Automatic cleaning needle cleaning device and control system
The automatic cleaning device and control system enables automatic cleaning of the sandpaper surface, solving the problems of needle tip wear and jamming caused by foreign matter residue in the cleaning device, improving cleaning efficiency and equipment reliability, and reducing maintenance costs.
Patent Information
- Application Number
- CN202423101767.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2034-12-16
AI Technical Summary
In existing needle cleaning devices, foreign matter remaining on the cleaning sandpaper causes needle tip wear and jamming failures, affecting the precision and yield of semiconductor chip manufacturing, and existing technologies are unable to effectively solve this problem.
The automatic cleaning needle cleaning device detects the position of the worktable through the first detection element, and uses cleaning components such as electric air valves or dust collection devices to automatically clean the surface of the worktable. Combined with the control system, it achieves integrated and intelligent control.
It improved needle cleaning efficiency, reduced the risk of jamming and maintenance costs, and ensured the smooth progress of needle cleaning operations and the reliability of the equipment.
Smart Images

Figure CN223917553U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of mechanical equipment technology, and in particular to an automatic cleaning needle cleaning device and control system. Background Technology
[0002] In the precision environment of semiconductor manufacturing, even the slightest anomaly on the cleaning machine's workbench can lead to serious production problems. This is especially true when foreign objects fall into the machine, such as tiny dust particles or metal shavings, or debris accidentally left behind during the needle cleaning process. These impurities remain on the cleaning sandpaper used to clean the needle cassettes, and problems quietly arise. Semiconductor production has extremely high cleanliness requirements because these foreign objects pose a significant risk of contacting and rubbing against the needle tips during subsequent cleaning operations.
[0003] In other words, impurities on the cleaning sandpaper can cause wear on the needle tip, resulting in needle bending and deformation. It can also lead to serious malfunctions such as needle jamming (the needle jamming collided with other parts of the equipment), which in turn affects the manufacturing precision and yield of semiconductor chips, causing huge losses to the entire production process.
[0004] To address the aforementioned issues, existing technologies urgently need improvement. Utility Model Content
[0005] The purpose of this invention is to provide an automatic cleaning needle cleaning device and control system, which has the advantages of improving needle cleaning efficiency, reducing the risk of jamming, and reducing maintenance costs.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] An automatic cleaning needle cleaning device according to an embodiment of the present invention includes: a device body, a first detection element, and a cleaning element. The device body includes a working chamber and a worktable. The worktable is installed in the working chamber and can reciprocate along a first direction. The first detection element is installed in the working chamber to detect the position of the worktable. The cleaning element is installed in the working chamber to clean the worktable.
[0008] The automatic cleaning needle cleaning device according to the present invention detects the position of the worktable through the first detection component and automatically cleans the worktable through the cleaning component, which effectively solves the problem that foreign objects remaining on the needle cleaning sandpaper may cause the needle to get stuck in the prior art. It has the advantages of improving needle cleaning efficiency, reducing the risk of getting stuck, and reducing maintenance costs.
[0009] In addition, the needle cleaning device according to the above embodiments of the present invention may also have the following additional technical features:
[0010] In some embodiments of this utility model, the first detection element is communicatively connected to the first cleaning element.
[0011] In some embodiments of this utility model, the cleaning component is configured as an electric air valve, and the air outlet of the cleaning component is positioned directly opposite the workbench.
[0012] In some embodiments of this utility model, a bracket is also included, which is installed on the inner wall of the working chamber, and the first detection element and the cleaning element are installed on the bracket.
[0013] In some embodiments of this utility model, the first detection element is installed on the inner wall of the working chamber, and the cleaning element is installed on the inner wall of the working chamber.
[0014] In some embodiments of this utility model, a groove is also included, which is detachably mounted on the edge of the workbench.
[0015] In some embodiments of this utility model, the first detection element is configured as a photoelectric sensor.
[0016] According to the control system of this utility model embodiment, the control system includes a host computer and the above-mentioned automatic cleaning needle cleaning device, and the host computer and the needle cleaning device are communicatively connected.
[0017] According to the control system of this utility model embodiment, by setting the control system, the automatic cleaning function of the needle cleaning device is integrated into the normal working process of the needle cleaning device, thereby improving the overall integration and intelligence of the needle cleaning device.
[0018] In some embodiments of this utility model, the control system further includes a second detection element, which is configured as a high-precision camera. The second detection element is disposed in the working cavity to detect the worktable, and the second detection element is communicatively connected to the control system.
[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the automatic cleaning needle cleaning device according to an embodiment of the present invention.
[0021] Figure Labels
[0022] 100. Needle cleaning device;
[0023] 1. Main body of the device; 11. Working chamber; 12. Worktable;
[0024] 2. First inspection piece;
[0025] 3. Cleaning components; 31. Air outlet;
[0026] 4. Support; 5. Second test piece; 6. Tank. Detailed Implementation
[0027] The following is a more detailed description of an automatic cleaning needle-cleaning device and control system of the present invention, with reference to the accompanying drawings, which illustrate preferred embodiments of the present invention. It should be understood that those skilled in the art can modify the present invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the present invention.
[0028] In the description of this specification, terms such as "one embodiment" or "some embodiments" mean that one or more embodiments of this specification include a particular feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.
[0029] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0030] The automatic cleaning needle cleaning device 100 according to an embodiment of the present invention is described below with reference to the accompanying drawings.
[0031] The automatic cleaning needle cleaning device 100 according to an embodiment of the present invention, such as Figure 1 As shown, the device includes: a main body 1, a first detection element 2, and a cleaning element 3. The main body 1 includes a working chamber 11 and a worktable 12. The worktable 12 is installed in the working chamber 11 and can reciprocate along a first direction. The first detection element 2 is installed in the working chamber 11 to detect the position of the worktable 12. The cleaning element 3 is installed in the working chamber 11 to clean the worktable 12.
[0032] Specifically, when the needle cleaning device 100 is not in operation, the worktable 12 is in the first position. When the needle cleaning device 100 starts working, the worktable 12 moves along the first direction (e.g., Figure 1The first detection element 2 moves to the second position (in the Z direction shown), wherein the first detection element 2 detects the position information of the workbench 12. When the first detection element 2 cannot detect the workbench 12, the cleaning element 3 starts to clean the surface of the workbench 12. After cleaning is completed, the needle cleaning device 100 starts to work when the workbench 12 is in the second position. After the work is completed, the workbench 12 returns to the first position from the second position in the opposite direction of the first direction.
[0033] The working chamber 11 and the worktable 12 of the main body 1 of the device provide the basic structure for the needle cleaning operation. The reciprocating movement of the worktable 12 makes the needle cleaning process more flexible and efficient. The first detection element 2 is used to monitor the position of the worktable 12 in real time to ensure that the cleaning element 3 can accurately clean the worktable 12. The cleaning element 3 is directly responsible for cleaning the worktable 12, removing residual foreign matter from the surface of the sandpaper, thereby avoiding the problem of needle jamming caused by friction between foreign matter and the needle tip.
[0034] Furthermore, the cleaning component 3 can be configured as an electric air valve, with its air outlet 31 facing the workbench 12, cleaning the surface of the workbench 12 via airflow. As a preferred embodiment, the cleaning component 3 can also be implemented in other ways, such as using a vacuum cleaner. Additionally, the first detection component 2 can be configured as a photoelectric sensor, detecting the position of the workbench 12 via photoelectric signals, thereby improving detection accuracy and response speed.
[0035] The automatic cleaning needle removal device 100 according to an embodiment of the present invention achieves automatic cleaning of the sandpaper surface during the needle removal process through the cooperation of the device body 1, the first detection element 2, and the cleaning element 3, ensuring the smooth progress of the needle removal operation. Compared with the prior art, the present invention reduces the risk of needle jamming, thereby improving the reliability and service life of the needle removal device 100.
[0036] In some embodiments of this invention, the first detection element 2 is communicatively connected to the cleaning element 3. Specifically, during the cleaning process, the first detection element 2 detects the position information of the workbench 12 and transmits the signal to the first cleaning element 3. The cleaning element 3 adjusts the direction of the air vent and the airflow intensity according to the received signal to ensure that the cleaning element 3 can effectively clean the workbench 12.
[0037] Therefore, through the communication connection between the first detection element 2 and the cleaning element 3, the cleaning element 3 can respond to the feedback from the detection element in real time, ensuring that the cleaning strategy can be adjusted in a timely manner during the cleaning process, avoiding problems such as incomplete cleaning or over-cleaning due to information lag. This communication connection not only improves the accuracy and efficiency of cleaning, but also ensures that the cleaning element 3 can perform corresponding cleaning operations according to the signals from the detection element, thereby improving the accuracy and efficiency of cleaning.
[0038] Furthermore, this invention solves the communication problem between the cleaning component 3 and the detection component by establishing a communication connection between the first detection component 2 and the cleaning component 3. This communication connection enables the cleaning component 3 to respond to the feedback from the detection component in real time, ensuring that the cleaning strategy can be adjusted in a timely manner during the cleaning process, and avoiding problems such as incomplete cleaning or over-cleaning due to information lag.
[0039] In some embodiments of this utility model, the cleaning component 3 is configured as an electric air valve, with its air outlet 31 facing the workbench 12. Specifically, the electric air valve enables precise control of airflow, ensuring that the airflow directly acts on the surface of the workbench 12, thereby achieving rapid cleaning. Furthermore, the electric air valve can be remotely operated via a control system, further improving the automation level of cleaning. In addition, the air outlet 31 of the electric air valve can be designed with an adjustable angle to adapt to workbenches 12 of different shapes and sizes, ensuring comprehensive and consistent cleaning results.
[0040] Furthermore, the number of cleaning components 3 can be set to 1, 2, 3, 4 or more. The actual number of cleaning components 3 installed is set according to production needs, which will not be elaborated here. Preferably, there can be two cleaning components 3, and the positions of the two cleaning components 3 are greater than the second position of the workbench 12 along the first direction, and the air outlets 31 of the two cleaning components 3 are arranged facing the upper surface of the workbench 12.
[0041] In some embodiments of this utility model, such as Figure 1 As shown, the needle cleaning device 100 also includes a bracket 4, which is mounted on the inner wall of the working chamber 11. The first detection element 2 and the cleaning element 3 are mounted on the bracket 4. Specifically, the bracket 4 provides a stable mounting platform, allowing the first detection element 2 and the cleaning element 3 to be securely installed within the working chamber 11. Simultaneously, the bracket 4 allows the first detection element 2 and the cleaning element 3 to be positioned close to the second position of the worktable 12, ensuring the accuracy of the detection by the first detection element 2 and the cleaning efficiency of the cleaning element 3, thereby improving the performance and service life of the entire automatic cleaning needle cleaning device 100.
[0042] In a preferred embodiment, the support 4 can be made of metal to ensure its strength and durability. Furthermore, the structural design of the support 4 can include multiple fixing points to facilitate the installation and removal of the first detection element 2 and the cleaning element 3. Further, the support 4 can also be designed to be adjustable to accommodate the inner walls of the working cavity 11 of different sizes and shapes.
[0043] In some embodiments of this utility model, the first detection element 2 is installed on the inner wall of the working chamber 11, and the cleaning element 3 is installed on the inner wall of the working chamber 11. That is, both the first detection element 2 and the cleaning element 3 are installed on the inner wall of the working chamber 11, solving the installation problem of the cleaning element 3 and the detection element within the working chamber 11. This ensures the normal operation of the device and the cleaning effect, while avoiding interference with the internal working activities of the working chamber 11 caused by adding other installation structures, thus reducing installation difficulty and cost.
[0044] In some embodiments of this utility model, such as Figure 1 As shown, the needle cleaning device 100 also includes the groove 6, which is detachably mounted on the edge of the workbench 12. The groove 6 is designed to collect any foreign objects that may remain on the edge of the workbench 12. By installing the detachable groove 6 on the edge of the workbench 12, these foreign objects can be effectively collected and disposed of, preventing them from affecting the normal operation and cleaning effect of the workbench 12. The detachable design of the groove 6 facilitates cleaning and maintenance, ensuring the cleanliness and normal operation of the workbench 12.
[0045] Specifically, the tank 6 can be detachably installed in various ways, such as by bolt fixing, snap-fit design, or magnetic adsorption. As a preferred embodiment, the tank 6 can be designed with a filter screen to facilitate the collection and filtering of foreign objects, while also simplifying cleaning. Furthermore, the tank 6 can also be equipped with sensors to detect the accumulation of foreign objects, thereby automatically reminding or triggering a cleaning operation.
[0046] In some embodiments of this invention, the first detection element 2 is configured as a photoelectric sensor. Specifically, the photoelectric sensor has accurate monitoring capabilities while being inexpensive, thereby ensuring accurate positioning of the worktable 12 during the needle cleaning process while reducing the overall maintenance cost of the needle cleaning device 100.
[0047] It should be noted that the number of the first detection component 2 can be set to 1, 2, 3, 4, 5 or more. The actual number of the first detection component 2 is set according to production needs, which will not be elaborated here.
[0048] According to the control system of this utility model embodiment, the control system includes a host computer and the aforementioned automatic cleaning needle device 100, and the host computer and the cleaning needle device 100 are communicatively connected. Specifically, the control system may include one or more processors for receiving data from various sensors and controlling the operation of the cleaning component 3 and other related components according to preset algorithms and programs. For example, the processor may receive position information from the first detection element 2 and adjust the operating parameters of the cleaning component 3 based on this information to ensure optimal cleaning effect.
[0049] Furthermore, the control system may also include a user interface that allows operators to monitor and adjust the control system. For example, operators can use the user interface to control variables such as the opening and closing of the electric gas valve, the opening time, and the gas flow rate.
[0050] Therefore, the control system not only automates the needle cleaning process but also improves cleaning efficiency and effectiveness through high-precision sensors and optimized algorithms. Compared with existing technologies, the control system of this invention can more effectively solve the control problem of the needle cleaning device 100, improving the reliability and efficiency of the equipment.
[0051] In some embodiments of this utility model, such as Figure 1 As shown, the control system further includes a second detection element 5, which is disposed in the working cavity 11 to detect the worktable 12, and the second detection element 5 is communicatively connected to the control system.
[0052] Specifically, the second detection element 5 can detect whether the workbench 12 is clean after being cleaned by the cleaning element 3 and whether it is over-cleaned, which further improves the safety of the needle cleaning device 100 and avoids the needle tip from rubbing against foreign objects, causing the needle to be stuck.
[0053] The second detection element 5 can be implemented in various ways. For example, a high-precision camera with high resolution and a fast frame rate can be used to ensure that subtle changes within the working cavity 11 can be captured. Furthermore, the camera can be equipped with autofocus and image stabilization functions to improve the accuracy and stability of monitoring. As a preferred embodiment, the camera can communicate with the control system via wired or wireless means to ensure real-time data transmission and processing.
[0054] In other words, the control system achieves secondary detection of the workbench 12 by adding the second detection element 5, further reducing the risk of jamming. Simultaneously, the communication connection between the high-precision camera and the control system ensures timely transmission and processing of monitoring data, thereby improving the overall system's response speed and accuracy. In this way, the control system can better monitor and control the automatically cleaning needle-cleaning device 100, ensuring its high efficiency and safety during operation.
[0055] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.
Claims
1. An automatic cleaning needle cleaning device, characterized in that, include: The device body includes a working chamber and a worktable, the worktable being installed inside the working chamber and capable of reciprocating along a first direction; A first detection element is installed inside the working cavity to detect the position of the worktable. A cleaning component is installed inside the working chamber to clean the worktable.
2. The automatic cleaning needle cleaning device according to claim 1, characterized in that, The first detection component is communicatively connected to the cleaning component.
3. The automatic cleaning needle cleaning device according to claim 1, characterized in that, The cleaning component is equipped with an electric air valve, and the air outlet of the cleaning component is positioned directly opposite the workbench.
4. The automatic cleaning needle cleaning device according to claim 1, characterized in that, It also includes a bracket, which is installed on the inner wall of the working chamber, and the first detection component and the cleaning component are installed on the bracket.
5. The automatic cleaning needle cleaning device according to claim 1, characterized in that, The first detection component is installed on the inner wall of the working chamber, and the cleaning component is installed on the inner wall of the working chamber.
6. The automatic cleaning needle cleaning device according to claim 1, characterized in that, It also includes a trough, which is detachably mounted on the edge of the worktable.
7. The automatic cleaning needle cleaning device according to claim 1, characterized in that, The first detection element is a photoelectric sensor.
8. A control system, characterized in that, It includes a host computer and an automatic cleaning needle cleaning device as described in any one of claims 1 to 7, wherein the host computer and the needle cleaning device are communicatively connected.
9. The control system according to claim 8, characterized in that, It also includes a second detection element, which is a high-precision camera. The second detection element is located inside the working cavity to detect the worktable, and the second detection element is communicatively connected to the control system.