Disilane preparation device

Abstract

The utility model relates to the technical field of chemical equipment, and discloses a disilane preparation device, which comprises a mounting plate, the supporting block is arranged on the mounting plate; the clamping sleeve is fixedly arranged above the supporting block; the reaction kettle is fixedly arranged in the jacket; the feeding hole is formed in the reaction kettle, and a feeding pipe is fixedly arranged in the feeding hole; the outlet is formed in the reaction kettle and is formed in one side of the feeding hole, and a discharging pipe is fixedly connected to the outlet; the gas inlet hole is formed in the reaction kettle, and the output end of a gas compressor is fixedly connected to the interior of the gas inlet hole; the stirring mechanism is arranged in the reaction kettle; the slag discharge pipe is communicated with the jacket and the reaction kettle, and the slag discharge pipe is arranged at the bottom of the reaction kettle; the rectifying tower is communicated with the discharging pipe, the top of the rectifying tower is connected with a condenser, the bottom of the rectifying tower is connected with a reboiler, and the rectifying tower is communicated with a storage tank. The disilane preparation device disclosed by the utility model is used for solving the problems of the existing equipment.

Description

Technical Field

[0001] This utility model belongs to the field of chemical equipment technology, and in particular relates to an apparatus for preparing silane. Background Technology

[0002] Silane gas is an important raw material in the semiconductor and photovoltaic industries, mainly used for depositing various silicon-containing thin films, especially amorphous and polycrystalline silicon films. Currently, the most widely used silane gas is silane, but silane has a high decomposition temperature and slow deposition rate for depositing polycrystalline silicon films, which limits its application to some extent, such as direct deposition of polycrystalline silicon films on glass substrates. Higher-order silanes have lower decomposition temperatures, faster deposition rates, and the deposited films have more regular lattice arrangements, which is more conducive to the growth of large-grain polycrystalline silicon films. Existing production equipment yields low amounts of silane (10-20%), all of which are gas-solid reactions. These processes involve complex equipment with high requirements, are difficult to operate, and generally have high reaction temperatures, resulting in high energy consumption.

[0003] Chinese utility model patent with publication number CN205709892U discloses a device for producing silane. By installing a stirrer inside the reactor and a slag discharge port at the bottom of the reactor with an angled arrangement, the device can improve the reaction efficiency of silane, save reaction time, reduce production costs, reduce equipment corrosion, and enable continuous and stable production. However, this device also has some other problems. During the production of silane, the internal environment of the reactor is not limited, which results in insufficient silane production rate. Utility Model Content

[0004] The purpose of this invention is to provide an apparatus for preparing silane to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the following technical solution is provided: an apparatus for preparing silane, comprising:

[0006] Mounting plate;

[0007] Support blocks are disposed on both sides of the upper surface of the mounting plate;

[0008] A sleeve is fixedly installed above the support block;

[0009] The reactor is fixedly disposed inside the jacket;

[0010] The feed inlet is located on the reactor vessel, and a feed pipe is fixedly installed inside the feed inlet;

[0011] An outlet is provided on the reactor vessel and located on one side of the inlet, and a discharge pipe is fixedly connected to the outlet.

[0012] An air inlet hole is arranged on the reactor, and an output end of a gas compressor is fixedly connected to the inside of the air inlet hole;

[0013] A stirring mechanism is arranged in the inside of the reactor;

[0014] A slag discharge pipe is arranged in the bottom of the reactor and communicates with the jacket and the reactor;

[0015] A rectifying tower is arranged in communication with the discharge pipe, and a condenser is connected to the top of the rectifying tower, a reboiler is connected to the bottom of the rectifying tower, and a storage tank is arranged in communication with the rectifying tower.

[0016] In the above technical solution, further, one end of the jacket is provided with a connecting port, a plurality of heat pipes are fixedly connected to the inside of the jacket, and the heat pipes are electrically connected to the connecting port.

[0017] In any of the above technical solutions, further, the stirring mechanism comprises:

[0018] A vertical plate is fixedly arranged on the mounting plate;

[0019] An electric motor is fixedly arranged above the vertical plate;

[0020] A rotating shaft is arranged in the inside of the reactor and penetrates the jacket;

[0021] An auger blade is fixedly connected to the rotating shaft, and the side surface of the auger blade is slidably attached to the inner wall of the reactor.

[0022] In any of the above technical solutions, further, a valve is arranged on the slag discharge pipe, a sealing plug is arranged on the feed pipe, and an electromagnetic valve is arranged between the discharge pipe and the rectifying tower.

[0023] In any of the above technical solutions, further, two auger blades are arranged, and the two auger blades are symmetrically arranged on the rotating shaft.

[0024] In any of the above technical solutions, further, a pressure detection device and a temperature detection device are arranged on the reactor.

[0025] The beneficial effects of the present application are as follows:

[0026] 1. The utility model discloses a reaction kettle is provided with the feed pipe and the output shaft of gas compressor on the reaction kettle, and the feed pipe can feed the raw material of generating ethylsilane into the inside of the reaction kettle, and the discharge pipe is also seted up on the reaction kettle, and the other end of the discharge pipe is connected with rectifying tower, and the rectifying tower can be provided with a plurality of and be connected together in series, and the condenser is connected at the top of rectifying tower, and the reboiler is connected at the bottom of rectifying tower, and the storage tank is connected with the side of rectifying tower, and the raw material is reacted in the inside of the reaction kettle, and the product after reaction can be discharged from the discharge pipe to the inside of rectifying tower through the discharge pipe, and through distillation, the different substances in the product can be refined, and finally different products can be divided into the inside of different storage tanks. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 It is the structure schematic diagram of the utility model;

[0028] Figure 2 It is the structure schematic diagram of the utility model reaction kettle;

[0029] Figure 3 It is the structure section schematic diagram of the utility model reaction kettle;

[0030] Figure 4 It is the structure section schematic diagram of the utility model reaction kettle;

[0031] Figure 5 It is the structure section schematic diagram of the utility model reaction kettle;

[0032] The figure mark explains: 100, mounting plate; 110, support block; 120, jacket; 121, connecting port; 122, heat pipe; 130, reaction kettle; 140, feed pipe; 150, discharge pipe; 160, gas compressor; 170, stirring mechanism; 171, vertical plate; 172, motor; 173, rotating shaft; 174, auger blade; 175, through -opening; 180, slag discharge pipe; 200, rectifying tower; 210, condenser; 220, reboiler. DETAILED DESCRIPTION

[0033] The technical scheme in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art belong to the scope of protection of the present application.

[0034] In the description of this application, it should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. For ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0035] Example 1:

[0036] like Figures 1-5 As shown, this embodiment provides an apparatus for preparing silane, comprising:

[0037] Mounting plate 100;

[0038] Support blocks 110 are disposed on both sides of the upper surface of the mounting plate 100;

[0039] The sleeve 120 is fixedly installed above the support block 110;

[0040] The reactor 130 is fixedly installed inside the jacket 120;

[0041] The feed inlet is located on the reactor 130, and a feed pipe 140 is fixedly installed inside the feed inlet;

[0042] The outlet is located on the reactor 130 and is situated on one side of the inlet. A discharge pipe 150 is fixedly connected to the outlet.

[0043] An air inlet is provided on the reactor 130, and the output end of a gas compressor 160 is fixedly connected inside the air inlet.

[0044] A stirring mechanism 170 is disposed inside the reactor 130;

[0045] The slag discharge pipe 180 connects the jacket 120 and the reactor 130, and the slag discharge pipe 180 is located at the bottom of the reactor 130;

[0046] The distillation column 200 is connected to the discharge pipe 150. The top of the distillation column 200 is connected to a condenser 210, the bottom of the distillation column 200 is connected to a reboiler 220, and the distillation column 200 is connected to a storage tank.

[0047] In the technical solution, in order to change different reaction conditions according to different raw materials when producing ethylsilane, two symmetrical supporting blocks 110 are fixedly arranged on the upper surface of the mounting plate 100, a jacket 120 is fixedly arranged on the supporting block 110, the reaction kettle 130 is limited in the jacket 120, the feeding pipe 140 is arranged on the feeding port, the discharge pipe 150 is fixedly arranged on the discharge port, the raw materials for producing ethylsilane can be injected into the reaction kettle 130 through the feeding pipe 140, the gas compressor 160 is fixedly connected to the gas inlet hole, the outside air can be injected into the reaction kettle 130 through the gas compressor 160, so that the pressure in the reaction kettle 130 is increased, so that the gas compressor 160 can be controlled when the reaction conditions of the raw materials are relatively high pressure, and the gas pressure in the reaction kettle 130 reaches the reaction condition, the stirring mechanism 170 is arranged in the reaction kettle 130, the raw materials in the reaction kettle 130 can be stirred by the stirring mechanism 170, so that the raw materials are fully reacted, the reaction rate and the production rate are increased, the other end of the discharge pipe 150 is communicated with the rectifying tower 200, the rectifying tower 200 is arranged in multiple and connected in series, the reaction product can be discharged into the rectifying tower 200 through the discharge pipe 150, the condenser 210 is fixedly connected to the top of the rectifying tower 200, the reboiler 220 is connected to the bottom of the rectifying tower 200, the product in the rectifying tower 200 can be continuously evaporated through the reboiler 220, the steam can be vaporized through the condenser 210, so that the different boiling point products are separated, the storage tank (not shown in the figure) is connected to one side of each rectifying tower 200, the products with different boiling points and condensation points are finely divided, so that each storage tank contains the corresponding product, the silane product manufacturing process in the application is the same as the process disclosed in CN205709892U, and the device can also be suitable for use of different raw materials, thereby increasing the use range of the device.

[0048] Embodiment 2:

[0049] The embodiment provides an ethylsilane preparation device, in addition to the technical solutions of the above-mentioned embodiments, further having the following technical features.

[0050] As shown in Figures 1-5 In the embodiment, one end of the jacket 120 is provided with a connecting port 121, a plurality of heat pipes 122 are fixedly connected in the jacket 120, the heat pipes 122 are electrically connected to the connecting port 121, and the connecting port 121 can be electrically connected to a heater or a refrigerator.

[0051] In the technical scheme, in order to change the reaction temperature inside the reaction kettle 130, a connecting port 121 is arranged on one side of the jacket 120, a plurality of heat pipes 122 are arranged in the jacket 120, one end of the heat pipe 122 is communicated to the position of the connecting port 121, a heater or a refrigerating device is connected to the connecting port 121, so that the temperature inside the heat pipe 122 can be changed by controlling the heater or the refrigerating device, and the heat can be transferred to the jacket 120 through the interlayer, the jacket 120 is made of a material with good conduction effect, so that the energy of the heat pipe 122 can be transferred to the reaction kettle 130, the reaction environment inside the reaction kettle 130 is changed, the reaction conditions between raw materials are adjusted to the most suitable temperature, and the yield of ethylsilane is increased.

[0052] Embodiment 3:

[0053] The embodiment provides an ethylsilane preparation device, in addition to comprising the technical scheme of the above embodiment, further having the following technical features.

[0054] As shown in Figures 1-5 In the embodiment, the stirring mechanism 170 comprises:

[0055] The vertical plate 171 is fixedly arranged on the mounting plate 100;

[0056] The motor 172 is fixedly arranged above the vertical plate 171;

[0057] The rotating shaft 173 is arranged in the inside of the reaction kettle 130 and penetrates the jacket 120;

[0058] The auger blade 174 is fixedly connected to the rotating shaft 173, and the side surface of the auger blade 174 is slidably attached to the inner wall of the reaction kettle 130.

[0059] In the technical scheme, in order to accelerate the reaction rate inside the reaction kettle 130, the stirring mechanism 170 is arranged, the vertical plate 171 of the stirring mechanism 170 is fixedly arranged on the mounting plate 100, the motor 172 is fixed on the vertical plate 171, the output shaft of the motor 172 is fixedly connected with the rotating shaft 173, the rotating shaft 173 penetrates the jacket 120 and the reaction kettle 130 and is rotatably arranged in the inside of the reaction kettle 130, the auger blade 174 is fixedly arranged on the rotating shaft 173, the auger blade 174 can stir the raw materials inside the reaction kettle 130, so that the raw materials can be fully contacted, the production of the product is accelerated, heat dissipation is performed, local temperature is prevented from being too high, and the production rate of ethylsilane is accelerated.

[0060] Embodiment 4:

[0061] The embodiment provides a disilane preparation device, and in addition to comprising the technical scheme of the above embodiment, has the following technical features.

[0062] As shown in Figures 1-5 In the embodiment, a valve is arranged on the slag discharge pipe 180, a sealing plug is arranged on the feeding pipe 140, and a solenoid valve is arranged between the discharging pipe 150 and the rectifying tower 200.

[0063] In the technical scheme, in order to conveniently adjust the air pressure in the reaction kettle 130, a valve is arranged on the slag discharge pipe 180 and the feeding pipe 140, the slag discharge pipe 180 and the feeding pipe 140 can be sealed by the valve, the sealing plug is fixed on the top of the feeding pipe 140, the sealing plug can be opened before the reaction, after the appropriate raw materials are put into the feeding pipe 140, the sealing plug is closed, so that a closed environment is formed in the reaction kettle 130, in order to prevent the air pressure in the reaction kettle 130 from being reduced due to the product released from the discharging pipe 150, a solenoid valve is arranged on the connecting pipe connected between the discharging pipe 150 and the rectifying tower 200, so that the flow of the disilane and other gases released from the discharging pipe 150 can be controlled, the air compressor 160 is used to keep the air pressure in the reaction kettle 130 balanced until the reaction is completed, after the reaction is completed, the valve on the slag discharge pipe 180 is opened, the precipitate after the reaction can be discharged from the reaction kettle 130, and the inside of the reaction kettle 130 is kept clean.

[0064] Embodiment 5

[0065] The embodiment provides a disilane preparation device, and in addition to comprising the technical scheme of the above embodiment, has the following technical features.

[0066] As shown in Figures 3-5 In the embodiment, two auger blades 174 are arranged, and the two auger blades 174 are symmetrically arranged on the rotating shaft 173.

[0067] In the technical solution, in order to make the stirring mechanism 170 more evenly stir the raw materials in the reaction kettle 130, the auger blades 174 are arranged in two and symmetrically arranged on the rotating shaft 173, so that the rotating shaft 173 can rotate in an indefinite direction under the rotation of the motor 172, so that the two auger blades 174 rotate in the same direction. Because the transmission directions of the two auger blades 174 are opposite, the auger blades 174 on both sides can transport the raw materials on both sides of the reaction kettle 130 to the middle of the reaction kettle 130 under the rotation of the rotating shaft 173, so that all the raw materials can be fully reacted, and the auger blades are provided with a plurality of through holes 175, so that a part of the raw materials can be drilled out of the through holes while stirring the raw materials, further increasing the stirring of the raw materials.

[0068] Embodiment 6:

[0069] The embodiment provides an ethylsilane preparation device, in addition to comprising the technical solutions of the above embodiments, further having the following technical features.

[0070] As shown in Figures 1-5 In the embodiment, the reaction kettle 130 is provided with a pressure detection device and a temperature detection device.

[0071] In the technical solution, in order to be able to monitor the temperature and gas pressure in the reaction kettle 130 in real time, the reaction kettle 130 is provided with a gas pressure detection device (not shown in the figure) and a temperature detection device (not shown in the figure). The gas pressure detection device and the temperature detection device can monitor the state of the gas pressure and the temperature in the reaction kettle 130 in real time, so as to control the temperature of the jacket 120 and the gas in and out of the gas compressor 160 according to the needs, thereby facilitating the control of the reaction environment in the reaction kettle 130 by the staff.

[0072] The embodiments of the present application are described above in combination with the drawings, and in the case of no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other, and the present application is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative, not restrictive, and those skilled in the art can make many forms under the inspiration of the present application without departing from the scope of the present application and the protection scope of the claims.

Claims

1. An ethylsilane production apparatus characterized by comprising: Include: Mounting plate (100); Support block (110), configured on both sides of the upper surface of the mounting plate (100); Jacket (120), fixedly arranged above the support block (110); Reaction kettle (130), fixedly arranged inside the jacket (120); Feed inlet, opened on the reaction kettle (130), and a feed pipe (140) is fixedly arranged inside the feed inlet; Outlet, opened on the reaction kettle (130), and arranged on one side of the feed inlet, the outlet is fixedly connected with the discharge pipe (150); Air inlet, opened on the reaction kettle (130), and the output end of the gas compressor (160) is fixedly connected inside the air inlet; Stirring mechanism (170), arranged inside the reaction kettle (130); Slag discharge pipe (180), communicating the jacket (120) and the reaction kettle (130), and the slag discharge pipe (180) is arranged at the bottom of the reaction kettle (130); Rectification tower (200), communicating with the discharge pipe (150), the top of the rectification tower (200) is connected with the condenser (210), the bottom of the rectification tower (200) is connected with the reboiler (220), and the rectification tower (200) is communicated with the storage tank.

2. A device for preparing di-silane according to claim 1, characterized in that: One end of the jacket (120) is provided with a connecting port (121), a plurality of heat pipes (122) are fixedly connected inside the jacket (120), the heat pipes (122) are electrically connected to the connecting port (121), and the connecting port (121) can be electrically connected to a heater or a refrigerator.

3. A device for preparing di-silane according to claim 1, characterized in that: The stirring mechanism (170) comprises: Vertical plate (171), fixedly arranged on the mounting plate (100); Motor (172), fixedly arranged above the vertical plate (171); Rotary shaft (173), penetrating through the jacket (120) and arranged inside the reaction kettle (130); Auger blade (174), fixedly connected to the rotary shaft (173), and the side surface of the auger blade (174) slides with the inner wall of the reaction kettle (130).

4. A device for preparing di-silane according to claim 1, characterized in that: The slag discharge pipe (180) is provided with a valve, the feed pipe (140) is provided with a sealing plug, and the discharge pipe (150) and the rectification tower (200) are also provided with a solenoid valve.

5. A device for preparing di-silane according to claim 3, characterized in that: The auger blade (174) is provided with two, and the two auger blades (174) are symmetrically arranged on the rotary shaft (173).

6. A device for preparing di-silane as claimed in claim 1, wherein: The reaction kettle (130) is provided with a pressure detection device and a temperature detection device.

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