Micropump structure

Abstract

The utility model provides a micropump structure which comprises a middle layer, one side of the middle layer is provided with a pump cavity, the other side of the middle layer is provided with a pump membrane and a liquid outlet flow channel, the pump cavity is communicated with the liquid outlet flow channel through a through hole, the middle layer is provided with an inlet valve and an outlet valve, the inlet end of the inlet valve penetrates through the surface of the other side of the middle layer, and the outlet end of the outlet valve penetrates through the surface of the other side of the middle layer. The outlet end of the inlet valve is communicated with the pump cavity, the inlet end of the outlet valve is communicated with the liquid outlet flow channel, the outlet end of the outlet valve penetrates through the surface of one side of the middle layer, and the pump membrane reciprocates through the driver; the first sealing layer is installed on one side of the middle layer, an output channel is formed in the first sealing layer, and the output channel is used for being communicated with the outlet end of the outlet valve; and the second sealing layer is installed on the other side of the middle layer, and an input channel is formed in the second sealing layer and used for being communicated with the inlet end of the inlet valve. According to the scheme, the size of the micropump can be obviously reduced, and the production cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of fluid transport technology, specifically to a micropump structure. Background Technology

[0002] The main principle of MEMS micropumps is to utilize the movement of the pump diaphragm to cause a change in the volume of the pump chamber, creating a pressure difference between the chamber and the outside. This pressure difference opens and closes the valve, thus pumping the fluid. During the pumping process, MEMS micropumps require a relatively low opening pressure to maximize valve opening and good sealing to prevent backflow of the liquid, which could reduce pumping accuracy. Furthermore, MEMS micropumps are manufactured using wafer (silicon wafer) semiconductor technology. Smaller micropump sizes can improve wafer utilization, increase the output per wafer, and reduce the cost of individual micropump devices. However, existing micropump technologies generally suffer from limitations in size reduction, resulting in higher production costs.

[0003] Existing micropump technologies generally suffer from the problem of large micropump size, as detailed below:

[0004] The patent, published under CN1324238C and titled "Fluid Flow Device and Manufacturing Method Thereof and Its Application," describes a fluid flow device comprising a stack covered by a sealing sheet. The stack includes a support wafer, an insulating material layer, and a silicon layer. The sealing sheet and / or the silicon layer are fabricated to form a cavity between the sealing sheet and the silicon layer. At least one channel in the support wafer completely penetrates the layer. The insulating material layer has at least one area completely free of material, which is at least aligned with the channel to mate with the cavity and form a moving part within the silicon layer. This moving part is adapted to move in the opposite direction towards the support wafer under the liquid pressure in the cavity until it contacts the support sheet. While this solution can pump fluid, the use of a silicon layer and a support wafer results in an excessively large intermediate stack volume, and the inlet and outlet valves occupy a significant amount of space, thus affecting the utilization rate of the pump chamber. Therefore, this solution suffers from the problem of excessively large micropump size.

[0005] The patent, CN118775225A, entitled "A MEMS Micropump," includes a silicon layer with opposing first and second surfaces. The first surface is etched with a first groove to form a pump chamber, and the second surface is etched with grooves to form a pump diaphragm, an inlet valve body, and an outlet valve body. At least partially, the grooves around the inlet valve body extend into the first groove. A central flow channel extending along the thickness direction of the silicon layer and communicating with the first groove is formed in the outlet valve body to draw out fluid. A first sealing layer, connected to the first surface, covers the first groove to form the pump chamber. A second sealing layer, connected to the second surface, has a drive channel corresponding to the pump diaphragm position for connecting a pump diaphragm actuator. At least one of the outlet valve body and the second sealing layer has a thinned portion facing each other, or the second sealing layer has through holes to form a larger outlet chamber. While this solution can reduce etching costs and achieve high-frequency pumping, the second groove occupies a large space, affecting the usable space of the pump chamber and resulting in a larger micropump size.

[0006] Therefore, the technical problem that this application needs to solve is: how to effectively reduce the size of the micropump. Utility Model Content

[0007] To address the aforementioned technical problems, this utility model proposes a micropump structure. In this design, the liquid outlet channel is located on the side of the intermediate layer opposite to the pump chamber, thus making full use of both sides of the intermediate layer. Furthermore, the installation of the outlet valve does not occupy the space of the pump chamber. While ensuring the power of the micropump, the volume of the micropump can be significantly reduced, thereby effectively reducing the production cost of the micropump.

[0008] Specifically, this utility model proposes a micropump structure, including:

[0009] The intermediate layer has a pump chamber on one side and a pump diaphragm and a liquid outlet channel on the other side. The pump chamber and the liquid outlet channel are connected by a through hole. The intermediate layer has an inlet valve and an outlet valve. The inlet end of the inlet valve penetrates the surface of the other side of the intermediate layer, and the outlet end of the inlet valve is connected to the pump chamber. The inlet end of the outlet valve is connected to the liquid outlet channel, and the outlet end of the outlet valve penetrates the surface of one side of the intermediate layer. The pump diaphragm reciprocates through a driver.

[0010] A first sealing layer is installed on one side of the intermediate layer, and an output channel is provided on the first sealing layer for connecting to the outlet end of the outlet valve.

[0011] A second sealing layer is installed on the other side of the intermediate layer, and an input channel is provided on the second sealing layer for connecting to the inlet end of the inlet valve.

[0012] Preferably, the intermediate layer, the first sealing layer, and the second sealing layer are rectangular structures, the inlet valve and the outlet valve are respectively located at two adjacent corners of the intermediate layer, and the line connecting the center of the pump cavity with the center of the inlet valve and the center of the outlet valve forms a broken line.

[0013] Preferably, the inlet valve and the outlet valve are both multi-beam supported diaphragm structures.

[0014] Preferably, the inlet valve includes:

[0015] An inlet valve cavity is formed on the intermediate layer, one end of the inlet valve cavity penetrates the pump cavity, and the other end of the inlet valve cavity penetrates the surface of the other side of the intermediate layer.

[0016] A valve body is installed in the inlet valve cavity, with a gap between the valve body and the side wall of the inlet valve cavity. One end of the valve body is supported on the intermediate layer by multiple first cantilever beams, and the other end of the valve body is used to block the input channel. The first cantilever beams are elastic and deform to follow the movement of the valve body.

[0017] Preferably, the number of the first cantilever beams is three or more.

[0018] Preferably, the outlet valve includes:

[0019] The first groove is formed on one side of the intermediate layer;

[0020] An outlet valve cavity, one end of which communicates with the first groove, and the other end of which communicates with the liquid outlet channel;

[0021] A diaphragm is used to seal one end of the outlet valve cavity. The diaphragm is supported on the side wall of the first groove by a plurality of second cantilever beams. The diaphragm and the second cantilever beams are elastic.

[0022] Preferably, the number of the second cantilever beams is three or more.

[0023] Preferably, the second sealing layer has a first anti-bonding layer on the side facing the intermediate layer. The first anti-bonding layer has a ring structure and surrounds the outer periphery of the input channel. The first anti-bonding layer is used to prevent the valve body from bonding with the second sealing layer.

[0024] Preferably, the other end face of the valve body is provided with a second groove.

[0025] Preferably, the side of the second sealing layer facing the intermediate layer is provided with a second anti-bonding layer. The second anti-bonding layer has a ring structure and is used to prevent the pump membrane from bonding with the second sealing layer.

[0026] Preferably, the two ends of the second sealing layer are provided with openings, and the driver passes through the openings to connect with the pump membrane.

[0027] Preferably, the intermediate layer is a silicon wafer layer, and the first sealing layer and the second sealing layer are glass layers. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0029] Figure 1 This is a schematic diagram showing the positional distribution of the inlet valve and outlet valve in the micropump structure of this embodiment along the top view direction;

[0030] Figure 2 yes Figure 1 Schematic diagram of the cross-sectional structure along the AA direction;

[0031] Figure 3 This is a schematic diagram showing the positional relationship between the inlet valve and the pump chamber in this embodiment;

[0032] Figure 4 yes Figure 3 A magnified schematic diagram of the structure at point C in the middle;

[0033] Figure 5 yes Figure 1 Schematic diagram of the cross-sectional structure in the middle BB direction;

[0034] Figure 6 This is a schematic diagram showing the positional relationship between the outlet valve and the pump chamber in this embodiment;

[0035] Figure 7 yes Figure 6 A magnified schematic diagram of the local structure at point D;

[0036] Figure 8 This is a schematic diagram of the first cantilever beam and the valve body in a top view when there are three first cantilever beams in this embodiment;

[0037] Figure 9 This is a schematic diagram of the first cantilever beam and the valve body in a top view when there are four first cantilever beams in this embodiment;

[0038] Figure 10 This is a schematic diagram of the first cantilever beam and the valve body in a top view when there are six first cantilever beams in this embodiment;

[0039] Figure 11 This is a schematic diagram of the first cantilever beam and the valve body in a top view when there are ten cantilever beams in this embodiment;

[0040] Figure 12 This is a schematic diagram of the second cantilever beam and the diaphragm in the top view when there are three second cantilever beams in this embodiment;

[0041] Figure 13 This is a schematic diagram of the second cantilever beam and the diaphragm in the top view when there are four second cantilever beams in this embodiment;

[0042] Figure 14 This is a schematic diagram of the second cantilever beam and the diaphragm in the top view when there are six second cantilever beams in this embodiment;

[0043] Figure 15 This is a schematic diagram of the second cantilever beam and the diaphragm in the top view when there are ten second cantilever beams in this embodiment.

[0044] The reference numerals used in the attached figures are as follows:

[0045] 11-Intermediate layer; 12-Pump chamber; 13-Pump diaphragm; 14-Outlet flow channel; 15-Through hole; 16-Inlet valve; 17-Outlet valve; 18-First sealing layer; 19-Outlet channel; 20-Second sealing layer; 21-Inlet channel; 22-Inlet valve cavity; 23-Valve body; 24-First cantilever beam; 25-First groove; 26-Outlet valve cavity; 27-Diaphragm; 28-Second cantilever beam; 29-First anti-bonding layer; 30-Second groove; 31-Second anti-bonding layer; 32-Opening. Detailed Implementation

[0046] The technical solutions of this application will be further described below with reference to specific embodiments, but this application is not limited to these embodiments.

[0047] like Figures 1 to 7 As shown, this embodiment proposes a micropump structure, including:

[0048] The intermediate layer 11 has a pump chamber 12 on one side and a pump membrane 13 and a liquid outlet channel 14 on the other side. The pump chamber 12 and the liquid outlet channel 14 are connected by a through hole 15. The through hole 15 is formed by etching the intermediate layer 11. The intermediate layer 11 is provided with an inlet valve 16 and an outlet valve 17. The inlet end of the inlet valve 16 penetrates the surface of the other side of the intermediate layer 11 and the outlet end of the inlet valve 16 is connected to the pump chamber 12. The inlet end of the outlet valve 17 is connected to the liquid outlet channel 14 and the outlet end of the outlet valve 17 penetrates the surface of one side of the intermediate layer 11. The pump membrane 13 is reciprocated by a driver.

[0049] The first sealing layer 18 is installed on one side of the intermediate layer 11, and the first sealing layer 18 is provided with an output channel 19, which is used to connect to the outlet end of the outlet valve 17.

[0050] The second sealing layer 20 is installed on the other side of the intermediate layer 11, and the second sealing layer 20 is provided with an input channel 21, which is used to connect to the inlet end of the inlet valve 16.

[0051] The technical advantages of this solution are: it can significantly reduce the size of the micropump and reduce production costs.

[0052] In this design, the liquid outlet channel 14 is located on the side of the intermediate layer 11 opposite to the pump chamber 12, thus making full use of both sides of the intermediate layer 11. The installation of the outlet valve 17 does not occupy the space of the pump chamber 12. While ensuring the power of the micropump, the volume of the micropump can be significantly reduced, and the production cost of the micropump can be effectively reduced.

[0053] Furthermore, the intermediate layer 11, the first closed layer 18, and the second closed layer 20 are all rectangular structures. For example... Figure 1 As shown, the inlet valve 16 and the outlet valve 17 are respectively located at two adjacent corners of the intermediate layer 11. At this time, the line connecting the center of the pump chamber 12 with the center of the inlet valve 16 and the center of the outlet valve 17 forms a broken line.

[0054] This solution can further reduce the space occupied by the inlet valve 16 and the outlet valve 17, effectively reducing the size of the micro pump.

[0055] In one embodiment of this invention, the inlet valve 16 and the outlet valve 17 are both multi-beam supported diaphragm structures. This design further reduces the space occupied by the inlet valve 16 and the outlet valve 17. Compared with the prior art, the overall size of the micropump in this embodiment can be reduced by about half, effectively reducing the production cost of the micropump.

[0056] Furthermore, such as Figures 2 to 4 As shown, the inlet valve 16 includes:

[0057] The inlet valve cavity 22 is formed on the intermediate layer 11. One end of the inlet valve cavity 22 passes through the pump cavity 12, and the other end of the inlet valve cavity 22 passes through the surface of the other side of the intermediate layer 11.

[0058] The valve body 23 is installed in the inlet valve cavity 22. There is a gap between the valve body 23 and the side wall of the inlet valve cavity 22. One end of the valve body 23 is supported on the intermediate layer 11 by multiple first cantilever beams 24. The other end of the valve body 23 is used to block the input channel 21. The first cantilever beams 24 are elastic and are used to deform with the movement of the valve body 23.

[0059] This solution effectively increases the number of first cantilever beams 24 by setting multiple first cantilever beams 24, which allows for a reduction in the dimensions of the first cantilever beams 24 and the valve body 23. Specifically, by reducing the width of the first cantilever beams 24, the deflection of the valve body 23 is increased, thereby reducing the opening pressure of the inlet valve 16.

[0060] Furthermore, this solution effectively reduces the space occupied by the inlet valve 16 by shortening the length of the cantilever beam and the diameter of the valve body 23.

[0061] Inlet valve 16 is a one-way valve, and its working principle is as follows:

[0062] When the pump chamber 12 is under negative pressure, the valve body 23 moves away from the input channel 21 under pressure difference. At this time, the input channel 21 is open, and the fluid enters the gap between the valve body 23 and the inlet valve cavity 22 through the input channel 21. Then the fluid flows into the pump chamber 12 through the gap between the adjacent first cantilever beams 24.

[0063] As one implementation method of this embodiment, such as Figures 5 to 7 As shown, the outlet valve 17 includes:

[0064] The first groove 25 is provided on one side of the intermediate layer 11;

[0065] The outlet valve cavity 26 has one end connected to the first groove 25 and the other end connected to the liquid outlet channel 14.

[0066] The diaphragm 27 is used to seal one end of the outlet valve cavity 26. The diaphragm 27 is supported on the side wall of the first groove 25 by multiple second cantilever beams 28. The diaphragm 27 and the second cantilever beams 28 are elastic.

[0067] This solution effectively increases the number of second cantilever beams 28 by setting multiple second cantilever beams 28, which allows for a reduction in the size of the second cantilever beams 28 and the diaphragm 27. Specifically, by reducing the width of the second cantilever beams 28, the deflection of the diaphragm 27 is increased, thereby reducing the opening pressure of the outlet valve 17.

[0068] Furthermore, this solution effectively reduces the space occupied by the outlet valve 17 by shortening the length of the cantilever beam and the diameter of the diaphragm 27.

[0069] Outlet valve 17 is a one-way valve, and its working principle is as follows:

[0070] When the pump chamber 12 is under high pressure, the outlet valve cavity 26 connected to the pump chamber 12 is also under high pressure. At this time, the diaphragm 27 moves away from the outlet valve cavity 26 under the action of pressure difference. The fluid in the pump chamber 12 flows into the liquid outlet channel 14 through the through hole 15. Then the fluid flows into the first groove 25 through the outlet valve cavity 26. Finally, the fluid in the first groove 25 flows out through the output channel 19.

[0071] In one embodiment of this invention, the number of first cantilever beams 24 and second cantilever beams 28 are each three or more. Specifically, as shown... Figures 8 to 15 As shown, the number of the first cantilever beam 24 and the second cantilever beam 28 can be selected as 3, 4, 6 or 10, or other numbers.

[0072] As one implementation method of this embodiment, such as Figure 4 As shown, the second sealing layer 20 has a first anti-bonding layer 29 on the side facing the intermediate layer 11. The first anti-bonding layer 29 has a ring structure and surrounds the outer periphery of the input channel 21. The first anti-bonding layer 29 is used to prevent the valve body 23 from bonding with the second sealing layer 20.

[0073] As one implementation method of this embodiment, such as Figure 4 As shown, a second groove 30 is provided on the other end face of the valve body 23. The technical advantage of this solution is that the fluid passing through the second groove 30 can effectively compress the valve body 23, making it easier to open the valve body 23.

[0074] As one implementation method of this embodiment, such as Figure 3 As shown, the second sealing layer 20 has a second anti-bonding layer 31 on the side facing the intermediate layer 11. The second anti-bonding layer 31 has a ring structure and is used to prevent the pump membrane 13 from bonding with the second sealing layer 20.

[0075] As one implementation method of this embodiment, such as Figure 3 As shown, the second sealing layer 20 has openings 32 extending through both ends, and the actuator passes through the openings 32 to connect with the pump membrane 13. The actuator is prior art, and its specific structure is not shown in the accompanying drawings.

[0076] In one embodiment of this invention, the intermediate layer 11 is a silicon wafer layer, and the first sealing layer 18 and the second sealing layer 20 are glass layers, respectively.

[0077] In addition, the structure in the intermediate layer 11 in this embodiment is formed by an etching process, wherein the first cantilever beam 24 and the second cantilever beam 28 are integrally formed with the intermediate layer 11.

[0078] The working principle of this solution is as follows:

[0079] An external actuator drives the pump diaphragm 13 to reciprocate, changing the pressure in the pump chamber 12. When the actuator pulls the pump diaphragm 13, the volume of the pump chamber 12 increases, the internal pressure decreases, and the inlet valve 16 opens under the pressure difference, allowing fluid to flow in. Meanwhile, the outlet valve 17 remains closed, achieving unidirectional suction in the pump chamber 12. When the actuator pushes the pump diaphragm 13, the volume of the pump chamber 12 decreases, the internal pressure increases, and the outlet valve 17 opens under the pressure difference, allowing fluid to flow out. The inlet valve 16 is then pressed shut, achieving unidirectional discharge from the pump chamber 12. Repeated pushing and pulling of the pump diaphragm 13 enables continuous pumping of the fluid.

[0080] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A micropump structure, characterized in that, include: An intermediate layer (11) is provided with a pump chamber (12) on one side and a pump diaphragm (13) and a liquid outlet channel (14) on the other side. The pump chamber (12) and the liquid outlet channel (14) are connected by a through hole (15). An inlet valve (16) and an outlet valve (17) are provided on the intermediate layer (11). The inlet end of the inlet valve (16) penetrates the surface of the other side of the intermediate layer (11), and the outlet end of the inlet valve (16) is connected to the pump chamber (12). The inlet end of the outlet valve (17) is connected to the liquid outlet channel (14), and the outlet end of the outlet valve (17) penetrates the surface of one side of the intermediate layer (11). The pump diaphragm (13) is reciprocated by a driver. A first sealing layer (18) is installed on one side of the intermediate layer (11), and an output channel (19) is provided on the first sealing layer (18), the output channel (19) being used to connect to the outlet end of the outlet valve (17); The second sealing layer (20) is installed on the other side of the intermediate layer (11), and the second sealing layer (20) is provided with an input channel (21) for connecting the inlet end of the inlet valve (16).

2. The micropump structure according to claim 1, characterized in that, The intermediate layer (11), the first sealing layer (18), and the second sealing layer (20) are rectangular structures. The inlet valve (16) and the outlet valve (17) are respectively located at two adjacent corners of the intermediate layer (11), and the line connecting the center of the pump chamber (12) with the center of the inlet valve (16) and the center of the outlet valve (17) forms a broken line.

3. The micropump structure according to claim 1, characterized in that, The inlet valve (16) and the outlet valve (17) are both multi-beam supported diaphragm structures.

4. The micropump structure according to any one of claims 1 to 3, characterized in that, The inlet valve (16) includes: An inlet valve cavity (22) is formed on the intermediate layer (11). One end of the inlet valve cavity (22) penetrates the pump chamber (12), and the other end of the inlet valve cavity (22) penetrates the surface of the other side of the intermediate layer (11). The valve body (23) is installed in the inlet valve cavity (22). There is a gap between the valve body (23) and the side wall of the inlet valve cavity (22). One end of the valve body (23) is supported on the intermediate layer (11) by a plurality of first cantilever beams (24). The other end of the valve body (23) is used to block the input channel (21). The first cantilever beams (24) are elastic and are used to deform with the movement of the valve body (23).

5. The micropump structure according to claim 4, characterized in that, The number of the first cantilever beam (24) is more than three.

6. The micropump structure according to any one of claims 1 to 3, characterized in that, The outlet valve (17) includes: The first groove (25) is provided on one side of the intermediate layer (11); The outlet valve cavity (26) has one end connected to the first groove (25) and the other end connected to the liquid outlet channel (14). A diaphragm (27) is used to seal one end of the outlet valve cavity (26). The diaphragm (27) is supported on the side wall of the first groove (25) by a plurality of second cantilever beams (28). The diaphragm (27) and the second cantilever beams (28) are elastic.

7. The micropump structure according to claim 6, characterized in that, The number of the second cantilever beam (28) is more than three.

8. The micropump structure according to claim 4, characterized in that, The second sealing layer (20) has a first anti-bonding layer (29) on the side facing the intermediate layer (11). The first anti-bonding layer (29) has an annular structure and surrounds the outer periphery of the input channel (21). The first anti-bonding layer (29) is used to prevent the valve body (23) from bonding with the second sealing layer (20).

9. The micropump structure according to claim 8, characterized in that, The valve body (23) has a second groove (30) on the other end face.

10. The micropump structure according to claim 1, characterized in that, The second sealing layer (20) has a second anti-bonding layer (31) on the side facing the intermediate layer (11). The second anti-bonding layer (31) has a ring structure and is used to prevent the pump membrane (13) from bonding with the second sealing layer (20).

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