Clamping device for crystal orientation analysis instrument

Abstract

The utility model relates to the technical field of crystal processing, in particular to a clamping device for a crystal orientation analysis instrument, which comprises a mounting platform, a clamping mechanism, a positioning rotating mechanism and a locking executing mechanism, the clamping mechanism is used for placing a crystal bar, and the locking executing mechanism is matched with the clamping mechanism to fix the crystal bar. The positioning rotating mechanism is used for positioning the crystal bar and can drive the crystal bar to rotate. Compared with the prior art, the crystal bar clamping device has the advantages that electric clamping and rotating of a crystal bar are achieved through the locking executing mechanism and the positioning rotating mechanism, manual operation is replaced, process time and human intervention are reduced, measurement errors possibly caused by frequent manual dismounting and rotating of the crystal bar are avoided, the elastic pipe sleeve in the containing cavity can buffer the clamping force of the crystal bar, surface damage is avoided, and the service life of the crystal bar is prolonged. The device is simple in structure and convenient to clean, meanwhile, it is ensured that the axis of the crystal bar is accurately aligned with the machining direction, the elastic sleeve is arranged to be detachable, the appropriate elastic sleeve can be selected for use according to crystal bars of different sizes, and the application range of the device is widened.

Description

Technical Field

[0001] This utility model relates to the field of crystal processing technology, specifically to a clamping device for a crystal orientation analysis instrument. Background Technology

[0002] In the crystal ingot manufacturing process, the cylindrical surface, after rounding and cutting and grinding, needs to be processed into a FALT or NOTCH. With the increasing precision requirements of modern semiconductor processes, the accuracy of crystal ingot reference edge processing is becoming more and more precise. Traditional processing technology mainly relies on manual processing.

[0003] The processing steps are roughly divided into: 1. manual feeding, 2. manual positioning of the fixture, 3. manual determination of the cross-sectional orientation, 4. manual observation of the pendulum movement and manual adjustment of the fixture, 5. after repeated adjustments, 6. transport to the grinding machine for processing.

[0004] The excessive human involvement in the overall process inevitably leads to human error and low production efficiency in the processing of high-volume, high-value products. The crystal ingot clamping operation, in particular, requires repeated manual assembly, disassembly, and rotation of the ingots, making the process tedious and complex, thus impacting overall work efficiency. Utility Model Content

[0005] This invention aims to solve at least one of the technical problems existing in the prior art. Therefore, one objective of this invention is to provide a clamping device for a crystal orientation analysis instrument. This device achieves electric locking and clamping, and drives the crystal rod to rotate electrically, thereby improving automation and increasing production efficiency.

[0006] To solve the above-mentioned technical problems, the technical solution provided by this utility model is: a clamping device for a crystal orientation analysis instrument, including a mounting platform.

[0007] Also includes:

[0008] Clamping mechanism, positioning and rotating mechanism and locking actuator;

[0009] The clamping mechanism, the positioning and rotating mechanism, and the locking actuator are all fixedly mounted on the mounting platform;

[0010] The clamping mechanism is used to place the crystal rod, the locking actuator cooperates with the clamping mechanism to fix the crystal rod, and the positioning and rotating mechanism is used to position the crystal rod and can drive it to rotate.

[0011] Preferably, the clamping mechanism includes two parallel and symmetrically arranged guide strips on the mounting platform, a positioning block positioned on one side of the two guide strips and perpendicular to the guide strips, and a crystal placement block slidably disposed between the two guide strips. The crystal placement block has a placement cavity along a direction perpendicular to the guide strips. An elastic sleeve is detachably provided in the placement cavity. A crystal rod is disposed in the elastic sleeve. The crystal placement block has a locking part that cooperates with the elastic sleeve. The crystal placement block has a crystal limiting part located at the front end face of the placement cavity.

[0012] Preferably, the locking part includes a first locking block and a second locking block symmetrically arranged on both sides of the placement cavity in the axial direction. Both the first locking block and the second locking block are C-shaped. The first locking block is fixedly arranged in the crystal placement block, and the second locking block is slidably arranged in the crystal placement block. An adjusting screw that is threadedly connected to the crystal placement block is rotatably connected to the second locking block. The other side of the adjusting screw extends through the side wall of the crystal placement block to its outside and cooperates with the locking actuator.

[0013] Preferably, the crystal limiting part includes a locking bolt threaded onto the crystal placement block, and a limiting plate that mates with the crystal rod is sleeved on the locking bolt.

[0014] Preferably, the positioning and rotating mechanism includes a first mounting plate, and a first linear sliding module is provided between the first mounting plate and the mounting platform to drive the first mounting plate to move. A servo motor is provided on the first mounting plate, and the output shaft of the servo motor is driven to connect a rotating rod. A suction cup is provided on the end of the rotating rod away from the servo motor, and the suction cup is used to adhere to the crystal rod and drive it to rotate.

[0015] Preferably, the inner wall of the guide strip on the side away from the positioning block is provided with a guide slope.

[0016] Preferably, the locking actuator includes a second mounting plate, and a second linear sliding module is provided between the second mounting plate and the mounting platform for driving the second mounting plate to move. The second mounting plate is provided with a torque motor, and the output shaft of the torque motor is provided with a connecting sleeve that can transmit power to the adjusting screw, so that the adjusting screw can be rotated through the connecting sleeve.

[0017] With the above structure, this utility model has the following advantages:

[0018] This application achieves electric clamping and rotation of crystal rods through a locking actuator and a positioning rotation mechanism, replacing traditional manual operation, reducing process time and human intervention, and avoiding measurement errors that may be caused by frequent manual disassembly and rotation of crystal rods. The clamping mechanism, positioning rotation mechanism and locking actuator work together to achieve full automation of the crystal rod from clamping, positioning to rotation, adapting to the needs of high-volume production. The elastic sleeve in the placement cavity can buffer the crystal rod clamping force, avoid surface damage, facilitate cleaning, and ensure precise alignment of the crystal rod axis with the processing direction. The elastic sleeve is designed to be detachable, allowing the selection of appropriate elastic sleeves for crystal rods of different sizes, thus expanding the applicability of the device.

[0019] The above overview is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments, and features described above, further aspects, embodiments, and features of the present invention will become readily apparent from the accompanying drawings and the following detailed description. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of this utility model.

[0022] Figure 2 This is a schematic diagram of the clamping mechanism.

[0023] Figure 3 This is the front view of the clamping mechanism.

[0024] Figure 4 yes Figure 3 A schematic diagram of the cross-sectional structure of AA.

[0025] Figure 5 This is a schematic diagram of the positioning and rotating mechanism.

[0026] Figure 6 This is a schematic diagram of the locking actuator.

[0027] As shown in the figure: 1. Mounting platform; 2. Clamping mechanism; 21. Guide bar; 22. Crystal placement block; 23. Guide slope; 24. Crystal rod; 25. Elastic sleeve; 26. Adjusting screw; 27. Positioning block; 28. Limiting plate; 29. ​​Locking bolt; 210. Second locking block; 211. First locking block; 3. Positioning rotation mechanism; 31. First mounting plate; 32. First linear sliding module; 33. Servo motor; 34. Rotating rod; 35. Suction cup; 4. Locking actuator; 41. Second mounting plate; 42. Second linear sliding module; 43. Torque motor; 44. Connecting sleeve. Detailed Implementation

[0028] The embodiments of this application are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0030] Combined with appendix Figures 1-6 A clamping device for a crystal orientation analysis instrument includes a mounting platform 1, a clamping mechanism 2, a positioning and rotating mechanism 3, and a locking actuator 4. The clamping mechanism 2, the positioning and rotating mechanism 3, and the locking actuator 4 are all fixedly mounted on the mounting platform 1. The clamping mechanism 2 is used to place a crystal rod 24. The locking actuator 4 cooperates with the clamping mechanism 2 to fix the crystal rod 24. The positioning and rotating mechanism 3 is used to position the crystal rod 24 and can drive it to rotate.

[0031] The clamping mechanism 2 includes two parallel and symmetrically arranged guide bars 21 on the mounting platform 1, a positioning block 27 positioned on one side of the two guide bars 21 and perpendicular to the guide bars 21, and a crystal placement block 22 slidably arranged between the two guide bars 21. The positioning block 27 is equipped with a Hall sensor to determine whether the crystal placement block is in place. The guide bars 21 are made of high-strength aluminum alloy and are used to guide the operator to place the crystal placement block 22. The inner wall of the guide bar 21 away from the positioning block 27 is provided with a guide slope 23 with an angle of 15°-30°. The crystal placement block 22 has a placement cavity along the direction perpendicular to the guide bars 21. The placement cavity is detachably provided with an elastic sleeve 25. The elastic sleeve 25 is made of silicone and its inner diameter is adapted to the diameter of the crystal rod 24. The crystal placement block 22 is provided with a locking part that cooperates with the elastic sleeve 25. The crystal placement block 22 is provided with a crystal limiting part located at the front end of the placement cavity.

[0032] The locking part includes a first locking block 211 and a second locking block 210 symmetrically arranged on both sides of the placement cavity in the axial direction. Both the first locking block 211 and the second locking block 210 are C-shaped with an opening angle of 120°-150° and an opening width that is 2-3 mm larger than the diameter of the elastic sleeve 25. The first locking block 211 is fixedly installed in the crystal placement block 22. A pressure sensor can be installed on the first locking block 211 to detect the clamping force on the crystal rod 24. The second locking block 210 is slidably installed in the crystal placement block 22 and is rotatably connected to an adjusting screw 26 that is threadedly connected to the crystal placement block 22. The other side of the adjusting screw 26 extends through the side wall of the crystal placement block 22 to its outside and cooperates with the locking actuator 4. The adjusting screw 26 adopts a trapezoidal thread and has a hexagonal drive head at the end, which cooperates with the inner hexagonal hole of the connecting sleeve 44.

[0033] The crystal limiting part includes a locking bolt 29 threadedly connected to the crystal placement block 22, and a limiting plate 28 that cooperates with the crystal rod 24 is sleeved on the locking bolt 29.

[0034] The positioning and rotating mechanism 3 includes a first mounting plate 31. A first linear sliding module 32 is provided between the first mounting plate 31 and the mounting platform 1 to drive the first mounting plate 31 to move. A servo motor 33 is provided on the first mounting plate 31, and the output shaft of the servo motor 33 is connected to a rotating rod 34. A suction cup 35 is provided on the end of the rotating rod 34 away from the servo motor 33. The suction cup 35 is attached to the crystal rod 24 and drives it to rotate. The diameter of the suction cup 35 is 1 / 3 to 1 / 2 of the diameter of the crystal rod 24. The material is nitrile rubber. The suction cup 35 can be equipped with a piezoelectric ceramic displacement sensor to detect the adsorption pressure. The servo motor 33 can be a servo motor 33 equipped with a 17-bit absolute encoder and connected to the rotating rod 34 through a planetary reducer.

[0035] The locking actuator 4 includes a second mounting plate 41. A second linear sliding module 42 is provided between the second mounting plate 41 and the mounting platform 1 to drive the second mounting plate 41 to move. A torque motor 43 is provided on the second mounting plate 41, and a connecting sleeve 44 is provided on the output shaft of the torque motor 43 to transmit power to the adjusting screw 26. The connecting sleeve 44 is a hollow cylinder with a hexagonal hole on its inner wall that matches the driving head of the adjusting screw 26. The adjusting screw 26 is rotated through the connecting sleeve 44.

[0036] The crystal rod 24 is manually placed into the elastic sleeve 25, and the elastic sleeve is placed in the placement cavity. Then, the crystal placement block 22 is slid along the guide bar 21 to the positioning block 27 via the guide slope 23. It works in conjunction with the goniometer to achieve linkage control. The second linear sliding module 42 drives the connecting sleeve 44 to align with the adjusting screw 26. The torque motor 43 rotates the adjusting screw 26 with a torque of 30 N·m, driving the second locking block 210 to move towards the first locking block 211 until the C-shaped opening completely covers the crystal rod 24, achieving the clamping operation. The first linear sliding module 32 drives the suction cup 35 to move to the end of the crystal rod 24 and achieves vacuum adsorption with the crystal rod 24. The servo motor 33 drives the crystal rod 24 to rotate through vacuum adsorption.

[0037] All standard parts used in this invention can be purchased from the market, and irregularly shaped parts can be customized according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are mature technologies in the prior art. The machinery, parts, and equipment all use conventional models in the prior art, and the circuit connections also use conventional connection methods in the prior art, which will not be detailed here. Any content not described in detail in this specification belongs to the prior art known to those skilled in the art.

[0038] The present invention and its embodiments have been described above. This description is not restrictive, and the embodiments shown throughout the text are only one of the embodiments of the present invention. The actual structure is not limited to this. In conclusion, if a person skilled in the art is inspired by this description and designs a similar structure and embodiment without departing from the inventive spirit of the present invention, such design should fall within the protection scope of the present invention.

Claims

1. A clamping device for a crystal orientation analysis instrument, comprising a mounting platform, characterized in that: Also includes: Clamping mechanism, positioning and rotating mechanism and locking actuator; The clamping mechanism, the positioning and rotating mechanism, and the locking actuator are all fixedly mounted on the mounting platform; The clamping mechanism is used to place the crystal rod, the locking actuator cooperates with the clamping mechanism to fix the crystal rod, and the positioning and rotating mechanism is used to position the crystal rod and can drive it to rotate.

2. The clamping device for a crystal orientation analysis instrument according to claim 1, characterized in that: The clamping mechanism includes two parallel and symmetrically arranged guide strips on the mounting platform, a positioning block positioned on one side of the two guide strips and perpendicular to the guide strips, and a crystal placement block slidably disposed between the two guide strips. The crystal placement block has a placement cavity along a direction perpendicular to the guide strips. An elastic sleeve is detachably provided in the placement cavity. A crystal rod is disposed in the elastic sleeve. The crystal placement block has a locking part that cooperates with the elastic sleeve. The crystal placement block has a crystal limiting part located at the front end face of the placement cavity.

3. The clamping device for a crystal orientation analysis instrument according to claim 2, characterized in that: The locking part includes a first locking block and a second locking block symmetrically arranged on both sides of the placement cavity in the axial direction. Both the first locking block and the second locking block are C-shaped. The first locking block is fixedly arranged in the crystal placement block, and the second locking block is slidably arranged in the crystal placement block. An adjusting screw that is threadedly connected to the crystal placement block is rotatably connected to the second locking block. The other side of the adjusting screw extends through the side wall of the crystal placement block to its outside and cooperates with the locking actuator.

4. A clamping device for a crystal orientation analysis instrument according to claim 2, characterized in that: The crystal limiting part includes a locking bolt threaded onto the crystal placement block, and a limiting plate that mates with the crystal rod is fitted onto the locking bolt.

5. A clamping device for a crystal orientation analysis instrument according to claim 2, characterized in that: The positioning and rotating mechanism includes a first mounting plate. A first linear sliding module is provided between the first mounting plate and the mounting platform to drive the first mounting plate to move. A servo motor is provided on the first mounting plate, and the output shaft of the servo motor is driven to connect a rotating rod. A suction cup is provided on the end of the rotating rod away from the servo motor, and the suction cup is used to adhere to the crystal rod and drive it to rotate.

6. A clamping device for a crystal orientation analysis instrument according to claim 2, characterized in that: The guide strip has a guide slope on the inner wall of the side away from the positioning block.

7. A clamping device for a crystal orientation analysis instrument according to claim 3, characterized in that: The locking actuator includes a second mounting plate, and a second linear sliding module is provided between the second mounting plate and the mounting platform to drive the second mounting plate to move. The second mounting plate is provided with a torque motor, and the output shaft of the torque motor is provided with a connecting sleeve that can transmit power to the adjusting screw, so that the adjusting screw can be rotated through the connecting sleeve.

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