Suction and pressure combined multi-position DBC bonding tool

Abstract

The utility model relates to the technical field of lead bonding, in particular to a suction and pressure combined multi-position DBC (Direct Bonding Copper) bonding tool, which comprises a mounting frame, a suction platform, a carrying disc, a negative pressure system and a press-fitting mechanism, the adsorption platform is arranged at the top of the mounting frame, the carrying disc is horizontally and slidably matched on the adsorption platform, and the adsorption platform communicates with the negative pressure system; a plurality of first adsorption grooves are formed in the adsorption platform, a plurality of second adsorption grooves are formed in the carrying disc and used for containing DBC ceramic substrates to be machined, and the first adsorption grooves and the second adsorption grooves are in one-to-one correspondence and communicate with each other; the press-fitting mechanism comprises a reciprocating driving assembly and a press-fitting assembly, the reciprocating driving assembly is arranged on the mounting frame, the press-fitting assembly is located above the adsorption platform, the driving end of the reciprocating driving assembly is connected with the press-fitting assembly and used for driving the press-fitting assembly to vertically move in a reciprocating mode, and the press-fitting end of the press-fitting assembly is used for pressing the DBC ceramic substrate to be machined. By the adoption of the scheme, the number of clamped DBCs can be increased, and meanwhile the stability and reliability of adsorption and fixation can be ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to wire bonding technical field especially relates to a kind of suction pressure combined multi-position DBC bonding tool. BACKGROUND

[0002] In the packaging process of IGBT module, the bonding of directly bonding copper substrate (DBC) and chip is a key step. This process usually involves using ultrasonic bonder to fix one end of lead to chip output surface and the other end to DBC copper layer, so as to realize the electrical connection between chip and DBC substrate. In order to ensure the quality and stability of bonding, reliable fixation of DBC is needed during operation, and one common method is to use vacuum adsorption to fix DBC on the processing platform.

[0003] However, in the actual production process, because DBC will go through heating treatment in PINK furnace in the previous process, it will deform to a certain extent. As shown in Figure 9 DBC after deformation and vacuum platform exist gap (DBC deformation amount and DBC slot shape, size, welding temperature, cooling speed and other factors are related, usually within 0.1mm), which leads to DBC cannot be quickly and stably adsorbed on the vacuum platform, reduces the production efficiency. Although this deformation is subtle, usually no more than 0.1mm, but it is enough to affect the contact tightness between DBC and vacuum platform, causing air leakage phenomenon, and then reducing the stability and reliability of adsorption. Especially in the case of fixing multiple DBCs at the same time, the overall air leakage rate increases significantly, so that the traditional single negative pressure solution is difficult to effectively cope with, which not only limits the production capacity, but also increases the cost of equipment adjustment and maintenance. UTILITY MODEL CONTENT

[0004] To solve the above technical problems, the utility model provides a kind of suction pressure combined multi-position DBC bonding tool, can ensure the stability and reliability of adsorption fixation while increasing the number of clamped DBC.

[0005] In order to achieve the above purpose, the present application provides the following technical scheme:

[0006] A kind of suction pressure combined multi-position DBC bonding tool, including mounting bracket, adsorption platform, carrier disc, negative pressure system and press fitting mechanism;

[0007] The adsorption platform is arranged at the top of the mounting bracket, and the carrier disc is horizontally slidingly fitted on the adsorption platform, and the adsorption platform is communicated with the negative pressure system;

[0008] A number of first adsorption grooves are provided on the adsorption platform, and a number of second adsorption grooves are provided on the carrier plate for placing the to-be-processed DBC ceramic substrate. The first adsorption grooves and the second adsorption grooves correspond to each other and are connected.

[0009] The press-fitting mechanism includes a reciprocating drive component and a press-fitting component. The reciprocating drive component is arranged on the mounting frame. The press-fitting component is located above the adsorption platform. The drive end of the reciprocating drive component is connected to the press-fitting component and is used to drive the press-fitting component to move vertically back and forth. The press-fitting end of the press-fitting component is used to press the to-be-processed DBC ceramic substrate placed in the second adsorption groove.

[0010] Furthermore, the mounting frame includes a bottom plate, support walls, support grooves and limiting rods.

[0011] There are two support walls, which are respectively vertically and fixedly installed at the left and right ends of the bottom plate. Support grooves distributed in the front-back direction are opened on the inner side walls of the two support walls. The adsorption platform is fixedly installed between the two support walls. The left and right side walls of the adsorption platform are respectively fixedly connected in the support grooves on both sides. The carrier plate is slidably fitted in the two support grooves and is located on the upper surface of the adsorption platform. The limiting rod is vertically and fixedly installed on the rear side wall of the bottom plate. The top of the limiting rod is higher than the support groove. The limiting rod is used to abut against the rear side wall of the carrier plate. Through the combined use of the bottom plate, support walls and support grooves in this solution, the structural rigidity of the entire mounting frame is enhanced, the vibration and displacement risks during the operation are reduced, and the levelness and flatness of the adsorption platform are ensured. By sliding the carrier plate in the support grooves, the carrier plate can move smoothly back and forth, facilitating the operator to quickly replace or adjust the position of the to-be-processed DBC ceramic substrate. By limiting the carrier plate with the limiting rod, it is prevented that the carrier plate accidentally slides out of the support groove during the operation, increasing the safety, and helping to ensure that each to-be-processed DBC ceramic substrate can be in the corresponding position when performing press-fitting or other treatments.

[0012] Furthermore, a flow-dividing groove is provided in the adsorption platform. The flow-dividing groove is arranged in a "king" character shape. A communication hole is provided in the first adsorption groove for communicating with the flow-dividing groove. The negative pressure system is communicated with the inner bottom wall of the flow-dividing groove. The "king" character-shaped layout of the flow-dividing groove in this solution can ensure the uniform distribution of negative pressure on the entire adsorption platform. By connecting the first adsorption groove to the flow-dividing groove via the communication hole, an efficient air flow channel network is formed, reducing the resistance in the air flow path, enabling the negative pressure system to extract the air under the adsorption platform more quickly and effectively, thus quickly establishing the required vacuum environment and improving the speed and efficiency of the overall adsorption process.

[0013] Furthermore, the negative pressure system includes a first control valve and an air delivery pipe.

[0014] The first control valve is arranged in the mounting frame, one end of the first control valve is communicated with the external air pump, and the other end of the first control valve is communicated with the inner bottom wall of the flow distribution groove through the gas conveying pipe. The introduction of the first control valve allows accurate control of the gas flow entering the adsorption platform. The operator or the automatic system can adjust the valve opening according to the actual demand, thereby adjusting the negative pressure size, ensuring that each DBC substrate can obtain appropriate adsorption force, and improving the processing quality and efficiency.

[0015] Further, the reciprocating driving assembly comprises a cylinder and a connecting block.

[0016] The cylinder is provided with two and is fixedly installed on the left and right side walls of the mounting frame, the driving end of the two cylinders is fixedly connected with the connecting block, and the top of the connecting block is fixedly connected with the press assembly. When the press assembly is driven by the two cylinders to move up and down, balanced force is applied, the press assembly can move stably in the vertical direction, and each DBC ceramic substrate to be processed can be uniformly pressed, thereby reducing product quality problems caused by uneven pressure.

[0017] Further, the press assembly comprises a pressing plate, a pressing frame and an elastic component.

[0018] The bottom of the pressing plate is fixedly connected with the driving end of the reciprocating driving assembly, a plurality of observation holes are formed in the pressing plate corresponding to the plurality of second adsorption grooves, the pressing frame is provided with a plurality of observation holes, the pressing frame is connected to the bottom of the pressing plate through the elastic component, and the bottom of the pressing frame can abut against the top of the DBC ceramic substrate to be processed. The plurality of pressing frames on the pressing plate are driven by the reciprocating driving assembly to move to the DBC ceramic substrate to be processed in the second adsorption groove, until the bottoms of the plurality of pressing blocks abut against the top of the DBC ceramic substrate to be processed, and the deformation of the elastic component can complete the pressing of the plurality of DBCs at the same time.

[0019] Further, the elastic component comprises a spring shaft, a conical countersunk head, a spring and a snap spring.

[0020] The bottom of the pressing plate is provided with a mounting groove at each of the four corners corresponding to each pressing frame, and a mounting hole is formed in the inner top wall of the mounting groove.

[0021] The bottom of the spring shaft is fixedly connected with the conical countersunk head, and the upper part of the spring shaft is provided with a snap spring groove.

[0022] The four corners of the pressing frame are provided with a mounting groove corresponding to the pressing plate, the spring shaft passes through the counterbore, the mounting groove and the mounting hole in sequence, the snap spring is arranged in the snap spring groove, the bottom of the spring shaft is provided with a conical counterbore, the spring is arranged on the spring shaft, and the upper end and the lower end of the spring are arranged on the inner top wall of the mounting groove and the inner bottom wall of the counterbore respectively. The combination of the spring shaft, the conical counterbore and the snap spring provides necessary buffer and pre-pressure, ensures smooth pressing and uniform force, and facilitates daily inspection and maintenance.

[0023] Further, the inner wall of the pressing frame is provided with a slope block, which is used for pressing the DBC ceramic substrate to be processed. The design of the slope block helps to more evenly distribute the pressure during the pressing process, avoids the risk of product damage caused by local overpressure, and improves the flatness of the DBC surface, thereby enhancing the success rate and quality of subsequent welding and other processes. In addition, the slope block avoids the operation path of the bonding machine and ensures the strength of the pressing frame.

[0024] Further, the second adsorption groove is provided with a plurality of arrayed adsorption holes. The arrayed adsorption holes can significantly increase the effective adsorption surface area of the second adsorption groove, so that the DBC ceramic substrate to be processed is adsorbed in the second adsorption groove, and the DBC ceramic substrate to be processed is more uniformly contacted with each adsorption hole, thereby avoiding the situation of local over-adsorption or insufficient adsorption.

[0025] Further, the front side wall of the carrier disc is provided with a handle. The handle on the front side wall of the carrier disc facilitates pulling out or pushing onto the adsorption platform.

[0026] The beneficial effects of the utility model include:

[0027] A plurality of DBC ceramic substrates to be processed are placed in the second adsorption groove of the carrier disc, and then the carrier disc is horizontally slid onto the adsorption platform. The reciprocating driving assembly drives the pressing assembly to move towards the adsorption platform, and the DBC ceramic substrate to be processed placed in the second adsorption groove is pressed. During the pressing process, the negative pressure system is started, the first adsorption groove on the adsorption platform generates suction force on the second adsorption groove, and the negative pressure adsorption of the DBC ceramic substrate to be processed in the second adsorption groove is completed, thereby completing the fixation of the DBC ceramic substrate to be processed.

[0028] The plurality of DBC ceramic substrates to be processed can be simultaneously processed through the one-to-one correspondence and connection of the plurality of first adsorption grooves and the plurality of second adsorption grooves, thereby improving the production capacity of the production line. The design of the combination of adsorption and pressure of the negative pressure system, the adsorption platform, the reciprocating driving assembly and the pressing assembly not only utilizes the adsorption function of the negative pressure system to fix the plurality of DBC ceramic substrates to be processed, but also provides additional physical pressure through the pressing mechanism, solves the problem of unstable adsorption caused by the deformation of the DBC, ensures that reliable fixation can be achieved even in the case of slight deformation, completes the clamping requirement of the plurality of DBC, and can ensure the stability and reliability of adsorption fixation while increasing the number of clamped DBC. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is a whole structure schematic diagram (pressing state) of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0030] Figure 2 It is a whole structure schematic diagram (unpressing state) of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0031] Figure 3 It is a mounting bracket structure schematic diagram of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0032] Figure 4 It is the internal structure schematic diagram of the adsorption platform of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0033] Figure 5 It is the structure schematic diagram of the adsorption platform of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0034] Figure 6 It is the partial sectional view of the adsorption platform and the carrier disc of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0035] Figure 7 It is the partial sectional view of the pressing assembly of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0036] Figure 8 It is the partial sectional view of the pressing assembly and the carrier disc of the embodiment of the utility model discloses a kind of adsorption and pressure combination's multiple DBC bonding tool.

[0037] Figure 9 It is the schematic diagram of existing adsorption in the background art of the utility model. DETAILED DESCRIPTION

[0038] The following is further described in detail through specific embodiments:

[0039] The markings in the accompanying drawings include:

[0040] Mounting bracket 1, base plate 11, support wall 12, support groove 13, limit rod 14, adsorption platform 2, first adsorption groove 21, diversion groove 22, connecting hole 23, carrier plate 3, second adsorption groove 31, adsorption hole 32, negative pressure system 4, first control valve 41, air supply pipe 42, negative pressure gauge 43, reciprocating drive assembly 5, cylinder 51, connecting block 52, press assembly 6, pressure plate 601, pressing frame 602, mounting groove 603, mounting hole 604, countersunk hole 605, spring shaft 606, tapered countersunk head 607, spring 608, snap ring groove 609, snap ring 610, ramp block 611, observation port 612, DBC ceramic substrate to be processed 7.

[0041] The basic implementation examples are as follows: Figures 1 to 9 As shown:

[0042] This utility model embodiment proposes a multi-position DBC bonding tooling that combines suction and pressure, as shown in the attached figure. Figures 1 to 2 As shown, it includes a mounting frame 1, an adsorption platform 2, a carrier tray 3, a negative pressure system 4, and a pressing mechanism;

[0043] The adsorption platform 2 is set on the top of the mounting frame 1, and the carrier plate 3 is horizontally slidably fitted on the adsorption platform 2. Specifically, the carrier plate 3 is slidably fitted on the adsorption platform 2 along the front-back direction of the adsorption platform 2. The adsorption platform 2 is connected to the negative pressure system 4.

[0044] The adsorption platform 2 is provided with a plurality of first adsorption grooves 21, and the carrier plate 3 is provided with a plurality of second adsorption grooves 31 for placing the DBC ceramic substrate 7 to be processed. The first adsorption grooves 21 and the second adsorption grooves 31 correspond one-to-one and are connected. In this embodiment, there are 12 first adsorption grooves 21 and 12 second adsorption grooves 31, which are respectively opened on the upper surface of the adsorption platform 2 and the carrier plate 3.

[0045] The pressing mechanism includes a reciprocating drive assembly 5 and a pressing assembly 6. The reciprocating drive assembly 5 is mounted on the mounting frame 1, and the pressing assembly 6 is located above the adsorption platform 2. The driving end of the reciprocating drive assembly 5 is connected to the pressing assembly 6 and is used to drive the pressing assembly 6 to move vertically reciprocally. The pressing end of the pressing assembly 6 is used to press the DBC ceramic substrate 7 to be processed placed in the second adsorption tank 31.

[0046] Place several to-be-processed DBC ceramic substrates 7 in the second adsorption groove 31 of the carrier plate 3, then horizontally slide the carrier plate 3 onto the adsorption platform 2, start the reciprocating drive assembly 5 to drive the pressing assembly 6 to move towards the adsorption platform 2, and press the to-be-processed DBC ceramic substrate 7 placed in the second adsorption groove 31. During the pressing process, start the negative pressure system 4, and through the first adsorption groove 21 on the adsorption platform 2, make the adsorption platform 2 generate a suction force on the second adsorption groove 31, complete the negative pressure adsorption of the to-be-processed DBC ceramic substrate 7 in the second adsorption groove 31, and thus complete the fixation of the to-be-processed DBC ceramic substrate 7.

[0047] As shown in the appendix Figure 3 As shown, the mounting frame 1 includes a bottom plate 11, support walls 12, support grooves 13 and limit rods 14; there are two support walls 12, which are respectively vertically and fixedly installed at the left and right ends of the bottom plate 11. Support grooves 13 distributed in the front-back direction are opened on the inner side walls of the two support walls 12. The adsorption platform 2 is fixedly installed between the two support walls 12, and the left and right side walls of the adsorption platform 2 are respectively fixedly connected in the support grooves 13 on both sides. Specifically, the top of the support groove 13 is higher than the top of the adsorption platform 2. The carrier plate 3 is slidably fitted in the two support grooves 13 and is located on the upper surface of the adsorption platform 2. The limit rod 14 is vertically and fixedly installed on the rear side wall of the bottom plate 11, and the top of the limit rod 14 is higher than the support groove 13. The limit rod 14 is used to abut against the rear side wall of the carrier plate 3. Specifically, there are two limit rods 14, and both are vertically and fixedly installed on the rear side wall of the bottom plate 11. The two limit rods 14 are spaced apart in the left-right direction. In this embodiment, the bottom surface of the carrier plate 3 is smooth and flat to ensure airtightness after fitting with the upper surface of the adsorption platform 2. At the same time, when the carrier plate 3 is placed between the two support grooves 13, it is limited within the two support grooves 13.

[0048] Specifically, a number of air pipe through holes are also opened on the support wall 12 for various air pipes to extend between the two support walls 12, including the air pipes of the cylinder 51 and the external air pump.

[0049] As shown in the appendix Figure 4 and Figure 6 As shown, a flow dividing groove 22 is opened in the adsorption platform 2. The flow dividing groove 22 is arranged in a "king" shape. A communication hole 23 is opened in the first adsorption groove 21 for communicating with the flow dividing groove 22. The negative pressure system 4 is communicated with the inner bottom wall of the flow dividing groove 22.

[0050] The negative pressure system 4 includes a first control valve 41 and an air delivery pipe 42; the first control valve 41 is arranged in the mounting frame 1. One end of the first control valve 41 is communicated with an external air pump, and the other end of the first control valve 41 is communicated with the inner bottom wall of the flow dividing groove 22 through the air delivery pipe 42.

[0051] In the embodiment, the negative pressure system 4 further comprises a negative pressure gauge 43, which is arranged at the bottom of the adsorption platform 2, and the detection end of the negative pressure gauge 43 is arranged in the shunt groove 22.

[0052] In the embodiment, when it is needed to adsorb and fix the DBC ceramic substrate 7 to be processed, each module is placed in the corresponding second adsorption groove 31, the external air pump is started, the flow is adjusted through the first control valve 41, and the air in the shunt groove 22 is started to be extracted. Since the first adsorption groove 21 is connected with the shunt groove 22 through the communication hole 23, as the air in the shunt groove 22 is extracted, the first adsorption groove 21 also forms a corresponding negative pressure area, so as to firmly adsorb the DBC placed therein, and the pressure change in the shunt groove 22 is monitored in real time through the negative pressure gauge 43. The operator or the automatic control system can adjust the state of the first control valve 41 according to the reading of the negative pressure gauge 43, so as to ensure that the ideal adsorption effect is achieved and maintained.

[0053] The reciprocating driving assembly 5 comprises a cylinder 51 and a connecting block 52. The cylinder 51 is arranged in two and fixedly installed on the left and right side walls of the mounting frame 1. The driving end of each of the two cylinders 51 is fixedly connected with the connecting block 52, and the top of the connecting block 52 is fixedly connected with the press-fitting assembly 6. In the embodiment, the reciprocating driving assembly 5 further comprises a second control valve and a flow divider. The air inlet end of the second control valve is communicated with the external air pump, the air outlet end of the second control valve is communicated with the air inlet end of the flow divider, and the flow divider comprises two air outlet ends which are respectively communicated with the cylinders 51 on the left and right side walls of the mounting frame 1.

[0054] As shown in FIG. 4, the reciprocating driving assembly 5 is arranged on the mounting frame 1, and the press-fitting assembly 6 is arranged on the top of the connecting block 52. Figures 7 to 8As shown, the press assembly 6 includes a pressing plate 601, a pressing frame 602 and elastic components; the bottom of the pressing plate 601 is fixedly connected with the driving end of the reciprocating driving assembly 5, specifically, the bottom of the pressing plate 601 is fixedly connected with the top of the connecting blocks 52 on both sides of the mounting frame 1, the pressing plate 601 is provided with a plurality of observation openings 612 corresponding to the second suction grooves 31, the pressing frame 602 is provided with a plurality of observation openings 612, in this embodiment, the observation openings 612 and the pressing frame 602 are both provided with 12, the pressing frame 602 is connected to the bottom of the pressing plate 601 through elastic components, the bottom of the pressing frame 602 can abut against the top of the DBC ceramic substrate 7 to be processed, in this embodiment, the pressing frame 602 has high overall hardness, and the surface of the pressing frame 602 in contact with the DBC is processed to have high flatness, when the pressing plate 601 is pressed down, the DBC can be reliably sucked by the vacuum suction platform 2 when the pressing frame 602 presses the DBC to the high flatness state. In this embodiment, the left and right cylinders 51 of the mounting frame 1 are started at the same time to drive the pressing plate 601 to move up and down, thereby driving the pressing frame 602 on the pressing plate 601 to move up and down, so that the lower surface of the pressing frame 602 can abut against the four edges of the upper surface of the DBC.

[0055] The elastic components include a spring shaft 606, a conical countersunk head 607, a spring 608 and a snap spring 610; the bottom of the pressing plate 601 is provided with a mounting groove 603 at each of the four corners corresponding to each pressing frame 602, the inner top wall of the mounting groove 603 is provided with a mounting hole 604; the bottom of the spring shaft 606 is fixedly connected with the conical countersunk head 607, the upper part of the spring shaft 606 is provided with a snap spring groove 609; the four corners of the pressing frame 602 are provided with a countersunk hole 605 corresponding to the mounting groove 603 of the pressing plate 601, the upper end of the spring shaft 606 passes through the countersunk hole 605, the mounting groove 603 and the mounting hole 604 in sequence, the snap spring groove 609 is located above the mounting hole 604, the snap spring 610 is clamped in the snap spring groove 609, the conical countersunk head 607 at the bottom of the spring shaft 606 abuts in the countersunk hole 605, the spring 608 is sleeved outside the spring shaft 606, and the upper and lower ends of the spring 608 abut against the inner top wall of the mounting groove 603 and the inner bottom wall of the countersunk hole 605 respectively.

[0056] In the initial state, the carrier plate 3 is pulled out of the adsorption platform 2, and a plurality of DBC ceramic substrates 7 to be processed are placed in the second adsorption groove 31, at this time the pressing plate 601 is located above the adsorption platform 2 by the air cylinder 51, at this time the spring 608 is in a natural or slightly compressed state, the pressing frame 602 is connected with the pressing plate 601 through the spring shaft 606 and the conical countersunk head 607, and is suspended below the pressing plate 601, the spring 608 provides a pre-pressure to ensure that the pressing frame 602 can be smoothly lowered; when the air cylinder 51 drives the pressing plate 601 to press down, the pressing operation is performed, with the downward movement of the pressing plate 601, the pressing frame 602 also begins to approach the DBC ceramic substrate 7 to be processed (i.e. DBC), because each pressing frame 602 corresponds to one DBC, and the bottom is processed to a higher flatness, so the DBC surface can be effectively flattened, when the pressing plate 601 continues to press down, the spring 608 is compressed and deformed, the pressing frame 602 contacts the DBC and gradually applies pressure, so that the DBC is more closely attached to the adsorption platform 2, at the same time, the negative pressure system 4 is started, air is extracted through the communication hole 23 between the first adsorption groove 21 and the second adsorption groove 31 to form a negative pressure environment, so that the DBC is firmly adsorbed on the platform, the spring 608 plays a buffering role in this process, ensuring that the pressure applied to each DBC is uniform and moderate, avoiding damage caused by excessive extrusion. After the pressing is completed, the reciprocating drive assembly 5 drives the pressing plate 601 to rise, the spring 608 returns to its original state, and the pressing frame 602 is pushed back to the initial position, preparing for the next operation.

[0057] Specifically, a plurality of limiting grooves are formed in the bottom of the pressing plate 601 corresponding to each observation hole 612, and the mounting groove 603 is located at the inner top wall of the limiting groove, the limiting groove is used for placing the pressing frame 602, so that the pressing frame 602 is vertically slidingly fitted in the limiting groove, and the outer peripheral wall of the pressing frame 602 is vertically slidingly fitted with the inner peripheral wall of the limiting groove, so that the pressing frame 602 can vertically slide in the limiting groove with a certain displacement.

[0058] The inner peripheral wall of the pressing frame 602 is provided with a slope block 611, which is used for pressing the DBC ceramic substrate 7 to be processed. The lower surfaces of the four slope blocks 611 provided on the inner peripheral wall of the pressing frame 602 are pressed on the inner sides of the four edges of the upper surface of the DBC, and the slope blocks 611 provided around are arranged to avoid the bonding machine binding head and ensure the strength of the pressing frame, so that the DBC has a higher flatness state.

[0059] As shown in FIG. 8, the pressing frame 602 is provided with a plurality of observation holes 612, which are used for observing the DBC ceramic substrate 7 to be processed. Figure 5 and Figure 6As shown, the second adsorption groove 31 is provided with a plurality of arrayed adsorption holes 32. Specifically, the plurality of adsorption holes 32 are communicated with the first adsorption groove 21 and the communication hole 23 in the first adsorption groove 21. Through the plurality of arrayed adsorption holes 32, the effective adsorption surface area of the second adsorption groove 31 is increased, and the stable adsorption of the DBC ceramic substrate 7 to be processed in the second adsorption groove 31 is realized.

[0060] The front side wall of the carrier disc 3 is provided with a handle. Through the handle, the carrier disc 3 can be pushed and pulled in the front-rear direction when the DBC ceramic substrate 7 to be processed is placed or taken. Specifically, the carrier disc 3 is provided with a taking groove corresponding to the two side walls of the second adsorption groove 31. The taking groove is communicated with the inner end of the second adsorption groove 31. Through the taking groove arranged on the two sides of the second adsorption groove 31, the DBC ceramic substrate 7 to be processed can be placed or taken.

[0061] The above is only an embodiment of the present application, and the common knowledge of the specific structure and characteristics in the scheme is not described in detail. The ordinary skilled person in the art knows all the ordinary technical knowledge in the technical field of the present application before the application date or the priority date, can know all the prior art in the field, and has the ability to apply conventional experimental means before that date. The ordinary skilled person in the art can improve and implement the present scheme based on their own ability under the inspiration of the present application. Some typical known structures or known methods should not be an obstacle for the ordinary skilled person in the art to implement the present application. It should be noted that for those skilled in the art, without departing from the structure of the present application, a number of modifications and improvements can be made, which should also be considered as the protection scope of the present application. These will not affect the effect and practicality of the present application. The protection scope of the present application should be subject to the content of its claims. The specific implementation mode in the specification can be used to explain the content of the claims.

Claims

1. A multi-position DBC bonding tool with suction and pressure combination, characterized in that: It includes a mounting frame, a suction platform, a carrier plate, a negative pressure system and a pressing mechanism; The suction platform is arranged on the top of the mounting frame. The carrier plate is horizontally slidably fitted on the suction platform, and the suction platform is communicated with the negative pressure system; A number of first suction grooves are formed on the suction platform, and a number of second suction grooves are formed on the carrier plate for placing the to-be-processed DBC ceramic substrate. The first suction grooves and the second suction grooves correspond to each other and are communicated; The pressing mechanism includes a reciprocating driving component and a pressing component. The reciprocating driving component is arranged on the mounting frame. The pressing component is located above the suction platform. The driving end of the reciprocating driving component is connected to the pressing component for driving the pressing component to move vertically back and forth. The pressing end of the pressing component is used to press the to-be-processed DBC ceramic substrate placed in the second suction groove.

2. The multi-position DBC bonding tool of claim 1, wherein: The mounting frame includes a bottom plate, support walls, support grooves and limit rods; There are two support walls, which are respectively vertically and fixedly installed at the left and right ends of the bottom plate. Support grooves distributed in the front-back direction are formed on the inner side walls of the two support walls. The suction platform is fixedly installed between the two support walls. The left and right side walls of the suction platform are respectively fixedly connected in the support grooves on both sides. The carrier plate is slidably fitted in the two support grooves and is located on the upper surface of the suction platform. The limit rod is vertically and fixedly installed on the rear side wall of the bottom plate. The top of the limit rod is higher than the support groove. The limit rod is used to abut against the rear side wall of the carrier plate.

3. The multi-position DBC bonding tool of claim 1, wherein: A flow dividing groove is formed in the suction platform. The flow dividing groove is arranged in a "king" shape. A communication hole is formed in the first suction groove for communicating with the flow dividing groove. The negative pressure system is communicated with the inner bottom wall of the flow dividing groove.

4. The multi-position DBC bonding tool of claim 3, wherein: The negative pressure system includes a first control valve and an air delivery pipe; The first control valve is arranged in the mounting frame. One end of the first control valve is communicated with an external air pump, and the other end of the first control valve is communicated with the inner bottom wall of the flow dividing groove through the air delivery pipe.

5. The multi-position DBC bonding tool of claim 1, wherein: The reciprocating driving component includes a cylinder and a connecting block; There are two cylinders, which are respectively fixedly installed on the left and right side walls of the mounting frame. The driving ends of the two cylinders are both fixedly connected with a connecting block, and the top of the connecting block is fixedly connected with a pressing component.

6. The multi-position DBC bonding tool of claim 1, wherein: The pressing component includes a pressing plate, a pressing frame and an elastic component; The bottom of the pressing plate is fixedly connected with the driving end of the reciprocating driving component. A number of observation ports are formed on the pressing plate corresponding to a number of second suction grooves. A number of pressing frames are arranged corresponding to the number of observation ports. The pressing frames are connected to the bottom of the pressing plate through elastic components. The bottom of the pressing frame can abut against the top of the to-be-processed DBC ceramic substrate.

7. The multi-position DBC bonding tool of claim 6, wherein: The elastic component includes a spring shaft, a tapered countersunk head, a spring and a snap ring; Installation grooves are formed at the four corners of the bottom of the pressing plate corresponding to each pressing frame, and installation holes are formed on the inner top wall of the installation grooves; The bottom of the spring shaft is fixedly connected with a tapered countersunk head, and a snap ring groove is formed on the upper part of the spring shaft; The four corners of the pressing frame are provided with sink holes corresponding to the mounting slots of the pressing plate, the upper end of the spring shaft sequentially penetrates the sink holes, the mounting slots and the mounting holes, the snap spring slot is located above the mounting hole, the snap spring is clamped in the snap spring slot, the conical sink at the bottom of the spring shaft abuts against the sink hole, the spring sleeve is arranged outside the spring shaft, and the upper and lower ends of the spring abut against the inner top wall of the mounting slot and the inner bottom wall of the sink hole respectively.

8. The multi-position DBC bonding tool of claim 6, wherein: The inner circumferential wall of the pressing frame is provided with slope blocks, which are used for pressing the DBC ceramic substrate to be processed.

9. The multi-position DBC bonding tool of claim 1-8, wherein: A plurality of arrayed adsorption holes are arranged on the second adsorption groove.

10. The multi-position DBC bonding tool of claim 1-8, wherein: The front side wall of the carrier disc is provided with a handle.

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