Optical system for switching light path processing and light splitting

Abstract

The utility model relates to an optical system for switching optical path processing and splitting, which is characterized in that a first laser beam for processing enters a first beam shaping device after passing through a first half-wave plate and then enters a first polarization crystal; a second laser beam for processing enters a second beam shaping device after passing through a second half-wave plate, and then enters a first polarization crystal; the first polarization crystal is used for coaxially and concentrically transmitting two beams of light, the two beams of light enter the second polarization crystal after being combined, the second polarization crystal splits the two beams of laser into a third light beam, a fourth light beam, a fifth light beam and a sixth light beam, then the third light beam, the fourth light beam, the fifth light beam and the sixth light beam enter the two scanners, and are focused and processed after passing through the focusing field lens. And the focusing field lens is used for focusing the light beams into focus light spots for processing. According to the optical system, the requirement for machining different forms of light spots of the same equipment can be met, the requirement for rapid switching is met, two light paths can be machined together through the light splitting design, and the efficiency is doubled.

Description

TECHNICAL FIELD

[0001] The utility model belongs to laser precision machining system, especially a kind of optical system of switching optical path processing and light splitting. BACKGROUND

[0002] Laser processing equipment is transmitted to focusing field mirror by optical system the light beam generated by laser, forms the micro focusing light spot of high energy density to realize material processing.In conventional equipment, laser beam is emitted by laser in turn through reflecting mirror, galvanometer and field mirror and is focused as circular light spot, and single line scanning processing is carried out by galvanometer drive. However, in actual process, light spot form is often flexibly adjusted: for example, large size flat top light spot is used to improve central region processing efficiency, and small size flat top light spot is used to optimize edge processing precision. Existing single optical system is difficult to meet the demand of multiple form light spot, and multiple system switching scheme leads to overall processing efficiency reduction due to too long time consumption. In existing equipment, in order to realize the switching of two kinds of light spots in the same optical system, first half wave plate is usually connected with mechanical rotating mechanism driven by rotary motor, and the switching and energy distribution of two beams of light emitted by laser emitter through beam splitter are realized by controlling the acceleration of mechanical rotating mechanism, and the adjustment time is long, which affects laser processing efficiency. SUMMARY

[0003] The utility model aims at overcoming the deficiency of prior art processing efficiency, and provides a kind of optical system and processing method of switching optical path processing and light splitting, it can meet the requirement of improving efficiency, and also meet the requirement of different process demand.

[0004] The utility model solves its technical problem by the following technical scheme:

[0005] The utility model provides a kind of switching optical path processing and light splitting optical system, it includes first laser, second laser, first half wave plate, second half wave plate, third half wave plate, first polarization crystal, second polarization crystal, first beam shaping device, second beam shaping device, first scanner and first focusing field lens, second scanner and second focusing field lens;First laser provides processing first laser beam, processing first laser beam is incident to first beam shaping device after first half wave plate, then it is incident to first polarization crystal after first reflecting mirror, second reflecting mirror;Second laser provides processing second laser beam, processing second laser beam is incident to second beam shaping device after second half wave plate, then it is incident to first polarization crystal after third reflecting mirror;First laser beam is transmitted after first polarization crystal, is incident to third half wave plate, second laser beam is reflected after first polarization crystal, is incident to third half wave plate;First laser beam is incident to second polarization crystal after third half wave plate, energy is evenly distributed to third beam and fourth beam;Second beam shaping device is incident to second polarization crystal after third half wave plate, energy is evenly distributed to fifth beam and sixth beam;Third beam and fifth beam are incident to first scanner and first focusing field lens after reflecting mirror;Fourth beam and fifth beam are incident to second scanner and second focusing field lens;Focus processing after first focusing field lens, second focusing field lens.

[0006] And, the first laser beam is transmitted after first polarization crystal, is incident to third half wave plate, and second laser beam is reflected after first polarization crystal, is incident to third half wave plate;First laser beam, second laser beam coaxial transmission with same center.

[0007] And, the first scanner, second scanner can be galvanometer or fast mirror, to control beam swing processing.

[0008] And, the first focusing field lens, second focusing field lens is F-theta lens or objective lens, to focus.

[0009] The utility model discloses the advantages and beneficial effects are as follows:

[0010] 1, the utility model discloses a kind of switching optical path processing and light splitting optical system, processing first laser beam is incident to first beam shaping device after first half wave plate, then it is incident to first polarization crystal;Processing second laser beam is incident to second beam shaping device after second half wave plate, then it is incident to first polarization crystal;First polarization crystal is used to transmit two coaxial beams with same center, it is incident to second polarization crystal after combining, and second polarization crystal splits third beam, fourth beam and fifth beam and sixth beam into two laser beams, then it is incident to two scanners, and focus processing after passing through focusing field lens, focusing field lens is used to focus into focus spot light spot processing.

[0011] 2, The utility model discloses a switching light path processing and splitting optical system, two light beams can be integrated into different light beam shapes, when needing to process with first laser beam shape, open first laser, when needing second laser beam shape, open second laser, the existing laser processing system can only carry out one shaping, or needs mechanical movement when switching, and the efficiency is lower, cannot reach two light path shaping and the effect of quick switching use at any time.

[0012] 3, The utility model discloses a switching light path processing and splitting optical system, first laser beam is divided into third light beam and fourth light beam and processes simultaneously, second laser beam is divided into fifth light beam and sixth light beam and processes simultaneously, it can satisfy the requirement of improving efficiency, can satisfy the requirement of quick switching different spot shape simultaneously. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a switching light path processing and splitting optical system's optical structure diagram of the utility model.

[0014] REFERENCE NUMERALS:

[0015] 1 - first laser, 2 - first laser beam for processing, 3 - first half - wave plate, 4 - first beam expander, 5 - first beam shaper, 6 - first reflector, 7 - second reflector, 8 - second laser, 9 - second laser beam, 10 - second half - wave plate, 11 - second beam expander, 12 - second beam shaper, 13 - third reflector, 14 - first polarization crystal, 15 - third half - wave plate, 16 - second polarization crystal, 17 - reflector, 18 - first scanner, 19 - first focusing field mirror, 20 - second scanner, 21 - second focusing field mirror. DETAILED DESCRIPTION

[0016] The utility model will be further described in detail below through specific embodiment, the following embodiment is only descriptive, is not limitative, can not be defined the protection scope of the utility model with this.

[0017] A switching light path processing and splitting optical system, as Figure 1As shown, it comprises a first laser 1, a second laser 8, a first half-wave plate 3, a second half-wave plate 10, a third half-wave plate 15, a first polarization crystal 14, a second polarization crystal 16, a first beam shaping device 5, a second beam shaping device 12, a first scanner 18 and a first focusing field lens 19, a second scanner 20 and a second focusing field lens 21; the first laser 1 provides a first laser beam 2 for processing, which is incident on the first beam shaping device 5 after passing through the first half-wave plate 3, and then is incident on the first polarization crystal 14 after passing through the first mirror 6 and the second mirror 7; the second laser 8 provides a second laser beam 9 for processing, which is incident on the second beam shaping device 12 after passing through the second half-wave plate 10, and then is incident on the first polarization crystal 14 after passing through a mirror 13; the first laser beam 2 is transmitted through the first polarization crystal 14 and is incident on the third half-wave plate 15, and the second laser beam 9 is reflected by the first polarization crystal 14 and is incident on the third half-wave plate 15. The first laser beam and the second laser beam are coaxial and concentrically transmitted in parallel. The first polarization crystal is used to coaxially and concentrically transmit the two beams, and the combined beams are incident on the second polarization crystal.

[0018] After the first beam 2 passes through the third half-wave plate 15, it is incident on the second polarization crystal 16, and the energy is evenly distributed to the third beam and the fourth beam; after the second beam 9 passes through the third half-wave plate 15, it is incident on the second polarization crystal 16, and the energy is evenly distributed to the fifth beam and the sixth beam; the third beam and the fifth beam are incident on the first scanner 18 and the first focusing field lens 19 after passing through the mirror 17; the fourth beam and the fifth beam are incident on the second scanner 20 and the second focusing field lens 21. The galvanometer or the fast mirror of the first scanner 18 and the second scanner 20 is used to control the swing processing of the beams, and the galvanometer is used in the embodiment.

[0019] After focusing by the focusing field lens, the galvanometer of the first scanner 18 and the second scanner 20 is used to provide processing scanning, and the first focusing field lens and the second focusing field lens are F-θ lenses or objective lenses, which play a focusing role. The focusing field lens focuses the third, fourth, fifth and sixth beams. Under the control of the first laser 1 and the second laser 8, the first light path 2 and the second light path 9 can be switched to form two different focal spot shapes after focusing through the first beam shaping device 5 and the second beam shaping device 12.

[0020] Through the switching control of the first laser 1 and the second laser 8, when the first beam shape processing is needed, the first laser 1 is controlled to be turned on and the second laser 8 is controlled to be turned off to meet the needs of the first beam shape processing; when the second beam shape processing is needed, the second laser 8 is controlled to be turned on and the first laser 1 is controlled to be turned off to meet the needs of the second beam shape processing.

[0021] The steps of the above laser processing method are:

[0022] 1. The first laser 1 emits a first laser beam 2 for processing, which passes through the first half-wave plate 3, changes the beam shape through the first beam shaper 5, is incident to the first polarization crystal 14 through the first mirror 6 and the second mirror 7, is transmitted by the first polarization crystal 14, is incident to the second polarization crystal 16 after passing through the third half-wave plate 15, and is evenly distributed to the third beam and the fourth beam, which are incident to the first scanner and the second scanner respectively, and the third beam and the fourth beam are processed together.

[0023] 2. The second laser 8 emits a second laser beam 9 for processing, which passes through the second half-wave plate 10, changes the beam shape through the second beam shaper 12, is incident to the first polarization crystal 14 through the mirror 13, is reflected by the first polarization crystal 14, is incident to the second polarization crystal 16 after passing through the third half-wave plate 15, and is evenly distributed to the fifth beam and the sixth beam, which are incident to the first scanner and the second scanner respectively, and the fifth beam and the sixth beam are processed together.

[0024] 3. The first laser beam 2 for processing and the second beam shaper 10 are controlled by the first laser 1 and the second laser 8 respectively, and can be processed simultaneously or alternately; when the first laser beam shape for processing is needed, the first laser 1 is controlled to be turned on and the second laser 8 is controlled to be turned off to meet the needs of processing with the first laser beam shape; when the second beam shaper shape is needed, the second laser 8 is controlled to be turned on and the first laser 1 is controlled to be turned off to meet the needs of processing with the second beam shaper shape.

[0025] 4. The third beam and the fourth beam are two beams that are completely the same; the fifth beam and the sixth beam are two beams that are completely the same.

[0026] Specific processing examples:

[0027] On the copper layer and PI composite material, the PI is processed and removed by using a picosecond ultraviolet laser, the first laser 1 and the second laser 8 control the switching of the two beams and perform split processing, and the following parameters are used:

[0028]

[0029] Other switching methods are used, such as single laser light output, the laser is switched to the first shaper or the second shaper by using a half-wave plate beam splitter or other devices, and non-split processing is performed, and the following parameters are used:

[0030]

[0031] It can be seen that the total time 26s is required when processing using other switching methods. When processing using the method shown in the utility model, the splitting scheme can double the efficiency, and the laser electric control switching can also improve the efficiency, so that the total time 10s is required for processing the same material. Therefore, the optical system of the utility model ensures switching of different demand light spots and also ensures the problem of improving the efficiency.

[0032] Although the embodiments and drawings of the utility model are disclosed for the purpose of illustration, those skilled in the art can understand that various substitutions, changes and modifications are possible without departing from the spirit and scope of the utility model, so the scope of the utility model is not limited to the content disclosed in the embodiments and drawings.

Claims

1. An optical system for switching optical path processing and splitting light, characterized by: The application relates to a laser processing device, which comprises a first laser (1), a second laser (8), a first half-wave plate (3), a second half-wave plate (10), a third half-wave plate (15), a first polarization crystal (14), a second polarization crystal (16), a first beam shaping device (5), a second beam shaping device (12), a first scanner (18) and a first focusing field lens (19), a second scanner (20) and a second focusing field lens (21); the first laser (1) provides a first laser beam (2) for processing, the first laser beam (2) for processing is incident to the first beam shaping device (5) after passing through the first half-wave plate (3), then passes through a first reflecting lens (6) and a second reflecting lens (7) to be incident to the first polarization crystal (14); the second laser (8) provides a second laser beam (9) for processing, the second laser beam (9) for processing is incident to the second beam shaping device (12) after passing through the second half-wave plate (10), then passes through a third reflecting mirror (13) to be incident to the first polarization crystal (14); the first laser beam (2) is transmitted through the first polarization crystal (14) to be incident to the third half-wave plate (15), and the second laser beam (9) is reflected by the first polarization crystal (14) to be incident to the third half-wave plate (15); after the first laser beam (2) passes through the third half-wave plate (15), the first laser beam (2) is incident to the second polarization crystal (16) to be evenly distributed to a third beam and a fourth beam; after the second laser beam (9) passes through the third half-wave plate (15), the second laser beam (9) is incident to the second polarization crystal (16) to be evenly distributed to a fifth beam and a sixth beam; the third beam and the fifth beam are incident to the first scanner (18) and the first focusing field lens (19) after passing through a reflecting mirror (17); the fourth beam and the fifth beam are incident to the second scanner (20) and the second focusing field lens (21); the first focusing field lens (19) and the second focusing field lens (21) are used for focusing processing after passing through the first focusing field lens (19) and the second focusing field lens (21).

2. The optical system for switching optical path processing and splitting light according to claim 1, characterized in that: The first laser beam (2) is transmitted through the first polarization crystal (14) to be incident to the third half-wave plate (15), and the second laser beam (9) is reflected by the first polarization crystal (14) to be incident to the third half-wave plate (15); the first laser beam (2) and the second laser beam (9) are coaxial and have the same center.

3. The optical system for switching optical path processing and splitting light according to claim 1, characterized in that: The first scanner (18) and the second scanner (20) can be galvanometer mirrors or fast mirrors, which are used for controlling beam swing processing.

4. The optical system for switching optical path processing and splitting light according to claim 1, characterized in that: The first focusing field lens (19) and the second focusing field lens (21) are F-theta lenses or objective lenses, which are used for focusing.

Images