Pressing device and positioning equipment

Abstract

The utility model relates to the technical field of semiconductors or photovoltaics, in particular to a pressing device and positioning equipment, and aims to solve the problems that a slide glass structure is difficult to fit with a first reference surface, so that the position precision of the slide glass structure is low, and the phenomena of blocking, fragmentation and edge breakage are easy to occur when a flaky material is inserted and unloaded. According to the pressing device, the pressing piece is rotatably connected with the driving assembly, the driving assembly drives the pressing piece to move, when the pressing piece makes contact with the slide glass structure, the pressing piece can automatically adjust the angle of the pressing piece so as to be tightly attached to the slide glass structure, the slide glass structure is prevented from being bent and twisted, the slide glass structure is pressed on the first datum plane, and the slide glass structure is attached to the first datum plane; the position precision when the slide glass structure is tidied is improved, the phenomena of blocking, fragmentation, edge breakage and the like when the flaky materials are inserted and unloaded are reduced, and the fragmentation rate of the flaky materials is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a clamping device and a positioning device. Background Technology

[0002] In the semiconductor or photovoltaic industries, wafer carrier structures are commonly used to support and transport sheet materials. These carrier structures can be boats or baskets, etc. When inserting or removing sheet materials from the carrier structure, the carrier structure must first be aligned with the first reference surface of the leveling platform to ensure the positional accuracy of the carrier structure on the leveling platform, thus ensuring that the robot arm can accurately insert and remove sheet materials from the carrier structure.

[0003] However, after the carrier structure is placed on the first reference surface, the existing positioning equipment has difficulty in making the plane of the carrier structure facing the first reference surface fit with the first reference surface, resulting in low positional accuracy of the carrier structure on the regularization platform. When inserting or removing sheet materials, jamming, fragmentation and edge breakage are likely to occur, resulting in a high fragmentation rate of sheet materials. Utility Model Content

[0004] In view of this, embodiments of this application provide a clamping device and a positioning device to solve the problem that the carrier structure is difficult to fit with the first reference surface, resulting in low positional accuracy of the carrier structure, and that jamming, fragmentation and edge breakage are easy to occur when inserting and unloading sheet materials, resulting in a high fragmentation rate of sheet materials.

[0005] In a first aspect, one embodiment of this application provides a clamping device applied to a positioning device. The positioning device has a first reference surface, which is used to provide a positioning reference for a carrier structure. The clamping device includes: a base; a driving assembly disposed on the base; and one or more clamping members rotatably connected to the driving assembly. The clamping members clamp the carrier structure onto the first reference surface under the drive of the driving assembly.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the side of the clamping member away from the drive assembly has a clearance groove.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the clamping member includes: a first connecting portion rotatably connected to the drive assembly; two or more protrusions spaced apart on the side of the first connecting portion away from the drive assembly, the end of the protrusions away from the first connecting portion being used to clamp the carrier structure onto the first reference surface; wherein adjacent protrusions and the first connecting portion form a clearance groove.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the material of the protrusion includes an elastic material.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the protrusion is detachably connected to the first connecting portion.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the drive component includes: a connecting component rotatably connected to the clamping member; and a power component connected to the connecting component and used to drive the connecting component to move.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the power assembly has one or more first guide holes, and the clamping device further includes: one or more first guide rods, the first end of which is connected to the connecting assembly, the second end of which passes through the first guide hole, and / or the base has a second guide hole, and the clamping device further includes: one or more second guide rods, the first end of which is connected to the connecting assembly, and the second end of which passes through the second guide hole.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the power component includes: a power source for providing driving force; and a travel limit component connected to the power source for limiting the driving travel of the power source.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the clamping member has a first connecting hole, and the connecting assembly includes: a connector, a first side of which is connected to the power assembly, and a second side of which has two spaced-apart second connecting portions, each second connecting portion having a second connecting hole; the clamping member is inserted between the two second connecting portions; and a connecting shaft passes through the first connecting hole and the two second connecting holes.

[0014] Secondly, one embodiment of this application provides a positioning device, including: a positioning stage having a first reference surface, the first reference surface being used to provide a positioning reference for a carrier structure; and one or more clamping devices mentioned in any of the first aspects for clamping the carrier structure onto the first reference surface.

[0015] The clamping device provided in this embodiment has a clamping member rotatably connected to a driving assembly. The driving assembly drives the clamping member to move. When the clamping member contacts the carrier structure, the clamping member can automatically adjust its own angle to fit tightly against the carrier structure, avoiding bending or twisting of the carrier structure, and pressing the carrier structure against the first reference surface. This makes the carrier structure fit against the first reference surface, improves the positional accuracy of the carrier structure when it is regulated, reduces jamming, fragmentation, and edge chipping that occur when inserting or removing sheet materials, and reduces the fragmentation rate of sheet materials. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a clamping device provided in an embodiment of this application.

[0018] Figure 2 The diagram shown is a top view of a clamping device provided in an embodiment of this application.

[0019] Figure 3 The diagram shown is a rear view of a clamping device provided in an embodiment of this application.

[0020] Figure 4 The diagram shown is a left-side view of a clamping device provided in an embodiment of this application.

[0021] Figure 5 The diagram shown is a structural schematic of an application scenario for a positioning device provided in an embodiment of this application.

[0022] Figure 6 The image shown is an embodiment provided by this application. Figure 5 A top-down view diagram illustrating application scenarios suitable for positioning devices.

[0023] Figure 7 The diagram shown is a top view of a clamping device provided in another embodiment of this application.

[0024] Figure 8 The diagram shown is a left-side view of a clamping device provided in another embodiment of this application.

[0025] Figure 9 The image shown is a top view of a clamping component provided in an embodiment of this application.

[0026] Figure 10 The diagram shown is a top view of a portion of the second connection part provided in an embodiment of this application.

[0027] Figure label:

[0028] 1. Positioning device; 10. Clamping device; 11. Base; 110. Base bottom plate; 111. Base top plate; 112. Base side plate; 113. Second guide hole; 12. Drive assembly; 120. Connecting assembly; 1200. Connector; 1201. Connecting shaft; 1202. First side of connector; 1203. Second side of connector; 1204. Second connecting part; 1205. Baffle; 1206. Second connecting hole; 121. Power assembly; 122. First guide hole; 123. Power source; 124. Stroke limit assembly ; 13. Clamping component; 130. Clamping surface; 131. Clearance groove; 132. First connecting part; 133. Protrusion; 134. First connecting hole; 14. First guide rod; 140. First end of the first guide rod; 141. Second end of the first guide rod; 15. Second guide rod; 150. First end of the second guide rod; 151. Second end of the second guide rod; 20. First reference surface; 21. Second reference surface; 22. Third reference surface; 23. Positioning platform; 3. Carrier structure; 30. Top plate; 31. Bottom plate; 32. Support rod. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] Figure 1 The diagram shown is a structural schematic of a clamping device provided in an embodiment of this application. Figure 2 The diagram shown is a top view of a clamping device provided in an embodiment of this application. Figure 3 The diagram shown is a rear view of a clamping device provided in an embodiment of this application. Figure 4 The diagram shown is a left-side view of a clamping device provided in an embodiment of this application. Figure 5 The diagram shown is a structural schematic of an application scenario for a positioning device provided in an embodiment of this application. Figure 6 The image shown is an embodiment provided by this application. Figure 5 A top-down view diagram illustrating application scenarios suitable for positioning devices.

[0031] like Figures 1 to 6 As shown, the clamping device 10 is applied to the positioning device 1. The positioning device 1 has a first reference surface 20. The first reference surface 20 is used to provide a positioning reference for the carrier structure 3.

[0032] The clamping device 10 includes: a base 11, a drive assembly 12, and one or more clamping elements 13.

[0033] The drive assembly 12 is mounted on the base 11. One or more clamping members 13 are rotatably connected to the drive assembly 12. The clamping members 13 are able to press the carrier structure 3 against the first reference surface 20 under the drive of the drive assembly 12.

[0034] For example, the carrier structure 3 can be any structure capable of supporting sheet-like materials. The carrier structure 3 may include at least one of a basket or boat structure. The sheet-like material may include silicon wafers, solar cells, wafers, etc.

[0035] Specifically, the positioning device 1 may include any device capable of shaping any side of the carrier structure 3. Before inserting or removing the sheet material into the carrier structure 3, the positioning device 1 shapes and presses the carrier structure 3 against the first reference surface 20, thereby achieving the positioning of the carrier structure 3.

[0036] Exemplarily, the shape of the clamping member 13 may include a plate shape, a rod shape, an arc shape, etc. The shape of the end of the clamping member 13 used to clamp the carrier structure 3 can be set according to the shape of the carrier structure 3. Exemplarily, the clamping member 13 can be rotatably connected to the drive assembly 12 through a ball joint structure. Exemplarily, the rotation angle of the clamping member 13 relative to the drive assembly 12 can be greater than or equal to 0° and less than or equal to 5°.

[0037] Exemplarily, the clamping member 13 has a clamping surface 130. The clamping surface 130 is for contacting the substrate structure 3. The clamping member 13 clamps the substrate structure 3 onto the first reference surface 20 via the clamping surface 130. Exemplarily, the clamping surface 130 may be adapted to its contact surface with the substrate structure 3.

[0038] For example, multiple clamping elements 13 can be rotatably connected to the drive assembly 12. The structure of each clamping element 13 can be different. This allows for better fit of the carrier structure 3 after the multiple clamping elements 13 come into contact with it.

[0039] Exemplarily, the drive assembly 12 may include any structure capable of driving the clamping member 13 to move. Exemplarily, the drive assembly 12 may include one or more combinations of the following drive structures: gear set, sprocket chain, lead screw guide, cylinder, motor, and crank slider. This embodiment does not specifically limit the structure of the drive assembly 12.

[0040] Exemplarily, the drive assembly 12 is used to drive the clamping member 13 to move along a first direction to press the clamping member 13 against the carrier structure 3 on the first reference plane 20. Exemplarily, the first direction is perpendicular to the first reference plane 20. This arrangement simplifies the structure of the clamping device 10.

[0041] The carrier structure 3 is a three-dimensional structure, typically assembled or welded from multiple parts. Due to factors such as the shape, machining accuracy, installation accuracy, and welding accuracy of the carrier structure 3, the contact surfaces of the carrier structure 3 with the clamping member 13 and with the first reference surface 20 are not necessarily parallel. For example, as... Figure 5 and Figure 6 As shown, the carrier structure 3 includes a top plate 30, a bottom plate 31, and multiple support rods 32 connecting the top plate 30 and the bottom plate 31. The support rods 32 have multiple toothed grooves ( Figure 5 and Figure 6 (Not shown in the diagram). Sheet material is supported by multiple toothed grooves. The clamping member 13 clamps the top plate 30, causing the bottom plate 31 to fit against the first reference surface 20. Because the top plate 30 and the bottom plate 31 are far apart, installation accuracy is difficult to guarantee; therefore, they are not necessarily parallel.

[0042] Existing positioning devices typically drive a flat plate parallel to the first reference surface 20 to press the carrier structure 3. This may cause the carrier structure 3 to bend or twist, causing the contact surface of the carrier structure 3 with the first reference surface 20 (such as the bottom surface of the base plate 31) to lift up. This makes it difficult for the plane of the carrier structure 3 facing the first reference surface 20 to fit with the first reference surface 20, resulting in low positional accuracy of the carrier structure 3 on the positioning stage, or even damage to the carrier structure 3.

[0043] The clamping device 10 provided in this embodiment rotatably connects the clamping member 13 to the driving component 12. The driving component 12 drives the clamping member 13 to move. When the clamping member 13 contacts the carrier structure 3, the clamping member 13 can automatically adjust its own angle to fit tightly against the carrier structure 3, avoid bending or twisting the carrier structure 3, and press the carrier structure 3 against the first reference surface 20, so that the carrier structure 3 fits against the first reference surface 20. This improves the positional accuracy of the carrier structure 3 when it is regulated, reduces the phenomena of jamming, fragmentation and edge chipping that occur when inserting and unloading sheet materials, and reduces the fragmentation rate of sheet materials.

[0044] In some embodiments, the clamping member 13 has a clearance groove 131 on the side away from the drive assembly 12.

[0045] Specifically, the side of the clamping member 13 away from the drive assembly 12 is used to clamp the carrier structure 3 onto the first reference surface. Since there may be other structures on the side of the carrier structure 3 facing the clamping member 13, or structures such as weld marks on the side of the carrier structure 3 facing the clamping member 13 that affect the clamping member 13's fit against the carrier structure 3, the clearance groove 131 can effectively avoid structures that affect the clamping member 13's fit against the carrier structure 3, allowing the clamping member 13 to better clamp the carrier structure 3 onto the first reference surface 20.

[0046] For example, the relief groove 131 can be a recessed groove with a rectangular cross-section. The structure that affects the contact of the clamping member 13 with the carrier structure 3 can be accommodated in the relief groove 131.

[0047] For example, the shape of the clearance groove 131 can be set according to the specific structure of the carrier structure 3, and this embodiment does not specifically limit it.

[0048] In some embodiments, such as Figures 1 to 6 As shown, the clamping member 13 includes: a first connecting portion 132 and two or more protrusions 133.

[0049] The first connecting part 132 is rotatably connected to the drive assembly 12.

[0050] Two or more protrusions 133 are spaced apart on the side of the first connecting portion 132 away from the drive assembly 12. The end of the protrusion 133 away from the first connecting portion 132 is used to press the carrier structure 3 against the first reference surface 20. Adjacent protrusions 133 and the first connecting portion 132 form a relief groove 131.

[0051] Exemplarily, the clamping member 13 can be integrally molded. Exemplarily, the first connecting portion 132 and the two or more protrusions 133 can be fixedly connected. Exemplarily, the first connecting portion 132 and the two or more protrusions 133 can be detachably connected, and the first connecting portion 132 and the two or more protrusions 133 are assembled to form the clamping member 133.

[0052] For example, the end of the protrusion 133 that is away from the first connecting portion 132 is used for the aforementioned pressing surface 130.

[0053] For example, the carrier structure 3 has multiple reference platforms (not shown) on the side facing the clamping member 13. The reference platforms have high machining accuracy. The parallelism between the plane of the reference platform for contacting the clamping member 13 and the plane of the carrier structure 3 for contacting the first reference surface 20 is high. The end of the protrusion 133 away from the first connecting portion 132 is used to press the carrier structure 3 against the first reference surface 20 by pressing the reference platforms. This arrangement can reduce the rotation angle of the clamping member 13, improve the positioning accuracy of the carrier structure 3, and improve the driving efficiency of the drive assembly 12.

[0054] The clamping device 10 provided in this embodiment realizes the rotatable connection between the clamping member 13 and the driving assembly 12 through the first connecting part 132, and is provided with two or more protrusions 133, which can more accurately avoid the structure of the carrier structure 3 that affects the clamping member 13 to fit the carrier structure 3, and can also accurately selectively fit the plane with high processing precision on the carrier structure 3 or fit the part of the carrier structure 3 that is not easily deformed, thereby improving the positioning accuracy of the carrier structure 3.

[0055] In some embodiments, the material of the protrusion 133 may include an elastic material. Since the carrier structure 3 is generally brittle, this arrangement can protect the carrier structure 3 from being crushed when the clamping member 13 contacts or clamps the carrier structure 3.

[0056] For example, the protrusion 133 can be detachably connected to the first connecting portion 132. Since the protrusion 133 needs to frequently contact and separate from the carrier structure 3, it is prone to damage. This arrangement facilitates replacement of the protrusion 133 and reduces costs. For example, the protrusion 133 can be screwed to the first connecting portion 132. The protrusion 133 can be made entirely of an elastic material.

[0057] For example, the elastic material may include rubber or polyetheretherketone (PEEK). The elastic modulus of the elastic material can be set according to the mechanical properties of the carrier structure 3.

[0058] In some embodiments, such as Figures 1 to 4 As shown, the drive assembly 12 includes a connection assembly 120 and a power assembly 121.

[0059] The connecting assembly 120 is rotatably connected to the clamping member 13. The power assembly 121 is connected to the connecting assembly 120 and is used to drive the connecting assembly 120 to move.

[0060] For example, the connecting assembly 120 may include a universal joint, a shaft and bushing, a rolling bearing, etc. The connecting assembly 120 can be configured according to actual needs.

[0061] For example, the power assembly 121 may include one or more of the following drive structures: gear set, sprocket chain, lead screw guide, cylinder, motor and crank slider.

[0062] The clamping device 10 provided in this embodiment has a clamping member 13 that is rotatably connected to the power component 121 through a connecting component 120. This makes it easier to assemble and disassemble the clamping member 13 and the power component 121, facilitating daily maintenance and replacement of damaged parts.

[0063] In some embodiments, such as Figures 1 to 4 As shown, the power assembly 121 has one or more first guide holes 122.

[0064] The clamping device 10 further includes one or more first guide rods 14. The first end 140 of the first guide rod is connected to the connecting assembly 120. The second end 141 of the first guide rod passes through the first guide hole 122.

[0065] Specifically, the first guide rod 14 is slidably connected to the power assembly 121 through the first guide hole 122. By providing the first guide rod 14, the power assembly 121 can easily drive the clamping member 13 to move along the extension direction of the first guide rod 14, thereby improving the movement accuracy of the clamping member 13 during the movement process. In addition, the first guide rod 14 being provided on the power assembly 121 can also make the structure of the clamping device 10 more compact.

[0066] For example, the first guide rod 14 extends in a direction parallel to a first direction. For example, the power assembly 121 may include a cylinder with a guide rod or a three-axis cylinder.

[0067] Figure 7 The diagram shown is a top view of a clamping device provided in another embodiment of this application. Figure 8 The diagram shown is a left-side view of a clamping device provided in another embodiment of this application.

[0068] In some embodiments, such as Figure 7 and Figure 8 As shown, the base 11 has a second guide hole 113.

[0069] The clamping device 10 further includes one or more second guide rods 15. The first end 150 of the second guide rod is connected to the connecting assembly 120, and the second end 151 of the second guide rod passes through the second guide hole 113.

[0070] Specifically, the second guide rod 15 is slidably connected to the base 11 through the second guide hole 113. By providing the second guide rod 15, the movement accuracy of the clamping member 13 during movement can be improved. For example, the extension direction of the second guide rod 15 is parallel to the first direction.

[0071] The guide rods can be mounted on the base 11 or on the power assembly 121. The specific position and number of the guide rods can be set according to actual needs.

[0072] In some embodiments, such as Figures 1 to 4 As shown, the base 11 includes: a base bottom plate 110, a base top plate 111, and one or more base side plates 112 connecting the base bottom plate 110 and the base top plate 111.

[0073] Exemplarily, the drive assembly 12 is disposed on the base top plate 111. Exemplarily, the base bottom plate 110 can be connected to the positioning stage described below. The clamping device 10 can be adapted to clamp carrier structures 3 of different sizes by changing the height of the base side plate 112.

[0074] In some embodiments, the power assembly 121 includes a power source 123 and a travel limit assembly 124.

[0075] The power source 123 is used to provide driving force. The travel limit assembly 124 is connected to the power source 123 and is used to limit the driving travel of the power source 123.

[0076] For example, the power source 123 may include one or more of the following drive structures: gear set, sprocket chain, lead screw guide, cylinder, motor and crank slider.

[0077] For example, the travel limit assembly 124 may include a position sensor, a limit switch, a pneumatic valve, etc.

[0078] The clamping device 10 provided in this embodiment limits the driving stroke of the power source 123 by setting the stroke limit component 124, so as to avoid the driving stroke of the power source 123 being too large, causing the clamping member 13 to be displaced too much, and causing the carrier structure 3 to be deformed or damaged.

[0079] Figure 9 The image shown is a top view of a clamping component provided in an embodiment of this application. Figure 10 The diagram shown is a top view of a portion of the second connection part provided in an embodiment of this application.

[0080] In some embodiments, such as Figures 1 to 4 , Figure 9 and Figure 10 As shown, the clamping member 13 has a first connecting hole 134.

[0081] The connecting assembly 120 includes a connector 1200 and a connecting shaft 1201.

[0082] The first side 1202 of the connector is connected to the power assembly 121. The second side 1203 of the connector has two spaced-apart second connecting portions 1204. Each second connecting portion 1204 has a second connecting hole 1206. A clamping member 13 is inserted between the two second connecting portions 1204.

[0083] The connecting shaft 1201 passes through the first connecting hole 134 and two second connecting holes 1206.

[0084] For example, two second connecting portions 1204 are spaced apart along the extension direction of the length of the connecting shaft 1201. For example, the extension direction of the length of the connecting shaft 1201 is perpendicular to the first direction.

[0085] Exemplarily, the length of the connecting shaft 1201 extends along a second direction. The second direction is perpendicular to the first direction. Exemplarily, the connecting assembly 120 also includes two baffles 1205. The two baffles 1205 are disposed on the connecting shaft 1201 and located on opposite sides of the connector 1200 along the second direction. Exemplarily, the two baffles 1205 are screwed to the connecting shaft 1201. By providing the two baffles 1205, the connecting shaft 1201 can be prevented from falling out of the second connecting hole 1206.

[0086] For example, the clamping member 13 is elongated. The length of the clamping member 13 extends in a direction parallel to the length of the second connecting portion 1204.

[0087] The clamping device 10 provided in this embodiment provides two second connecting parts 1204 spaced apart on the second side 1203 of the connector. The clamping member 13 is inserted between the two second connecting parts 1204. The two second connecting parts 1204 can provide a limiting and guiding effect on the rotation of the clamping member 13.

[0088] The clamping device 10 embodiment of this application has been described in detail above. The positioning device 1 embodiment of this application will be described in detail below. It should be understood that the description of the clamping device 10 embodiment corresponds to the description of the positioning device 1 embodiment. Therefore, any parts not described in detail can be referred to the above description of the clamping device 10 embodiment.

[0089] like Figure 5 and Figure 6 As shown, the positioning device 1 includes: a positioning platform 23 and one or more of the clamping devices 10 mentioned in any of the above embodiments.

[0090] The positioning stage 23 has a first reference surface 20. The first reference surface 20 is used to provide a positioning reference for the substrate structure 3. The clamping device 10 is used to clamp the substrate structure 3 onto the first reference surface 20.

[0091] Exemplarily, the positioning stage 23 has a first reference surface 20, a second reference surface 21, and a third reference surface 22. The first reference surface 20, the second reference surface 21, and the third reference surface 22 are perpendicular to each other. Both the second reference surface 21 and the third reference surface 22 are used to provide positioning references for the carrier structure 3. Exemplarily, the extension length of the carrier structure 3 in the direction perpendicular to the first reference surface 20 is greater than the extension length of the carrier structure 3 in the direction perpendicular to the second reference surface 21 and the extension length of the carrier structure 3 in the direction perpendicular to the third reference surface 22. The clamping device 10 is disposed opposite to the first reference surface 20. Since the extension length of the carrier structure 3 in the direction perpendicular to the first reference surface 20 is the largest, the installation accuracy or welding accuracy of the carrier structure 3 in the direction perpendicular to the first reference surface 20 is relatively low. This arrangement allows the clamping device 10 to better clamp the carrier structure 3 onto the first reference surface 20.

[0092] For example, the positioning device 1 also includes other clamping devices to clamp the carrier structure 3 against the second reference surface 21 and the third reference surface 22. Other clamping devices may include cylinders, lead screws, etc.

[0093] The positioning device 1 provided in this embodiment rotatably connects the clamping member 13 to the driving component 12. The driving component 12 drives the clamping member 13 to move. When the clamping member 13 contacts the carrier structure, the clamping member 13 can automatically adjust its own angle to fit tightly against the carrier structure 3, avoid bending or twisting the carrier structure 3, and press the carrier structure 3 against the first reference surface 20, so that the carrier structure 3 fits against the first reference surface 20. This improves the positional accuracy of the carrier structure 3 when it is regulated, reduces the phenomena of jamming, fragmentation and edge chipping that occur when inserting and unloading sheet materials, and reduces the fragmentation rate of sheet materials.

[0094] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0095] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0096] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0097] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0098] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A clamping device applied to a positioning equipment, the positioning equipment having a first reference surface, the first reference surface being used to provide a positioning reference for a carrier structure, characterized in that... The clamping device includes: Base; The driving component is disposed on the base; One or more clamping members are rotatably connected to the drive assembly, and the clamping members press the carrier structure against the first reference surface under the drive of the drive assembly.

2. The clamping device according to claim 1, characterized in that, The clamping member has a clearance groove on the side away from the drive assembly.

3. The clamping device according to claim 2, characterized in that, The clamping element includes: The first connecting part is rotatably connected to the drive assembly; Two or more protrusions are spaced apart on the side of the first connecting portion away from the driving component, and the end of the protrusion away from the first connecting portion is used to press the carrier structure against the first reference surface. The adjacent protrusions and the first connecting portion form the clearance groove.

4. The clamping device according to claim 3, characterized in that, The material of the protrusion includes an elastic material.

5. The clamping device according to claim 3, characterized in that, The protrusion is detachably connected to the first connecting part.

6. The clamping device according to any one of claims 1 to 5, characterized in that, The driving component includes: A connecting component is rotatably connected to the clamping member; A power component, connected to the connecting component, is used to drive the connecting component to move.

7. The clamping device according to claim 6, characterized in that, The power assembly has one or more first guide holes, and the clamping device further includes: One or more first guide rods, the first end of the first guide rods being connected to the connecting assembly, the second end of the first guide rods passing through the first guide hole, and / or The base has a second guide hole, and the clamping device further includes: One or more second guide rods, the first end of the second guide rods being connected to the connecting assembly, and the second end of the second guide rods passing through the second guide hole.

8. The clamping device according to claim 6, characterized in that, The power assembly includes: A power source, used to provide driving force; A travel limit component is connected to the power source and is used to limit the drive travel of the power source.

9. The clamping device according to claim 6, characterized in that, The clamping member has a first connecting hole. The connection component includes: A connector, the first side of which is connected to the power assembly, and the second side of which has two spaced-apart second connecting portions, each having a second connecting hole; a clamping member is inserted between the two second connecting portions. The connecting shaft passes through the first connecting hole and the two second connecting holes.

10. A positioning device, characterized in that, include: A positioning stage, the positioning stage having a first reference surface, the first reference surface being used to provide a positioning reference for the carrier structure; One or more clamping devices as described in any one of claims 1-9 are used to clamp the carrier structure onto the first reference surface.

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