needed to hold the two knobs 21 at one corner respectively, and the two diagonal knobs 21 are moved towards each other, so that the insertion block 13 is retracted into the cavity 9, at this time the protective cover body 1 can be removed from the probe card 4. Through the above arrangement, the protective cover body 1 and the probe card 4 can be quickly connected, fixed and disassembled, the protection effect and stability of the protective cover body 1 are enhanced, and meanwhile the fixing mode does not need other tools for assistance, and the convenience is improved.

[0028] Finally, it should be noted that: the above only for preferred embodiments of the present application, and not for limiting the present application, although the present application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part of the technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application, should be included in the protection scope of the present application.

Claims

1. A protective cover for probe testing, characterized by, Include: The protective cover body (1), the bottom of the protective cover body (1) is recessed inward to form a groove (2), the periphery of the groove (2) is provided with a plurality of positioning columns (3), the top of the positioning column (3) and the bottom of the protective cover body (1) are fixedly connected, the lower side of the protective cover body (1) is provided with a probe card (4), the top of the probe card (4) is provided with a protrusion (5), the cross section of the protrusion (5) is consistent with the cross section of the groove (2), a plurality of probe grooves (6) are arranged on the protrusion (5), a plurality of holes (7) are arranged on the probe groove (6), a plurality of positioning holes (8) are arranged on the periphery of the protrusion (5), the positioning column (3) can be inserted into the positioning hole (8), the positioning column (3) is provided with a fixing assembly, and the fixing assembly comprises a cavity (9) and an insertion block (13).

2. The protective cover for probe testing according to claim 1, wherein: Two left and right symmetrical cavities (9) are arranged in the positioning column (3), and the left and right sides of the positioning column (3) are provided with openings (10), and the openings (10) are square.

3. The protective cover for probe testing according to claim 2, wherein: The inner sides of the two cavities (9) are provided with sliding grooves (11), the sliding grooves (11) and the cavities (9) are communicated, the two sliding grooves (11) are not communicated with each other, and the cavity (9) is provided with a limiting block (12).

4. The protective cover for probe testing according to claim 3, wherein: The outer side of the limiting block (12) is provided with an insertion block (13), the insertion block (13) can pass through the opening (10), the bottom of the insertion block (13) is provided with an inclined surface (14), and the inclined surface (14) is located on the outer side of the opening (10).

5. The protective cover for probe testing according to claim 4, wherein: The inner side of the limiting block (12) is provided with a sliding rod (15), the inner side end of the sliding rod (15) is inserted into the sliding groove (11), and the sliding rod (15) can slide in the sliding groove (11), and the rod body of the sliding rod (15) is sleeved with a spring (16).

6. The protective cover for probe testing according to claim 5, wherein: The top of the cavity (9) is provided with a through hole (17), the protective cover body (1) is provided with a through hole (18) corresponding to the through hole (17), and the through hole (18) and the through hole (17) are communicated.

7. The protective cover for probe testing according to claim 6, wherein: The top of the limiting block (12) is provided with a connecting rod (19), the top end of the connecting rod (19) passes through the through hole (17) and the through hole (18) and is located above the protective cover body (1), and the top end of the connecting rod (19) is provided with a sliding block (20).

8. The protective cover for probe testing according to claim 7, wherein: The top of the sliding block (20) is provided with a pushing block (21), the bottom of the pushing block (21) and the top of the sliding block (20) are fixedly connected, the inner walls of the diagonally opposite two positioning holes (8) on the probe card (4) are provided with fixed grooves (22) on the left and right sides, the bottom of the fixed groove (22) is flush with the bottom of the positioning hole (8), and the top of the fixed groove (22) is lower than the top of the positioning hole (8).

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