Vacuum pump rotary vane and vacuum pump

Abstract

The vacuum pump rotary vane comprises a primary rotary vane and a secondary rotary vane, and a hinge is arranged on one side of the primary rotary vane; the secondary rotary piece comprises a first secondary rotary piece and a second secondary rotary piece, at least one of the first secondary rotary piece and the second secondary rotary piece is rotatably connected with the primary rotary piece through the hinge, and one side of the first secondary rotary piece is rotatably connected with one side of the second secondary rotary piece through the hinge; and a rotary vane suction hole is formed in the first sub rotary vane. According to the rotary vane vacuum pump provided by the utility model, the rotary vane is independently subjected to air suction, compression and exhaust processes while the normal operation of the air suction, compression and exhaust processes of the rotary vane vacuum pump is ensured, so that the backflow gas amount is further reduced, and the aims of improving the air suction efficiency and improving the limit vacuum degree of a product are fulfilled.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of the vane device of rotary vane vacuum pump, specifically, a vacuum pump vane and vacuum pump. BACKGROUND

[0002] Rotary vane vacuum pump is a kind of variable volume gas transmission vacuum pump, and is one of the most basic vacuum obtaining equipment in vacuum technology.Rotary vane pump is generally composed of pump body, rotor, vane and end cover.The rotor is eccentrically installed in the pump body and the outer circle is tangent to the inner surface of the pump body (this is the ideal state, generally there is a small gap between the two), the rotor is slotted, and the slot is filled with oil vane.When the rotor rotates, the vane makes its top end and the inner wall of the pump body always contact by the action of centrifugal force and slides along the inner wall of the pump body.The mainstream rotary vane vacuum pump product in the market has two vanes and three vanes.Taking the two-vane vacuum pump as an example, the crescent space formed by the rotor, pump body and end cover is divided into A, B and C three parts.When the rotor rotates, the A space close to the suction port expands from small to large, the space expansion leads to pressure reduction, and the gas is sucked in through the pump inlet, which is in the process of suction;The volume of B space between them decreases, the pressure increases, and the exhaust valve opens, which is in the compression process;The volume of C space close to the exhaust port further decreases, the pressure increases, and when the pressure exceeds the set pressure of the exhaust valve, the gas is compressed and discharged, which is in the process of exhaust;When the A space is isolated from the suction port, it becomes the B space.In the continuous operation process of the pump, the processes of suction, compression and exhaust are carried out continuously, so as to achieve the purpose of continuous pumping.

[0003] There is no absolutely sealed vacuum container, and the vacuum pump in operation extracts the gas, mainly extracts the following four kinds of gas: the gas in the container itself;The desorption of the gas adsorbed on the inner surface of the container;The gas return of the vacuum pump into the container;The gas permeated into the container from the atmosphere.If the container is sealed, after the vacuum pump is operated for a period of time, the extracted gas will form a balance with the gas generated in the container, and the measured vacuum degree of the container at this time is the limit vacuum degree that the vacuum pump can reach.

[0004] If the gas discharged by the rotary vane pump enters another rotary vane pump, and is compressed and discharged to the atmosphere by the rotary vane pump.The compression by the second rotary vane pump can further reduce the limit vacuum degree of the required environment.This way of connecting two single-stage rotary vane pumps in series is called double-stage rotary vane pump.Double-stage pump can obtain higher vacuum degree, and now there are many partitions to separate the pump cavities to achieve the structure of double-stage rotary vane pump.Even so, its cost will be much higher than that of single-stage rotary vane pump. UTILITY MODEL CONTENTS

[0005] To solve at least one aspect of the above problems, the utility model provides a kind of vacuum pump rotary blade, comprising: female rotary blade, the one side of the female rotary blade is provided with hinge;Sub rotary blade, the female rotary blade is rotatably connected with at least one of the first sub rotary blade and the second sub rotary blade by the hinge, the one side of the first sub rotary blade and the second sub rotary blade is rotatably connected by the hinge, and rotary blade suction hole is formed in the first sub rotary blade.

[0006] Preferably, the first sub rotary blade and the second sub rotary blade are rotatably connected with the female rotary blade by a hinge, respectively.

[0007] Preferably, it further includes a torsion spring, the spring part of the torsion spring is sleeved on the hinge, and the two ends of the torsion spring abut against the adjacent side surfaces of the first sub rotary blade and the second sub rotary blade, respectively.

[0008] Preferably, a limiting end surface is formed in the side of the first sub rotary blade close to the hinge, and the included angle between the limiting end surface and the side surface of the female rotary blade is an acute angle when the adjacent side surfaces of the first sub rotary blade and the second sub rotary blade are fitted.

[0009] Preferably, a valve piece is arranged on the first sub rotary blade, the valve piece is arranged on the side surface adjacent to the second sub rotary blade, one side of the valve piece is fixedly connected with the first sub rotary blade, and the other side of the valve piece covers the rotary blade suction hole.

[0010] Preferably, a balance hole is formed in the valve piece, and the balance hole corresponds to the position of the rotary blade suction hole.

[0011] Preferably, chamfered surfaces are formed in the side surfaces of the first sub rotary blade and the second sub rotary blade away from the female rotary blade.

[0012] On the other hand, a kind of vacuum pump is provided, comprising: pump body, air inlet and exhaust port are formed in the pump body;Rotor, the outer wall of the rotor and the inner wall of the pump body between the exhaust port of the pump body have the gas outlet gap of the preset width, rotary blade slot is formed in the rotor, and rotary blade is slidably arranged in the rotary blade slot, the rotary blade adopts any one of the preceding vacuum pump rotary blade, and the first sub rotary blade of the rotary blade is behind the second sub rotary blade when the rotor rotates.

[0013] Preferably, three rotary blade slots are formed in the rotor, and the central angles of any two adjacent rotary blade slots in the three rotary blade slots are equal.

[0014] Preferably, the width of the rotary blade slot gradually increases along the direction away from the rotor axis.

[0015] The vacuum pump rotating vane and the vacuum pump have the following beneficial effects: compared with a conventional single-stage rotating vane vacuum pump, the vacuum pump can reduce gas backflow of the vacuum pump, improve pumping efficiency, and optimize the limit vacuum degree, so as to solve the problems mentioned in the background art; while ensuring that the gas suction, compression, and exhaust processes of the rotating vane vacuum pump are normally performed, the rotating vane itself also performs independent gas suction, compression, and exhaust processes, so as to further reduce the amount of backflow gas, so as to improve the pumping efficiency and improve the limit vacuum degree of the product. BRIEF DESCRIPTION OF DRAWINGS

[0016] For better understanding of the above and other purposes, features, advantages and functions of the present application, reference can be made to the embodiments shown in the drawings. The same reference signs in the drawings refer to the same parts. Those skilled in the art should understand that the drawings are intended to illustrate the preferred embodiments of the present application, and have no limiting effect on the scope of the present application, and the various parts in the drawings are not drawn to scale.

[0017] Figure 1 A structure schematic view of a vacuum pump rotating vane according to an embodiment of the present application is shown;

[0018] Figure 2 Another perspective structure schematic view of a vacuum pump rotating vane according to an embodiment of the present application is shown;

[0019] Figure 3 A structure schematic view of a first sub-rotating vane of a vacuum pump rotating vane according to an embodiment of the present application is shown;

[0020] Figure 4 A structure schematic view of a vacuum pump according to an embodiment of the present application is shown;

[0021] Figure 5 Another perspective structure schematic view of a vacuum pump according to an embodiment of the present application is shown.

[0022] Reference signs:

[0023] 1, female rotating vane; 11, mounting groove; 2, first sub-rotating vane; 3, second sub-rotating vane; 4, hinge pin; 41, hinge sleeve; 5, torsional spring; 6, valve piece; 7, fastening countersunk head bolt; 8, right-angle triangular prism; 9, rotating vane gas suction hole; 10, rotor; 11, pump body; 12, combined rotating vane; 13, gas inlet; 14, gas outlet. DETAILED DESCRIPTION

[0024] The exemplary embodiments of this disclosure are described below with reference to the accompanying drawings, including various details of the embodiments to aid understanding, and should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this disclosure. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0025] The term "comprising" and its variations as used herein signify open inclusion, i.e., "including but not limited to". Unless otherwise stated, the term "or" means "and / or". The term "based on" means "at least partially based on". The terms "one example embodiment" and "one embodiment" mean "at least one example embodiment". The term "another embodiment" means "at least one additional embodiment". The terms "first", "second", etc., may refer to different or the same objects. Other explicit and implicit definitions may also be included below.

[0026] To at least partially solve one or more of the above-mentioned problems and other potential problems, embodiments of this disclosure propose a vacuum pump vane, comprising: a mother vane 1 and a daughter vane, wherein a hinge is provided on one side of the mother vane 1; the daughter vane includes a first daughter vane 2 and a second daughter vane 3, at least one of the first daughter vane 2 and the second daughter vane 3 being rotatably connected to the mother vane 1 by the hinge, one side of the first daughter vane 2 and the second daughter vane 3 being rotatably connected by the hinge, and a vane suction hole 9 is provided on the first daughter vane 2.

[0027] Specifically, the mother vane 1 and the daughter vane adopt a flat plate structure, and a hinge is provided on the side of the mother vane 1 near the daughter vane. The daughter vane is connected to the mother vane 1 by at least one of the first daughter vane 2 and the second daughter vane 3 being rotatably connected to the mother vane 1. The angle between the first daughter vane 2 and the second daughter vane 3 can be changed by the rotatable connection on one side. The air intake hole 9 provided on the first daughter vane 2 allows air to be drawn from the side of the first daughter vane 2 away from the second daughter vane 3 as the angle between the first daughter vane 2 and the second daughter vane 3 gradually increases.

[0028] In some embodiments, the first sub-rotary plate 2 is rotatably connected to the mother rotary plate 1 via a hinge, and the second sub-rotary plate 3 is fixedly connected to the mother rotary plate 1. The first sub-rotary plate 2 is rotatably connected to the mother rotary plate 1 via a hinge at the connection point between the second sub-rotary plate 3 and the mother rotary plate 1. In other embodiments, the second sub-rotary plate 3 and the mother rotary plate 1 are integrally formed, and the hinge is located at the boundary between the second sub-rotary plate 3 and the mother rotary plate 1. The first sub-rotary plate 2 is rotatably connected to the mother rotary plate 1 and the second sub-rotary plate 3 via a hinge. In still other embodiments, the first sub-rotary plate 2 and the second sub-rotary plate 3 are rotatably connected to the mother rotary plate 1 via hinges.

[0029] In some embodiments, the sum of the thicknesses of the first sub-vane 2 and the second sub-vane 3 is equal to the thickness of the parent vane 1, and when the first sub-vane 2 and the second sub-vane 3 are attached, the upper surface of the first sub-vane and the lower surface of the second sub-vane are coplanar with the upper surface and the lower surface of the parent vane 1, respectively.

[0030] In some embodiments, the parent vane 1 is provided with a plurality of mounting grooves 11 on the side close to the sub-vane, the hinge includes a hinge pin 4 and a hinge sleeve 41, the hinge sleeve 41 is arranged in the mounting grooves 11, respectively, and the hinge pin 4 passes through the mounting grooves 11 and the hinge sleeves arranged therein in sequence. The first sub-vane 2 and the second sub-vane 3 are fixedly connected with at least one hinge sleeve 41, respectively.

[0031] In some embodiments, a torsional spring 5 is further included, the spring part of the torsional spring 5 is sleeved on the hinge, and the two ends of the torsional spring 5 abut against the adjacent side surfaces of the first sub-vane 2 and the second sub-vane 3, respectively.

[0032] Specifically, to ensure that the sub-vanes can be effectively separated after the vane is thrown out under the action of centrifugal force during the operation of the vane vacuum pump, a torsional spring 5 is added in the middle of the vane connecting hinge to ensure that the sub-vanes can be opened.

[0033] In use, the vane is installed into the vane vacuum pump, and under the action of centrifugal force, the vane is thrown out, and under the action of the elastic force of the torsional spring 5, the first sub-vane 2 and the second sub-vane 3 are opened. The closed space formed between the two sub-vanes and the parent vane 1 has a volume from small to large and a pressure that decreases, forming a negative pressure to generate suction, and air is sucked from the adjacent chamber through the vane air suction hole 9.

[0034] In some embodiments, a limiting end face is provided on the side of the first sub-vane 2 close to the hinge, and when the adjacent side surfaces of the first sub-vane 2 and the second sub-vane 3 are attached, the included angle between the limiting end face and the side surface of the parent vane 1 is an acute angle.

[0035] Specifically, considering that if the opening angle of the sub-vane is too large, the sub-vane cannot be retracted and is easy to be stuck, a limiting end face is arranged at the hinge connection position of the sub-vane. For example, for the limiting end face of the first sub-vane 2, the included angle between the limiting end face and the upper surface of the first sub-vane is an obtuse angle (for example, 150°), and the included angle between the limiting end face and the lower surface of the first sub-vane is an acute angle (for example, 180°-150°). For the limiting end face of the second sub-vane 3, the included angle between the limiting end face and the lower surface of the second sub-vane is an obtuse angle (for example, 150°), and the included angle between the limiting end face and the upper surface of the second sub-vane is an acute angle (for example, 180°-150°).

[0036] In another embodiment, the limiting end face is a right triangular prism 8 arranged on the side face of the first sub-vane 2 and the second sub-vane 3. Specifically, the first sub-vane 2 and the second sub-vane 3 are both flat structures with the side face perpendicular to the upper and lower surfaces, one side face of the right triangular prism 8 is attached to the side face of the first sub-vane 2, and one side face of the right triangular prism 8 is coplanar with the lower surface of the first sub-vane 2, and the other side face of the right triangular prism 8 is the limiting end face. One side face of the right triangular prism 8 is attached to the side face of the second sub-vane 3, and one side face of the right triangular prism 8 is coplanar with the upper surface of the second sub-vane 3, and the other side face of the right triangular prism 8 is the limiting end face. By increasing the limiting end face of the right triangular prism 8, the maximum opening angle between the two sub-vanes is limited. In some embodiments, the maximum opening angle between the two sub-vanes is limited to not more than 60° by setting the included angle between the side faces of the right triangular prism, i.e. the included angle between the adjacent side faces of the first sub-vane 2 and the second sub-vane 3 ranges from 0° to 60°.

[0037] In some embodiments, a valve plate 6 is arranged on the first sub-vane 2, the valve plate 6 is arranged on the side face of the first sub-vane 2 adjacent to the second sub-vane 3, one side of the valve plate 6 is fixedly connected to the first sub-vane 2, and the other side of the valve plate 6 covers the vane air inlet hole 9.

[0038] Specifically, in order to ensure that the vane can inhale air, a vane air inlet hole 9 needs to be opened on the sub-vane on the side opposite to the rotation direction, and we need the space formed by the parent vane 1 and the two sub-vanes to inhale air during opening and to compress during closing until the air is discharged from the exhaust port 14, and it is necessary to ensure that the space formed by the parent vane 1 and the sub-vane is relatively airtight during compression. Therefore, a metal valve plate 6 is installed on the first sub-vane 2 where the vane air inlet hole 9 is opened. During the opening of the two sub-vanes, the metal valve plate 6 opens under the action of pressure difference and inhales air from the adjacent space through the vane air inlet hole 9. During the closing and compression of the first sub-vane 2 and the second sub-vane 3, the metal valve plate 6 is sealed to form a sealed space, thereby ensuring the compression and exhaust of the vane.

[0039] In some embodiments, a balance hole is opened on the valve plate 6, and the balance hole corresponds to the position of the vane air inlet hole 9.

[0040] Specifically, a balance hole is opened on the metal valve plate 6 to prevent the valve plate 6 from being sucked and unable to open.

[0041] In some embodiments, a chamfered surface is arranged on the side face of the first sub-vane 2 and the second sub-vane 3 away from the parent vane 1.

[0042] Specifically, by arranging the chamfered surface on the side face of the first sub-vane 2 and the second sub-vane 3, the contact area between the sub-vane and the inner wall of the pump body can be increased, and the airtightness of the space can be increased.

[0043] Embodiments

[0044] The sub-vane of the vane of the embodiment can be cyclically opened and closed to perform air suction and exhaust and reduce backflow of air in the pump cavity. Figure 1 As shown in the figure, the female vane 1 is connected with the first sub-vane 2 and the second sub-vane 3 through the hinge hole. To ensure that the sub-vane can be freely opened, the hinge hole position of the female vane 1 is inserted with a vane torsion spring 5 to provide the opening tension of the sub-vane. The vane hinge pin 4 passes through the female vane 1, the first sub-vane 2, the second sub-vane 3 and the vane torsion spring 5 to connect the four parts together. The metal valve plate 6 is fixed on the inner side of the first sub-vane 2 through the fastening countersunk bolt 7 to block the air suction port of the sub-vane with the air suction port.

[0045] The hinge hole position end faces of the first sub-vane 2 and the second sub-vane 3 are both provided with two limiting right triangular prisms 8, which are used to ensure that the maximum opening angle of the first sub-vane 2 and the second sub-vane 3 does not exceed 60°, so as to avoid that the sub-vane cannot be closed. The vane torsion spring 5 and the limiting right triangular prism 8 ensure that the first sub-vane 2 and the second sub-vane 3 can be cyclically opened and closed during the operation of the vane pump.

[0046] On the other hand, a vacuum pump is provided, which comprises a pump body 11 and a rotor 10, the pump body 11 is provided with an air inlet 13 and an air outlet 14; the outer wall of the rotor 10 and the inner wall of the pump body 11 at the air outlet 14 of the pump body 11 have a pre-set width of the air outlet gap, the rotor 10 is provided with a vane groove, and a vane is slidably arranged in the vane groove; the vane adopts any one of the vacuum pump vanes as described above, and the first sub-vane 2 of the vane is behind the second sub-vane 3 when the rotor 10 rotates.

[0047] Specifically, the pump body 11 of the vacuum pump has a cylindrical cavity, and the rotor 10 is arranged in the cavity. The rotor 10 is installed on the inner wall of the pump body 11 and is close to the tangent of the inner wall of the pump body 11. The pre-set width of the air outlet gap is between 0.04-0.08mm, and is close to the air outlet 14 of the pump body 11. At least one combined vane 12 composed of a female vane 1, a first sub-vane 2 and a second sub-vane 3 is arranged in the vane groove of the rotor 10. The length of the combined vane 12 is determined according to the diameter of the inner wall of the rotor 10 and the pump body 11. When the rotor 10 rotates, the first sub-vane 2 is behind the second sub-vane 3.

[0048] In some embodiments, three vane grooves are provided on the rotor 10, and the central angles of any two adjacent vane grooves in the three vane grooves are equal.

[0049] Specifically, the single-stage vane vacuum pump with three vane grooves has three vane grooves on the rotor 10, and each vane groove is provided with a combined vane 12. The three combined vanes 12 have the same structure size, and during installation, the side with the opening of the sub-vane is placed on the side opposite to the rotation direction.

[0050] In some embodiments, the width of the vane slot gradually increases in a direction away from the axis of the rotor 10.

[0051] Specifically, to ensure that the sub-vanes can gradually open, the vane slot of the rotor 10 is provided with an inverted bevel, which can ensure that the combined vane 12 can gradually open after being spun out from the tangent point of the rotor 10 and the pump body 11.

[0052] Embodiments

[0053] The single-stage vane vacuum pump described in the utility model has three combined vanes 12 evenly distributed in the three vane slots of the rotor 10, and the first sub-vane 2 of the combined vane 12 is installed on the side opposite to the direction of rotation of the rotor 10. The rotor 10 is installed on the inner wall of the pump body 11 and is tangent to the inner wall of the pump body 11 (with a gap of 0.04-0.08 mm) near the exhaust port 14 of the pump body 11.

[0054] One of the combined vanes 12 is spun out from the tangent point of the rotor 10 and the pump body 11, and the sub-vanes are attached to each other, the combined vane 12 is spun out as a whole, attached to the pump body 11, and slides along the inner wall of the pump body 11. The crescent-shaped space formed by the combined vane 12, the rotor 10 and the pump body 11 gradually increases, forming a negative pressure to suck air from the air inlet. The second sub-vane 3 of the first sub-vane 2 gradually opens under the action of the bevel angle of the rotor 10 slot, forming a negative pressure to suck air from the crescent-shaped space formed by the combined vane 12, the rotor 10 and the pump body 11. The crescent-shaped space is connected to the air inlet 13, and the originally backflowing gas is partially sucked into the vane, reducing the backflowing gas.

[0055] When the combined vane 12 rotates 120°, the other combined vane 12 starts to be spun out. After the combined vane 12 rotates 180°, the sub-vanes are fully opened, further absorbing the backflowing gas in the crescent-shaped space. The combined vane 12 continues to rotate, and the space in the vane decreases to compress the gas. After the combined vane 12 rotates 240°, a closed space is formed by the combined vane 12, the other combined vane 12, the rotor 10 and the pump body 11, and the space stops sucking air from the air inlet, entering the compression stage. The combined vane 12 continues to rotate to the exhaust port 14, and the compressed gas in the combined vane 12 is discharged, followed by the gas compression and discharge in the closed space formed by the combined vane 12, the other combined vane 12, the rotor 10 and the pump body 11. The combined vane 12 continues to rotate and enters the next cycle. In this process, the single-stage vane pump itself normally performs the processes of air suction, compression and exhaust. During rotation, the hinge is always in the vane slot, and in the limit state, the sub-vane is tightly sealed with the vane slot on the rotor 10 to avoid the gap of the hinge affecting the sealing of the vane in the pump body 11. At the same time, the vane is also performing the independent processes of air suction, compression and exhaust to further reduce the amount of backflowing gas, so as to improve the pumping efficiency and improve the ultimate vacuum degree of the product.

[0056] Having described above several embodiments of the disclosure, any modifications and variations that fall within the scope of the described embodiments are also contemplated. It is also contemplated that the application covered by the claims extends to any alternative combination of claim elements not specifically disclosed. It is intended that the appended claims cover all such modifications and variations as falling within the scope of the described embodiments.

Claims

1. A vane for a vacuum pump, characterized in that The utility model relates to a vacuum pump, comprising: a female rotor plate, one side of which is provided with a hinge; a male rotor plate, which comprises a first male rotor plate and a second male rotor plate, at least one of which is rotatably connected with the female rotor plate through the hinge, one side of the first male rotor plate and the second male rotor plate is rotatably connected through the hinge, and a rotor plate air suction hole is formed on the first male rotor plate.

2. A vacuum pump vane according to claim 1, wherein, The first male rotor plate and the second male rotor plate are rotatably connected with the female rotor plate through the hinge respectively.

3. A vacuum pump vane according to claim 2, wherein, A torsional spring is further included, a spring part of the torsional spring is sleeved on the hinge, and two ends of the torsional spring abut against adjacent side surfaces of the first male rotor plate and the second male rotor plate respectively.

4. A vacuum pump vane according to claim 3, wherein, A limiting end surface is formed on one side of the first male rotor plate close to the hinge, and an included angle between the limiting end surface and a side surface of the female rotor plate is an acute angle when the adjacent side surfaces of the first male rotor plate and the second male rotor plate are abutted.

5. A vacuum pump vane according to claim 4, wherein, A valve plate is arranged on the first male rotor plate, the valve plate is arranged on the side surface of the first male rotor plate adjacent to the second male rotor plate, one side of the valve plate is fixedly connected with the first male rotor plate, and the other side of the valve plate covers the rotor plate air suction hole.

6. A vacuum pump vane according to claim 5, wherein, A balance small hole is formed on the valve plate, and the balance small hole corresponds to the position of the rotor plate air suction hole.

7. The vacuum pump vane of claim 1, wherein, A chamfered surface is formed on the side surface of the first male rotor plate and the second male rotor plate away from the female rotor plate.

8. A vacuum pump, characterized by The utility model relates to a vacuum pump, comprising: a pump body, an air inlet and an air outlet are formed on the pump body; a rotor, an air outlet gap with a preset width is formed between an outer wall of the rotor and an inner wall of the pump body at the air outlet of the pump body, a rotor plate groove is formed on the rotor, a rotor plate is arranged in the rotor plate groove, the rotor plate adopts the vacuum pump rotor plate in any one of claims 1-7, and the first male rotor plate of the rotor plate is behind the second male rotor plate when the rotor rotates.

9. Vacuum pump according to claim 8, characterized in that Three rotor plate grooves are formed on the rotor, and the central angles of any two adjacent rotor plate grooves in the three rotor plate grooves are equal.

10. Vacuum pump according to claim 9, characterized in that The width of the rotor plate groove gradually increases in the direction away from the rotor axis.

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