Piston structure of vacuum valve

Abstract

The piston structure of the vacuum valve comprises a piston head, a piston rod, a shaft seat, a piston tail and a tail connector, the piston head, the piston rod and the tail connector are sequentially connected, the shaft seat and the piston tail are arranged on the piston rod in a sleeved mode, and the piston rod is provided with a first end and a second end. The piston rod sequentially comprises a first mounting section and a second mounting section from the first end to the second end; the diameter of the first installation section is larger than that of the second installation section, a step is formed at the joint of the first installation section and the second installation section, the first installation section is sleeved with the shaft seat, a sealing groove is formed in the inner wall of the shaft seat, a sealing ring is arranged in the sealing groove, and the shaft seat is installed outside the first installation section in a sealed mode through the sealing ring. The piston tail sleeves the second mounting section, a positioning groove is formed in the inner wall of one end, close to the tail joint, of the piston tail, and when the piston tail is arranged on the second mounting section, one end of the piston tail abuts against the step, and a lining is arranged in the positioning groove in the other end of the piston tail. According to the utility model, the moving smoothness and the sealing reliability of the piston structure are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum valve technical field, especially a kind of piston structure of vacuum valve. BACKGROUND

[0002] Vacuum valve refers to in vacuum system, for changing airflow direction, adjusting the size of air flow, cutting off or connecting the element of pipeline. With compressed air as power source, valve action is driven by cylinder and other actuators, with the advantages of rapid action, sensitive reaction etc. Mainly applied in electronics, semiconductor, aerospace, chemical industry, pharmaceutical and other fields. For example, in the process of semiconductor manufacturing, vacuum valve is used to control the vacuum environment in reaction chamber, to ensure the precision and quality of chip manufacturing.

[0003] However, the various parts of the piston structure of the existing vacuum valve are fixedly connected, and the matching connection is worn and not tight during the long-term movement of the piston structure, resulting in leakage. Therefore, it is necessary to provide a piston structure of vacuum valve to solve or at least partially solve the above problems. SUMMARY

[0004] The utility model embodiment provides a kind of piston structure of vacuum valve, optimize structure, improve the smoothness of piston structure movement and the reliability of sealing when moving.

[0005] The utility model embodiment provides a kind of piston structure of vacuum valve, including piston head, piston rod, axle seat, piston tail and tail connector, the piston head, piston rod and tail connector are sequentially connected, the axle seat and the piston tail are set on the piston rod, the piston rod has first end and second end, the piston rod sequentially includes first installation section and second installation section from first end to second end;The diameter of the first installation section is greater than the diameter of the second installation section and forms step at the connecting place of the first installation section and the second installation section, the axle seat is set outside the first installation section, sealing groove is provided in the inner wall of the axle seat, sealing ring is provided in the sealing groove, the axle seat is sealed and installed on the outside of the first installation section by sealing ring;The piston tail is set outside the second installation section, the inner wall of one end of the piston tail close to the tail connector is provided with positioning groove, when the piston tail is set to second installation section, one end of the piston tail is abutted with the step, and the other end is provided with bushing in the positioning groove.

[0006] Preferably, the piston head is threadedly connected with the first end of the piston rod, the end of the piston head connected with the piston rod is provided with a first connecting hole, the first connecting hole is provided with a first internal thread, and the outer wall of the first end of the piston rod is provided with a first external thread matched with the first internal thread.

[0007] Preferably, the tail joint is threadedly connected with the second end of the piston rod, the end of the tail joint connected with the piston rod is provided with a second connecting hole, the second connecting hole is provided with a second internal thread, and the outer wall of the second end of the piston rod is provided with a second external thread matched with the second internal thread.

[0008] Preferably, the sealing grooves arranged on the inner wall of the shaft seat are a plurality of sealing grooves arranged coaxially and spaced apart.

[0009] Preferably, the two ends of the piston head are both provided with a buffer groove, and the buffer groove is provided with a buffer washer.

[0010] Preferably, the inner wall of the one end of the piston tail close to the tail joint is further provided with a gasket groove, the gasket groove is sequentially arranged with the positioning groove, when the piston tail is arranged to the second mounting section, the one end of the piston tail abuts against the step, the other end of the piston tail is respectively provided with a bushing and a gasket in the positioning groove and the gasket groove, when the second end of the piston rod is connected with the tail joint, the tail joint abuts against the gasket, and the positioning of the piston tail is realized.

[0011] Preferably, the outer wall of the piston head and the tail joint is provided with a wrench groove.

[0012] Preferably, the first mounting section is coated with lubricating oil at the position in contact with the inner wall of the bushing.

[0013] Preferably, the second mounting section is coated with lubricating oil at the position in contact with the inner wall of the piston tail.

[0014] Preferably, the material of the piston head, the piston rod, the shaft seat, the piston tail and the tail joint is aluminum alloy.

[0015] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0016] For example, the utility model provides a piston structure of vacuum valve, including piston head, piston rod, axle seat, piston tail and tail joint, piston head, piston rod and tail joint connect gradually, axle seat and piston tail are set on piston rod, piston rod has first end and second end, piston rod includes first installation section and second installation section gradually from first end to second end, the diameter of first installation section is greater than the diameter of second installation section and forms step at first installation section and second installation section connection, axle seat is set on the outside of first installation section, the inner wall of axle seat is provided with sealing groove, and sealing ring is arranged in sealing groove, and axle seat is sealed and installed on the outside of first installation section through sealing ring, piston tail is set on the outside of second installation section, and the inner wall of one end of piston tail close to tail joint is provided with positioning groove, when piston tail is set to second installation section, one end of piston tail is in abutment with step, and the other end positioning groove is provided with bushing, the inner wall of axle seat is provided with sealing ring and is attached to piston rod, so that the air tightness of piston structure is effectively guaranteed, step and bushing cooperate to realize the positioning of piston tail, and axle seat and piston tail do not rub each other in the process of operation of piston structure, so that the service life of piston structure is prolonged.

[0017] For example, the piston head, the piston rod and the tail joint are connected by screw thread, so that the connection between the parts is more compact, and the piston head is provided with a buffer ring at both ends, so that the piston structure is beneficially buffered during operation, and the durability of the piston structure is improved.

[0018] For example, the first installation section and the inner wall of the bushing are coated with lubricating oil at the contact position, and the second installation section and the inner wall of the piston tail are coated with lubricating oil at the contact position, so that the piston structure runs more smoothly during operation, and the integrity and stability of the entire structure are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 is a schematic view of the piston structure of the vacuum valve in the utility model embodiment;

[0020] Figure 2 is an exploded view of the piston structure of the vacuum valve in the utility model embodiment;

[0021] Figure 3 is a sectional view of the piston structure of the vacuum valve in the utility model embodiment;

[0022] Figure 4 is a schematic view of the vacuum valve when it is closed in the utility model embodiment;

[0023] Figure 5 is a schematic view of the vacuum valve when it is opened in the utility model embodiment.

[0024] BRIEF DESCRIPTION OF DRAWINGS

[0025] 100 - piston structure; 200 - valve body; 201 - working gas inlet; 202 - working gas outlet; 203 - control gas outlet; 204 - control gas inlet;

[0026] 1 - piston head; 11 - buffer groove; 12 - first internal thread;

[0027] 2 - piston rod; 21 - first mounting section; 22 - second mounting section;

[0028] 3 - bushing;

[0029] 4 - shaft seat; 41 - sealing groove; 42 - positioning boss;

[0030] 5 - tail joint; 51 - second internal thread;

[0031] 6 - gasket;

[0032] 7 - piston tail; 71 - positioning groove. DETAILED DESCRIPTION

[0033] In order to make the purpose, features and beneficial effects of the utility model more obvious and easy to understand, the specific embodiments of the utility model are described in detail below in combination with the drawings. It can be understood that the specific embodiments described below are only used to explain the utility model, and are not a limitation on the utility model. In the drawings, the same or similar reference signs can be used to refer to the same or similar elements in different embodiments, and the description of the same or similar elements in different embodiments and the description of prior art elements, features, effects and the like can be omitted.

[0034] Referring to Figures 1-3 , the utility model embodiment provides a kind of piston structure of vacuum valve.

[0035] Specifically, the piston structure of the vacuum valve includes a piston head 1, a piston rod 2, a shaft seat 4, a piston tail 7 and a tail joint 5, the piston head 1, the piston rod 2 and the tail joint 5 are sequentially connected, the shaft seat 4 and the piston tail 7 are sleeved on the piston rod 2, the piston rod 2 has a first end and a second end, and the piston rod 2 sequentially includes a first mounting section 21 and a second mounting section 22 from the first end to the second end; the diameter of the first mounting section 21 is greater than that of the second mounting section 22, and a step is formed at the connection position of the first mounting section 21 and the second mounting section 22, the shaft seat 4 is sleeved outside the first mounting section 21, a sealing groove 41 is arranged on the inner wall of the shaft seat 4, a sealing ring (not shown) is arranged in the sealing groove 41, and the shaft seat 4 is sealingly installed outside the first mounting section 21 through the sealing ring; the piston tail 7 is sleeved outside the second mounting section 22, a positioning groove 71 is arranged on the inner wall of one end of the piston tail 7 close to the tail joint 5, one end of the piston tail 5 abuts against the step when the piston tail 5 is arranged on the second mounting section 22, and a bushing 3 is arranged in the positioning groove 71 of the other end of the piston tail 5; the sealing ring is arranged on the inner wall of the shaft seat 4 and abuts against the piston rod 2, so that the air tightness of the piston structure is effectively guaranteed; the step and the bushing 3 cooperate to realize the positioning of the piston tail 7, the shaft seat 4 and the piston tail 7 do not rub against each other in the running process of the piston structure, and parts are not damaged, thereby prolonging the service life of the piston structure.

[0036] In some embodiments, the piston head 1 is threadedly connected with the first end of the piston rod 2, the end, where the piston head 1 is connected with the piston rod 2, is provided with a first connecting hole, a first internal thread 12 is arranged in the first connecting hole, and an outer wall of the first end of the piston rod 2 is provided with a first external thread matched with the first internal thread 12; the threaded connection makes the connection between the parts more compact.

[0037] In some embodiments, the tail joint 5 is threadedly connected with the second end of the piston rod 2, the end, where the tail joint 5 is connected with the piston rod 2, is provided with a second connecting hole, a second internal thread 51 is arranged in the second connecting hole, and an outer wall of the second end of the piston rod 2 is provided with a second external thread matched with the second internal thread 51; the threaded connection makes the connection between the parts more compact.

[0038] In some embodiments, the sealing grooves 41 arranged on the inner wall of the shaft seat 4 are multiple, and the multiple sealing grooves 41 are coaxially and spaced apart.

[0039] In some embodiments, the two ends of the piston head 1 are both provided with a buffer groove 11, and a buffer gasket is arranged in the buffer groove 11, so that the piston structure is beneficially buffered in the running process, and the durability of the piston structure is improved.

[0040] In some embodiments, the inner wall of the piston tail 7 near one end of the tail joint 5 is further provided with a gasket groove, which is sequentially arranged with the positioning groove 71, when the piston tail 7 is arranged to the second mounting section 22, one end of the piston tail 7 abuts against the step, and the other end is respectively arranged with the bushing 3 and the gasket 6 in the positioning groove 71 and the gasket groove, when the second end of the piston rod 2 is connected with the tail joint 5, the tail joint 5 abuts against the gasket 6, and the positioning of the piston tail 7 is realized.

[0041] In some embodiments, the outer wall of the piston head 1 and the tail joint 5 is provided with a wrench groove.

[0042] In some embodiments, the first mounting section 21 is coated with lubricating oil at the contact position with the inner wall of the shaft seat 4 (position A in the figure); Figure 3 In some embodiments, the second mounting section 22 is coated with lubricating oil at the contact position with the inner wall of the piston tail 7 (position B in the figure); Figure 3 So that the piston structure is more smooth in operation, and the integrity and stability of the whole structure are ensured.

[0043] In some embodiments, the material of the piston head 1, the piston rod 2, the shaft seat 4, the piston tail 7 and the tail joint 5 is aluminum alloy.

[0044] Figure 4 is a schematic view when the vacuum valve is closed in the embodiment of the utility model; Figure 5 is a schematic view when the vacuum valve is opened in the embodiment of the utility model.

[0045] Referring to Figure 4 and Figure 5 , specifically, the outer wall of the shaft seat 4 is provided with a positioning boss 42, when the piston structure 100 is arranged in the valve body 200 of the vacuum valve, the positioning boss 42 of the shaft seat 4 divides the valve cavity into a working cavity and a control cavity, the working cavity is provided with a working air inlet 201 and a working air outlet 202 which communicate with the cavity, the control cavity is provided with a control air inlet 204 and a control air outlet 203, when the control air inlet 204 is opened and the control air outlet 203 is closed, air is communicated to the control cavity, the piston tail 7 drives the piston rod 2, the piston head 1 and the tail joint 5 to move relative to the shaft seat 4 and the valve body 200, the working air inlet 201 and / or the working air outlet 202 are closed, the vacuum valve is closed and the work is stopped, when the control air inlet 204 is closed and the control air outlet 203 is opened, the control cavity is exhausted, the working air inlet 201 is communicated with the working air outlet 202, the piston tail 7 drives the piston rod 2, the piston head 1 and the tail joint 5 to move in the opposite direction relative to the shaft seat 4 and the valve body 200, the working air inlet 201 and the working air outlet 202 are communicated, the vacuum valve is opened and the work is started.

[0046] In summary, the piston structure of the vacuum valve, comprising a piston head 1, a piston rod 2, a shaft seat 4, a piston tail 7 and a tail joint 5, the piston head 1, the piston rod 2 and the tail joint 5 are connected in sequence, the shaft seat 4 and the piston tail 7 are sleeved on the piston rod 2, the piston rod 2 has a first end and a second end, and the piston rod 2 comprises a first mounting section 21 and a second mounting section 22 in sequence from the first end to the second end; the diameter of the first mounting section 21 is greater than that of the second mounting section 22 and forms a step at the connection between the first mounting section 21 and the second mounting section 22, the shaft seat 4 is sleeved outside the first mounting section 21, a sealing groove 41 is arranged on the inner wall of the shaft seat 4, a sealing ring is arranged in the sealing groove 41, and the shaft seat 4 is sealingly mounted outside the first mounting section 21 through the sealing ring; the piston tail 7 is sleeved outside the second mounting section 22, a positioning groove 71 is arranged on the inner wall of one end of the piston tail 7 close to the tail joint 5, one end of the piston tail 5 abuts against the step when the piston tail 5 is arranged to the second mounting section 22, and a bushing 3 is arranged in the positioning groove 71 of the other end; the sealing ring is arranged on the inner wall of the shaft seat 4 and abuts against the piston rod 2, so that the air tightness of the piston structure is effectively guaranteed; the step and the bushing 3 cooperate to realize the positioning of the piston tail 7, the shaft seat 4 and the piston tail 7 do not rub against each other during the operation of the piston structure, so that the parts are not damaged, and the service life of the piston structure is prolonged.

[0047] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The examples of features provided in the present disclosure are intended to be illustrative, not limiting, unless otherwise specified. In specific implementations, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and technical features from a corresponding independent claim can be combined by any appropriate means, not just the specific combinations listed in the claims, if technically feasible.

[0048] Although the present disclosure has been described as above, the present disclosure is not limited thereto. Any person skilled in the art can make various modifications and changes without departing from the spirit and scope of the present disclosure, and therefore the protection scope of the present disclosure should be subject to the scope defined by the claims.

Claims

1. A piston structure of a vacuum valve, characterized by, The piston head, the piston rod, the shaft seat, the piston tail and the tail joint are sequentially connected, the shaft seat and the piston tail are sleeved on the piston rod, the piston rod has a first end and a second end, and the piston rod sequentially comprises a first mounting section and a second mounting section from the first end to the second end; the diameter of the first mounting section is larger than that of the second mounting section, and a step is formed at the connection between the first mounting section and the second mounting section, the shaft seat is sleeved outside the first mounting section, a sealing groove is arranged on the inner wall of the shaft seat, a sealing ring is arranged in the sealing groove, and the shaft seat is sealingly installed outside the first mounting section through the sealing ring; the piston tail is sleeved outside the second mounting section, a positioning groove is arranged on the inner wall of one end of the piston tail close to the tail joint, and a bushing is arranged in the positioning groove at the other end of the piston tail when the piston tail is arranged on the second mounting section.

2. The vacuum valve piston structure of claim 1, wherein, The piston head is threadedly connected with the first end of the piston rod, a first connecting hole is arranged on the end of the piston head connected with the piston rod, a first internal thread is arranged in the first connecting hole, and a first external thread matched with the first internal thread is arranged on the outer wall of the first end of the piston rod.

3. The vacuum valve piston structure of claim 1, wherein, The tail joint is threadedly connected with the second end of the piston rod, a second connecting hole is arranged on the end of the tail joint connected with the piston rod, a second internal thread is arranged in the second connecting hole, and a second external thread matched with the second internal thread is arranged on the outer wall of the second end of the piston rod.

4. The vacuum valve piston structure of claim 1, wherein, The sealing groove arranged on the inner wall of the shaft seat is a plurality of sealing grooves, and the plurality of sealing grooves are coaxially and spaced apart.

5. The vacuum valve piston structure of claim 1, wherein, Buffer grooves are arranged on both ends of the piston head, and buffer rings are arranged in the buffer grooves.

6. The vacuum valve piston structure of claim 1, wherein, A gasket groove is further arranged on the inner wall of one end of the piston tail close to the tail joint, and the gasket groove and the positioning groove are sequentially arranged, a bushing and a gasket are respectively arranged in the positioning groove and the gasket groove at the other end of the piston tail when the piston tail is arranged on the second mounting section, and the tail joint abuts against the gasket when the second end of the piston rod is connected with the tail joint, so that the positioning of the piston tail is realized.

7. The vacuum valve piston structure of claim 1, wherein A wrench groove is arranged on the outer wall of each of the piston head and the tail joint.

8. The vacuum valve piston structure of claim 1, wherein, Lubricating oil is coated on the contact position between the first mounting section and the inner wall of the bushing.

9. The vacuum valve piston structure of claim 1, wherein, Lubricating oil is coated on the contact position between the second mounting section and the inner wall of the piston tail.

10. The vacuum valve piston structure of claim 1, wherein, The materials of the piston head, the piston rod, the shaft seat, the piston tail and the tail joint are all aluminum alloy.

Images