Magnetic control assembly with adjustable magnetic field for PVD (Physical Vapor Deposition)

Abstract

The utility model provides a magnetic field adjustable magnetic control assembly used in PVD, comprising an intermediate body which comprises a first intermediate body part and a second intermediate body part which are connected with each other; a plurality of magnet assembling holes are formed in the first middle body part, and a cavity is formed in the middle of the first middle body part; a counterweight assembly hole is formed in the second middle body part; the back plate is arranged on the back surface of the middle body and is used for sealing one end of the back surface of the magnet assembly hole and one end of the back surface of the counterweight assembly hole in the middle body; the mounting assembly is connected to the back plate; the mounting assembly is used for connecting a rotor; one end of the back surface of the magnet mounting column is connected to the mounting assembly; a plurality of magnet assembling holes are formed in the magnet mounting column; the position of the magnet mounting column can be adjusted along the longitudinal direction of the middle body through the mounting assembly; the magnetic field distribution of the magnetic control assembly is convenient to adjust.

Description

TECHNICAL FIELD

[0001] The utility model relates to the magnetron assembly in PVD, especially a kind of magnetron assembly with adjustable magnetic field for in PVD. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition (PVD). General sputtering can be used to prepare metal, semiconductor, insulator and other multi-materials, and has the advantages of simple equipment, easy control, large plating area and strong adhesion. The magnetron sputtering developed in the 1970s realizes high speed, low temperature and low damage. Because it is carried out at low pressure, the ionization rate of the gas must be effectively improved. Magnetron sputtering method introduces magnetic field on the surface of target cathode, and uses the constraint of magnetic field on charged particles to improve plasma density to increase sputtering rate.

[0003] The magnetic field for capturing secondary electrons must be uniform throughout the target surface, and the magnetic field strength should be appropriate. Non-uniform magnetic field will produce non-uniform film layer. If the magnetic field strength is not appropriate (such as too low), even if the magnetic field strength is uniform, it will also cause the film layer to be contaminated, and sputtering may occur at the bolt head. This will contaminate the film layer. If the magnetic field strength is too high, the deposition rate may be very high at the beginning, but due to the etching area, the rate will quickly drop to a very low level. Similarly, this etching area will also cause the utilization rate of the target material to be relatively low.

[0004] The existing magnetron assembly has fixed installation position of magnet, which cannot be changed. In film plating, when it is found that the magnetic field strength is not appropriate, the distribution of magnet cannot be changed, and a new magnetron assembly needs to be manufactured, resulting in unnecessary scrap and time cost. SUMMARY

[0005] In view of the deficiencies in the prior art, the utility model embodiment provides a magnetron assembly with adjustable magnetic field for in PVD to facilitate adjusting the magnetic field distribution of the magnetron assembly. To achieve the above technical purpose, the utility model embodiment adopts the technical scheme that:

[0006] The utility model embodiment provides a magnetron assembly with adjustable magnetic field for in PVD, which comprises:

[0007] The intermediate body comprises a first intermediate body part and a second intermediate body part connected in series; a plurality of magnet assembly holes are arranged in the first intermediate body part, and a cavity is arranged in the middle of the first intermediate body part; the plurality of magnet assembly holes in the first intermediate body part are arranged around the cavity; a counterweight assembly hole is arranged in the second intermediate body part;

[0008] a back plate mounted on the back of the intermediate body for closing the back end of the magnet assembly holes in the intermediate body and the back end of the counterweight assembly holes;

[0009] a mounting assembly connected to the back plate; the mounting assembly is used to connect the rotor;

[0010] a magnet mounting column, the back end of which is connected to the mounting assembly, and the magnet mounting column is located in the middle hole on the back plate and the cavity of the intermediate body; a plurality of magnet assembly holes are arranged in the magnet mounting column; the magnet mounting column can be adjusted in position along the longitudinal direction of the intermediate body through the mounting assembly;

[0011] a first pressing plate connected to the front of the intermediate body for closing the front end of the magnet assembly holes in the first intermediate body part; the first pressing plate serves as a first magnetic yoke;

[0012] a second pressing plate connected to the front of the magnet mounting column for closing the front end of the magnet assembly holes in the magnet mounting column; the second pressing plate serves as a second magnetic yoke;

[0013] a third pressing plate connected to the front of the intermediate body for closing the front end of the counterweight assembly holes in the second intermediate body part.

[0014] Further, magnets are arranged in the magnet assembly holes in the first intermediate body part, magnets are arranged in the magnet assembly holes in the magnet mounting column, and the magnets in the magnet assembly holes in the first intermediate body part and the magnets in the magnet assembly holes in the magnet mounting column are arranged in opposite polarities.

[0015] Further, the intermediate body is symmetrically distributed along the longitudinal center line; the plurality of magnet assembly holes in the first intermediate body part are uniformly distributed, the plurality of magnet assembly holes in the magnet mounting column are uniformly distributed; and the plurality of magnet assembly holes in the first intermediate body part are symmetrically distributed relative to the longitudinal center line of the intermediate body, and the plurality of magnet assembly holes in the magnet mounting column are symmetrically distributed relative to the longitudinal center line of the intermediate body.

[0016] Further, the first intermediate body part is provided with a first side reinforcing part and a second side reinforcing part on the left and right sides respectively; the first side reinforcing part and the second side reinforcing part are symmetrically distributed relative to the longitudinal center line of the intermediate body; a plurality of uniformly distributed magnet assembly holes are arranged in the first side reinforcing part and the second side reinforcing part respectively; the magnet assembly holes in the first side reinforcing part and the magnet assembly holes in the second side reinforcing part are symmetrically distributed relative to the longitudinal center line of the intermediate body.

[0017] Further, the first intermediate body part, the second intermediate body part, the first side reinforcing part and the second side reinforcing part are integrally constructed.

[0018] Further, the magnet assembly hole in the first side reinforcement and the second side reinforcement is provided with a magnet, and the magnet in the magnet assembly hole in the first side reinforcement and the second side reinforcement is arranged in the same polarity as the magnet in the magnet assembly hole in the first intermediate body.

[0019] Further, the front surface of the first side reinforcement and the second side reinforcement is respectively provided with a fourth pressing plate and a fifth pressing plate, and the fourth pressing plate and the fifth pressing plate are respectively used as a third magnetic yoke and a fourth magnetic yoke.

[0020] Further, the counterweight assembly hole in the second intermediate body is provided with a counterweight.

[0021] Further, the mounting assembly comprises a mounting plate, a mounting ring and a fixing strip, the mounting ring is arranged in the middle of the mounting plate, three pairs of waist holes are arranged on the left and right sides of the mounting plate in the longitudinal direction, connecting ears are arranged on the two sides of the magnet mounting column, the back end of the magnet mounting column is connected to one end of the mounting plate by screwing the two ends of the fixing strip through a pair of waist holes on one end of the mounting plate and connecting the connecting ears on the two sides of the magnet mounting column, and the mounting plate is connected to the back plate by screwing the remaining two pairs of waist holes on the mounting plate.

[0022] Further, the magnetic field adjustable magnetron assembly used in PVD further comprises a magnetic detection piece, a plurality of magnetic detection sensors are uniformly distributed on the magnetic detection piece, one end of the magnetic detection piece is rotationally connected to a support column, and the support column is fixed on the back plate; the support column is located in the cavity of the first intermediate body and on the longitudinal center line of the intermediate body.

[0023] The technical scheme provided by the embodiment of the utility model has the beneficial effects that:

[0024] 1) The magnet mounting column can be adjusted in the longitudinal direction relative to the intermediate body, so that the magnet in the magnet mounting column can be adjusted in the longitudinal direction relative to the magnet in the first intermediate body, thereby adjusting the magnetic field distribution of the magnetron assembly.

[0025] 2) The magnet is arranged in the magnet assembly hole of the intermediate body and the magnet mounting column, and the installation and replacement are convenient. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a back view angle structure schematic diagram of the magnetron assembly in the embodiment of the utility model.

[0027] Figure 2 It is a front view angle structure schematic diagram of the magnetron assembly in the embodiment of the utility model.

[0028] Figure 3 It is another front view angle structure schematic diagram of the magnetron assembly in the embodiment of the utility model. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the utility model is further described in detail below in combination with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model and not to limit the utility model.

[0030] As shown in Figure 1 , Figure 2 and Figure 3 , the utility model embodiment proposes a magnetic field adjustable type magnetic control assembly (hereinafter referred to as magnetic control assembly) for PVD, comprising:

[0031] Intermediate body 1, the intermediate body 1 includes connected first intermediate body part 11 and second intermediate body part 12;Multiple magnet assembly holes 111 are arranged in the first intermediate body part 11, and a cavity 112 is arranged in the middle of the first intermediate body part 11;Multiple magnet assembly holes 111 in the first intermediate body part 11 are arranged around the cavity 112;Counterweight assembly hole 121 is arranged in the second intermediate body part 12;

[0032] Back plate 2, the back plate 2 is installed on the back of intermediate body 1, for closing the back end of the magnet assembly hole 111 in the intermediate body 1 and the back end of the counterweight assembly hole 121;The middle hole 21 matched with the cavity 112 in the middle of the first intermediate body part 11 is opened on the back plate 2;

[0033] Mounting assembly 3, the mounting assembly 3 is connected on the back plate 2;The mounting assembly 3 is used to connect the rotor;

[0034] Magnet mounting column 4, the back end of the magnet mounting column 4 is connected on the mounting assembly 3, and the magnet mounting column 4 is located in the middle hole 21 on the back plate 2 and the cavity 112 of the intermediate body 1;Multiple magnet assembly holes 111 are arranged in the magnet mounting column 4;The magnet mounting column 4 can be adjusted position along the longitudinal direction of the intermediate body 1 by the mounting assembly 3;

[0035] First pressing plate 5, connected on the front of intermediate body 1, for closing the front end of the magnet assembly hole 111 in the first intermediate body part 11, the first pressing plate 5 as first magnetic yoke;

[0036] Second pressing plate 6, connected on the front of magnet mounting column 4, for closing the front end of the magnet assembly hole 111 in the magnet mounting column 4, the second pressing plate 6 as second magnetic yoke;

[0037] Third pressing plate 7, connected on the front of intermediate body 1, for closing the front end of the counterweight assembly hole 121 in the second intermediate body part 12.

[0038] In the embodiment, the longitudinal direction of the intermediate body 1 is the extending direction of the first intermediate body part 11 to the second intermediate body part 12; in use, the magnets are arranged in the magnet assembling holes 111 in the first intermediate body part 11 and the magnet assembling holes 111 in the magnet mounting column 4 respectively, and the magnets in the magnet assembling holes 111 in the first intermediate body part 11 and the magnets in the magnet assembling holes 111 in the magnet mounting column 4 are arranged in opposite polarities; for example, the front end of the magnet in the magnet assembling hole 111 in the first intermediate body part 11 is N-pole, and the front end of the magnet in the magnet assembling hole 111 in the magnet mounting column 4 is S-pole; the embodiment can adjust the position of the magnet in the magnet mounting column 4 relative to the magnet in the first intermediate body part 11 in the longitudinal direction, so as to adjust the magnetic field distribution of the magnetorquer assembly.

[0039] Further, the magnet is arranged in the magnet assembling hole 111 in the first intermediate body part 11, and the magnet is arranged in the magnet assembling hole 111 in the magnet mounting column 4, and the magnet in the magnet assembling hole 111 in the first intermediate body part 11 and the magnet in the magnet assembling hole 111 in the magnet mounting column 4 are arranged in opposite polarities; when the magnetorquer assembly rotates, the magnetic field generated between the magnet in the first intermediate body part 11 and the magnet in the magnet mounting column 4 can be used as the magnetic field on the surface of the target cathode in PVD, for capturing secondary electrons.

[0040] More preferably, the intermediate body 1 is distributed symmetrically left and right along the longitudinal center line; the plurality of magnet assembling holes 111 in the first intermediate body part 11 are uniformly distributed, and the plurality of magnet assembling holes 111 in the magnet mounting column 4 are uniformly distributed; and the plurality of magnet assembling holes 111 in the first intermediate body part 11 are distributed symmetrically left and right relative to the longitudinal center line of the intermediate body 1, and the plurality of magnet assembling holes 111 in the magnet mounting column 4 are distributed symmetrically left and right relative to the longitudinal center line of the intermediate body 1; so that the distribution of the magnetic field generated between the magnet in the first intermediate body part 11 and the magnet in the magnet mounting column 4 is more symmetrical.

[0041] More preferably, the first intermediate body part 11 is provided with a first side reinforcing part 13 and a second side reinforcing part 14 respectively on the left and right sides; the first side reinforcing part 13 and the second side reinforcing part 14 are distributed symmetrically left and right relative to the longitudinal center line of the intermediate body 1; a plurality of uniformly distributed magnet assembling holes 111 are arranged in the first side reinforcing part 13 and the second side reinforcing part 14 respectively; and the magnet assembling holes 111 in the first side reinforcing part 13 and the magnet assembling holes 111 in the second side reinforcing part 14 are distributed symmetrically left and right relative to the longitudinal center line of the intermediate body 1.

[0042] Specifically, the first intermediate body part 11, the second intermediate body part 12, the first side reinforcing part 13 and the second side reinforcing part 14 are integrally configured; that is, the intermediate body 1 is integrally configured as a whole, which can increase the strength; the intermediate body 1 can be made of a resin material, for example, by injection molding; the magnet mounting column 4 can also be made of a resin material, for example, by injection molding.

[0043] Specifically, the magnet in the magnet assembly hole 111 in the first side reinforcing part 13 and the second side reinforcing part 14 is provided; the magnet in the magnet assembly hole 111 in the first side reinforcing part 13 and the second side reinforcing part 14 is arranged with the same polarity as the magnet in the magnet assembly hole 111 in the first intermediate body part 11; the magnet in the magnet assembly hole 111 in the first side reinforcing part 13 and the second side reinforcing part 14 can play a role in strengthening the magnetic field strength.

[0044] Further, the front surface of the first side reinforcing part 13 and the second side reinforcing part 14 is respectively provided with the fourth pressing plate 8 and the fifth pressing plate 9; the fourth pressing plate 8 and the fifth pressing plate 9 are respectively used as the third magnetic yoke and the fourth magnetic yoke; the fourth pressing plate 8 and the fifth pressing plate 9 can respectively close the front end of the magnet assembly hole 111 in the first side reinforcing part 13 and the second side reinforcing part 14; the back end of the magnet assembly hole 111 in the first side reinforcing part 13 and the second side reinforcing part 14 is closed by the back plate 2.

[0045] Further, the counterweight assembly hole 121 in the second intermediate body part 12 is provided with a counterweight; the counterweight can make the magnetic control assembly more balanced when rotating, reducing vibration.

[0046] Specifically, the mounting assembly 3 includes a mounting plate 301, a mounting ring 302, and a fixing strip 303; the mounting ring 302 is arranged in the middle of the mounting plate 301; three pairs of waist holes 304 are arranged on the left and right sides of the mounting plate 301 along the longitudinal direction; the magnet mounting column 4 is provided with connecting ears 401 on both sides; the connecting ears 401 on both sides of the magnet mounting column 4 are connected by screws passing through one pair of waist holes 304 at one end of the fixing strip 303 and one end of the mounting plate 301, so that the back end of the magnet mounting column 4 is connected to one end of the mounting plate 301; the back plate 2 is connected to the mounting plate 301 by screws passing through the other two pairs of waist holes 304 on the mounting plate 301, so that the mounting plate 301 is connected to the back plate 2. By arranging three pairs of waist holes 304 on the mounting plate 301, the position of the magnet mounting column 4 relative to the mounting plate 301 can be adjusted along the longitudinal direction of the intermediate body 1, and the position of the mounting plate 301 relative to the intermediate body 1 can be adjusted along the longitudinal direction of the intermediate body 1, so that the position of the magnet mounting column 4 relative to the intermediate body 1 can be adjusted in the longitudinal direction within a larger adjustment range, thereby enabling the magnet in the magnet mounting column 4 to be adjusted in the longitudinal direction relative to the magnet in the first intermediate body part 11. The mounting ring 302 is used to connect the rotor, which can drive the magnetic control assembly to rotate.

[0047] More preferably, the magnetic-field-adjustable magnetron assembly used in PVD further comprises a magnetic detection piece 10, which is uniformly provided with a plurality of magnetic detection sensors 10a, and one end of the magnetic detection piece 10 is rotatably connected to a support 10b fixed on the back plate 2; the support 10b is located in the cavity 112 of the first intermediate body part 11 and on the longitudinal center line of the intermediate body 1; the magnetic detection piece 10 can rotate to detect the magnetic field at different positions; and when the magnetic field of the magnetron assembly meets the requirements, the magnetic detection piece 10 and the support 10b are removed.

[0048] In some embodiments, the first, second, fourth and fifth pressing plates 5, 6, 8 and 9 are made of stainless iron material so as to serve as a magnetic yoke; the material of the third pressing plate 7 is not specifically required and can also be made of stainless iron material; and the back plate 2 is also made of stainless iron material.

[0049] The shape of the first intermediate body part 11 can be a water-drop shape, a heart shape, an oval shape, etc.

[0050] Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solutions of the present application and are not limiting. Although the present application has been described in detail with reference to the embodiments, it should be understood by those skilled in the art that the technical solutions of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical solutions of the present application, and all of them should be covered in the scope of the claims of the present application.

Claims

1. A magnetically adjustable control component for use in PVD, characterized in that, include: An intermediate body (1) includes a first intermediate body portion (11) and a second intermediate body portion (12) connected together; the first intermediate body portion (11) is provided with a plurality of magnet mounting holes (111), and a cavity (112) is provided in the middle of the first intermediate body portion (11); the plurality of magnet mounting holes (111) in the first intermediate body portion (11) are arranged around the cavity (112); the second intermediate body portion (12) is provided with a counterweight mounting hole (121); Back plate (2), the back plate (2) is installed on the back of the intermediate body (1) to close one end of the back of the magnet assembly hole (111) and one end of the back of the counterweight assembly hole (121) in the intermediate body (1); the back plate (2) has an intermediate hole (21) that matches the cavity (112) in the middle of the first intermediate body part (11); Mounting assembly (3), which is connected to the back plate (2); the mounting assembly (3) is used to connect the rotor; A magnet mounting post (4) is connected at one end of its back side to the mounting assembly (3). The magnet mounting post (4) is located in the middle hole (21) on the back plate (2) and in the cavity (112) of the intermediate body (1). The magnet mounting post (4) is provided with a plurality of magnet mounting holes (111); the magnet mounting post (4) can be adjusted in position along the longitudinal direction of the intermediate body (1) by means of the mounting assembly (3); The first pressure plate (5) is connected to the front of the intermediate body (1) and is used to close one end of the front of the magnet assembly hole (111) in the first intermediate body part (11). The first pressure plate (5) serves as the first magnetic yoke. The second pressure plate (6) is connected to the front side of the magnet mounting post (4) and is used to close one end of the front side of the magnet assembly hole (111) in the magnet mounting post (4). The second pressure plate (6) serves as the second magnetic yoke. The third pressure plate (7) is connected to the front of the intermediate body (1) and is used to close one end of the front of the counterweight assembly hole (121) in the second intermediate body part (12).

2. The adjustable magnetic control assembly for PVD as described in claim 1, characterized in that, A magnet is provided in the magnet assembly hole (111) in the first intermediate body part (11), and a magnet is provided in the magnet assembly hole (111) in the magnet mounting post (4), and the magnet in the magnet assembly hole (111) in the first intermediate body part (11) and the magnet in the magnet assembly hole (111) in the magnet mounting post (4) are arranged with opposite polarities.

3. The adjustable magnetic control assembly for PVD as described in claim 2, characterized in that, The intermediate body (1) is symmetrically distributed along the longitudinal center line; the multiple magnet mounting holes (111) in the first intermediate body part (11) are evenly distributed, and the multiple magnet mounting holes (111) in the magnet mounting post (4) are evenly distributed; and the multiple magnet mounting holes (111) in the first intermediate body part (11) are symmetrically distributed with respect to the longitudinal center line of the intermediate body (1), and the multiple magnet mounting holes (111) in the magnet mounting post (4) are symmetrically distributed with respect to the longitudinal center line of the intermediate body (1).

4. The adjustable magnetic control assembly for PVD as described in claim 2 or 3, characterized in that, The first intermediate body (11) is provided with a first side reinforcement (13) and a second side reinforcement (14) on its left and right sides respectively; the first side reinforcement (13) and the second side reinforcement (14) are symmetrically distributed with respect to the longitudinal center line of the intermediate body (1); the first side reinforcement (13) and the second side reinforcement (14) are provided with a plurality of evenly distributed magnet mounting holes (111); the magnet mounting holes (111) in the first side reinforcement (13) and the magnet mounting holes (111) in the second side reinforcement (14) are symmetrically distributed with respect to the longitudinal center line of the intermediate body (1).

5. The adjustable magnetic control assembly for PVD as described in claim 4, characterized in that, The first intermediate body (11), the second intermediate body (12), the first side reinforcement (13), and the second side reinforcement (14) are integrally constructed.

6. The adjustable magnetic control assembly for PVD as described in claim 4, characterized in that, Magnets are provided in the magnet mounting holes (111) in the first side reinforcement (13) and the second side reinforcement (14), and the magnets in the magnet mounting holes (111) in the first side reinforcement (13) and the second side reinforcement (14) are provided with the same polarity as the magnets in the magnet mounting holes (111) in the first intermediate body part (11).

7. The adjustable magnetic control assembly for PVD as described in claim 4, characterized in that, The front sides of the first side reinforcement (13) and the second side reinforcement (14) are respectively provided with a fourth pressure plate (8) and a fifth pressure plate (9); the fourth pressure plate (8) and the fifth pressure plate (9) serve as the third magnetic yoke and the fourth magnetic yoke, respectively.

8. The adjustable magnetic control assembly for PVD as described in claim 2 or 3, characterized in that, A counterweight block is provided in the counterweight assembly hole (121) in the second intermediate body part (12).

9. The adjustable magnetic control assembly for PVD as described in claim 1, 2, or 3, characterized in that, The mounting assembly (3) includes a mounting plate (301), a mounting ring (302), and a fixing strip (303); the mounting ring (302) is located in the middle of the mounting plate (301); the mounting plate (301) has three pairs of waist holes (304) along the longitudinal direction on the left and right sides; the magnet mounting post (4) has connecting ears (401) on both sides; the connecting ears (401) on both sides of the magnet mounting post (4) are connected by screws passing through the two ends of the fixing strip (303) and one pair of waist holes (304) at one end of the mounting plate (301), so that one end of the back of the magnet mounting post (4) is connected to one end of the mounting plate (301); the back plate (2) is connected by screws passing through the other two pairs of waist holes (304) on the mounting plate (301), so that the mounting plate (301) is connected to the back plate (2).

10. The adjustable magnetic control assembly for PVD as described in claim 1, 2, or 3, characterized in that, It also includes a magnetic detection component (10), on which multiple magnetic detection sensors (10a) are evenly distributed. One end of the magnetic detection component (10) is rotatably connected to a support column (10b), which is fixed on the back plate (2). The support column (10b) is located in the cavity (112) of the first intermediate body (11) and is located on the longitudinal center line of the intermediate body (1).

Images