Alternating current-direct current conversion device for supplying power to semiconductor VCE external molecular pump

Abstract

The utility model provides an AC / DC conversion device for supplying power to a semiconductor VCE plug-in molecular pump, which comprises a shell and a conversion circuit board arranged in the shell, and the shell is provided with an AC input interface, an overvoltage protection switch and a DC output interface. The conversion circuit board is provided with an input terminal, an electromagnetic filtering module, a protection module, a voltage transformation module, a rectification module, a filtering module and an output terminal which are electrically connected in sequence, and the AC input interface, the overvoltage protection switch and the input terminal are connected in sequence through a cable; and the output terminal is connected with the direct current output interface through a cable. According to the utility model, safe power supply of the externally-hung molecular pump is realized.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field especially relates to a kind of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply. BACKGROUND

[0002] In semiconductor technology, wafer transport needs to use external hanging molecular pump to extract VCE (Vacuum Cassette Elevator, vacuum cassette elevator) cavity to high vacuum, the power supply system used by cavity and molecular pump is different, VCE uses alternating current power supply, and molecular pump uses direct current power supply. In order to ensure the unity of equipment power supply, the molecular pump needs to be powered by VCE directly connected to the power supply equipment. However, the existing switch power supply on the market needs external electrical cabinet packaging, otherwise the connection is exposed and unsafe, and the installation is complicated. In addition, the existing DC power adapter cannot meet the external hanging demand due to size, protection level, interface compatibility and other problems. Therefore, it is necessary to provide an AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply to realize safe power supply of external hanging molecular pump. SUMMARY

[0003] The utility model provides an AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply to realize safe power supply of external hanging molecular pump.

[0004] To achieve the above purpose, the utility model provides the following technical scheme:

[0005] An AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply, comprising a housing and a conversion circuit board arranged in the housing, an AC input interface, an overvoltage protection switch and a DC output interface are arranged on the housing, an input terminal, an electromagnetic filter module, a protection module, a voltage conversion module, a rectifier module, a filter module and an output terminal are arranged on the conversion circuit board and connected in sequence, the AC input interface, the overvoltage protection switch and the input terminal are connected in sequence through a cable, and the output terminal is connected to the DC output interface through a cable.

[0006] Preferably, the electromagnetic filter module comprises an electromagnetic filter circuit and a rectifier and PFC circuit, the protection module comprises a switching circuit, a control circuit, an overload protection circuit and an over-temperature protection circuit, the voltage conversion module comprises a voltage conversion circuit, the rectifier module comprises a rectifier circuit, the filter module comprises a filter circuit, and the electromagnetic filter circuit, the rectifier and PFC circuit, the switching circuit, the voltage conversion circuit, the rectifier circuit and the filter circuit are connected in sequence.

[0007] Preferably, the switching circuit is connected with the control circuit, the overload protection circuit and the over-temperature protection circuit respectively, the overload protection circuit and the over-temperature protection circuit are connected with the control circuit respectively, and the overload protection circuit and the over-temperature protection circuit control the switching circuit through the control circuit.

[0008] Preferably, the voltage transformation circuit, the rectification circuit and the filter circuit are two paths, the two paths of the voltage transformation circuit, the rectification circuit and the filter circuit are connected one by one, and the two paths of the filter circuit are connected with the output terminal and the cooling fan respectively.

[0009] Preferably, the cooling fan is fixed to the top surface in the shell.

[0010] Preferably, the shell comprises a bottom shell, a cover shell and a front panel, the conversion circuit board is fixed to the bottom shell, the cover shell is arranged on the bottom shell, and the front panel seals the front side of the cover shell.

[0011] Preferably, the AC input interface, the over-voltage protection switch and the DC output interface are arranged on the front panel.

[0012] Preferably, the top and the two sides of the cover shell are respectively provided with air inlets and air outlets.

[0013] Preferably, the front panel is provided with an indicator lamp.

[0014] Preferably, the material of the shell is aluminum alloy.

[0015] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0016] For example, the AC / DC conversion device for power supply of semiconductor VCE externally hung molecular pump comprises a shell and a conversion circuit board arranged in the shell, the shell is provided with an AC input interface, an over-voltage protection switch and a DC output interface, the conversion circuit board is provided with an input terminal, an electromagnetic filter module, a protection module, a voltage transformation module, a rectification module, a filter module and an output terminal which are electrically connected in sequence, the AC input interface, the over-voltage protection switch and the input terminal are connected in sequence through a cable; the output terminal and the DC output interface are connected through a cable, and the safe and reliable power supply of the externally hung molecular pump is realized. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 is the AC / DC conversion device for power supply of semiconductor VCE externally hung molecular pump in the embodiment of the utility model, and the structure schematic view is shown;

[0018] Figure 2 is the structure schematic view of the AC / DC conversion device for power supply of semiconductor VCE externally hung molecular pump after the cover shell is removed in the embodiment of the utility model.

[0019] Figure 3 is a conversion circuit board structure schematic diagram in the embodiment of the utility model;

[0020] Figure 4 is the principle view of alternating current and direct current conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model;

[0021] Figure 5 is the schematic diagram of semiconductor VCE for alternating current and direct current conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model.

[0022] Reference signs:

[0023] 1 - shell;11 - bottom shell;12 - cover;121 - air inlet;122 - air outlet;13 - front panel;

[0024] 2 - conversion circuit board;21 - input terminal;22 - electromagnetic filter module;221 - electromagnetic filter circuit;222 - rectification and PFC circuit;23 - protection module;231 - switching circuit;232 - control circuit;233 - overload protection circuit;234 - over-temperature protection circuit;24 - voltage conversion module;241 - voltage conversion circuit;25 - rectification module;251 - rectification circuit;26 - filter module;261 - filter circuit;27 - output terminal;

[0025] 3 - alternating current input interface;

[0026] 4 - overvoltage protection switch;

[0027] 5 - direct current output interface;

[0028] 6 - indicator lamp;

[0029] 7 - cooling fan;

[0030] 100 - alternating current and direct current conversion device;200 - semiconductor VCE;201 - external power supply interface;300 - molecular pump. DETAILED DESCRIPTION

[0031] In order to make the purpose, features and beneficial effects of the utility model more obvious and easy to understand, the specific implementation of the utility model will be described in detail below in combination with the drawings. It can be understood that the specific implementation described below is only used to explain the utility model, and is not a limitation on the utility model. In the drawings, the same or similar reference signs can be used to refer to the same or similar elements in different embodiments, and the description of the same or similar elements in different embodiments and the description of prior art elements, features, effects, etc. can be omitted.

[0032] Figure 1It is the structure schematic view of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model; Figure 2 It is the structure schematic view of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model after removing the cover shell; Figure 3 It is the structure schematic view of conversion circuit board in the embodiment of the utility model; Figure 4 It is the principle view of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model; Figure 5 It is the schematic view of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply in the embodiment of the utility model installed in semiconductor VCE.

[0033] With reference to Figures 1-4 The utility model embodiment provides a kind of AC-DC conversion device for semiconductor VCE external hanging molecular pump power supply.

[0034] Specifically, the AC-DC conversion device 100 includes a housing 1 and a conversion circuit board 2 disposed in the housing 1. The housing 1 is provided with an AC input interface 3, an overvoltage protection switch 4 and a DC output interface 5. The conversion circuit board 2 is provided with an input terminal 21, an electromagnetic filter module 22, a protection module 23, a voltage conversion module 24, a rectifier module 25, a filter module 26 and an output terminal 27 connected in sequence. The AC input interface 3, the overvoltage protection switch 4 and the input terminal 21 are connected in sequence by a cable. The output terminal 27 is connected to the DC output interface 5 by a cable.

[0035] Specifically, the AC input interface 3 adopts IEC standard C-14 interface, which meets IP67 design and is convenient to connect with the AC 110V AC power supply interface (IEC standard C-13) of semiconductor VCE 200. The DC output interface 5 adopts Wiprosf1212 / S-3 connector, which meets IP67 design and is dustproof and waterproof, and can be used directly externally. The AC input interface 3 and the DC output interface 5 adopt different interface forms, which have the functions of preventing mistakes and electric shock, and are simple and convenient to connect.

[0036] Specifically, the overvoltage protection switch 4 is linked with the electromagnetic filter circuit 221 for control, to ensure the controllability and safety of the equipment connection.

[0037] In some embodiments, the electromagnetic filtering module 22 comprises an electromagnetic filtering circuit 221 and a rectification and PFC (Power Factor Correction) circuit 222; the protection module 23 comprises a switching circuit 231, a control circuit 232, an overload protection circuit 233 and an over-temperature protection circuit 234; the voltage transformation module 24 comprises a voltage transformation circuit 241; the rectification module 25 comprises a rectification circuit 251; the filtering module 26 comprises a filtering circuit 261; the electromagnetic filtering circuit 221, the rectification and PFC circuit 222, the switching circuit 231, the voltage transformation circuit 241, the rectification circuit 251 and the filtering circuit 261 are connected in sequence.

[0038] In some embodiments, the switching circuit 231 is connected to the control circuit 232, the overload protection circuit 233 and the over-temperature protection circuit 234 respectively, and the overload protection circuit 233 and the over-temperature protection circuit 234 are connected to the control circuit 232 respectively, and the overload protection circuit 233 and the over-temperature protection circuit 234 control the switching circuit 231 through the control circuit 232.

[0039] Specifically, when the overload protection circuit 233 and / or the over-temperature protection circuit 234 detects overload and / or temperature overload, the switching circuit 231 is controlled to be disconnected through the control circuit 232, and the AC-DC conversion device 100 stops working, thereby avoiding damage to the conversion circuit board 2.

[0040] In some embodiments, the voltage transformation circuit 241, the rectification circuit 251 and the filtering circuit 261 are both two-way, and the two-way voltage transformation circuit 241, the rectification circuit 251 and the filtering circuit 261 are connected one by one respectively, and the two-way filtering circuit 261 is connected to the output terminal 27 and the cooling fan 7 respectively.

[0041] In some embodiments, the cooling fan 7 is fixed to the top surface in the shell 1.

[0042] In some embodiments, the shell 1 comprises a bottom shell 11, a cover shell 12 and a front panel 13, the conversion circuit board 2 is fixed on the bottom shell 11, the cover shell 12 is covered on the bottom shell 11, and the front panel 13 closes the front side of the cover shell 12.

[0043] In some embodiments, the AC input interface 3, the over-voltage protection switch 4 and the DC output interface 5 are convenient to operate.

[0044] In some embodiments, the top and both sides of the cover shell 12 are respectively provided with air inlets 121 and air outlets 122.

[0045] Specifically, the cooling fan 7 is fixed to the top surface in the cover shell 12, and the air inlet 121 is arranged corresponding to the position of the cooling fan 7.

[0046] In some embodiments, the front panel 13 is provided with an indicator light 6, which is connected between the overvoltage protection switch 4 and the input terminal 21.

[0047] In some embodiments, the shell 1 is made of aluminum alloy, which is light and firm.

[0048] Referring to Figure 5 In actual use, the AC / DC conversion device 100 is installed below the molecular pump 300 arranged on one side of the semiconductor VCE 200, close to the external power supply interface 201 of the semiconductor VCE 200, and the air inlet 121 of the AC / DC conversion device 100 is arranged downward.

[0049] In summary, the AC / DC conversion device for external molecular pump power supply of the semiconductor VCE provided by the utility model, including shell 1 and setting in the conversion circuit board 2 of shell 1, shell 1 is provided with alternating current input interface 3, overvoltage protection switch 4 and direct current output interface 5, conversion circuit board 2 is provided with input terminal 21, electromagnetic filter module 22, protection module 23, voltage transformation module 24, rectifier module 25, filter module 26 and output terminal 27 that are electrically connected in sequence, alternating current input interface 3, overvoltage protection switch 4 and input terminal 21 are sequentially connected by cable, and output terminal 27 is connected with direct current output interface 5 by cable, to realize the safe and reliable power supply of the external molecular pump 300.

[0050] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The features provided in the present disclosure are intended to be illustrative, not limiting, unless otherwise stated. In specific implementations, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and technical features from a corresponding independent claim can be combined by any appropriate means, not just the specific combinations listed in the claims, if technically feasible.

[0051] Although the utility model discloses as above, the utility model discloses not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited by the range defined in the claims.

Claims

1. An AC / DC converter for powering an external molecular pump via a semiconductor VCE, characterized in that, The shell is provided with an alternating current input interface, an overvoltage protection switch and a direct current output interface, and the conversion circuit board is provided with an input terminal, an electromagnetic filtering module, a protection module, a transformation module, a rectification module, a filtering module and an output terminal connected in sequence, and the alternating current input interface, the overvoltage protection switch and the input terminal are connected in sequence through a cable.

2. The AC / DC converter for a semiconductor VCE externally-hung molecular pump power supply according to claim 1, characterized in that, The electromagnetic filtering module comprises an electromagnetic filtering circuit and a rectification and PFC circuit; the protection module comprises a switching circuit, a control circuit, an overload protection circuit and an over-temperature protection circuit; the transformation module comprises a transformation circuit; the rectification module comprises a rectification circuit; the filtering module comprises a filtering circuit; and the electromagnetic filtering circuit, the rectification and PFC circuit, the switching circuit, the transformation circuit, the rectification circuit and the filtering circuit are connected in sequence.

3. The AC / DC converter for the semiconductor VCE external hanging molecular pump power supply according to claim 2, characterized in that, The switching circuit is connected with the control circuit, the overload protection circuit and the over-temperature protection circuit respectively, and the overload protection circuit and the over-temperature protection circuit are connected with the control circuit respectively, and the overload protection circuit and the over-temperature protection circuit control the switching circuit through the control circuit.

4. The AC / DC converter for a semiconductor VCE externally-hung molecular pump power supply according to claim 2, characterized in that, The transformation circuit, the rectification circuit and the filtering circuit are both two-way, and the two-way transformation circuit, the rectification circuit and the filtering circuit are connected one by one, and the two-way filtering circuits are connected with the output terminal and a cooling fan respectively.

5. The AC / DC converter for the semiconductor VCE external hanging molecular pump power supply according to claim 4, characterized in that, The cooling fan is fixed to the top surface in the shell.

6. The AC / DC converter for a semiconductor VCE externally-hung molecular pump power supply according to claim 1, characterized in that, The shell comprises a bottom shell, a cover shell and a front panel, the conversion circuit board is fixed to the bottom shell, the cover shell covers the bottom shell, and the front panel closes the front side of the cover shell.

7. The AC / DC converter for the semiconductor VCE external hanging molecular pump power supply according to claim 6, characterized in that, The alternating current input interface, the overvoltage protection switch and the direct current output interface are arranged on the front panel.

8. The AC / DC converter for the semiconductor VCE external hanging molecular pump power supply according to claim 6, characterized in that, The top and two sides of the cover shell are respectively provided with air inlets and air outlets.

9. The AC / DC converter for a semiconductor VCE externally-hung molecular pump power supply according to claim 6, characterized in that, The front panel is provided with an indicator lamp.

10. The AC / DC converter for a semiconductor VCE externally-hung molecular pump power supply according to claim 1, characterized in that, The material of the shell is aluminum alloy.

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