Cooling pump pumping speed control device for process cavity

Abstract

The utility model provides a cold pump pumping speed control device for a process cavity, which comprises a device main body, the device main body is arranged between the process cavity and a gate valve to connect the process cavity and the gate valve, the device main body comprises a fixed baffle and a rotary baffle which are integrally disc-shaped, a first through hole is arranged on the fixed baffle, and a second through hole is arranged on the rotary baffle. A second through hole is formed in the rotary baffle, the fixed baffle and the rotary baffle are coaxially arranged and rotatably connected in the center, the relative angle between the rotary baffle and the fixed baffle is adjusted by rotating the rotary baffle, the communication area between the second through hole and the first through hole is adjusted, and then the opening degree of the fixed baffle is adjusted. By adopting the cold pump pumping speed control device for the process cavity, the adjustment of the communication area of the process cavity and the gate valve is realized, and the pumping speed of the cold pump is further adjusted.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field especially relates to a cold pump pumping speed control device for process cavity. BACKGROUND

[0002] In semiconductor technology, wafer thin film sputtering, etching and other process processing, usually in process cavity, metal thin film sputtering needs to be pumped to high vacuum with cold pump 2, valve is set between process cavity 1 and cold pump 2, and process cavity 1 and cold pump 2 are connected, as shown in Figure 1 Valve is gate valve 3, only realizes opening or closing, and the opening and closing angle cannot be controlled, and in optimization process, the opening size of valve cannot be adjusted to change the pumping speed of cold pump 2 and then achieve the purpose of controlling cavity pressure.Therefore, it is necessary to provide a cold pump pumping speed control device for process cavity, which controls the pumping speed of cold pump 2 by controlling the opening size, so as to achieve the purpose of controlling cavity pressure. SUMMARY

[0003] The utility model provides a cold pump pumping speed control device for process cavity, is set between process cavity and gate valve, and the relative angle of rotating baffle and fixed baffle is adjusted by rotating, the communication area is adjusted, and then the pumping speed of cold pump is adjusted.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A cold pump pumping speed control device for process cavity, including device main part, the device main part is set between process cavity and gate valve and connects process cavity with gate valve, the device main part includes fixed baffle and rotating baffle that are all disc-shaped, first through -hole is arranged on the fixed baffle, second through -hole is arranged on the rotating baffle, the fixed baffle is coaxially arranged with the rotating baffle and is rotatably connected in the center, the relative angle of rotating baffle and fixed baffle is adjusted by rotating, the communication area of second through -hole and first through -hole is adjusted, and then the opening of fixed baffle is adjusted.

[0006] Preferably, the outer diameter of the fixed baffle is greater than the outer diameter of the rotating baffle, the mounting hole is arranged on the fixed baffle, the mounting hole is arranged outside the rotating baffle, the fixed baffle is arranged between the interface flange of the process cavity and the interface flange of the gate valve, and the interface flange of the process cavity and the interface flange of the gate valve are connected by the bolt passing through the mounting hole.

[0007] Preferably, the first through -hole is a plurality of, and a plurality of first through -holes are arranged at equidistant intervals along the circumference of the fixed baffle.

[0008] Preferably, the second through hole is identical with the first through hole in number, size and setting position, when the second through hole is completely coincident with the first through hole, the opening of the fixed baffle is maximum, when the second through hole is completely staggered with the first through hole, the opening of the fixed baffle is minimum.

[0009] Preferably, the center of the fixed baffle is provided with a first connecting hole, the center of the rotating baffle is provided with a second connecting hole, the rotating baffle is rotatably connected with the fixed baffle through a connecting screw sequentially penetrating the second connecting hole and the first connecting hole.

[0010] Preferably, the first connecting hole is a threaded hole, the second connecting hole is a through hole, the connecting screw is screwed into the first connecting hole through the second connecting hole, when the connecting screw is not tightened, the rotating baffle can rotate relative to the fixed baffle, when the connecting screw is tightened, the rotating baffle is locked and fixed with the fixed baffle.

[0011] Preferably, the edge of the rotating baffle is provided with a first angle scale along the circumference; the side of the fixed baffle close to the rotating baffle is provided with a second angle scale corresponding to the first angle scale, the adjustment angle is confirmed by comparing the first angle scale and the second angle scale.

[0012] Preferably, the edge of the fixed baffle is provided with a positioning notch, the positioning notch is used to indicate the installation direction of the fixed baffle.

[0013] Preferably, the material of the fixed baffle and the rotating baffle is metal.

[0014] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0015] For example, a cold pump pumping speed control device for a process cavity, comprising a device main body, the device main body is arranged between the process cavity and the gate valve and connects the process cavity and the gate valve, the device main body comprises a fixed baffle and a rotating baffle which are in the form of a disc as a whole, the fixed baffle is provided with a first through hole, the rotating baffle is provided with a second through hole, the fixed baffle and the rotating baffle are coaxially arranged and rotatably connected at the center, the relative angle between the rotating baffle and the fixed baffle is adjusted by rotating the rotating baffle, the communication area of the second through hole and the first through hole is adjusted, and then the opening of the fixed baffle is adjusted, the adjustment of the communication area of the process cavity and the gate valve is realized, and then the cold pump pumping speed is adjusted. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a process cavity, a gate valve and a cold pump connection schematic diagram in the prior art;

[0017] Figure 2It is the structure schematic view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model;

[0018] Figure 3 It is the explosion view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model;

[0019] Figure 4 It is the installation schematic view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model.

[0020] Mark explanation:

[0021] 1-process cavity;

[0022] 2-cold pump;

[0023] 3-shutter valve;

[0024] 4-fixed baffle;41-first through hole;42-mounting hole;43-first connecting hole;44-second angle scale;45-positioning notch;

[0025] 5-rotary baffle;51-second through hole;52-second connecting hole;53-first angle scale;

[0026] 6-connection screw. Specific implementation

[0027] In order to make the purpose, feature and beneficial effect of the utility model more obvious and easy to understand, the specific implementation of the utility model is described in detail below in combination with the drawings.It can be understood that the specific implementation described below is only used to explain the utility model, and is not limited to the utility model.And, the same, similar signs in the drawing can be used to refer to the same, similar elements in different embodiments, and the description of the same, similar elements in different embodiments and the description of prior art elements, features, effects, etc.may be omitted.

[0028] Figure 1 It is the connection schematic view of the process cavity, shutter valve and cold pump in the prior art; Figure 2 It is the structure schematic view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model; Figure 3 It is the explosion view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model; Figure 4 It is the installation schematic view of the cold pump pumping speed control device for the process cavity in the embodiment of the utility model.

[0029] Reference Figures 1-4 , the utility model embodiment provides a kind of cold pump pumping speed control device for process cavity.

[0030] Specifically, the cold pump pumping speed control device for the process cavity comprises a device body, the device body is arranged between the process cavity 1 and the gate valve 3 and connects the process cavity 1 and the gate valve 3, the device body comprises a fixed baffle 4 and a rotating baffle 5 which are in the shape of a disc as a whole, the fixed baffle 4 is provided with a first through hole 41, the rotating baffle 5 is provided with a second through hole 51, the fixed baffle 4 and the rotating baffle 5 are coaxially arranged and are rotatably connected at the center, the relative angle between the rotating baffle 5 and the fixed baffle 4 is adjusted by rotating the rotating baffle 5, the communication area between the second through hole 51 and the first through hole 41 is adjusted, and then the opening degree of the fixed baffle 4 is adjusted, so that the communication area between the process cavity 1 and the gate valve 3 is adjusted, and then the pumping speed of the cold pump 2 is adjusted.

[0031] In some embodiments, the outer diameter of the fixed baffle 4 is greater than the outer diameter of the rotating baffle 5, the fixed baffle 4 is provided with a mounting hole 42, the mounting hole 42 is arranged outside the rotating baffle 5, the fixed baffle 4 is arranged between the interface flange of the process cavity 1 and the interface flange of the gate valve 3, the interface flange of the process cavity 1 and the interface flange of the gate valve 3 are connected through the bolts passing through the mounting hole 42, and the sealing connection between the device body and the process cavity 1 and the gate valve 3 is realized.

[0032] In some embodiments, the first through hole 41 is a plurality of first through holes 41, and the plurality of first through holes 41 are arranged at equal intervals along the circumference of the fixed baffle 4.

[0033] In some embodiments, the number, size and arrangement position of the second through hole 51 and the first through hole 41 are the same, when the second through hole 51 and the first through hole 41 completely coincide, the opening degree of the fixed baffle 4 is the largest, and when the second through hole 51 and the first through hole 41 completely stagger, the opening degree of the fixed baffle 4 is the smallest.

[0034] In some embodiments, the center of the fixed baffle 4 is provided with a first connecting hole 43, the center of the rotating baffle 5 is provided with a second connecting hole 52, and the rotating baffle 5 and the fixed baffle 4 are rotatably connected through a connecting screw 6 passing through the second connecting hole 52 and the first connecting hole 43 in sequence.

[0035] In some embodiments, the first connecting hole 43 is a threaded hole, the second connecting hole 52 is a through hole, the connecting screw 6 passes through the second connecting hole 52 and is screwed into the first connecting hole 43, when the connecting screw 6 is not tightened, the rotating baffle 5 can rotate relative to the fixed baffle 4, and when the connecting screw 6 is tightened, the rotating baffle 5 and the fixed baffle 4 are locked and fixed.

[0036] In some embodiments, the edge of the rotating baffle 5 is provided with a first angle scale 53 along the circumference; the side of the fixed baffle 4 close to the rotating baffle 5 is provided with a second angle scale 44 corresponding to the first angle scale 53, and the adjustment angle is confirmed by comparing the first angle scale 53 and the second angle scale 44.

[0037] In some embodiments, the edge of the fixed baffle 4 is provided with a positioning notch 45 for indicating the installation orientation of the fixed baffle 4.

[0038] In some embodiments, the fixed baffle 4 and the rotating baffle 5 are made of metal.

[0039] Specifically, in actual use, when pressure adjustment is needed, the process cavity 1 is depressurized to the atmosphere, the gate valve 3 is removed, the connecting screw 6 is loosened, the angle of the rotating baffle 5 is rotated to the required opening, the adjustment is completed, the connecting screw 6 is tightened, the gate valve 3 is installed, and the fixed baffle 4 of the process cavity 1 and the gate valve 3 are connected.

[0040] In summary, the cold pump pumping speed control device for the process cavity provided by the utility model, including device main part, device main part set up between process cavity 1 and gate valve 3 connect process cavity 1 and gate valve 3, device main part including the fixed baffle 4 and rotating baffle 5 that the whole is discoid, fixed baffle 4 is provided with first through-hole 41, rotating baffle 5 is provided with second through-hole 51, fixed baffle 4 and rotating baffle 5 coaxial arrangement and in the center rotatable connection, by rotating the rotating baffle 5 adjustment its relative angle with fixed baffle 4, adjustment second through-hole 51 and first through-hole 41's intercommunication area, and then adjustment fixed baffle 4's opening 4, realize process cavity 1 and gate valve 3 intercommunication area's adjustment, and then adjustment cold pump 2 pumping speed.

[0041] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The features provided in the present disclosure are intended to be illustrative, not limiting, unless otherwise stated. In specific implementations, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and technical features from a corresponding independent claim can be combined by any appropriate means, not just the specific combinations listed in the claims, if technically feasible.

[0042] Although the utility model discloses as above, the utility model discloses not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited by the range defined in the claims.

Claims

1. A cold pumpdown control apparatus for a process chamber, comprising: The device body is arranged between a process cavity and a gate valve connected with the process cavity and the gate valve, and comprises a fixed baffle and a rotating baffle in a disc shape. The fixed baffle is provided with a first through hole, and the rotating baffle is provided with a second through hole. The fixed baffle and the rotating baffle are coaxially arranged and rotatably connected at the center. The relative angle between the fixed baffle and the rotating baffle is adjusted by rotating the rotating baffle, the communication area between the second through hole and the first through hole is adjusted, and then the opening degree of the fixed baffle is adjusted.

2. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The outer diameter of the fixed baffle is larger than that of the rotating baffle. The fixed baffle is provided with a mounting hole arranged outside the rotating baffle. The fixed baffle is arranged between the interface flange of the process cavity and the interface flange of the gate valve. The interface flange of the process cavity and the interface flange of the gate valve are connected by a bolt passing through the mounting hole.

3. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The first through hole is a plurality of first through holes arranged at equal intervals along the circumference of the fixed baffle.

4. The cold pump down speed control apparatus for a process chamber of claim 3, wherein, The number, size and arrangement position of the second through hole are the same as those of the first through hole. When the second through hole is completely overlapped with the first through hole, the opening degree of the fixed baffle is maximum. When the second through hole is completely staggered with the first through hole, the opening degree of the fixed baffle is minimum.

5. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The center of the fixed baffle is provided with a first connecting hole, and the center of the rotating baffle is provided with a second connecting hole. The rotating baffle and the fixed baffle are rotatably connected by a connecting screw passing through the second connecting hole and the first connecting hole in sequence.

6. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The first connecting hole is a threaded hole, and the second connecting hole is a through hole. The connecting screw passes through the second connecting hole and is screwed into the first connecting hole. When the connecting screw is not tightened, the rotating baffle can rotate relative to the fixed baffle. When the connecting screw is tightened, the rotating baffle and the fixed baffle are locked and fixed.

7. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The edge of the rotating baffle is provided with a first angle scale along the circumference. The side of the fixed baffle close to the rotating baffle is provided with a second angle scale corresponding to the first angle scale. The adjustment angle is confirmed by comparing the first angle scale and the second angle scale.

8. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The edge of the fixed baffle is provided with a positioning notch for indicating the installation direction of the fixed baffle.

9. The cold pump down speed control apparatus for a process chamber of claim 1, wherein, The material of the fixed baffle and the rotating baffle is metal.

Images