Anti-abrasion graphite boat
By using a coaxial arrangement of metal limit rods and bushings and magnetic attraction in a graphite boat, the problem of unstable positioning caused by wear of the limit post was solved, achieving higher wear resistance and positioning accuracy, and improving product yield.
Patent Information
- Application Number
- CN202520489614.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-20
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-03-20
AI Technical Summary
After long-term use, existing graphite boats are prone to wear between the limiting posts and limiting holes, which causes relative movement between the carrier plate and the pressure plate, affecting the positioning accuracy of the chip and the product yield.
The system uses a metal limiting rod and bushing. The coaxial arrangement of the limiting rod and bushing and the properties of the metal material improve wear resistance. The attraction between the magnetic blocks enhances the bonding reliability between the pressure plate and the bearing plate, preventing relative movement.
It effectively prevents wear between the limit rod and the bushing, ensures stable positioning of the lead frame, and improves the wear resistance and product yield of the graphite boat.
Smart Images

Figure CN223899647U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a wear-resistant graphite boat, belonging to the field of graphite boats. Background Technology
[0002] A graphite boat for semiconductor packaging is a graphite container used to support and handle chips during the semiconductor packaging process. It typically serves to support and heat the chips during packaging, especially in high-temperature, high-precision processes. Graphite boats play a crucial role in semiconductor packaging applications, primarily used in chip welding, curing, and sintering.
[0003] Chinese invention patent CN117038538A discloses a graphite boat structure, including a graphite support plate, a graphite pressure plate, and a positioning plate. The graphite support plate has multiple through holes, and the positioning plate has multiple positioning posts. The graphite support plate is placed on the positioning plate, and the positioning posts pass through the through holes to position the upper and lower lead frames. This application uses positioning posts to position the upper and lower lead frames. After positioning, the graphite support plate is removed from the positioning plate, causing the positioning posts to detach from the graphite support plate. This prevents the upper or lower lead frames from shifting or lifting during heating and soldering, improving the chip soldering effect. However, in the prior art, after long-term use, wear easily occurs between the positioning posts and the positioning holes in the graphite boat, leading to an increase in the diameter of the positioning holes. This makes it easy for relative movement to occur between the support plate and the pressure plate, which in turn causes the chip on the lead frame to become misaligned, affecting product yield.
[0004] Therefore, there is a need for a wear-resistant graphite boat to improve its wear resistance. Utility Model Content
[0005] The technical problem to be solved by this utility model is: to overcome the shortcomings of the prior art and provide a wear-resistant graphite boat with improved wear resistance.
[0006] The technical solution adopted by this utility model to solve the above problems is as follows: a wear-resistant graphite boat, including a support plate and a pressure plate, the support plate and the pressure plate are arranged in close contact with each other, the pressure plate is provided with a plurality of limiting rods, the limiting rods are arranged vertically, the top of the limiting rods are fixedly set at the bottom of the pressure plate, the top of the support plate is provided with a plurality of limiting holes, the plurality of limiting holes correspond one-to-one with the plurality of limiting rods, and a bushing is fixedly set in each limiting hole, the bushing is annular, the limiting rods and the bushings are both made of metal, and the bushings and the limiting rods are arranged coaxially.
[0007] Preferably, the number of the limiting rods is four, and the four limiting rods are distributed in a matrix.
[0008] Preferably, the inner diameter of the bushing is equal to the diameter of the limiting rod.
[0009] Preferably, the bottom end of the limiting rod is chamfered.
[0010] Preferably, a through hole is provided on one side of the limiting hole, the through hole extends to the outer wall of the bearing plate, a locking hole is provided on the outer peripheral wall of the bushing, a positioning rod is provided in the through hole, and one end of the positioning rod is inserted into the locking hole.
[0011] Preferably, the positioning rod includes a threaded section and a locking section. The threaded section is located inside the through hole, and the locking section is inserted into the locking hole. The threaded section is threadedly connected to the inner wall of the through hole, and the diameter of the locking section is equal to the diameter of the locking hole.
[0012] Preferably, the bushing has a retaining strip on its outer peripheral wall and a retaining groove on its inner peripheral wall, the retaining strip matching the retaining groove and the retaining strip being inserted into the retaining groove.
[0013] Preferably, a first magnetic block is embedded in the top of the bearing plate and a second magnetic block is embedded in the bottom of the pressure plate. The first magnetic block and the second magnetic block are arranged facing each other, and the magnetic poles of the top of the first magnetic block and the bottom of the second magnetic block are opposite.
[0014] Preferably, the top of the first magnetic block is on the same plane as the top of the support plate, and the bottom of the second magnetic block is on the same plane as the bottom of the pressure plate.
[0015] Preferably, the top of the bearing plate is provided with a first groove, and the bottom of the pressure plate is provided with a second groove. The first groove and the second groove are matched and arranged opposite each other, and auxiliary grooves are provided on both sides of the first groove.
[0016] Compared with the prior art, the advantages of this utility model are:
[0017] This utility model discloses a wear-resistant graphite boat. By cooperating with the metal limiting rod and bushing, the wear resistance is improved. Secondly, the mutual attraction between the first and second magnetic blocks enhances the reliability of the fit between the pressure plate and the support plate, preventing relative movement between the pressure plate and the support plate, and further preventing wear between the limiting rod and the bushing. Attached Figure Description
[0018] Figure 1 This is a perspective view of a wear-resistant graphite boat according to the present invention;
[0019] Figure 2 This is a front view of a wear-resistant graphite boat according to the present invention;
[0020] Figure 3This is a left view of a wear-resistant graphite boat according to the present invention;
[0021] Figure 4 This is a top view of a wear-resistant graphite boat according to the present invention;
[0022] Figure 5 This is a schematic diagram of the supporting plate structure;
[0023] Figure 6 This is a schematic diagram of the limiting hole structure;
[0024] Figure 7 This is a schematic diagram of the bushing structure;
[0025] Figure 8 This is a schematic diagram of the positioning rod.
[0026] Figure 9 This is a schematic diagram of the pressure plate structure.
[0027] in:
[0028] 1. Bearing plate, 2. Pressure plate, 3. First groove, 4. Second groove, 5. Auxiliary groove, 6. Limiting rod, 7. Limiting hole, 8. Bushing, 9. Through hole, 10. Locking hole, 11. Positioning rod, 12. Locking strip, 13. Locking groove, 14. First magnetic block, 15.
[0029] Threaded section 110, locking section 111. Detailed Implementation
[0030] like Figure 1-9 As shown, an anti-wear graphite boat in this embodiment includes a support plate 1 and a pressure plate 2, wherein the support plate 1 and the pressure plate 2 are arranged in close contact with each other.
[0031] The top of the bearing plate 1 is provided with a first groove 3, and the bottom of the pressure plate 2 is provided with a second groove 4. The first groove 3 and the second groove 4 are matched and arranged opposite each other. Auxiliary grooves 5 are provided on both sides of the first groove 3.
[0032] Multiple first grooves 3 and multiple second grooves 4 are provided, with multiple first grooves 3 and multiple second grooves 4 corresponding one-to-one. Multiple first grooves 3 are arranged side by side, and the specific number of each first groove 3 and second groove 4 is two.
[0033] During use, the lead frame is placed in the first groove 3, and then the pressure plate 2 is attached to the top of the support plate 1. At this time, the first groove 3 and the second groove 4 are aligned to form a placement cavity, and the lead frame is placed in the placement cavity.
[0034] When it is necessary to remove the lead frame from the graphite boat, remove the pressure plate 2 and then remove the lead frame from the first groove 3. When removing the lead frame, the operator's hand can be inserted into the auxiliary groove 5 to facilitate the removal of the lead frame.
[0035] The pressure plate 2 is provided with a plurality of limiting rods 6, specifically four limiting rods 6 arranged in a matrix. The limiting rods 6 are vertically arranged, and the top of the limiting rods 6 is fixedly set at the bottom of the pressure plate 2. The bottom of the limiting rods 6 is provided with a chamfer. The top of the bearing plate 1 is provided with a plurality of limiting holes 7, and the plurality of limiting holes 7 correspond one-to-one with the plurality of limiting rods 6. A bushing 8 is fixedly set in each limiting hole 7. The bushing 8 is annular. Both the limiting rods 6 and the bushing 8 are made of metal. The bushing 8 is coaxially arranged with the limiting rod 6, and the inner diameter of the bushing 8 is equal to the diameter of the limiting rod 6.
[0036] A through hole 9 is provided on one side of the limiting hole 7. The through hole 9 extends to the outer wall of the bearing plate 1. A locking hole 10 is provided on the outer peripheral wall of the bushing 8. A positioning rod 11 is provided in the through hole 9. One end of the positioning rod 11 is inserted into the locking hole 10.
[0037] The positioning rod 11 includes a threaded section 110 and a locking section 111. The threaded section 110 is located inside the through hole 9, and the locking section 111 is inserted into the locking hole 10. The threaded section 110 is threadedly connected to the inner wall of the through hole 9, and the diameter of the locking section 111 is equal to the diameter of the locking hole 10.
[0038] When the pressure plate 2 is attached to the bearing plate 1, the bottom end of each limiting rod 6 is inserted into the corresponding bushing 8. The positioning of the bearing plate 1 and the pressure plate 2 is achieved through the cooperation between the limiting rod 6 and the bushing 8. Moreover, since the limiting rod 6 and the bushing 8 are both made of metal, they are not easy to wear.
[0039] In addition, when installing bushing 8, the positioning rod 11 and the locking hole 10 cooperate to lock bushing 8, thus achieving relative fixation between bushing 8 and bearing plate 1.
[0040] A retaining strip 12 is provided on the outer peripheral wall of the bushing 8, and a retaining groove 13 is provided on the inner peripheral wall of the limiting hole 7. The retaining strip 12 matches the retaining groove 13, and the retaining strip 12 is inserted into the retaining groove 13.
[0041] Multiple card strips 12 and card slots 13 are provided, with each card strip 12 corresponding to a card slot 13. The specific number of card strips 12 is two.
[0042] When installing the bushing 8, the bushing 8 is circumferentially fixed by the cooperation between the retaining strip 12 and the retaining groove 13, which makes it easier for the positioning rod 11 to be inserted into the locking hole 10.
[0043] A first magnetic block 14 is embedded in the top of the support plate 1, and a second magnetic block 15 is embedded in the bottom of the pressure plate 2. The first magnetic block 14 and the second magnetic block 15 are arranged facing each other. The magnetic poles of the top of the first magnetic block 14 and the bottom of the second magnetic block 15 are opposite. The top of the first magnetic block 14 and the top of the support plate 1 are on the same plane, and the bottom of the second magnetic block 15 and the bottom of the pressure plate 2 are on the same plane.
[0044] Multiple first magnetic blocks 14 and multiple second magnetic blocks 15 are provided, with multiple first magnetic blocks 14 and multiple second magnetic blocks 15 corresponding one-to-one;
[0045] When the pressure plate 2 is in contact with the support plate 1, the mutual attraction between the first magnetic block 14 and the second magnetic block 15 improves the reliability of the contact between the pressure plate 2 and the support plate 1, avoids relative movement between the pressure plate 2 and the support plate 1, and further avoids wear between the limit rod 6 and the bushing 8.
[0046] In summary, the wear resistance is improved by the cooperation between the metal limiting rod 6 and the bushing 8. Secondly, the mutual attraction between the first magnetic block 14 and the second magnetic block 15 improves the reliability of the fit between the pressure plate 2 and the bearing plate 1, avoids relative movement between the pressure plate 2 and the bearing plate 1, and further avoids wear between the limiting rod 6 and the bushing 8.
[0047] In addition to the above embodiments, this utility model also includes other implementation methods. All technical solutions formed by equivalent transformation or equivalent substitution should fall within the protection scope of the claims of this utility model.
Claims
1. A wear-resistant graphite boat, comprising a support plate (1) and a pressure plate (2), wherein the support plate (1) and the pressure plate (2) are arranged in an upper and lower fit together, characterized in that: The pressure plate (2) is provided with multiple limiting rods (6), the limiting rods (6) are arranged vertically, and the top of the limiting rods (6) is fixedly set at the bottom of the pressure plate (2). The top of the bearing plate (1) is provided with multiple limiting holes (7), and the multiple limiting holes (7) correspond one-to-one with the multiple limiting rods (6). Each limiting hole (7) is fixedly provided with a bushing (8), the bushing (8) is annular, the limiting rods (6) and the bushing (8) are both made of metal, and the bushing (8) and the limiting rod (6) are arranged coaxially.
2. The wear-resistant graphite boat according to claim 1, characterized in that: The specific number of the limiting rods (6) is four, and the four limiting rods (6) are distributed in a matrix.
3. The wear-resistant graphite boat according to claim 1, characterized in that: The inner diameter of the bushing (8) is equal to the diameter of the limiting rod (6).
4. The wear-resistant graphite boat according to claim 1, characterized in that: The bottom end of the limiting rod (6) is chamfered.
5. The wear-resistant graphite boat according to claim 1, characterized in that: A through hole (9) is provided on one side of the limiting hole (7), the through hole (9) extends to the outer wall of the bearing plate (1), a locking hole (10) is provided on the outer peripheral wall of the bushing (8), a positioning rod (11) is provided in the through hole (9), and one end of the positioning rod (11) is inserted into the locking hole (10).
6. The wear-resistant graphite boat according to claim 5, characterized in that: The positioning rod (11) includes a threaded section (110) and a locking section (111). The threaded section (110) is located inside the through hole (9), and the locking section (111) is inserted into the locking hole (10). The threaded section (110) is threadedly connected to the inner wall of the through hole (9), and the diameter of the locking section (111) is equal to the diameter of the locking hole (10).
7. The wear-resistant graphite boat according to claim 1, characterized in that: A retaining strip (12) is provided on the outer peripheral wall of the bushing (8), and a retaining groove (13) is provided on the inner peripheral wall of the limiting hole (7). The retaining strip (12) matches the retaining groove (13), and the retaining strip (12) is inserted into the retaining groove (13).
8. The wear-resistant graphite boat according to claim 1, characterized in that: The top of the bearing plate (1) is embedded with a first magnetic block (14), and the bottom of the pressure plate (2) is embedded with a second magnetic block (15). The first magnetic block (14) and the second magnetic block (15) are arranged facing each other, and the top of the first magnetic block (14) and the bottom of the second magnetic block (15) have opposite magnetic poles.
9. The wear-resistant graphite boat according to claim 8, characterized in that: The top of the first magnetic block (14) is on the same plane as the top of the support plate (1), and the bottom of the second magnetic block (15) is on the same plane as the bottom of the pressure plate (2).
10. The wear-resistant graphite boat according to claim 1, characterized in that: The top of the bearing plate (1) is provided with a first groove (3), and the bottom of the pressure plate (2) is provided with a second groove (4). The first groove (3) and the second groove (4) are matched and arranged opposite each other. The two sides of the first groove (3) are provided with auxiliary grooves (5).
Citation Information
Patent Citations
Graphite boat structure and semiconductor packaging process applied by same
CN117038538A