Sulfuric acid real-time heating device

Abstract

The utility model provides a sulfuric acid real-time heating device which comprises a bottom plate, a containing box is fixedly installed at the top end of the bottom plate, an inlet valve is installed in the middle of the bottom end of the right side of the containing box, and the other end of the inlet valve penetrates through the containing box and extends into the containing box. The other end of the inlet valve is connected with a hose body located in the containing box, the outer surface of the hose body is sleeved with a heating module located in the containing box, the outer surface of the hose body is sleeved with a temperature measuring coil located outside the heating module, and the outer surface of the heating module is connected with a heating device. According to the utility model, under the cooperation of the temperature display screen and the temperature measuring coil, an operator can control each hot air flow entering the heating module through the display of the temperature display screen and further through adjusting the adjusting valve, so that the temperature difference of discharged sulfuric acid does not have large deviation, and the technological process is met.

Description

Technical Field

[0001] This utility model relates to the field of heating equipment technology, and in particular to a real-time sulfuric acid heating device. Background Technology

[0002] Sulfuric acid is an inorganic compound with the chemical formula H₂SO₄, and is the most important oxyacid of sulfur. Pure sulfuric acid is a colorless, oily liquid that crystallizes at 10.36°C. It is commonly produced using aqueous solutions of varying concentrations via the column method and the contact method. The former yields crude dilute sulfuric acid, typically with a mass fraction of around 75%; the latter yields concentrated sulfuric acid with a mass fraction of 98.3%, a boiling point of 338°C, and a relative density of 1.84.

[0003] Currently, wet cleaning of photomasks generally employs the SPM (H2SO4+H2O2) acid washing process, which requires heating H2SO4 to a suitable temperature (40-100℃) to remove metal particles and organic residues. Although existing online sulfuric acid heating devices have basic heating functions, temperature fluctuations in these devices are detrimental to improving the quality of the SPM process. To keep temperature fluctuations within an acceptable range, we adopt multi-stage heating and install temperature monitoring devices on the outside of the hoses to control the heating of each heating module, ensuring that the sulfuric acid outlet temperature meets the usage requirements. Therefore, we propose a real-time sulfuric acid heating device. Summary of the Invention

[0004] To address the aforementioned problems, this invention proposes a real-time sulfuric acid heating device to more accurately resolve the issue of sulfuric acid not being able to flow out at a constant rate.

[0005] This utility model is achieved through the following technical solution:

[0006] This utility model proposes a real-time sulfuric acid heating device, including a base plate, a receiving box fixedly installed at the top of the base plate, an inlet valve installed in the middle of the bottom right side of the receiving box, the other end of the inlet valve penetrating through the receiving box and extending into the interior of the receiving box, the other end of the inlet valve being connected to a flexible hose body located inside the receiving box, a heating module being sleeved on the outer surface of the flexible hose body, a temperature measuring coil being sleeved on the outer surface of the flexible hose body located outside the heating module, and a heating device being connected to the outer surface of the heating module.

[0007] Furthermore, the heating device includes a hot air blower, which is fixedly installed in the middle of the right side of the housing box. A rigid air duct is connected to the left side of the hot air blower, and a connecting pipe is connected to the outer surface of the rigid air duct. The other end of the connecting pipe passes through the housing box and is connected to the heating module.

[0008] Furthermore, there are three connecting pipes, and each of the three connecting pipes is equipped with a regulating valve.

[0009] Furthermore, the number of temperature measuring coils is three, and the outer surface of each of the three temperature measuring coils is provided with a heat insulation sleeve. A temperature display screen is fixedly installed on the top of the housing.

[0010] Furthermore, rollers are installed at the four corners of the bottom of the base plate, and push rods are installed on the left and right sides of the top of the base plate.

[0011] Furthermore, a discharge pipe is fixedly installed at the center of the bottom front of the container, and the interior of the discharge pipe is connected to the interior of the hose body.

[0012] Furthermore, a fixed seat is fitted onto the outer surface of the discharge pipe, and a movable block is movably installed inside the fixed seat. The bottom end of the movable block passes through the fixed seat and the discharge pipe in sequence and extends to the bottom end of the discharge pipe.

[0013] Furthermore, a pull rod is movably installed at the top of the movable block, and connecting rods located inside the movable block are hinged to both sides of the bottom end of the pull rod. A fixing rod is fixedly installed inside the movable block.

[0014] Furthermore, a movable block is movably sleeved on the outer surface of the fixed rod, and a spring is fixedly connected between the movable blocks. The spring is movably sleeved with the fixed rod, and the movable block is hinged with the connecting rod.

[0015] Furthermore, the top of both the left and right sides of the fixing base are provided with round holes.

[0016] The beneficial effects of this utility model are:

[0017] 1. With the cooperation of the temperature display screen and the temperature measuring coil, the operator can control the hot airflow entering the heating module by adjusting the regulating valve after viewing the temperature display screen, so that the temperature difference of the discharged sulfuric acid will not deviate significantly.

[0018] This invention involves pressing down on the top of the movable block and then pulling the lever upwards. The lever will cause the two connecting rods to move upwards, which in turn causes the two movable blocks to move towards each other on the outer surface of the fixed rod. Then, the operator pulls the top of the movable block, causing the entire movable block to move upwards. At this point, the force applied to the lever is stopped, and the movable blocks will press against the inner surface of the fixed seat. As the movable block moves upwards as a whole, the spring force will push the two movable blocks outwards and insert them into the round holes. At this time, each round hole corresponds to a sulfuric acid flow rate. By changing the obstruction of the outlet of the discharge pipe by the movable block, the sulfuric acid output flow rate can be kept constant and controllable under this operation. Attached Figure Description

[0019] Figure 1 This is an exploded view of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the present invention;

[0022] Figure 4 This is a schematic diagram of the present invention;

[0023] Figure 5 This is a schematic diagram of the present invention;

[0024] The attached figures are labeled as follows:

[0025] 1. Base plate; 2. Container box; 3. Inlet valve; 4. Hose body; 5. Heating module; 6. Hot air blower; 7. Rigid air duct; 8. Connecting pipe; 9. Regulating valve; 10. Temperature measuring coil; 11. Heat insulation sleeve; 12. Temperature display screen; 13. Roller; 14. Push rod; 15. Discharge pipe; 16. Fixed base; 17. Moving block; 18. Pull rod; 19. Fixed rod; 20. Movable block; 21. Round hole; 22. Spring; 23. Connecting rod. Detailed Implementation

[0026] To more clearly and completely illustrate the technical solution of this utility model, the following description, in conjunction with the accompanying drawings, will further explain this utility model.

[0027] Please refer to Figures 1-5 This utility model proposes a real-time sulfuric acid heating device, including a base plate 1, a receiving tank 2 fixedly installed on the top of the base plate 1, an inlet valve 3 installed at the bottom of the front of the receiving tank 2, one end of the inlet valve 3 connected to a flexible tube body 4 located inside the receiving tank 2, and the other end of the flexible tube body 4 penetrating the receiving tank 2 and extending to the outer surface of the receiving tank 2. When sulfuric acid flows into the flexible tube body 4 from one end of the inlet valve 3, a heating module 5 is fitted on the outer surface of the flexible tube body 4 to heat the sulfuric acid. The flexible tube body 4 located inside the heating module 5 is meandering, which prolongs the time that the sulfuric acid stays in the heating module 5, thereby improving the heating effect of the sulfuric acid. The sulfuric acid is input from the inlet valve 3 into the high-temperature and corrosion-resistant flexible tube body 4, and the flexible tube body 4 passes through multiple heating modules 5 for heating. Each heating module 5 is set independently to make the liquid in the tube heat up steadily and keep the sulfuric acid temperature constant, which can effectively avoid the problem of excessive temperature fluctuation of sulfuric acid during the flow of sulfuric acid.

[0028] To ensure the proper functioning of the sulfuric acid heating system, a hot air blower 6 is fixedly installed in the center of the front of the container 2. A rigid air duct 7 is connected to the left end of the hot air blower 6, and three connecting pipes 8 are connected to the inner side of the rigid air duct 7. Each connecting pipe 8 is equipped with a regulating valve 9. The other ends of the three connecting pipes 8 pass through the container 2 and the heating module 5 and extend into the interior of the heating module 5. The connecting pipes 8 control the flow of hot air into the heating module 5 from the regulating valves 9. To monitor the temperature within each heating module 5, three temperature measuring coils 10 are fitted onto the outer surface of the flexible hose body 4, located outside the heating module 5. These three temperature measuring coils 10 employ linear temperature measurement. Linear temperature measurement has advantages over traditional point temperature measurement, as it is more uniform and accurate. Additionally, the outer surface of the temperature measuring coil 10 is fitted with a heat insulation sleeve 11. When hot air enters the heating module 5 and exits from the bottom, it remains inside the receiving box 2 for a period of time. Without the heat insulation sleeve 11, the temperature measurement effect of the temperature measuring coil 10 would be affected. A temperature display screen 12 is fixedly installed at the top of the receiving box 2. With the cooperation of the temperature display screen 12 and the temperature measuring coil 10, the operator can control the hot air entering the heating module 5 by adjusting the regulating valve 9, thereby ensuring that the temperature difference of the discharged sulfuric acid does not deviate significantly.

[0029] A discharge pipe 15 is fixedly connected to the other end of the hose body 4. A fixed seat 16 is sleeved on the outer surface of the discharge pipe 15. A movable block 17 is movably installed inside the fixed seat 16. The bottom end of the movable block 17 passes through the discharge pipe 15 and extends to the bottom of the discharge pipe 15. The movable block 17 acts as a block to the discharge pipe 15, controlling the outflow of sulfuric acid. A pull rod 18 is movably connected to the top of the movable block 17. The bottom end of the pull rod 18 passes through the movable block 17 and extends into the interior of the movable block 17. A fixed rod 19 is fixedly installed inside the movable block 17. A movable block 20 is movably sleeved on the outer surface of the fixed rod 19. The fixed rod 19 restricts the movement trajectory of the movable block 20. A spring 22 is provided between the two movable blocks 20. The spring 22 is sleeved on the outer surface of the fixed rod 19. The two springs 22 are connected by two connecting rods. The connecting rod 23 is hinged to the pull rod 18. When the pull rod 18 moves upward, it will drive the two connecting rods 23 to move upward. At the same time, there are round holes 21 equidistantly opened at the top of both sides of the fixed seat 16. Each round hole 21 corresponds to the sulfuric acid outlet flow rate. When the two connecting rods 23 drive the movable blocks 20 to move towards each other on the fixed rod 19, the two movable blocks 20 will disengage from the inside of the round holes 21. When the moving block 17 moves upward, it stops pulling the pull rod 18. At this time, the movable blocks 20 will abut against the inner surface of the fixed seat 16. Under the elastic force of the spring 22, the two movable blocks 20 will be inserted into another round hole 21. And so on. When the movable blocks 20 are inserted into different round holes 21, the flow rate of sulfuric acid discharged through the discharge pipe 15 will be different, thereby achieving precise constant control of the sulfuric acid outlet flow rate.

[0030] Rollers 13 are installed at the four corners of the bottom of the base plate 1, and push rods 14 are installed on the left and right sides of the top of the base plate 1. With the cooperation of the rollers 13 and the push rods 14, the entire heating device can be moved.

[0031] In this embodiment

[0032] First, the operator presses down on the top of the movable block 17, then pulls the lever 18 upwards. The lever 18 will drive the two connecting rods 23 upwards, which in turn will drive the two movable blocks 20 to move towards each other on the outer surface of the fixed rod 19. Then, the operator pulls the top of the movable block 17, causing the entire movable block 17 to move upwards. At this point, the force applied to the lever 18 is stopped, and the movable blocks 20 will press against the inner surface of the fixed seat 16. When the movable block 17 moves upwards as a whole, under the elastic force of the spring 22, the two movable blocks 20 will be pushed outwards and inserted into the round hole 21. When we need to increase the sulfuric acid outlet flow of the discharge pipe 15, we repeat the above operation until the maximum sulfuric acid outlet flow is adjusted.

[0033] Once the sulfuric acid outlet flow rate is adjusted (and can also be adjusted while sulfuric acid is flowing), the operator starts the hot air blower 6, which draws gas from the outside and converts it into hot air flow. This hot air flows through the rigid air duct 7 and regulating valve 9 into the heating module 5 and exits from the bottom of the heating module 5. The operator then inputs sulfuric acid from the inlet valve 3 into the hose body 4. After being heated by the heating module 5, the sulfuric acid exits from one end of the outlet pipe 15. With the cooperation of the temperature measuring coil 10 and the temperature display screen 12, the operator can monitor the temperature of each sulfuric acid after heating in the heating module 5. If the temperature of sulfuric acid flowing out of the heating module 5 exceeds or fails to meet expectations, the regulating valve 9 controls the amount of hot air flowing into the heating module 5. This ensures that the heating temperature in each heating module 5 is controllable, thus preventing excessive temperature fluctuations when the sulfuric acid exits from the outlet pipe 15 and meeting the process requirements.

[0034] Of course, there may be other implementations of this utility model. Based on this implementation, other implementations obtained by those skilled in the art without any creative effort are all within the scope of protection of this utility model.

Claims

1. A sulfuric acid real-time heating device comprising a base plate, characterized in that, A receiving box is fixedly installed at the top of the base plate. An inlet valve is installed in the middle of the bottom right side of the receiving box. The other end of the inlet valve passes through the receiving box and extends into the interior of the receiving box. The other end of the inlet valve is connected to a flexible hose body located inside the receiving box. A heating module is sleeved on the outer surface of the flexible hose body. A temperature measuring coil located outside the heating module is sleeved on the outer surface of the flexible hose body. A heating device is connected to the outer surface of the heating module.

2. The real-time heating device of sulfuric acid according to claim 1, characterized in that, The heating device includes a hot air blower, which is fixedly installed in the middle of the right side of the housing. A rigid air duct is connected to the left side of the hot air blower, and a connecting pipe is connected to the outer surface of the rigid air duct. The other end of the connecting pipe passes through the housing and is connected to the heating module.

3. The real-time heating device of sulfuric acid according to claim 2, characterized in that, There are three connecting pipes, and each of the three connecting pipes is equipped with a regulating valve.

4. The real-time heating device of sulfuric acid according to claim 1, characterized in that, The number of temperature measuring coils is three, and the outer surface of each of the three temperature measuring coils is provided with a heat insulation sleeve. A temperature display screen is fixedly installed on the top of the housing.

5. The real-time heating device of sulfuric acid according to claim 1, characterized in that, Rollers are installed at the four corners of the bottom of the base plate, and push rods are installed on the left and right sides of the top of the base plate.

6. The real-time heating device of sulfuric acid according to claim 1, characterized in that, A discharge pipe is fixedly installed in the middle of the bottom front of the container, and the interior of the discharge pipe is connected to the interior of the hose body.

7. The real-time heating device of sulfuric acid according to claim 6, characterized in that, A fixed seat is fitted onto the outer surface of the discharge pipe, and a movable block is movably installed inside the fixed seat. The bottom end of the movable block passes through the fixed seat and the discharge pipe in sequence and extends to the bottom end of the discharge pipe.

8. The real-time heating device of sulfuric acid according to claim 7, characterized in that, A pull rod is movably installed at the top of the movable block, and connecting rods located inside the movable block are hinged to both sides of the bottom end of the pull rod. A fixing rod is fixedly installed inside the movable block.

9. The real-time heating device of sulfuric acid according to claim 8, characterized in that, The outer surface of the fixed rod is movably sleeved with a movable block, and a spring is fixedly connected between the movable blocks. The spring is movably sleeved with the fixed rod, and the movable block is hinged with the connecting rod.

10. The real-time heating device of sulfuric acid according to claim 7, characterized in that, The top of both sides of the fixing base is provided with round holes.

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