Water-cooling tray device

Abstract

A water-cooling tray device belongs to the technical field of vacuum equipment. The device comprises a connecting plate and a connecting bottom support, the connecting plate is connected to the upper portion of a tray, the connecting bottom support is connected to the lower portion of the tray, a waterway plate is arranged above the connecting plate, an upper cover is arranged above the waterway plate and connected with the upper edge of the tray, and the middle of the connecting plate is fixed to a waterway inner pipe. The water path inner pipe extends to the position between the upper cover and the water path plate, the connecting bottom support is connected with a water path outer pipe, the water path outer pipe extends to the position between the tray and the connecting plate, the water path inner pipe is located in the water path outer pipe, the water path outer pipe is connected with an inner water nozzle and an outer water nozzle, and the inner water nozzle and the outer water nozzle are connected with the water path inner pipe. The inner water nozzle is communicated with the interior of the water path inner pipe, and the outer water nozzle is communicated with the space between the water path outer pipe and the water path inner pipe. According to the tray cooling device, the tray can be rapidly cooled, the tray cooling stability is improved, and therefore the production efficiency is improved.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum equipment technology, and specifically relates to a water-cooled tray device. Background Technology

[0002] Currently, in the vacuum industry, raw materials are placed in crucibles within a cavity's thermal field for melting, refining, and crystal production. The trays used to produce and bond seed crystals are very expensive. However, the cooling rate of the seed crystals during bonding is slow, and the lack of a cooling device results in a long process time. Furthermore, unstable cooling can easily damage the trays, leading to economic losses. Utility Model Content

[0003] This invention addresses the aforementioned problems and overcomes the shortcomings of existing technologies by providing a water-cooled pallet device. This invention enables rapid cooling of the pallet, improves the stability of pallet cooling, and thus increases production efficiency.

[0004] To achieve the above objectives, the present invention adopts the following technical solution.

[0005] This utility model provides a water-cooled tray device, characterized in that it includes a connecting plate and a connecting base. The connecting plate is connected to the top of the tray, and the connecting base is connected to the bottom of the tray. A water channel plate is provided above the connecting plate, and a top cover is provided above the water channel plate. The top cover is connected to the upper edge of the tray. The middle part of the connecting plate is fixed to the inner water channel pipe. The inner water channel pipe extends between the top cover and the water channel plate. The connecting base is connected to the outer water channel pipe, and the outer water channel pipe extends between the tray and the connecting plate. The inner water channel pipe is located inside the outer water channel pipe. An inner water nozzle and an outer water nozzle are respectively connected to the outer water channel pipe. The inner water nozzle communicates with the interior of the inner water channel pipe, and the outer water nozzle communicates with the space between the outer water channel pipe and the inner water channel pipe.

[0006] Furthermore, the water circuit board is provided with multiple water flow holes. Cooling water in the inner water circuit pipe flows from the top of the water circuit board along the water flow holes to the top of the connecting plate to cool the side of the tray. Cooling water in the outer water circuit pipe flows to the top of the tray to cool the bottom of the tray.

[0007] The beneficial effects of this utility model.

[0008] This invention enables rapid cooling of pallets via water cooling, which not only reduces process time but also improves the stability of pallet cooling and increases production efficiency. Attached Figure Description

[0009] To make the technical problems solved, the technical solutions, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0010] Figure 1 This is a cross-sectional structural diagram of the present invention.

[0011] The markings in the diagram are: 1 is the connecting plate, 2 is the connecting base, 3 is the tray, 4 is the water circuit plate, 5 is the top cover, 6 is the inner water circuit pipe, 7 is the outer water circuit pipe, 8 is the inner water nozzle, 9 is the outer water nozzle, and 10 is the water outlet. Detailed Implementation

[0012] As shown in the accompanying drawings, this embodiment provides a water-cooled tray device, all components of which are made of 304 stainless steel, including a connecting plate 1 and a connecting base 2. The connecting plate 1 is positioned above the tray 3, and the connecting base 2 is installed below the tray 3.

[0013] A water channel plate 4 is provided above the connecting plate 1. The water channel plate 4 is provided with multiple water flow holes 10. A top cover 5 is provided above the water channel plate 4. The top cover 5 is connected to the upper edge of the tray 3. The middle part of the connecting plate 1 is fixed together with the inner water channel pipe 6. The inner water channel pipe 6 extends between the top cover 5 and the water channel plate 4. The cooling water in the inner water channel pipe 6 flows from the top of the water channel plate 4 along the water flow holes 10 to the top of the connecting plate 1 to cool the side of the tray 3.

[0014] The base 2 is connected to the outer water pipe 7. The inner water pipe 6 is located inside the outer water pipe 7. The outer water pipe 7 extends between the tray 3 and the connecting plate 1. The cooling water in the outer water pipe 7 flows into the upper part of the tray 3 to cool the lower part of the tray 3.

[0015] An inner water nozzle 8 and an outer water nozzle 9 are connected to the outer water pipe 7. The inner water nozzle 8 is connected to the inside of the inner water pipe 6 and is used to introduce cooling water into the inner water pipe 6. The outer water nozzle 9 is connected to the space between the outer water pipe 7 and the inner water pipe 6 and is used to introduce cooling water into the outer water pipe 7.

[0016] The above structure allows cooling water to reach the top of tray 3 and cool both the sides and bottom of tray 3, enabling the temperature of tray 3 to drop faster and more stably. This improves the stability of cooling tray 3, reduces the overall process time, and thus increases production efficiency.

[0017] It is understood that the above specific description of this utility model is only used to illustrate this utility model and is not limited to the technical solutions described in the embodiments of this utility model. Those skilled in the art should understand that modifications or equivalent substitutions can still be made to this utility model to achieve the same technical effect; as long as the use needs are met, they are all within the protection scope of this utility model.

Claims

1. A water-cooled tray device, characterized in that, The device includes a connecting plate (1) and a connecting base (2). The connecting plate (1) is connected above the tray (3), and the connecting base (2) is connected below the tray (3). A water channel plate (4) is provided above the connecting plate (1), and a top cover (5) is provided above the water channel plate (4). The top cover (5) is connected to the upper edge of the tray (3). The middle part of the connecting plate (1) is fixed together with the inner water channel pipe (6). The inner water channel pipe (6) extends to the top cover (5) and the water channel plate (4). Between them, the connecting base (2) is connected to the water pipe (7), the water pipe (7) extends between the tray (3) and the connecting plate (1), the water pipe (6) is located inside the water pipe (7), the water pipe (7) is connected to an inner water nozzle (8) and an outer water nozzle (9), the inner water nozzle (8) is connected to the inside of the water pipe (6), and the outer water nozzle (9) is connected to the space between the water pipe (7) and the water pipe (6).

2. The water-cooled tray device according to claim 1, characterized in that, The water circuit plate (4) is provided with multiple water flow holes (10). Cooling water in the inner water circuit pipe (6) flows from the top of the water circuit plate (4) along the water flow holes (10) to the top of the connecting plate (1) to cool the side of the tray (3). Cooling water in the outer water circuit pipe (7) flows to the top of the tray (3) to cool the bottom of the tray (3).

Images