Radio frequency target

Abstract

The utility model relates to a radio frequency target. The radio frequency target comprises a target material, a target material back plate, a magnetic pole, a water separation assembly and a limiting assembly, the target material is arranged on one side of the target material back plate, the magnetic pole is arranged on the side, away from the target material, of the target material back plate, the water separation assembly comprises a water separation plate, the water separation plate is arranged between the target material back plate and the magnetic pole, and a cooling water channel is defined by the water separation plate and the target material back plate; and the limiting assembly is configured to be used for limiting the movement of the water-stop sheet, so that the water-stop sheet and the target material back plate are relatively fixed. The magnetic pole is effectively separated from cooling water through the water-stop sheet, so that the magnetic pole is prevented from being soaked in water for a long time, chemical reaction between the magnetic pole and impurities in water is avoided, and harm to the environment is reduced; polarity attenuation caused by magnetic pole oxidation is avoided, process stability and workpiece quality are guaranteed, the service life of the radio frequency target is prolonged, and use cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating processing, in particular to a radio frequency target. BACKGROUND

[0002] In radio frequency sputtering, in order to confine the electron beam on the surface of the radio frequency (RF) target, a pole shoe is arranged in the target to form a magnetic pole and a Lorentz force, so that the electron moves along a specific track. The ions generated by the ionization of the working gas bombard the target surface, and the sputtered atoms are deposited on the workpiece. The electrons gather on the target surface to form a plasma, which causes the temperature of the target surface to rise, so the target needs to be cooled by cooling water.

[0003] In the conventional technology, the magnetic pole is fixed behind the target surface and used to gather the electron beam. The magnetic pole is immersed in water as a whole, and the surface and the interior of the magnetic pole will be gradually oxidized due to the impact of the cooling water, and chemical reactions will occur with impurities in the water, which will harm the environment. Moreover, the polarity of the magnetic pole will gradually decay due to long-term oxidation, which will affect the process parameters and the quality of the workpiece, resulting in a shortened service life and increased use cost. CONTENT OF THE INVENTION

[0004] Therefore, it is necessary to provide a radio frequency target aiming at the problem that the magnetic pole is easily oxidized.

[0005] Embodiments of the present application provide a radio frequency target, which comprises:

[0006] a target material;

[0007] a target material back plate, wherein the target material is arranged on one side of the target material back plate;

[0008] a magnetic pole, wherein the magnetic pole is arranged on the side of the target material back plate away from the target material;

[0009] a water isolation assembly, wherein the water isolation assembly comprises a water isolation plate, the water isolation plate is arranged between the target material back plate and the magnetic pole, and the water isolation plate and the target material back plate define a cooling water channel; and

[0010] a limiting assembly configured to limit the movement of the water isolation plate, so that the water isolation plate is relatively fixed with the target material back plate.

[0011] In one of the embodiments, the limiting assembly comprises:

[0012] a fixed plate arranged on the side of the water isolation plate away from the target material, wherein the fixed plate is fixedly connected with the target material back plate;

[0013] A support rod is arranged between the fixed plate and the water stop plate, and two ends of the support rod are respectively abutted and supported between the fixed plate and the water stop plate, and the support rod tightly fixes the water stop plate on the target backing plate.

[0014] In one of the embodiments, the target backing plate comprises:

[0015] A first backing plate section is arranged between the target and the water stop plate, and the first backing plate section and the water stop plate define the cooling water channel;

[0016] A second backing plate section is connected with the first backing plate section at one end and extends away from the target at the other end, and the second backing plate section and the first backing plate section define a mounting groove, and the magnetic pole is mounted in the mounting groove; and

[0017] A third backing plate section is connected with the second backing plate section away from the target at one end, and the third backing plate section is fixedly connected with the fixed plate.

[0018] In one of the embodiments, the radio frequency target further comprises an adjusting assembly arranged between the fixed plate and the magnetic pole, and the magnetic pole is moved by the adjusting assembly to adjust the distance between the magnetic pole and the target.

[0019] In one of the embodiments, the adjusting assembly comprises:

[0020] A first support is fixedly connected with the magnetic pole;

[0021] A second support is fixedly connected with the fixed plate;

[0022] An adjusting screw is arranged along the moving direction of the magnetic pole, and the adjusting screw is threadedly connected with the first support and rotationally connected with the second support.

[0023] In one of the embodiments, the adjusting assembly further comprises:

[0024] A gland is fixedly connected with the second support and abuts against the adjusting screw to limit the axial movement of the adjusting screw, and the adjusting screw is rotationally connected with the second support through the gland.

[0025] In one of the embodiments, the radio frequency target further comprises:

[0026] A magnetic pole fixed plate is fixedly connected with the magnetic pole at one side and fixedly connected with the first support at the other side.

[0027] In one of the embodiments, a groove is provided on the side of the water-proof plate facing the magnetic pole, and the groove is for the extension of at least part of the magnetic pole.

[0028] In one of the embodiments, the water-proof assembly further comprises:

[0029] A sealing member is sealingly connected between the magnetic pole and the water-proof plate.

[0030] In one of the embodiments, the water-proof assembly further comprises:

[0031] A pipe joint is used for connecting an external circulating water assembly.

[0032] A joint is connected at one end to the cooling water channel and at the other end extends to the outside of the water-proof plate and is connected to the pipe joint.

[0033] According to the radio frequency target of the embodiments of the present application, a water-proof plate is arranged between the target backing plate and the magnetic pole, and the water-proof plate and the target backing plate define a cooling water channel, and cooling water flows in the cooling water channel to cool the target backing plate and the target material. The design effectively separates the magnetic pole and the cooling water by the water-proof plate, avoids demagnetization of the magnetic pole due to long-term soaking in water and contamination of the cooling water, ensures process stability, increases the service life of the radio frequency target, and reduces the use cost. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1 It is a sectional view of the radio frequency target of one of the embodiments of the present application.

[0035] Figure 2 It is a structural schematic view of the water-proof plate in the radio frequency target of one of the embodiments of the present application.

[0036] Figure 3 It is a sectional view of the radio frequency target of one of the embodiments of the present application.

[0037] Figure 4 It is a partial schematic view of the radio frequency target of one of the embodiments of the present application.

[0038] REFERENCE SIGNS:

[0039] 1000, radio frequency target;

[0040] 100, target material;

[0041] 200, target backing plate; 210, first backing plate segment; 220, second backing plate segment; 221, mounting groove; 230, third backing plate segment;

[0042] 300, magnetic pole;

[0043] 400. Waterproof component; 410. Waterproof plate; 411. Groove; 412. Raised strip; 420. Seal; 430. Pipe fitting; 440. Joint;

[0044] 500. Cooling water channel;

[0045] 600. Limiting component; 610. Fixing plate; 620. Support rod;

[0046] 700, Adjustment assembly; 710, First support; 711, First screw; 720, Second support; 721, Second screw; 730, Adjustment screw; 740, Pressure cap;

[0047] 800. Magnetic pole fixing plate;

[0048] 2000, workpiece;

[0049] 3000, electron beam;

[0050] 4000, Argon atoms. Detailed Implementation

[0051] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0052] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0053] In addition, the terms "first", "second", and the like, if any, are used herein for descriptive purposes only and should not be construed as indicating or implying relative importance or implicating the number of indicated technical features. Thus, a feature defined with "first" or "second" can include at least one of the features explicitly or implicitly. In the description of the present application, the term "plurality" means at least two, for example, two, three, etc., unless otherwise explicitly specified and limited.

[0054] In the present application, unless otherwise explicitly specified and limited, if the terms "mounting", "connecting", "connecting", "fixing" and the like appear, these terms should be interpreted broadly. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0055] In the present application, unless otherwise explicitly specified and limited, if the first feature is described as "on" or "under" the second feature and the like, it can mean that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be the first feature directly above or obliquely above the second feature, or it can only mean that the first feature is higher than the second feature in horizontal height. The first feature "below", "below" and "below" the second feature can be the first feature directly below or obliquely below the second feature, or it can only mean that the first feature is lower than the second feature in horizontal height.

[0056] It should be noted that if an element is referred to as "fixed to" or "disposed to" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are only for illustrative purposes and do not represent the only implementation.

[0057] Reference Figure 1 , Figure 1A cross-sectional view of a radio frequency target 1000 according to an embodiment of the present application is shown. At least one embodiment of the present application provides a radio frequency target 1000, which includes a target material 100, a target material back plate 200, a magnetic pole 300, a water-proof assembly 400, and a limiting assembly 600. The target material 100 is disposed on one side of the target material back plate 200. The magnetic pole 300 is disposed on a side of the target material back plate 200 opposite to the target material 100. The water-proof assembly 400 includes a water-proof plate 410, which is disposed between the target material back plate 200 and the magnetic pole 300. The water-proof plate 410 and the target material back plate 200 define a cooling water channel 500. The limiting assembly 600 is configured to limit the movement of the water-proof plate 410, so that the water-proof plate 410 is relatively fixed with the target material back plate 200. The cooling water channel 500 is provided with a cooling medium, which can be cooling water or other cooling medium.

[0058] In use, a workpiece 2000 is placed opposite to the target material 100 of the radio frequency target 1000. Due to the presence of the magnetic pole 300, a large number of electrons are bound to the surface of the target material 100, forming a plasma. Argon atoms 4000 are ionized into argon ions under the action of the electron beam 3000, and bombard the target material 100. Under the action of the argon ions and the radio frequency electric field, the material of the target material 100 is sputtered and deposited on the surface of the workpiece 2000 to form a film layer. This process generates a large amount of heat. The cooling medium in the cooling water channel 500 exchanges heat with the target material back plate 200 and the target material 100 to achieve rapid cooling of the target material 100. In the radio frequency target 1000, the water-proof plate 410 is disposed between the target material back plate 200 and the magnetic pole 300. The water-proof plate 410 and the target material back plate 200 define the cooling water channel 500. The cooling water flows in the cooling water channel 500 to cool the target material back plate 200 and the target material 100. This design effectively separates the magnetic pole 300 and the cooling water by the water-proof plate 410, avoiding long-term soaking of the magnetic pole 300 in water, chemical reaction between the magnetic pole 300 and impurities in the water, and environmental hazards. It also avoids the polarity decay caused by oxidation of the magnetic pole 300, ensures the stability of the process and the quality of the workpiece 2000, increases the service life of the radio frequency target 1000, and reduces the use cost.

[0059] The limiting assembly 600 limits the movement of the water-proof plate 410, so that the water-proof plate 410 is relatively fixed with the target material back plate 200, avoiding movement of the water-proof plate 410, and forming a structurally stable cooling water channel 500 between the water-proof plate 410 and the target material back plate 200.

[0060] In some embodiments, the limiting assembly 600 includes a fixing plate 610 and a support rod 620. The fixing plate 610 is arranged on the side of the water-proof plate 410 away from the target material 100, and the fixing plate 610 is fixedly connected with the target backing plate 200. The support rod 620 is arranged between the fixing plate 610 and the water-proof plate 410, and the two ends of the support rod 620 are respectively abutted and supported between the fixing plate 610 and the water-proof plate 410. The support rod 620 tightly fixes the water-proof plate 410 on the target backing plate 200. Since the fixing plate 610 is fixedly connected with the target backing plate 200, the support rod 620 is tightly fixed between the water-proof plate 410 by the fixing plate 610.

[0061] Through the above arrangement, compared with the screw fixing in the prior art, the thinner water-proof plate 410 can be fixed without damaging the structure (opening a hole), so as to maintain the structural stability of the water-proof plate 410 and the structural stability of the cooling water channel 500. Only the support rod 620 is used to support and abut the edge of the water-proof plate 410, without occupying too much space, so that the installation space of the magnetic pole 300 is increased, and the arrangement of the magnetic field is facilitated.

[0062] Referring to Figure 1 and Figure 2 , Figure 2 a structural schematic view of the water-proof plate 410 in the radio frequency target 1000 of an embodiment of the present application is shown. In some embodiments, the side of the water-proof plate 410 close to the target material 100 is provided with a plurality of protrusions 412, and the protrusions 412 extend to be attached to the target backing plate 200, so that the water-proof plate 410 and the target backing plate 200 define a winding cooling water channel 500, which is similar to a labyrinth structure, so as to improve the cooling effect. Specifically, the arrangement and position of the protrusions 412 can be flexibly designed according to different cooling requirements.

[0063] Referring to Figure 2 and Figure 3 , Figure 3 a sectional view of the radio frequency target 1000 of an embodiment of the present application is shown. In some embodiments, the water-proof assembly 400 further includes a pipe joint 430 and a joint 440. The pipe joint 430 is used to connect an external circulating water assembly. One end of the joint 440 is connected with the cooling water channel 500, and the other end extends to the outside of the water-proof plate 410 and is connected with the pipe joint 430. Specifically, the two ends of the water-proof plate 410 are respectively provided with one joint 440, and one pipe joint 430 is connected to each joint 440, so that one end of the water-proof plate 410 is used for water inlet and the other end is used for water outlet, forming an effective cooling circulation system and improving the cooling effect.

[0064] Referring to Figure 4 , Figure 4A partial schematic view of the radio frequency target 1000 according to an embodiment of the present application is shown. In some embodiments, the water-proof assembly 400 further comprises a sealing member 420 sealingly connected between the magnetic pole 300 and the water-proof plate 410. Specifically, the sealing member 420 comprises an O-ring, and it can be understood that the sealing member 420 can also be provided in other sealing structures to improve the sealing of the cooling water channel 500, reduce the possibility of leakage of the cooling medium, further avoid the magnetic pole 300 being soaked in water for a long time, and ensure the normal use of the magnetic pole 300.

[0065] In some embodiments, the water-proof plate 410 is provided with a recess 411 facing the magnetic pole 300, and the recess 411 is configured to accommodate at least a portion of the magnetic pole 300. The magnetic pole 300 is accommodated in the recess 411, which can reduce the influence of the water-proof plate 410 on the magnetic field and make the structure more compact.

[0066] Referring to Figure 4 In some embodiments, the target backing plate 200 comprises a first backing plate segment 210, a second backing plate segment 220, and a third backing plate segment 230. The first backing plate segment 210 is arranged between the target 100 and the water-proof plate 410, and the first backing plate segment 210 and the water-proof plate 410 define the cooling water channel 500. The second backing plate segment 220 is connected at one end to the first backing plate segment 210 and extends away from the target 100 at the other end, and the second backing plate segment 220 and the first backing plate segment 210 define a mounting groove 221 in which the magnetic pole 300 is mounted. The third backing plate segment 230 is connected at one end to the second backing plate segment 220 away from the target 100, and the third backing plate segment 230 is fixedly connected to the fixing plate 610.

[0067] It can be understood that the cooling water channel 500 mainly plays a cooling role on the target 100 through the first backing plate segment 210. Therefore, in some embodiments, the first backing plate segment 210 can be arranged to be slightly thinner than the other backing plate segments, so that the cooling effect of the cooling water channel 500 on the target 100 is better.

[0068] Due to the differences in the material, shape, structure, etc. of the sputtering workpiece 2000, it is often necessary to adjust the distance of the magnetic pole 300 to change the strength of the magnetic field to meet the process requirements. However, the current adjustment can only be achieved by replacing parts, which increases the cost and consumes time and manpower.

[0069] Therefore, in some embodiments, the radio frequency target 1000 further comprises an adjusting assembly 700, which is arranged between the fixed plate 610 and the magnetic pole 300. The magnetic pole 300 is moved through the adjusting assembly 700 to adjust the distance between the magnetic pole 300 and the target material 100. When sputtering different workpieces 2000, the distance between the magnetic pole 300 and the target material back plate 200 is moved to adjust the distance between the magnetic pole 300 and the target material 100, and the magnetic field strength is adjusted. Without frequent replacement of parts, the cost is reduced, and the production efficiency is improved and the labor is reduced.

[0070] In some embodiments, when the magnetic pole 300 moves, it slides in the groove 411, which limits the movement of the magnetic pole 300 and makes the movement track of the magnetic pole 300 stable and smooth.

[0071] Referring to Figure 1 In some embodiments, the adjusting assembly 700 comprises a first support 710, a second support 720, and an adjusting screw 730. The first support 710 is fixedly connected with the magnetic pole 300, the second support 720 is fixedly connected with the fixed plate 610, and the adjusting screw 730 is arranged along the moving direction of the magnetic pole 300. The adjusting screw 730 is threadedly connected with the first support 710 and rotationally connected with the second support 720. The first support 710 can axially slide in the second support 720.

[0072] In some embodiments, the radio frequency target 1000 further comprises a magnetic pole 300 fixed plate 610, which is fixedly connected with the magnetic pole 300 on one side and fixedly connected with the first support 710 on the other side.

[0073] In some embodiments, the adjusting assembly 700 further comprises a gland 740, which is fixedly connected with the second support 720 and abuts against the adjusting screw 730 to limit the axial movement of the adjusting screw 730. The adjusting screw 730 is rotationally connected with the second support 720 through the gland 740.

[0074] Specifically, the magnetic pole 300 fixing plate 610 is connected with the first support 710 by the first screw 711. The second support 720 is fastened with the fixing plate 610 by the second screw 721, and the adjusting screw 730 is connected with the first support 710 by screwing. The gland 740 fixes the adjusting screw 730 so that it cannot move axially. When the adjusting screw 730 rotates, it cannot move axially because it is fixed by the gland 740, and the first support 710 moves in the opposite direction due to the screwing movement, and the magnetic pole 300 fixing plate 610 moves, so that the magnetic pole 300 fixed thereon also moves axially, finally the magnetic field of the workpiece 2000 will change due to the movement of the magnetic pole 300, so that the workpiece 2000 can freely adjust the magnetic field according to the sputtering needs. The radio frequency target 1000 structure in the embodiment of the application is simple and practical, easy to operate, and accurate in adjustment.

[0075] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, but as long as the combination of the technical features does not exist contradictory, it should be considered as the scope of the present application.

[0076] The above-mentioned embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, some modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A radio frequency target, characterized in that, include: Target material; A target backplate, wherein the target is disposed on one side of the target backplate; Magnetic poles, wherein the magnetic poles are disposed on the side of the target backplate opposite to the target; A water-isolating assembly, the water-isolating assembly including a water-isolating plate, the water-isolating plate being disposed between the target material back plate and the magnetic pole, the water-isolating plate and the target material back plate defining a cooling water channel; as well as A limiting component is configured to restrict the movement of the baffle plate so that the baffle plate is fixed relative to the target back plate.

2. The radio frequency target according to claim 1, characterized in that, The limiting component includes: A fixing plate is disposed on the side of the water-proof plate away from the target material, and the fixing plate is fixedly connected to the back plate of the target material; A support rod is disposed between the fixed plate and the water-proof plate, and both ends of the support rod abut against and support the fixed plate and the water-proof plate respectively. The support rod presses and fixes the water-proof plate to the target material back plate.

3. The radio frequency target according to claim 2, characterized in that, The target backplate includes: A first backplate section is disposed between the target material and the water-insulating plate, and the first backplate section and the water-insulating plate define the cooling water channel; A second backplate segment, one end of which is connected to the first backplate segment, and the other end extending away from the target material, defining a mounting groove with the first backplate segment, wherein the magnetic pole is mounted within the mounting groove; and The third backplate segment is connected to the end of the second backplate segment away from the target material, and the third backplate segment is fixedly connected to the fixing plate.

4. The radio frequency target according to claim 2, characterized in that, The radio frequency target also includes an adjustment component disposed between the fixed plate and the magnetic pole. The magnetic pole is moved by the adjustment component to adjust the distance between the magnetic pole and the target material.

5. The radio frequency target according to claim 4, characterized in that, The adjustment component includes: The first support is fixedly connected to the magnetic pole; The second support is fixedly connected to the fixed plate; An adjusting screw is provided along the direction of movement of the magnetic pole. The adjusting screw is threadedly connected to the first support and rotatably connected to the second support.

6. The radio frequency target according to claim 5, characterized in that, The adjustment component further includes: A pressure cap is fixedly connected to the second support and abuts against the adjusting screw to restrict the axial movement of the adjusting screw. The adjusting screw is rotatably connected to the second support through the pressure cap.

7. The radio frequency target according to claim 5, characterized in that, The radio frequency target also includes: A magnetic pole fixing plate, one side of which is fixedly connected to the magnetic pole and the other side is fixedly connected to the first support.

8. The radio frequency target according to claim 1, characterized in that, The water-blocking plate has a groove on the side facing the magnetic pole, into which at least a portion of the magnetic pole extends.

9. The radio frequency target according to claim 1, characterized in that, The waterproofing component also includes: A sealing element is provided, which is sealed between the magnetic pole and the water-proof plate.

10. The radio frequency target according to claim 1, characterized in that, The waterproofing component also includes: Pipe fitting, the pipe fitting being used to connect to an external circulating water assembly; A connector, one end of which is connected to the cooling water channel, and the other end extends to the outside of the baffle plate and is connected to the pipe joint.

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