Laser galvanometer assembly and laser processing equipment

Abstract

The utility model relates to a laser galvanometer assembly and laser processing equipment, the laser galvanometer assembly comprises a galvanometer, a field lens and an adjustable connecting piece, the field lens is arranged on the light emitting side of the galvanometer, the adjustable connecting piece comprises a first connecting part and a second connecting part, the first connecting part is connected to the galvanometer, the second connecting part is connected to the field lens, and the field lens is arranged on the first connecting part. The adjustable connecting piece is arranged in the mode that the second connecting part can be close to or away from the first connecting part in the first direction, and the first direction is parallel to the direction, pointing to the field lens, of the galvanometer. The relative position of the field lens and the galvanometer can be adjusted, the front focus of the field lens can be conveniently adjusted to coincide with the deflection center point position of a light beam passing through the galvanometer, and therefore the machining precision of the laser machining equipment can be improved.

Description

Technical Field

[0001] This application relates to the field of laser processing technology, and in particular to a laser galvanometer assembly and laser processing equipment. Background Technology

[0002] In existing laser galvanometer assemblies, the front focal point of the field lens is usually set at the center point of the beam deflection after passing through the galvanometer. This can minimize optical aberrations, improve focusing quality, and thus improve processing quality and accuracy.

[0003] However, laser galvanometer assemblies in related technologies often struggle to maintain the front focal point of the field lens at the center point of the beam deflection after passing through the galvanometer. This is especially true after the laser galvanometer assembly has been used for a certain period of time or after the internal structure has been replaced. The center point of the beam deflection after passing through the galvanometer often does not match the front focal point of the field lens, resulting in poor light focusing quality and affecting the processing quality. Utility Model Content

[0004] Based on this, a laser galvanometer assembly and a laser processing device are provided, which can adjust the relative positions of the field mirror and the galvanometer to make the front focal point of the field mirror coincide with the center point of the beam deflection after passing through the galvanometer, thereby improving the processing accuracy of the laser processing device.

[0005] According to one aspect of this application, a laser galvanometer assembly is provided, the laser galvanometer assembly comprising:

[0006] galvanometer;

[0007] A field lens is disposed on the light-emitting side of the galvanometer; and

[0008] An adjustable connector includes a first connecting part and a second connecting part. The first connecting part is connected to the galvanometer, and the second connecting part is connected to the field mirror. The first connecting part and the second connecting part can be relatively close to or relatively far apart in the laser propagation direction.

[0009] In one embodiment, the adjustable connector further includes a guide rail connected between the first connecting portion and the second connecting portion, so that the first connecting portion and the second connecting portion can move relative to each other along the first direction via the guide rail.

[0010] In one embodiment, the adjustable connector further includes a self-locking structure disposed on the guide rail and configured to lock the guide rail.

[0011] In one embodiment, the first connecting part includes an outer cylinder, the central axis of which is coaxial with the optical axis of the galvanometer pointing to the field lens; the second connecting part includes an inner cylinder, the central axis of which is parallel to the optical axis of the galvanometer pointing to the field lens; the first connecting part is sleeved outside the first connecting part along its axial extension direction; and the guide rail is connected between the inner wall of the first connecting part and the outer wall of the first connecting part.

[0012] In one embodiment, the interior of the second connecting portion has a light guide channel through which the emitted light from the galvanometer propagates to the field lens.

[0013] In one embodiment, the field lens includes a lens barrel and a lens assembly body, the lens assembly body being disposed inside the lens barrel, and the central axis of the lens barrel coinciding with the central axis of the inner barrel.

[0014] In one embodiment, the outer wall of the first connecting part is provided with a scale extending along the first direction, and the second connecting part is provided with a display window opposite to the scale. As the second connecting part and the first connecting part move relative to each other, the display window reveals different readings on the scale.

[0015] In one embodiment, the first connecting portion has a first threaded portion at one end facing the galvanometer, and the galvanometer has a second threaded portion adapted to the first threaded portion; the first connecting portion and the galvanometer are connected to each other through the first threaded portion and the second threaded portion; and / or

[0016] The second connecting part has a third threaded part at one end facing the field lens, and the field lens has a fourth threaded part adapted to the third threaded part. The second connecting part and the field lens are connected to each other through the third threaded part and the fourth threaded part.

[0017] In one embodiment, the galvanometer includes a first reflective element and a second reflective element arranged sequentially along the light propagation direction, as well as a first driving member and a second driving member. The first driving member is used to drive the first reflective element to rotate about a first axis parallel to a second direction, and the second driving member is used to drive the second reflective element to rotate about a second axis parallel to a third direction.

[0018] The first direction, the second direction, and the third direction intersect each other.

[0019] According to another aspect of this application, a laser processing apparatus is provided, including the laser galvanometer assembly described in any of the above embodiments.

[0020] The aforementioned laser galvanometer assembly, through an adjustable connector between the galvanometer and the field mirror, allows for adjustment of the distance between the second and first connecting parts. This enables the spacing between the second and first connecting parts to be changed as needed, aligning the front focal point of the field mirror with the center of the galvanometer's tilt. This mitigates issues such as variations in spot size and reduced roundness caused by the field mirror's front focal point not being at the center of the galvanometer's tilt, resulting in better spot size and roundness and enabling more precise laser processing. Furthermore, it offers convenient operation, improving the ease of installation and adjustment. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a laser galvanometer assembly according to one embodiment of this application.

[0022] Figure 2 for Figure 1 A schematic diagram of the adjustable connector in the embodiment shown.

[0023] Figure 3 for Figure 1 A schematic diagram of the optical path of the laser galvanometer assembly in the embodiment shown.

[0024] Explanation of icon numbers:

[0025] 10. Laser galvanometer assembly;

[0026] 1. Galvanometer; 11. First reflecting element; 12. Second reflecting element; 13. First driving element; 14. Second driving element; 2. Adjustable connector; 21. First connecting part; 22. Second connecting part; 23. Display window; 3. Field lens;

[0027] F1, First Direction. Detailed Implementation

[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0029] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0030] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0031] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0032] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0033] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0034] Laser galvanometer assemblies typically consist of a galvanometer and a field lens. The galvanometer controls the high-speed oscillation of a motor to drive the reflector mirror to oscillate rapidly, enabling the laser beam to scan at high speed in a plane. The field lens is mainly used to focus the laser beam into a high-power-density micro-spot that acts on the material surface, achieving material processing and etching through the interaction between the laser and the material.

[0035] According to the design principle of the field mirror, there exists a front focal point in the object space. The laser galvanometer assembly achieves optimal focusing quality when this front focal point coincides with the galvanometer's tilting center. The galvanometer consists of two tilting motors (with reflecting mirrors) in the X and Y directions, meaning it has two centers. In existing laser galvanometer assemblies, the front focal point of the field mirror is typically set at the midpoint of the line connecting the centers of the X and Y reflecting mirrors. This means the galvanometer's tilting center is at the midpoint of the line connecting the centers of the X and Y reflecting mirrors. This minimizes optical aberrations, improves focusing quality, and consequently enhances processing quality and accuracy. For existing biaxial galvanometers and field mirrors, the tilting center of the galvanometer typically does not match the front focal point of the field mirror. The conventional approach is to design a connecting ring at the junction of the galvanometer and field mirror. This ring connects to the galvanometer's output port via an external thread and to the field mirror via an internal thread. By adjusting the spacing between the internal and external threads, the center point of the galvanometer mirror, or the tilting center of the galvanometer, is matched with the front focal point of the field mirror.

[0036] When assembling or replacing galvanometers and field lenses, additional junction rings are required. Replacing the junction rings necessitates readjustment and calibration, causing significant inconvenience and increasing the complexity of the work for debugging and operation personnel. Inaccurate adjustments can also affect the precision of laser processing. Furthermore, custom-designed junction rings for different field lenses increase the cost and design complexity of the laser galvanometer assembly.

[0037] Typically, a junction ring is designed at the connection between the galvanometer and the field lens. Repeated replacements of this ring cause wear, resulting in a shift between the field lens's front focal point and the center points of the galvanometer's X and Y reflectors. This design presents several problems: 1. Changes in the focal point position lead to variations in the laser power density acting on the material surface, thus affecting the spot size. Different focal points result in significant variations in spot size, affecting the spot's roundness and consequently the processing quality. 2. The shift in focal point position causes changes in laser power density, which significantly impacts the quality of laser processing. Changes in power density directly affect the material processing results, such as the quality of cutting, welding, or marking. 3. If a telecentric field lens is used, the shift between the field lens's front focal point and the center points of the galvanometer's X and Y reflectors will affect the telecentric angle of the laser galvanometer assembly, potentially causing a slight bevel in the processed holes or cut edges, thus affecting the processing quality.

[0038] In summary, the assembly or replacement of galvanometers and field mirrors in related technologies requires additional adapter rings, and readjustment and calibration are necessary after replacing the adapter rings. This increases the complexity of the work and makes it easy for the front focal point of the field mirror to deviate from the center points of the X and Y reflective mirrors of the galvanometer. This negatively impacts the quality and efficiency of laser processing, leading to a deterioration in parameters such as laser spot size and roundness, and affecting the graphic accuracy and processing quality of laser scanning.

[0039] Based on this, this application provides a laser galvanometer assembly and laser processing equipment, which can flexibly replace the field mirror according to different processing needs. The entire laser galvanometer assembly can be calibrated simply by moving the field mirror and galvanometer relative to each other on the guide rail, significantly reducing design and maintenance complexity, improving ease of operation, and making the laser marking process more efficient and economical. Simultaneously, the position of the field mirror relative to the galvanometer can be adjusted in real time, perfectly matching the front focal point of the field mirror with the center point of one of the X or Y reflective mirrors of the galvanometer. This improves problems such as changes in spot size and deterioration in roundness caused by the field mirror's front focal point not being at the galvanometer's deflection center, maintaining better spot size and roundness, and achieving more precise laser processing.

[0040] See Figure 1 , Figure 2 and Figure 3 As shown, Figure 1 This is a schematic diagram of the structure of a laser galvanometer assembly 10 according to an embodiment of this application. Figure 2 for Figure 1 A schematic diagram of the adjustable connector in the embodiment shown. Figure 3 for Figure 1 A schematic diagram of the optical path of the laser galvanometer assembly in the embodiment shown.

[0041] The laser galvanometer assembly 10 provided in this application includes a galvanometer 1, a field lens 3, and an adjustable connector 2. The field lens 3 is located on the light-emitting side of the galvanometer 1. Light rays passing through the galvanometer 1 propagate through the field lens 3, improving the processing quality. The field lens 3 can adjust the beam to form a uniformly sized focused spot within the entire marking plane of the workpiece, ensuring a linear relationship between the beam incident angle and the spot position on the image plane. The position of the focused spot on the image plane is controlled by adjusting the scanning angle of the incident beam. Thus, the field lens 3 enables uniform distribution of laser energy within the focused spot, corrects various aberrations, and enhances the utilization rate of the edge beam.

[0042] The adjustable connector 2 includes a first connecting part 21 and a second connecting part 22. The first connecting part 21 is connected to the galvanometer 1, and the second connecting part 22 is connected to the field mirror 3. The first connecting part 21 and the second connecting part 22 can be relatively close or relatively far apart in the laser propagation direction, thereby causing the galvanometer and the field mirror to be relatively close or relatively far apart in the laser propagation direction.

[0043] It is evident that this application allows for adjustable spacing between the second connecting part 22 and the first connecting part 21 via the adjustable connector 2. This adjustment enables the front focal point of the field lens 3 to be positioned at the swing center of the galvanometer 1. This solves problems such as the field lens 3's front focal point not being at the swing center of the galvanometer 1 due to various operating conditions, including replacing internal components of the laser galvanometer assembly 10 or prolonged use, which leads to changes in spot size and reduced roundness. This ensures the laser galvanometer assembly 10 maintains a better spot size and roundness, enabling more precise laser processing. Furthermore, it is easy to operate, improving the simplicity of installation and adjustment.

[0044] In some embodiments, the adjustable connector 2 further includes a guide rail connected between the first connecting portion 21 and the second connecting portion 22, so that the first connecting portion 21 and the second connecting portion 22 can move relative to each other along a first direction via the guide rail. The guide rail allows for precise movement between the first connecting portion 21 and the second connecting portion 22 along the first direction, reducing the risk of movement in other directions and improving the accuracy of movement along the first direction. This, in turn, improves light quality, facilitates obtaining better spot size and roundness, and enables more precise laser processing.

[0045] In some embodiments, the adjustable connector 2 further includes a self-locking structure. This self-locking structure is disposed on the guide rail and configured to lock the guide rail, locking the first connecting portion 21 and the second connecting portion 22 together, preventing them from moving relative to each other. Only after the lock is released can the first connecting portion 21 and the second connecting portion 22 move relative to each other. This improves the stability of the adjustment, enhances light quality, and enables more precise laser processing. Alternatively, the guide rail can be a self-locking guide rail.

[0046] In some embodiments, in conjunction with reference Figure 2 As shown, the first connecting part 21 includes an outer cylinder, the central axis of which is coaxial with the optical axis of the galvanometer 1 pointing towards the field mirror 3. The second connecting part 22 includes an inner cylinder, the central axis of which is coaxial with the optical axis of the galvanometer 1 pointing towards the field mirror 3. The first connecting part 21 is sleeved on the outside of the first connecting part 21 along its axial extension direction. A guide rail is connected between the inner wall and the outer wall of the first connecting part 21. That is, both the first connecting part 21 and the second connecting part 22 are cylindrical structures, which helps to enhance the strength of the first connecting part 21 and the second connecting part 22, further improves the connection strength between the galvanometer 1 and the field mirror 3, improves the stability of the laser galvanometer assembly 10, facilitates stable light propagation, and improves the accuracy of laser processing.

[0047] In some embodiments, the second connecting portion 22 has a light guide channel inside, through which the emitted light from the galvanometer 1 propagates to the field mirror 3. This allows for the formation of corresponding light guide channels while simultaneously increasing the intensity of the first connecting portion 21 and the second connecting portion 22, reducing the impact of ambient stray light on the propagation of internal light, facilitating the acquisition of a better quality light spot, and improving processing accuracy.

[0048] In some embodiments, see Figure 2 As shown, the outer wall of the first connecting part 21 is provided with a scale extending along a first direction, and the second connecting part 22 is provided with a display window 23 opposite to the scale. As the second connecting part 22 and the first connecting part 21 move relative to each other, the display window 23 reveals different readings on the scale. This allows for precise control of the moving distance based on the corresponding displayed scale, improving the accuracy and convenience of the adjustment process.

[0049] In some embodiments, the first connecting portion 21 has a first threaded portion at the end facing the galvanometer 1, and the galvanometer 1 has a second threaded portion adapted to the first threaded portion. The first connecting portion 21 and the galvanometer 1 are connected to each other through the first threaded portion and the second threaded portion. It can be understood that the first connecting portion 21 and the galvanometer 1 are detachably connected by a threaded structure, which facilitates the replacement of different galvanometers 1. For example, after long-term use, aging, or damage, different galvanometers 1 can be easily replaced, which helps to improve the convenience of installation and replacement of the laser galvanometer assembly 10.

[0050] In some embodiments, the second connecting portion 22 has a third threaded portion at one end facing the field lens 3, and the field lens 3 has a fourth threaded portion adapted to the third threaded portion. The second connecting portion 22 and the field lens 3 are connected to each other through the third threaded portion and the fourth threaded portion. The second connecting portion 22 and the field lens 3 are detachably connected by a threaded structure, which facilitates the replacement of different field lenses 3. For example, after long-term use, aging, or damage, different field lenses 3 can be easily replaced, which helps to improve the ease of installation and replacement of the laser galvanometer assembly 10.

[0051] In some embodiments, the field lens 3 includes a lens barrel and a lens assembly body, with the lens assembly body disposed inside the lens barrel, and the central axis of the lens barrel coinciding with the central axis of the inner barrel. Thus, precise light propagation can be achieved by directly connecting the lens barrel and the second connecting part 22 via the third and fourth threaded parts, without the need for additional alignment, thereby improving installation convenience.

[0052] In some embodiments, the galvanometer 1 includes a first reflecting element 11 and a second reflecting element 12 arranged sequentially along the light propagation direction, as well as a first driving member 13 and a second driving member 14. The first driving member 13 drives the first reflecting element 11 to rotate about a first axis parallel to a second direction, and the second driving member 14 drives the second reflecting element 12 to rotate about a second axis parallel to a third direction; wherein the first direction, the second direction, and the third direction intersect each other. Thus, by adjusting the direction of the light path and the light beam through the first reflecting element 11 and the second reflecting element 12 of the galvanometer 1, the propagation direction of the light can be precisely controlled, which is beneficial for improving the accuracy of laser processing.

[0053] This application also provides a laser processing device, including the laser galvanometer assembly 10 in any of the above embodiments. By using the laser galvanometer assembly 10, the galvanometer 1 and field mirror 3 in the laser galvanometer assembly 10 can be conveniently replaced. After long-term use or replacement of the components in the laser galvanometer assembly 10, the front focal point of the field mirror 3 and the deflection center of the galvanometer 1 can be adjusted to coincide, thereby still obtaining a better quality spot, which is beneficial to improving and maintaining the accuracy of laser processing.

[0054] The laser galvanometer assembly 10 and laser processing equipment of this application can flexibly replace the field lens 3 according to different processing needs. The field lens 3 can be moved relative to the galvanometer 1 on the guide rail to calibrate the entire system, significantly reducing design and maintenance complexity, improving operational convenience, and making the laser marking process more efficient and economical. During the replacement of the galvanometer 1 or field lens 3, the design of this application flexibly replaces and dynamically adjusts the position of the field lens 3 through the adjustable connector 2, cleverly avoiding the need to replace the contact ring in related technologies. This improvement significantly enhances operational convenience. By eliminating the cumbersome contact ring adjustment steps during the replacement of the galvanometer 1 or field lens 3 in related technologies, operators can complete the replacement of the galvanometer 1 or field lens 3 more quickly and easily, reducing the additional calibration and debugging time that may be caused by improper contact ring replacement. Cleverly avoiding the need to replace the contact ring reduces the cost of the laser processing equipment, making the maintenance and upgrading of the entire laser processing process simpler and more direct.

[0055] Furthermore, this application, through the adjustable connector 2, can adjust the position of the field lens 3 in real time, aligning the front focal point of the field lens 3 with the tilting center of the galvanometer 1. This improves the problems of spot size variation and roundness deterioration caused by the misalignment of the front focal point of the field lens 3 and the tilting center of the galvanometer 1, maintaining a better spot size and roundness, and achieving more precise laser processing. A telecentric field lens 3 can also be used to control the telecentric angle within a certain range, perfectly improving the problem of beveled edges on processed holes or cuts. Simultaneously, the distance between the field lens 3 and the galvanometer 1 can be adjusted, effectively compensating for defocusing caused by equipment wear, temperature changes, or machining errors, thereby significantly improving the accuracy and quality of laser marking. This application employs a guide rail, inner cylinder, and outer cylinder limiting design to precisely connect the galvanometer 1 and the field lens 3, further improving adjustment and processing accuracy.

[0056] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A laser galvanometer assembly, characterized in that, The laser galvanometer assembly includes: galvanometer; A field lens is disposed on the light-emitting side of the galvanometer; and An adjustable connector includes a first connecting part and a second connecting part. The first connecting part is connected to the galvanometer, and the second connecting part is connected to the field mirror. The first connecting part and the second connecting part can be relatively close to or relatively far apart in the laser propagation direction.

2. The laser galvanometer assembly according to claim 1, characterized in that, The adjustable connector further includes a guide rail connected between the first connecting part and the second connecting part, so that the first connecting part and the second connecting part can move relative to each other along a first direction via the guide rail.

3. The laser galvanometer assembly according to claim 2, characterized in that, The adjustable connector also includes a self-locking structure, which is disposed on the guide rail and configured to lock the guide rail.

4. The laser galvanometer assembly according to claim 2, characterized in that, The first connecting part includes an outer cylinder, the central axis of which is coaxial with the optical axis of the galvanometer pointing to the field lens. The second connecting part includes an inner cylinder, the central axis of which is parallel to the optical axis of the galvanometer pointing to the field lens. The first connecting part is sleeved outside the first connecting part along its axial extension direction. The guide rail is connected between the inner wall of the first connecting part and the outer wall of the first connecting part.

5. The laser galvanometer assembly according to claim 4, characterized in that, The second connecting part has a light guide channel inside, through which the light emitted from the galvanometer is propagated to the field lens.

6. The laser galvanometer assembly according to claim 4, characterized in that, The field lens includes a lens barrel and a lens assembly body, the lens assembly body being disposed inside the lens barrel, and the central axis of the lens barrel coinciding with the central axis of the inner barrel.

7. The laser galvanometer assembly according to claim 4, characterized in that, The outer wall of the first connecting part is provided with a scale extending along the first direction, and the second connecting part is provided with a display window opposite to the scale. As the second connecting part and the first connecting part move relative to each other, the display window reveals different readings on the scale.

8. The laser galvanometer assembly according to claim 2, characterized in that, The galvanometer includes a first reflective element and a second reflective element arranged sequentially along the direction of light propagation, as well as a first driving member and a second driving member. The first driving member is used to drive the first reflective element to rotate about a first axis parallel to the second direction, and the second driving member is used to drive the second reflective element to rotate about a second axis parallel to the third direction. The first direction, the second direction, and the third direction intersect each other.

9. The laser galvanometer assembly according to claim 1, characterized in that, The first connecting portion has a first threaded portion at one end facing the galvanometer, and the galvanometer has a second threaded portion that mates with the first threaded portion. The first connecting portion and the galvanometer are connected to each other through the first threaded portion and the second threaded portion; and / or The second connecting part has a third threaded part at one end facing the field lens, and the field lens has a fourth threaded part adapted to the third threaded part. The second connecting part and the field lens are connected to each other through the third threaded part and the fourth threaded part.

10. A laser processing device, characterized in that, Includes the laser galvanometer assembly as described in any one of claims 1-9.

Images