Light splitting type wavefront sensing device, system and measuring equipment
By simultaneously measuring the light field intensity and phase using a beam-splitting wavefront sensor, the problem of synchronizing light field intensity and phase measurements in existing technologies is solved, thus achieving high-precision light field measurement.
Patent Information
- Application Number
- CN202520590381.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-03-31
AI Technical Summary
In existing technologies, it is difficult to measure the field intensity and phase of light simultaneously, resulting in large deviations in measurement results. Furthermore, the unequal optical path lengths in artificially constructed beam-splitting systems lead to increased errors.
A beam-splitting wavefront sensor is used, including a beam splitter, a field strength imaging device, and a phase imaging device. The incident light is split into two paths by the beam splitter, and the field strength and phase are measured simultaneously in a single sampling. Synchronous measurement is performed using a microlens array and a phase imaging device, and data processing is performed in conjunction with a controller.
It achieves simultaneous measurement of light field intensity and phase, improving the synchronization and accuracy of the measurement. The structure is simple, reducing human error and system noise, and enhancing the accuracy of the measurement.
Smart Images
Figure CN223896914U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical device technology, and in particular to a beam-splitting wavefront sensor, system and measuring equipment. Background Technology
[0002] Light is a form of electromagnetic radiation; microscopically, it is a transverse wave propagating forward through electromagnetic oscillations. Taking any wavefront as an example, the wave on that surface possesses two properties: field intensity and phase. Both are indispensable for a complete description of the scalar field of light. In recent years, with the improvement in wavefront measurement accuracy, the simultaneous measurement of light field intensity and phase has become particularly necessary. If two devices are used to measure field intensity and phase sequentially, for discontinuous light, two different pulses are actually measured, leading to significant deviations in the results. Furthermore, if a beam splitting system is manually constructed to measure field intensity and phase, human error can cause unequal optical path lengths between the two paths, making simultaneous measurement difficult. Summary of the Invention
[0003] The technical problem to be solved by this utility model is to provide a spectroscopic wavefront sensor device and system that addresses the shortcomings of the prior art.
[0004] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A beam splitter wavefront sensor includes a beam splitter, a field intensity imaging device, a microlens array and a phase imaging device. The incident light is split into two outgoing directions by the beam splitter. The field intensity imaging device and the microlens array are respectively arranged in the two outgoing directions of the beam splitter. The phase imaging device is arranged on the side of the microlens array away from the beam splitter.
[0005] The beneficial effects of this utility model are as follows: The beam-splitting wavefront sensor of this utility model splits the incident light into two by means of the beam splitter, and in one sampling, the field strength and phase are measured simultaneously by means of the field strength imaging device and the phase imaging device. The scalar field can be obtained by simple formula conversion, which greatly improves the synchronization and accuracy of the measurement. In addition, the entire sensor assembly has a simple structure and is easy to use.
[0006] Based on the above technical solution, the present invention can be further improved as follows:
[0007] Further: The beam splitter is a cubic beam splitter.
[0008] The beneficial effects of the above-mentioned further solution are: the beam splitting film of the cubic beam splitter can ensure that the incident light is separated in both the reflection and transmission directions, and there is sufficient energy output in both directions. In addition, the cubic beam splitter has a stable structure that is not easily deformed, ensuring measurement accuracy, and is easy to install and convenient to fix and connect with the housing.
[0009] Furthermore, at least one side surface of the beam splitter is coated with an anti-reflection film.
[0010] The beneficial effects of the above-mentioned further solutions are: by setting an anti-reflective coating, stray light can be reduced, ghosting and glare can be avoided, and image clarity and contrast can be improved.
[0011] Further: The beam splitter is a plane beam splitter.
[0012] The beneficial effect of the above-mentioned further solutions is that by using a planar beam splitter, the weight and volume of the beam splitter can be greatly reduced, which facilitates lightweight design.
[0013] Furthermore, an extinction material is provided on the non-working direction of the beam splitter opposite to the reflection direction.
[0014] The beneficial effect of the above-mentioned further solution is that by setting the matting material in the non-working direction, light unrelated to the measurement can be absorbed, thus reducing system noise.
[0015] Furthermore, the optical path between the incident surface of the incident light and the field intensity imaging device is equal to the optical path between the incident surface of the incident light and the microlens array.
[0016] The beneficial effect of the above-mentioned further scheme is that by setting the optical path between the incident surface of the incident light and the field intensity imaging device to be equal to the optical path between the incident surface of the incident light and the microlens array, it is ensured that the field intensity and phase measurements come from the same wavefront, which facilitates the calculation of the scalar field and improves the accuracy of the measurement results.
[0017] This utility model also provides a beam splitting wavefront sensing system, including a controller and the beam splitting wavefront sensor device. The controller is electrically connected to the field strength imaging device and the phase imaging device respectively, and synchronously processes the image data acquired by the field strength imaging device and the phase imaging device.
[0018] Based on the above technical solution, the present invention can be further improved as follows:
[0019] Furthermore, the field strength imaging device and the phase imaging device are respectively set separately from the controller, and the field strength imaging device and the phase imaging device are respectively electrically connected to the controller via data lines.
[0020] The beneficial effect of the above-mentioned further solution is that by setting the field strength imaging device and the phase imaging device separately from the controller, the size of the field strength imaging device and the phase imaging device can be reduced, making installation easier.
[0021] This invention also provides a measuring device for laser spot detection, including the aforementioned beam-splitting wavefront sensor.
[0022] This invention also provides a measuring device for optical system detection, including the aforementioned beam-splitting wavefront sensor. Attached Figure Description
[0023] Figure 1 This is a three-dimensional structural schematic diagram of a beam-splitting wavefront sensor device according to an embodiment of the present invention;
[0024] Figure 2 This is a planar schematic diagram of the beam splitter of a beam-splitting wavefront sensor device according to an embodiment of the present invention;
[0025] Figure 3 This is a schematic diagram of the planar structure of a beam-splitting wavefront sensor device according to another embodiment of the present invention;
[0026] Figure 4 This is a schematic diagram of the electrical connection structure between the controller and the imaging device of a beam-splitting wavefront sensor according to an embodiment of the present invention.
[0027] The attached diagram lists the components represented by each number as follows:
[0028] 1. Beam splitter, 2. Field intensity imaging device, 3. Microlens array, 4. Phase imaging device, 5. Incident surface, 6. Reflection direction, 7. Transmission direction, 8. Non-working direction, 9. Controller. Detailed Implementation
[0029] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.
[0030] like Figure 1 and Figure 2 As shown, a beam-splitting wavefront sensor includes a beam splitter 1, a field intensity imaging device 2, a microlens array 3, and a phase imaging device 4. Incident light enters from the incident surface 5 and is split into two exit directions by the beam splitter 1, including a reflection direction 6 and a transmission direction 7. The field intensity imaging device 2 is disposed on one side of the reflection direction 6, the microlens array 3 is disposed on one side of the transmission direction 7, and the phase imaging device 4 is disposed on the side of the microlens array 3 away from the beam splitter 1.
[0031] The beam-splitting wavefront sensor of this invention splits the incident light into two by the beam splitter 1, and simultaneously measures the field strength and phase by the field strength imaging device 2 and the phase imaging device 4 in a single sampling. The scalar field can be obtained by simple formula conversion, which greatly improves the synchronization and accuracy of the measurement. In addition, the entire sensor assembly has a simple structure and is easy to use.
[0032] In practice, the field strength imaging device 2 can also be set on one side of the transmission direction 7, and the microlens array 3 can be set on one side of the reflection direction 6.
[0033] In one or more embodiments of this utility model, the beam splitter 1 is a cubic beam splitter, which includes two right-angle prisms, one of which has a beam-splitting film coated on its inclined surface. The inclined surfaces of the two right-angle prisms are fitted together to form the cubic beam splitter. The two right-angle prisms ensure that the incident light is split at the beam-splitting film in both reflection and transmission directions, with sufficient energy output in both directions. Furthermore, the cubic beam splitter has a stable structure that is not easily deformed, ensuring measurement accuracy, and is easy to install and fix to the housing.
[0034] Optionally, in one or more embodiments of this invention, the beam splitter 1 has a splitting ratio of 1:1. By setting the splitting ratio of the two beams to 1:1, the optical power of the two output beams can be guaranteed to be the same, simplifying the optical path design and reducing system complexity.
[0035] Optionally, in one or more embodiments of this invention, at least one side surface of the beam splitter 1 is coated with an anti-reflection film. By providing an anti-reflection film, stray light can be reduced, ghosting and glare can be avoided, and image clarity and contrast can be improved.
[0036] like Figure 3 As shown, in one or more embodiments of this utility model, the beam splitter 1 is a planar beam splitter. By using a planar beam splitter, the weight and volume of the beam splitter can be greatly reduced, facilitating lightweight design.
[0037] In one or more embodiments of this utility model, an matting material is provided on the non-working direction 8 opposite to the reflection direction 6 of the beam splitter 1. By providing the matting material on the non-working direction 8, light unrelated to the measurement can be absorbed, reducing system noise. In specific implementations, a black anodizing treatment can be applied to the aluminum alloy surface corresponding to the non-working direction 8, or a black matting velvet can be placed on it.
[0038] Optionally, in one or more embodiments of this invention, the optical path between the incident surface 5 of the incident light and the field intensity imaging device 2 is equal to the optical path between the incident surface 5 of the incident light and the microlens array 3. By setting the optical path between the incident surface 5 of the incident light and the field intensity imaging device 2 to be equal to the optical path between the incident surface 5 of the incident light and the microlens array 3, it is ensured that the field intensity and phase measurements originate from the same wavefront, facilitating scalar field calculations and improving the accuracy of the measurement results.
[0039] like Figure 4As shown, this utility model also provides a beam splitting wavefront sensing system, including a controller 9 and the beam splitting wavefront sensor device. The controller 9 is electrically connected to the field strength imaging device 2 and the phase imaging device 4 respectively, and synchronously processes the image data collected by the field strength imaging device 2 and the phase imaging device 4.
[0040] In practice, controller 9 directly outputs the synthesized data, and the host computer program can acquire field strength and phase data in the same frame image, facilitating scalar field calculation. Controller 9 synchronizes the two imaging devices in time, ensuring that the acquired field strength and phase originate from the same light pulse. For example, an embedded electronic solution can be used to synchronize the image data of the two imaging devices. The main control chip of controller 9 can be an FPGA / ARM or an image-specific ASIC chip. In a preferred embodiment, controller 9 includes an FPGA chip connected to the two imaging devices, thus ensuring data synchronization in hardware. After the field strength imaging device 2 and the phase imaging device 4 acquire image data, the scalar field data can be obtained using existing scalar field calculation formulas.
[0041] In one or more embodiments of this utility model, the field strength imaging device 2 and the phase imaging device 4 are respectively separately disposed from the controller 9, and the field strength imaging device 2 and the phase imaging device 4 are respectively electrically connected to the controller 9 via data lines.
[0042] By separating the field strength imaging device 2 and the phase imaging device 4 from the controller 9, the size of the field strength imaging device 2 and the phase imaging device 4 can be reduced, making installation easier. Furthermore, the controller 9 typically generates significant heat; if the controller 9 and the imaging devices share a circuit board, it can cause the circuit board to deform, reducing measurement accuracy. The separate design reduces the amount of deformation on the circuit board containing the imaging devices.
[0043] This invention also provides a measuring device for laser spot detection, including the aforementioned beam-splitting wavefront sensor.
[0044] This invention also provides a measuring device for optical system detection, including the aforementioned beam-splitting wavefront sensor.
[0045] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A spectroscopic wavefront sensor device, characterized in that... The device includes a beam splitter (1), a field intensity imaging device (2), a microlens array (3), and a phase imaging device (4). The incident light is split into two outgoing directions by the beam splitter (1). The field intensity imaging device (2) and the microlens array (3) are respectively arranged in the two outgoing directions of the beam splitter (1). The phase imaging device (4) is arranged on the side of the microlens array (3) away from the beam splitter (1).
2. The beam-splitting wavefront sensor device according to claim 1, characterized in that... The beam splitter (1) is a cubic beam splitter.
3. The beam-splitting wavefront sensor device according to claim 2, characterized in that... At least one side surface of the beam splitter (1) is coated with an anti-reflection film.
4. The beam-splitting wavefront sensor device according to claim 1, characterized in that... The beam splitter (1) is a plane beam splitter.
5. The beam-splitting wavefront sensor according to claim 2 or 4, characterized in that... An extinction material is provided on the non-working direction (8) opposite to the reflection direction (6) of the beam splitter (1).
6. The beam-splitting wavefront sensor according to any one of claims 1-4, characterized in that... The optical path between the incident surface (5) of the incident light and the field intensity imaging device (2) is equal to the optical path between the incident surface (5) of the incident light and the microlens array (3).
7. A spectroscopic wavefront sensing system, characterized in that... The device includes a controller (9) and a beam-splitting wavefront sensor as described in any one of claims 1-6. The controller (9) is electrically connected to the field strength imaging device (2) and the phase imaging device (4) respectively, and performs synchronous processing on the image data acquired by the field strength imaging device (2) and the phase imaging device (4).
8. The beam-splitting wavefront sensing system according to claim 7, characterized in that... The field strength imaging device (2) and the phase imaging device (4) are respectively set separately from the controller (9), and the field strength imaging device (2) and the phase imaging device (4) are respectively electrically connected to the controller (9) via data lines.
9. A measuring device for laser spot detection, characterized in that: Includes the beam-splitting wavefront sensor device as described in any one of claims 1-6.
10. A measuring device for inspecting optical systems, characterized in that: Includes the beam-splitting wavefront sensor device as described in any one of claims 1-6.