Heating wire connection structure of vacuum transmission valve and semiconductor device

Abstract

The utility model provides a vacuum transmission valve heating wire connection structure and semiconductor equipment, the vacuum transmission valve comprises a valve plate internally provided with a heating rod and a driving shaft driving the valve plate to move, the heating wire connection structure comprises a first connector and a second connector, the first connector is arranged on the valve plate, and the second connector is arranged on the driving shaft. The first connector assembly is electrically connected with the heating rod, the second connector assembly is arranged on the driving shaft and used for being connected with an external power source, a containing cavity is formed in the assembling and combining position of the valve plate and the driving shaft, and electrical connecting points of the heating wire connecting structure are arranged in the first connector assembly and the second connector assembly. External vibration, collision and stress are thoroughly prevented from directly acting on electrical connection points, the axial and radial installation space of the vacuum transmission valve is saved, the vacuum transmission valve adapts to the compact design of semiconductor equipment, the electrical connection points are physically isolated from the external severe process environment, and the electrical safety risk is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor manufacturing, more specifically, it relates to a kind of heating wire connection structure of vacuum transmission valve and semiconductor equipment. BACKGROUND

[0002] With the development of semiconductor manufacturing process to more fine node, the control requirements of equipment internal cleanliness and thermal environment uniformity are increasingly stringent. As a key isolation component, the active heating of the valve plate of the vacuum transmission valve has become a standard configuration to prevent process gas condensation, reduce particle contamination and improve process stability. The core of heating valve plate is to reliably and safely transmit electric energy from external power supply to heating rod embedded in valve plate, and heating wire connection mechanism is the key to ensure long-term and stable operation of heating valve.

[0003] At present, the common heating wire connection mode of vacuum transmission valve mainly includes two types. The first type is integral hard connection, that is, the heating wire is directly welded or fixed by screw on the terminal of the side wall or rear of the valve body after being led out from the valve plate, and the valve plate and the driving shaft (main shaft) are not designed to be separable. The second type is external connector connection, that is, an independent industrial connector socket is arranged outside the valve body, and the terminal of the heating wire led out from the valve plate is assembled with a matching male head or female head to realize connection by manual plugging.

[0004] However, the above-mentioned existing heating wire connection mode of vacuum transmission valve has the following defects: the connection structure design of heating wire and heating rod is not stable enough, and is mostly arranged on both sides of the valve body or other external areas, which not only increases the axial space requirement of transmission valve, but also is easily loosened or even fallen off due to long-term influence of equipment vibration or thermal expansion and contraction, resulting in heating interruption or temperature fluctuation, which may seriously cause product yield reduction; the disassembly process of the existing connection structure is complicated, and when the heating wire needs to be maintained or replaced, a plurality of fixed components need to be disassembled, which takes a long time and reduces the equipment utilization rate; the exposed wire is prone to insulation aging or damage in high-temperature and high-humidity process environment, which has electrical safety hazards and threatens the safety of equipment and operators. UTILITY MODEL CONTENTS

[0005] The utility model provides a kind of heating wire connection structure of vacuum transmission valve and semiconductor equipment, which can improve product yield, adapt to the compact layout requirement of semiconductor equipment and reduce electrical safety hazards.

[0006] The technical scheme adopted by the utility model to solve its technical problems is: the utility model provides a kind of heating wire connection structure of vacuum transmission valve in the first aspect, the vacuum transmission valve includes valve plate with heating rod and driving shaft for driving valve plate movement, and the heating wire connection structure includes:

[0007] A first connector is arranged on the valve plate and electrically connected with the heating rod;

[0008] A second connector is arranged on the driving shaft and used for connecting with an external power supply.

[0009] The valve plate and the driving shaft are combined at a fitting position, and a receiving cavity is formed at the fitting position.

[0010] In an embodiment, the receiving cavity is formed by a first groove on the valve plate and a second groove on the end face of the driving shaft.

[0011] In an embodiment, the plug-in end of the first connector is provided with at least one positioning groove, and the plug-in end of the second connector is provided with a guide protrusion in sliding fit with the positioning groove.

[0012] In an embodiment, the driving shaft is provided with a threaded hole in communication with the receiving cavity, and a locking screw is arranged in the threaded hole and abuts against the second connector to limit the circumferential rotation of the second connector.

[0013] In an embodiment, the gap between the inner wall of the receiving cavity and the first connector and the second connector after abutment is filled with a sealing structure.

[0014] In an embodiment, the first connector and the second connector each include an insulating shell made of insulating material.

[0015] In an embodiment, the end face of the first connector and / or the second connector is embedded with a magnet for providing auxiliary positioning and suction force when the first connector and the second connector are abutted.

[0016] In an embodiment, the first connector includes a male contact, and the second connector includes a female contact, the male contact being a pin, and the female contact being a spring contact hole adapted to the pin.

[0017] In an embodiment, the opening end of the receiving cavity is provided with an annular sealing groove, and a sealing ring is embedded in the annular sealing groove.

[0018] The second aspect of the utility model provides a semiconductor device, including vacuum transmission valve, the vacuum transmission valve includes the heating line connection structure of vacuum transmission valve as described above.

[0019] The heating wire connecting structure of the vacuum transmission valve is used for the vacuum transmission valve, the vacuum transmission valve comprises a valve plate provided with a heating rod and a driving shaft for driving the valve plate to move, the heating wire connecting structure comprises a first connector and a second connector, the first connector is arranged on the valve plate, the first connector is electrically connected with the heating rod, the second connector is arranged on the driving shaft, the second connector is used for being connected with an external power supply, a containing cavity is formed at the assembly joint of the valve plate and the driving shaft, the first connector and the second connector are contained in the containing cavity and constitute a pluggable electrical connection. The electrical connection point of the heating wire connecting structure is internally arranged in the first connector and the second connector, external vibration, knocking and stress are completely avoided from directly acting on the electrical connection point, the electrical connection no longer adopts an external junction box or a connector, the installation space of the vacuum transmission valve in the axial direction and the radial direction is greatly saved, the compact design of the semiconductor equipment is adapted, the electrical connection point is physically isolated from the external harsh process environment, and the electrical safety risk is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the following will briefly introduce the drawing needed to be used in the embodiment or prior art description, obviously, the drawing in the following description is only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating labor.

[0021] Figure 1 The structural schematic diagram of the first connector of the heating wire connecting structure provided by the embodiment of the utility model is shown in the drawing.

[0022] Figure 2 The structural schematic diagram of the second connector of the heating wire connecting structure provided by the embodiment of the utility model is shown in the drawing.

[0023] Figure 3 The structural schematic diagram of the first connector and the second connector of the heating wire connecting structure provided by the embodiment of the utility model after plugging is shown in the drawing.

[0024] Figure 4 The structural schematic diagram of the valve plate and the driving shaft of the vacuum transmission valve provided by the embodiment of the utility model after installation is shown in the drawing.

[0025] Figure 5 The installation structural schematic diagram of the second connector of the heating wire connecting structure provided by the embodiment of the utility model is shown in the drawing.

[0026] In the drawing, various reference signs are as follows:

[0027] 1-heating line connection structure; 2-valve plate; 3-driving shaft; 11-first connector; 12-second connector; 31-threaded hole; 111-first positioning groove; 112-second positioning groove; 121-guide protrusion; 122-third positioning groove. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments but not all embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0029] In the description of the present application, it should be understood that the terms "include" and "have" and any variations thereof used in this text are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device that includes a series of steps or units need not be limited to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0030] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0031] In addition, the terms "first", "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. It should be understood that the term "and / or" used in this text is only a description of the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. In the description of the present application, unless otherwise specified, the meaning of "multiple" is two or more.

[0032] The heating wire connection structure of the existing vacuum conveying valve has many technical defects: firstly, the connection structure of the heating wire and the heating rod is not stable enough, and is mostly arranged on the two sides of the valve body or other external areas, which not only increases the axial space requirement of the conveying valve, but also is prone to loosening or even falling off due to long-term vibration or thermal expansion and contraction of the equipment, resulting in heating interruption or temperature fluctuation, and even product yield reduction in severe cases; secondly, the disassembly and assembly process of the existing connection mechanism is complicated, and when the heating wire needs to be maintained or replaced, a plurality of fixed parts need to be disassembled, which takes a long time and reduces the equipment utilization rate; thirdly, the insulation protection measures of part of the connection mechanism are not in place, and the exposed wires are prone to insulation aging or damage in the high-temperature and high-humidity process environment, which poses an electrical safety hazard and threatens the safety of the equipment and the operating personnel. These defects restrict the reliable application of the vacuum conveying valve in semiconductor equipment. The present application provides a heating wire connection structure of a vacuum conveying valve and a semiconductor equipment based on the above problems.

[0033] The heating wire connection structure of a vacuum conveying valve and a semiconductor equipment provided by the present application will be described in detail below in combination with specific embodiments.

[0034] Figure 1 A structure diagram of a first connector provided by the heating wire connection structure of the embodiment of the present application, Figure 2 A structure diagram of a second connector provided by the heating wire connection structure of the embodiment of the present application, Figure 3 A structure diagram of the first connector and the second connector of the heating wire connection structure provided by the embodiment of the present application after plugging, Figure 4 A structure diagram of the valve plate and the drive shaft of the vacuum conveying valve provided by the embodiment of the present application after installation, please refer to Figures 1-4 The first aspect of the embodiment of the present application provides a heating wire connection structure 1 of a vacuum conveying valve, the vacuum conveying valve comprises a valve plate 2 provided with a heating rod and a drive shaft 3 for driving the movement of the valve plate 2, the heating wire connection structure 1 comprises a first connector 11 and a second connector 12, the first connector 11 is arranged on the valve plate 2, the first connector 11 is electrically connected with the heating rod, the second connector 12 is arranged on the drive shaft 3, the second connector 12 is used for connecting with an external power supply, and a receiving cavity is formed at the assembly joint of the valve plate 2 and the drive shaft 3, the first connector 11 and the second connector 12 are received in the receiving cavity and constitute a pluggable electrical connection.

[0035] The vacuum transmission valve of the embodiment comprises a valve plate 2 for isolating a chamber, which is internally embedded with a heating rod to achieve active temperature control, and a drive shaft 3 for driving the valve plate 2 to perform linear reciprocating motion and realize the opening and closing of the valve. The first connector 11 is an electrical connection terminal arranged on the valve plate 2, which is reliably electrically connected with the heating rod in the valve plate 2 through internal wiring (first heating line segment) of the valve plate 2. The second connector 12 is an electrical connection starting terminal arranged on the drive shaft 3, which is finally connected with an external power supply of a device cabinet through a wire (second heating line segment) passing through the hollow interior of the drive shaft 3. The accommodation cavity is a closed or semi-closed space formed at the assembly joint of the valve plate 2 and the drive shaft 3, which is jointly enclosed by the structure (such as a groove) of the valve plate 2 and the drive shaft 3 after assembly.

[0036] When the valve plate 2 is installed on the drive shaft 3, the first connector 11 and the second connector 12 are automatically or manually aligned and inserted in the accommodation cavity to form an electrical path, and when the valve plate 2 is disassembled, the two can be separated, and the plugging action is completed in the internal accommodation cavity and cannot be seen externally.

[0037] When installing the valve plate 2, the operator pushes the valve plate 2 towards the drive shaft 3, during which the first connector 11 on the valve plate 2 gradually approaches the second connector 12 on the drive shaft 3. When the two are mechanically aligned in place, the first connector 11 and the second connector 12 are also accurately aligned and fully inserted in the accommodation cavity, and the circuit connection from the external power supply to the heating rod of the valve plate 2 is completed instantaneously. The entire electrical connection process is completed synchronously with the mechanical installation process, and the connection point is completely protected in the accommodation cavity composed of the metal valve body and the shaft body.

[0038] The electrical connection point of the embodiment is built into the first connector 11 and the second connector 12, completely avoiding the direct effect of external vibration, bumping and stress on the electrical connection point, eliminating the external junction box or connector, greatly saving the installation space of the vacuum transmission valve in the axial and radial directions, and adapting to the compact design of semiconductor equipment. The electrical connection point is physically isolated from the external harsh process environment (dust, corrosive gas, plasma), which fundamentally reduces the risk of short circuit, creepage and corrosion, and the modular connector structure supports the quick replacement of heating wires of different specifications, which can adapt to heating rods with various power requirements by replacing matching male and female contact pieces, meets the diversified temperature control requirements of semiconductor equipment, and at the same time, the standardized design of the first connector 11 and the second connector 12 facilitates mass production and maintenance and replacement, and reduces the overall cost.

[0039] In a specific embodiment, the accommodating cavity is formed by the first groove formed on the valve plate 2 and the second groove formed on the end face of the drive shaft 3, and the embodiment relates to a specific implementation of the accommodating cavity, that is, the first groove machined on the back face of the valve plate 2 and the second groove machined on the end face of the drive shaft 3 are combined to form a complete cylindrical or square cylindrical cavity. For example, during manufacturing, the matching grooves are machined at the center positions of the joint surfaces of the valve plate 2 and the drive shaft 3, and during assembly, the two groove openings are aligned to form a complete cylindrical or square cylindrical cavity. The accommodating cavity structure is simple and convenient to process, and can form an internal accommodating space without adding additional parts, and the assembly precision and sealing performance are easy to guarantee.

[0040] Further, the plug-in end of the first connector 11 is provided with at least one first positioning groove 111, and the plug-in end of the second connector 12 is provided with a guide protrusion 121 which is in sliding fit with the first positioning groove 111. In the embodiment, the first positioning groove 111 is arranged at the plug-in end of the first connector 11, and the guide protrusion 121 is arranged at the plug-in end of the second connector 12, thereby forming a sliding rail guide system. During plugging, the guide protrusion 121 can be smoothly slid into the first positioning groove 111 only when the angle is completely correct, and the operator can feel a clear “clicking” feeling, thereby simplifying the operation, eliminating the need for repeated attempts to align, and shortening the installation time.

[0041] Figure 5 A second connector mounting structure schematic diagram of the heating wire connection structure is provided in the embodiment of the utility model, please refer to Figures 1-5 Preferably, the drive shaft 3 is provided with a threaded hole 31 which is in communication with the accommodating cavity, and a locking screw is arranged in the threaded hole 31, and the locking screw abuts against the second connector 12 to limit the circumferential rotation of the second connector 12. In the embodiment, after the second connector 12 is placed in the second groove, the locking screw is screwed into the threaded hole 31, and the locking screw abuts against the side face of the second connector 12. The embodiment can prevent the circumferential rotation or axial movement of the second connector 12 in the accommodating cavity due to vibration, and provides additional mechanical locking, so that the connection is more stable and reliable. The outer wall of the first connector 11 is provided with a second positioning groove 112, the outer wall of the second connector 12 is provided with a third positioning groove 122, and the second positioning groove 112 and the third positioning groove 122 are aligned when the first connector 11 and the second connector 12 are plugged, so that the first connector 11 can be prevented from being deviated during plugging.

[0042] Further, the gap between the inner wall of the accommodating cavity and the first connector 11 and the second connector 12 after abutting is filled with a sealing structure. In this embodiment, the accommodating cavity is filled with a sealing structure, such as a high-temperature-resistant insulating sealant. For example, after the first connector 11 and the second connector 12 are inserted and fixed, liquid sealant is injected into the gap in the accommodating cavity through a reserved injection hole, and a solid filling layer is formed after solidification. The sealing structure of this embodiment can completely isolate the external moisture, dust and corrosive gas from invading the contact point, and can also provide an additional electrical insulation barrier to prevent electric leakage. The solidified glue can also assist in fixing and buffering the connector.

[0043] In this embodiment, the first connector 11 and the second connector 12 each include an insulating shell made of insulating material. For example, the insulating shell of the first connector 11 and the second connector 12 is made of high-performance engineering plastic such as polyether ether ketone (PEEK) or ceramic. The metal conductive components (pins and sockets) are covered or fixed in the insulating shell, and the insulating shell constitutes the main body of the connector. The insulating shell of the first connector 11 and the second connector 12 in this embodiment ensures that the entire connector will not short circuit when in contact with the metal valve plate 2 and the drive shaft 3. Preferably, the insulating shell is made of PEEK material, which has high strength, high insulation and excellent high-temperature performance (long-term use temperature > 250°C).

[0044] In a specific embodiment, a magnet member is embedded in the end face of the first connector 11 and / or the second connector 12 to provide auxiliary positioning and adsorption force when the first connector 11 and the second connector 12 are abutted. In this embodiment, a magnet member is embedded in the end face of the first connector 11 and / or the second connector 12. For example, a small hole is processed in the end face of the connector, and a high-temperature-resistant permanent magnet (such as a samarium-cobalt magnet) is embedded and fixed. When the two connectors are close to a certain distance, the magnetic force starts to act. The magnet member of this embodiment can assist in positioning, and the magnetic force can guide the connector to automatically attract and align in the last distance. Maintenance personnel can clearly perceive whether the connection is in place through the attraction, thereby improving the operation experience.

[0045] For example, the first connector 11 includes a male contact, and the second connector 12 includes a female contact. The male contact is a pin, and the female contact is a spring-leaf socket adapted to the pin. In this embodiment, the first connector 11 is specifically defined as a male contact including a pin, and the second connector 12 is a female contact including a spring-leaf socket. The pin of this embodiment is a rigid cylinder, and the spring-leaf socket is a sleeve with multiple elastic spring leaves. When inserted, the pin spreads the spring leaves, and the elastic force of the spring leaves provides stable contact pressure. The elastic contact of this embodiment provides low contact resistance, good anti-fretting ability and long plug-in life.

[0046] Further, the opening end of the accommodating cavity is provided with an annular sealing groove, and a sealing ring is embedded in the annular sealing groove. An annular sealing groove is arranged at the opening end of the accommodating cavity (i.e. the outer side of the joint surface between the valve plate 2 and the drive shaft 3), and a sealing ring is arranged in the annular sealing groove. For example, the sealing groove is machined at the edge of the first groove of the valve plate 2 or the second groove of the drive shaft 3. Before assembly, an O-shaped sealing ring (e.g. made of fluorine rubber) is arranged in the groove, and the sealing ring is compressed after assembly.

[0047] The sealing ring of the embodiment constitutes the first environmental sealing defense line, mainly preventing macroscopic particulate matters and gases in the chamber environment from invading the inside of the accommodating cavity through the joint surface gap, and forming double sealing between the inside and the outside with the sealing glue filled inside, thereby greatly improving the protection level.

[0048] The heating wire connection structure 1 of the vacuum transfer valve of the embodiment is precisely positioned by the first connector 11 and the second connector 12, has high strength and high temperature resistance of the PEEK connector, is angularly locked by the locking screw, and is gap-filled by the high-temperature-resistant insulating sealing glue, thereby forming a multi-stable mechanism against vibration and thermal expansion and contraction. Compared with the traditional external connection structure, the heating interruption or temperature fluctuation is effectively avoided, and the product yield is improved. The internal integrated wiring design saves about 35% of the axial space compared with the traditional external structure, adapts to the compact layout requirement of the semiconductor equipment, and the combination of the fluorine rubber sealing ring and the high-temperature-resistant sealing glue can resist the corrosion of corrosive gases and dust in the semiconductor process, thereby prolonging the service life of the connection mechanism. The modular connector structure of the embodiment supports quick replacement of different specifications of heating wires, and only the matching male and female connector plugs need to be replaced to adapt to heating rods with various power requirements, thereby meeting the diversified temperature control requirements of the semiconductor equipment. The standardized design of the first connector 11, the second connector 12 and the male and female connector plugs facilitates batch production and maintenance and replacement, and reduces the overall cost.

[0049] The second aspect of the embodiment of the utility model provides a semiconductor equipment, including a vacuum transfer valve, the vacuum transfer valve includes a valve plate with a heating rod and a drive shaft for driving the valve plate to move, and the vacuum transfer valve includes the heating wire connection structure of the vacuum transfer valve as described above.

[0050] For example, the heating wire connection structure includes: a first connector arranged on the valve plate, the first connector being electrically connected with the heating rod; and a second connector arranged on the drive shaft, the second connector being used for connecting with an external power supply; wherein an accommodating cavity is formed at the assembly joint of the valve plate and the drive shaft, and the first connector and the second connector are accommodated in the accommodating cavity and constitute a pluggable electrical connection.

[0051] The semiconductor equipment can be an etching machine, a chemical vapor deposition (CVD) equipment, a physical vapor deposition (PVD) equipment, an atomic layer deposition (ALD) equipment, etc. The connecting structure of the present application is integrated on the vacuum transfer valve of the equipment.

[0052] The heating wire connecting structure of the vacuum transfer valve of the present embodiment improves the reliability, maintainability and productivity of the whole semiconductor equipment. The heating valve plate works more stably, reduces the process defects and particle contamination caused by temperature fluctuation, and finally improves the yield of chip manufacturing. The quick maintenance structure also reduces the equipment downtime and increases the comprehensive utilization rate of the equipment.

[0053] In the above description, the description referring to the terms "an embodiment", "some embodiments", "an example", "a specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the present specification and the features of the different embodiments or examples, without contradiction.

[0054] The above embodiments are only used to illustrate the technical solutions of the present application, but not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A heating wire connection structure for a vacuum transmission valve, the vacuum transmission valve comprising a valve plate with a heating rod inside and a drive shaft for driving the valve plate to move, characterized in that, The heating wire connection structure includes: A first connector is disposed on the valve plate and is electrically connected to the heating rod. The second connector is disposed on the drive shaft and is used to connect to an external power source. The valve plate and the drive shaft are assembled together to form a receiving cavity, and the first connector and the second connector are received in the receiving cavity and form a pluggable electrical connection.

2. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: The receiving cavity is formed by the engagement of a first groove formed on the valve plate and a second groove formed on the end face of the drive shaft.

3. The heating wire connection structure of the vacuum transmission valve according to claim 2, characterized in that: The first connector has at least one positioning groove at its insertion end, and the second connector has a guide protrusion that slides with the positioning groove at its insertion end.

4. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: The drive shaft is provided with a threaded hole communicating with the receiving cavity, and a locking screw is provided in the threaded hole. The locking screw abuts against the second connector to restrict the circumferential rotation of the second connector.

5. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: The gap between the inner wall of the receiving cavity and the first and second connectors after docking is filled with a sealing structure.

6. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: Both the first connector and the second connector include an insulating housing made of insulating material.

7. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: The end faces of the first connector and the second connector are fitted with magnetic components to provide auxiliary positioning and adsorption force when the first connector and the second connector are mated.

8. The heating wire connection structure of the vacuum transmission valve according to claim 1, characterized in that: The first connector includes a male contact, and the second connector includes a female contact. The male contact is a pin, and the female contact is a spring-loaded socket that mates with the pin.

9. The heating wire connection structure of the vacuum transmission valve according to claim 2, characterized in that: The opening end of the receiving cavity is provided with an annular sealing groove, and a sealing ring is embedded in the annular sealing groove.

10. A semiconductor device, characterized in that: The invention includes a vacuum transmission valve, wherein the vacuum transmission valve comprises the heating wire connection structure of the vacuum transmission valve according to any one of claims 1-9.

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