Die bonding swing arm device and die bonding equipment

Abstract

The utility model is suitable for the technical field of die bonding equipment, and provides a die bonding swing arm device and die bonding equipment. The die bonding swing arm device comprises a supporting seat, a swing arm assembly, an elastic connection group and a driving unit. The die bonding equipment comprises any one of the die bonding swing arm devices. The connecting end of the swing arm assembly is connected to the supporting seat through the elastic connecting group, and the suction nozzle structure is arranged on the die bonding end far away from the connecting end, so that the suction nozzle structure can be far away from the second axis as far as possible, and the suction nozzle structure has a larger rotation diameter when the swing arm assembly swings around the second axis in the vertical direction. According to the geometrical relationship, when the rotation radius of the object is larger when the object rotates in the vertical plane, the displacement in the horizontal direction is smaller when the object moves by the same distance in the vertical direction, so that the rotation radius of the suction nozzle structure is increased, and the deviation value of the suction nozzle structure in the horizontal direction when the suction nozzle structure is adjusted in the vertical direction is reduced; and the die bonding precision is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of die bonding equipment, especially relates to a die bonding swing arm device and die bonding equipment. BACKGROUND

[0002] The die bonder is one of the equipment for semiconductor device manufacturing, which connects the semiconductor wafer and other components together. In the working process of the die bonder, the crystal ring is usually supported by the crystal supply platform, then the chip on the crystal ring is separated from the blue film through the needle device, then the chip on the crystal ring is moved and sucked through the swing arm driving suction nozzle structure, finally the chip is transported to the welding point on the packaging substrate and is firmly connected with the welding point to realize the fixation of the chip. The die bonding swing arm device is an important part of the die bonder, and high-frequency reciprocating motion is needed in the working process of the die bonder to realize the taking and placing of the crystal. However, the existing die bonding swing arm device mostly has the problem of low die bonding precision in the working process. SUMMARY

[0003] The utility model aims at providing a die bonding swing arm device and die bonding equipment, which aims at solving the technical problem of low die bonding precision of the die bonding swing arm device in the prior art.

[0004] The utility model is realized as follows: in the first aspect, a die bonding swing arm device is provided, which comprises:

[0005] The support seat has the freedom of autorotation around the first axis;

[0006] The swing arm assembly has the connecting end and the die bonding end arranged oppositely, and has the intermediate part between the connecting end and the die bonding end;

[0007] The elastic connection group is connected between the support seat and the connecting end, can be elastically deformed when subjected to external force, is used for enabling the swing arm assembly to reciprocally swing around the second axis with the elastic connection group as the support, and the second axis is arranged at an angle with the first axis; and

[0008] The driving unit is arranged on the support seat, and the driving end of the driving unit is connected with the intermediate part of the swing arm assembly, and is used for driving the swing arm assembly to reciprocally swing around the first axis.

[0009] In an optional embodiment, the die bonding swing arm device further comprises a suction nozzle structure, the suction nozzle structure has a suction nozzle surface for contacting the chip, the second axis is in the horizontal direction, and in the horizontal direction, the second axis is located in the region flush with the suction nozzle surface.

[0010] In an alternative embodiment, the elastic connection set comprises a first elastic sheet, which is parallel to the second axis, one end of the first elastic sheet is fixed to the support base, and the other end of the first elastic sheet is fixed to the connecting end.

[0011] In an alternative embodiment, the elastic connection set further comprises a second elastic sheet, which is also parallel to the second axis, one end of the second elastic sheet is fixed to the support base, and the other end of the second elastic sheet is fixed to the connecting end, and the projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect each other.

[0012] In an alternative embodiment, the first elastic sheet is arranged in a horizontal direction, the second axis passes through the first elastic sheet, and in the horizontal direction, the first elastic sheet is located in a region flush with the nozzle surface of the nozzle structure.

[0013] In an alternative embodiment, the swing arm assembly comprises a swing arm mounting base and a swing arm body, the first end of the swing arm mounting base is connected to the support base through an elastic connection set, the second end of the swing arm mounting base is connected to the first end of the swing arm body, and the second end of the swing arm body extends away from the swing arm mounting base, the driving end is connected to the swing arm mounting base, the first end of the swing arm mounting base is the connecting end, and the second end of the swing arm body is the die bonding end.

[0014] In an alternative embodiment, the driving unit comprises a voice coil motor, the voice coil motor comprises a stator assembly and a mover assembly, the stator assembly is fixedly installed on the support base, the mover assembly is movably arranged inside the stator assembly, at least part of the mover assembly is connected to the middle part of the swing arm assembly, the stator assembly has a magnetic part, the mover assembly has a coil part for communication with an external circuit, and the coil part is also used for interacting with the magnetic part after being energized to drive the mover assembly to reciprocate along a predetermined path.

[0015] In an alternative embodiment, an elastic limiting set is arranged between the support base and / or the body of the driving unit and the swing arm assembly, the elastic limiting set is used for limiting the swing arm assembly to avoid collision between the swing arm assembly and the support base.

[0016] In an alternative embodiment, the elastic limiting set comprises a mounting bracket and an elastic top pin, one end of the elastic top pin is fixed to the support base or the driving unit through the mounting bracket, and the other end of the elastic top pin abuts against the swing arm assembly.

[0017] In a second aspect, a die bonding device is provided, comprising the die bonding swing arm device of any one of the above aspects.

[0018] The technical effect of the present application is that the connecting end of the swing arm assembly is connected to the support seat through the elastic connection group, and the die bonding end of the swing arm assembly can extend away from the support seat. Meanwhile, the driving unit is arranged on the support seat, and the driving end of the driving unit is connected to the middle part of the swing arm assembly. During work, the swing arm assembly can be driven to swing around the first axis through the rotation of the support seat, and the swing arm assembly can be periodically driven to swing around the second axis through the driving unit, so as to realize the movement of the fixed end of the swing arm assembly in multiple directions. Compared with the die bonding swing arm device in the prior art, the connecting end of the swing arm assembly is connected to the support seat through the elastic connection group, and the suction nozzle structure is arranged on the die bonding end away from the connecting end, so that the suction nozzle structure can be as far away from the second axis as possible, so that the suction nozzle structure has a larger rotating diameter when the swing arm assembly swings around the second axis in the vertical direction. According to the geometric relationship, when the object rotates in the vertical plane, the larger the rotating radius of the object, the smaller the displacement in the horizontal direction when the object moves the same distance in the vertical direction. Therefore, increasing the rotating radius of the suction nozzle structure reduces the deviation value of the suction nozzle structure in the horizontal direction when adjusting in the vertical direction, thereby improving the precision of die bonding.

[0019] It can be understood that the beneficial effects of the second aspect described above can be referred to the related description in the first aspect described above, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application or the prior art description. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0021] Figure 1 is a structural schematic view of the die bonding swing arm device provided by the embodiments of the present application;

[0022] Figure 2 is a side view structural schematic view of the die bonding swing arm device provided by the embodiments of the present application;

[0023] Figure 3 is Figure 2 is an enlarged structural schematic view of A in the figure;

[0024] Figure 4 is a structural schematic view of the elastic connection group used in the embodiments of the present application;

[0025] Figure 5It is an explosion structure schematic diagram of the elastic connection group used in the utility model embodiment.

[0026] Explanation of reference signs:

[0027] 1, support seat; 2, swing arm assembly; 21, connecting end; 22, die bonding end; 23, middle part; 24, swing arm mounting seat; 25, swing arm body; 26, first mounting surface; 27, second mounting surface; 3, elastic connection group; 31, first elastic sheet; 32, second elastic sheet; 33, first pressing block; 34, second pressing block; 4, driving unit; 41, stator assembly; 42, rotor assembly; 5, suction nozzle structure; 51, suction nozzle surface; 6, elastic limiting group; 61, mounting bracket; 62, elastic top pin. DETAILED DESCRIPTION

[0028] The embodiments of the utility model are described in detail below, examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the utility model, and cannot be understood as a limitation of the utility model.

[0029] In the description of the utility model, it is understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation of the utility model.

[0030] In the embodiment, according to the following figure: Figure 1 The first axis is in the X direction in the figure, and the second axis is in the Y direction in the figure, and the position of the second axis is not completely fixed.

[0031] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0032] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "fix" and so on should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through the intermediate medium, can be the communication of two elements or the interaction of two elements.For the ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0033] In order to make the purpose, technical scheme and advantage of the utility model more clear, the utility model is further explained in detail below with the combination of drawings and examples.

[0034] Please refer to Figure 1 With Figure 2 As shown in the utility model embodiment, a crystal placement swing arm device is provided, which comprises a support base 1, a swing arm assembly 2, an elastic connection group 3 and a driving unit 4.The support base 1 has the freedom of rotation around the first axis.The swing arm assembly 2 has a connecting end 21 and a crystal placement end 22 arranged oppositely, and further has an intermediate part 23 located in the region between the connecting end 21 and the crystal placement end 22.The elastic connection group 3 is connected between the support base 1 and the connecting end 21, and can be elastically deformed when subjected to external force, so as to enable the swing arm assembly 2 to swing back and forth around the second axis with the elastic connection group 3 as support, and the second axis is arranged at an angle with the first axis.The driving unit 4 is arranged on the support base 1, and the driving end of the driving unit 4 is connected with the intermediate part 23 of the swing arm assembly 2, and the driving unit 4 is used to drive the swing arm assembly 2 to swing back and forth around the first axis.

[0035] Specifically, the support base 1 refers to a support component with a certain volume, and the shape of the support base 1 can be block-shaped, columnar or plate-shaped, etc.The support base 1 has the freedom of rotation around the first axis, and the support base 1 can be connected with a motor or other power equipment, and rotates around the first axis under the drive of the power equipment, wherein the first axis is usually arranged along the vertical direction.The swing arm assembly 2 refers to a component with a certain length, and the swing arm assembly 2 can be rod-shaped, columnar or a combination of multiple shapes.The connecting end 21 and the crystal placement end 22 respectively refer to the two end regions of the swing arm assembly 2, and the intermediate part 23 can refer to other regions of the swing arm assembly 2 except the two ends.

[0036] The driving unit 4 refers to a power assembly that can drive a component to move along a straight line or an arc, and the driving unit 4 can be a pneumatic cylinder, an electric push rod or a voice coil motor, etc.The driving end of the driving unit 4 refers to the part of the driving unit 4 that can move relative to the main body, and the driving end of the driving unit 4 is usually connected with other components.

[0037] The elastic connection group 3 refers to a component or assembly that can undergo elastic deformation under stress. The elastic connection group 3 can be a single component or a combination of multiple components. The second axis refers to a virtual straight line. The second axis generally runs through the elastic connection group 3 and is usually located outside the swing arm assembly 2. The second axis is generally horizontal and the angle between it and the first axis is generally a right angle.

[0038] The die-bonding swing arm device provided in this embodiment of the invention connects the connecting end 21 of the swing arm assembly 2 to the support base 1 via an elastic connecting group 3, allowing the die-bonding end 22 of the swing arm assembly 2 to extend away from the support base 1. A drive unit 4 is also provided on the support base 1, with its drive end connected to the middle portion 23 of the swing arm assembly 2. During operation, the rotation of the support base 1 drives the swing arm assembly 2 to swing around a first axis, and the drive unit 4 pushes the entire swing arm assembly 2 to swing periodically around a second axis, thereby achieving movement of the fixed end of the swing arm assembly 2 in multiple directions. Compared with the existing die-bonding swing arm device, the connecting end 21 of the swing arm assembly 2 is connected to the support base 1 through the elastic connecting group 3, and the suction nozzle structure 5 is set on the die-bonding end 22 away from the connecting end 21. This allows the suction nozzle structure 5 to be as far away from the second axis as possible, so that the suction nozzle structure 5 has a larger rotation diameter when the swing arm assembly 2 swings around the second axis in the vertical direction. According to geometric relationships, when an object rotates in a vertical plane, the larger the rotation radius of the object, the smaller the displacement in the horizontal direction when moving the same distance in the vertical direction. Therefore, increasing the rotation radius of the suction nozzle structure 5 reduces the deviation value in the horizontal direction when the suction nozzle structure 5 is adjusted in the vertical direction, thereby improving the die-bonding accuracy.

[0039] It should be noted that in this embodiment, by connecting the driving end of the driving unit 4 to the middle part 23 of the swing arm assembly 2, there is sufficient space at the connecting end 21 of the swing arm assembly 2 to set the elastic connecting group 3, so that the connecting end 21 of the swing arm assembly 2 can be connected to the rotating body through the elastic connecting group 3.

[0040] In one embodiment, see Figure 2 and Figure 3The die-bonding arm device also includes a nozzle structure 5, which has a nozzle surface 51 for contacting the chip. The second axis is horizontal and located in an area flush with the nozzle surface 51. Specifically, the nozzle structure 5 refers to the component or assembly used to pick up and place the chip. The working principle of the nozzle structure 5 is that during operation, the vacuum system generates negative pressure at the nozzle head through the internal channel of the nozzle. This negative pressure allows the nozzle to firmly adhere to the chip, and when chip placement is needed, the connection with the vacuum system is disconnected, allowing the chip to detach from the nozzle structure 5. The nozzle surface 51 refers to the part where the nozzle contacts the chip, and the accuracy of the position of the nozzle surface 51 directly affects the accuracy of die bonding. In this embodiment, when the second axis is horizontal, the first axis is vertical, based on geometric relationships and... Figure 2 and Figure 3 It can be seen that when the first axis and the suction surface 51 of the suction structure 5 are aligned horizontally, the rotation center of the suction surface 51, i.e., the location of the first axis, is O1. And when the rotation radius of the suction surface 51 is R1, the motion trajectory of the suction surface 51 is as follows: Figure 3 As shown in C1, when the suction nozzle surface 51 descends a vertical distance of H, its horizontal offset distance is D1. When the first axis is located at any position that is not on the same horizontal plane as the suction nozzle surface 51, the rotation center position of the suction nozzle surface 51 is O2 (exemplary). And when the rotation radius of the suction nozzle surface 51 is R2 and R1 equals R2, the motion trajectory of the suction nozzle surface 51 is as follows. Figure 3 As shown in C2, when the suction nozzle surface 51 descends a vertical distance of H, the horizontal offset distance of the suction nozzle surface 51 is D2. Figure 3 From the results, we know that D2 is greater than D1. Therefore, if the first axis and the suction surface 51 of the suction structure 5 are located in the same horizontal plane, the deviation in the horizontal direction will be smaller when the suction surface 51 of the suction structure 5 moves the same distance in the vertical direction, thereby reducing the deviation of the suction surface 51 when the swing arm assembly 2 swings.

[0041] It should be noted that the description of the first axis and the suction surface 51 of the suction structure 5 being located in the same horizontal plane is only a theoretical geometric description. In actual installation, certain dimensional deviations are allowed. That is, in actual products, the first axis and the suction surface 51 being close to being in the same horizontal plane are also within the scope of protection of this application.

[0042] In one embodiment, see Figure 4 and Figure 5The elastic connection assembly 3 includes a first elastic sheet 31, which is parallel to the second axis. One end of the first elastic sheet 31 is fixed to the support base 1, and the other end is fitted and fixed to the connecting end 21. Specifically, the first elastic sheet 31 is a sheet-like or plate-like component that can elastically deform under external force, primarily by bending. The first elastic sheet 31 can be made of metal or non-metallic materials such as plastic. There can be one or multiple first elastic sheets 31. When there are multiple first elastic sheets 31, they can be arranged parallel to the second axis. During installation, one end of the first elastic sheet 31 can be fitted and fixed to the support base 1, and the other end can be fitted and fixed to the connecting end 21 of the swing arm assembly 2. The first elastic sheet 31 is arranged parallel to the second axis. While connecting the swing arm assembly 2 to the support base 1 via the first elastic plate 31, the swing arm assembly 2 can also swing around the second axis with the first elastic plate 31 as support when the middle part 23 of the swing arm assembly 2 is pushed by the driving end of the driving unit 4. The elastic deformation of the first elastic plate 31 allows the swing arm assembly 2 to swing with the first elastic plate 31 as support. The use of the first elastic plate 31 in the elastic structure simplifies the structure of the elastic connection group 3.

[0043] In one embodiment, see Figure 4 and Figure 5 The elastic connection assembly 3 also includes a second elastic sheet 32, which is also parallel to the second axis. One end of the second elastic sheet 32 ​​is fixedly attached to the support base 1, and the other end is fixedly attached to the connecting end 21. The projections of the second elastic sheet 32 ​​and the first elastic sheet 31 onto a plane perpendicular to the second axis intersect each other. Specifically, the second elastic sheet 32 ​​is a sheet-like or plate-like component that can elastically deform under external force. The elastic deformation of the second elastic sheet 32 ​​is mainly bending. The second elastic sheet 32 ​​can be made of metal or non-metallic materials such as plastic. There can be one or multiple second elastic sheets 32. When there are multiple second elastic sheets 32, they can be arranged in a direction parallel to the second axis. The second elastic sheet 32 ​​is also parallel to the second axis, with one end fixedly attached to the support base 1 and the other end fixedly attached to the connecting end 21.

[0044] In this embodiment, by providing a second elastic sheet 32 ​​on the basis of the first elastic sheet 31, the connection between the swing arm assembly 2 and the support base 1 can be further strengthened. By arranging both the first elastic sheet 31 and the second elastic sheet 32 ​​in a direction parallel to the second axis, and with the projections of the second elastic sheet 32 ​​and the first elastic sheet 31 on a plane perpendicular to the second axis intersecting each other, the swing arm assembly 2 is prevented from deviating from the second axis during swinging. This makes the swinging of the swing arm assembly 2 more stable and the die bonding more precise.

[0045] It should be noted that when the projections of the second elastic plate 32 and the first elastic plate 31 on the plane intersect each other, the intersection position of the second elastic plate 32 and the first elastic plate 31 is the position of the second axis. The second axis intersects with both the second elastic plate 32 and the first elastic plate 31. The aforementioned plane generally refers to a vertical plane. The included angle between the second elastic plate 32 and the first elastic plate 31 is generally a right angle, making the force on the swing arm assembly 2 more uniform.

[0046] In one embodiment, see Figure 2 and Figure 3 The first elastic sheet 31 is arranged horizontally, and the second axis passes through the first elastic sheet 31. Horizontally, the first elastic sheet 31 is located in an area flush with the suction surface 51 of the suction structure 5. In this embodiment, by arranging the first elastic sheet 31 horizontally, the second elastic sheet 32 ​​can be arranged vertically. Simultaneously, the second axis passes through the first elastic sheet 31, and the first elastic sheet 31 and the suction surface 51 of the suction structure 5 are located in the same horizontal plane. This allows for a smaller horizontal deviation when the suction surface 51 of the suction structure 5 moves the same distance vertically, reducing the deviation of the suction surface 51 caused by the swing arm assembly 2. In an optional embodiment, please refer to... Figure 4 and Figure 5The support base 1 is provided with a first clamping block 33 for clamping the first elastic sheet 31 or the second elastic sheet 32. The first clamping block 33 can be fixed to the support base 1 with screws. At least a portion of the first elastic sheet 31 or at least a portion of the second elastic sheet 32 ​​is located between the first clamping block 33 and the support base 1. The clamping of the first clamping block 33 can make the first elastic sheet 31 or the second elastic sheet 32 ​​fit and fix to the support base 1. At the same time, mounting through holes can be provided on the first elastic sheet 31 or the second elastic sheet 32. When the first clamping block 33 is fixed by fasteners, the fasteners can also pass through the mounting through holes on the first elastic sheet 31 or the second elastic sheet 32, making the fit and fixation between the first elastic sheet 31 or the second elastic sheet 32 ​​and the support base 1 more secure. Similarly, a second clamping block 34 is provided on the swing arm assembly 2 for pressing the first elastic sheet 31 or the second elastic sheet 32. The second clamping block 34 can be fixed to the swing arm assembly 2 by screws. At least a portion of the first elastic sheet 31 or at least a portion of the second elastic sheet 32 ​​is located between the second clamping block 34 and the swing arm assembly 2. The first elastic sheet 31 or the second elastic sheet 32 ​​can be adhered and fixed to the swing arm assembly 2 by the clamping of the second clamping block 34. At the same time, mounting through holes can be provided on the first elastic sheet 31 or the second elastic sheet 32. When the second clamping block 34 is fixed by fasteners, the fasteners can also pass through the mounting through holes on the first elastic sheet 31 or the second elastic sheet 32, making the adhesion and fixation between the first elastic sheet 31 or the second elastic sheet 32 ​​and the swing arm assembly 2 more secure.

[0047] In one embodiment, see Figure 1The swing arm assembly 2 includes a swing arm mounting base 24 and a swing arm body 25. The first end of the swing arm mounting base 24 is connected to the support base 1 via an elastic connection group 3, and the second end is connected to the first end of the swing arm body 25. The second end of the swing arm body 25 extends away from the swing arm mounting base 24, and the driving end is connected to the swing arm mounting base 24. The first end of the swing arm mounting base 24 is the connecting end 21, and the second end of the swing arm body 25 is the die-bonding end 22. Specifically, the swing arm mounting base 24 refers to a component with a certain volume; it can be block-shaped, plate-shaped, or a combination of various shapes. The swing arm body 25 refers to a component with a certain length; it can be column-shaped, rod-shaped, or block-shaped. The first end of the swing arm body 25 can be connected to the second end of the swing arm mounting base 24 through snap-fit ​​fixing, fastener fixing, welding, etc. A weight-reducing structure can also be provided on the swing arm body 25. By setting the swing arm assembly 2 as a split structure consisting of a swing arm mounting base 24 and a swing arm body 25, the swing arm mounting base 24 and the swing arm body 25 can be processed separately, which can reduce the overall manufacturing cost of the swing arm assembly 2. At the same time, after the swing arm mounting base 24 is connected to the support base 1 through an elastic structure, the swing arm body 25 can be installed on the second end of the swing arm mounting base 24, making the assembly of the swing arm assembly 2 faster and more convenient.

[0048] In one embodiment, see Figure 5 The first end of the swing arm mounting base 24 is further provided with a first mounting surface 26 and a second mounting surface 27. The first mounting surface 26 is used to fit and fix the first elastic sheet 31, and the second mounting surface 27 is used to fit and fix the second elastic sheet 32. Specifically, both the first mounting surface 26 and the second mounting surface 27 refer to surface structures with a certain area. The first mounting surface 26 and the second mounting surface 27 are generally planar structures, and they can be arranged perpendicular to each other. In this embodiment, by providing the first mounting surface 26 and the second mounting surface 27 at the first end of the swing arm mounting base 24, that is, at the connecting end 21 of the swing arm assembly 2, the fitting and fixing of the first elastic sheet 31 and the second elastic sheet 32 ​​to the connecting end 21 is more convenient and more secure.

[0049] Based on the aforementioned features of the first mounting surface 26 and the second mounting surface 27, please refer to Figure 1 The support base 1 is further provided with a third mounting surface and a fourth mounting surface. The third mounting surface is parallel to the first mounting surface 26, and the fourth mounting surface is parallel to the second mounting surface 27. The arrangement of the third and fourth mounting surfaces makes the installation of the first elastic piece 31 and the second elastic piece 32 more convenient and secure.

[0050] In one embodiment, see Figure 1The drive unit 4 includes a voice coil motor, which includes a stator assembly 41 and a mover assembly 42. The stator assembly 41 is fixedly mounted on the support base 1, and the mover assembly 42 is movably disposed inside the stator assembly 41. At least a portion of the mover assembly 42 is connected to the middle part 23 of the swing arm assembly 2. The stator assembly 41 has a magnetic part, and the mover assembly 42 has a coil part for communicating with an external circuit. The coil part is also used to interact with the magnetic part after being energized to drive the mover assembly 42 to reciprocate along a preset path.

[0051] Specifically, the stator assembly 41 refers to a component with a certain volume. The stator assembly 41 typically has a receiving structure, which can be a receiving groove, receiving hole, etc. The magnetic part refers to a component that possesses magnetism and can generate a stable magnetic field. The magnetic part can be housed within the receiving structure on the stator assembly 41. The mover assembly 42 also refers to a component with a certain volume, and it also has a coil part, which is a structure made of wound wire. When the voice coil motor is working, the coil part can be connected to an external circuit. After the coil part is energized, it also generates a magnetic field, which interacts with the magnetic field generated by the magnetic part, causing the mover assembly 42 to move along a straight line or arc. By changing the direction of the current flowing into the coil part (e.g., by applying alternating current), the reciprocating motion of the mover assembly 42 can be achieved. By connecting at least a portion of the mover assembly 42 to the power end of the swing arm assembly 2, the movement of the mover assembly 42 will also drive the power end of the swing arm assembly 2 to move together.

[0052] In this embodiment, a voice coil motor is used instead of a servo motor to drive the power end of the swing arm assembly 2. The voice coil motor has better high-frequency response characteristics and can realize high-speed reciprocating linear motion. It is particularly suitable for short-stroke servo control with high positioning accuracy. Moreover, the voice coil motor has no intermediate transmission link, which can greatly simplify its own structure and size, improve the compactness of the entire swing arm assembly 2, and reduce the moment of inertia of the swing arm assembly 2, thereby improving the working efficiency and die bonding accuracy of the entire swing arm assembly 2 during operation.

[0053] In one embodiment, see Figure 1 An elastic limiting group 6 is provided between the support base 1 and / or the body of the drive unit 4 and the swing arm assembly 2. The elastic limiting group 6 is used to limit the swing arm assembly 2 to avoid collision between the swing arm assembly 2 and the support base 1. Specifically, the elastic limiting group 6 refers to a component or assembly used to elastically limit an object through its own elasticity. In this embodiment, by providing the elastic limiting group 6 between the support base 1 and the swing arm assembly 2, and between the body of the drive unit 4 and the swing arm assembly 2, the swing arm assembly 2 can be elastically limited during its swing, thereby preventing collision between the swing arm assembly 2 and the support base 1.

[0054] In one embodiment, see Figure 1 The elastic limiting assembly includes a mounting bracket 61 and an elastic pin 62. One end of the elastic pin 62 is fixed to the support base 1 or the drive unit 4 via the mounting bracket 61, and the other end of the elastic pin 62 abuts against the swing arm assembly 2. Specifically, the mounting bracket 61 refers to a component with a certain volume, which can be block-shaped, plate-shaped, or a combination of various shapes. The elastic pin 62 refers to an elastic component with a certain length. The elastic pin 62 can be a single elastic component, such as a columnar spring or a rubber column. The elastic pin 62 can also be composed of multiple components, for example, a columnar component is provided inside a sleeve, and a buffer spring is provided inside the sleeve to form the entire elastic pin 62. In this embodiment, the body of the elastic top pin 62 is fixed to the body of the support base 1 or the drive unit 4 by the mounting bracket 61. One end of the elastic top pin 62 can abut against the swing arm assembly 2. When the swing arm assembly 2 is close to the body of the support base 1 or the drive unit 4, the elasticity of the elastic top pin 62 can apply a force to the swing arm assembly 2, thereby limiting the swing arm assembly 2 to avoid collision.

[0055] Secondly, a die bonding apparatus is provided, including the die bonding arm device of any of the above-mentioned embodiments. It is understood that the beneficial effects of the second aspect can be found in the relevant description in the first aspect above, and will not be repeated here.

[0056] The above are merely preferred embodiments of the present utility model, and only specifically describe the technical principles of the present utility model. These descriptions are only for explaining the principles of the present utility model and should not be construed as limiting the scope of protection of the present utility model in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model, as well as other specific embodiments of the present utility model that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present utility model.

Claims

1. A die-bonding swing arm device, characterized in that, include: The support base has a degree of freedom to rotate about the first axis; A swing arm assembly having a connecting end and a die-bonding end disposed opposite to each other, and the swing arm assembly also having a middle portion located in the region between the connecting end and the die-bonding end; An elastic connection assembly is connected between the support base and the connecting end. The elastic connection assembly can elastically deform when subjected to external force, allowing the swing arm assembly to reciprocate about a second axis with the elastic connection assembly as support. The second axis is set at an angle to the first axis. A drive unit is disposed on the support base, and the drive end of the drive unit is connected to the middle part of the swing arm assembly, for driving the swing arm assembly to reciprocate around the first axis.

2. The die-bonding swing arm device as described in claim 1, characterized in that, The die-bonding arm device further includes a nozzle structure having a nozzle surface for contacting the chip, and the second axis is horizontal, located in a region flush with the nozzle surface.

3. The die-bonding swing arm device as described in claim 2, characterized in that, The elastic connection assembly includes a first elastic sheet, which is parallel to the second axis. One end of the first elastic sheet is fixed to the support base, and the other end of the first elastic sheet is fitted and fixed to the connection end.

4. The die-bonding swing arm device as described in claim 3, characterized in that, The elastic connection group further includes a second elastic sheet, which is also parallel to the second axis. One end of the second elastic sheet is fixedly attached to the support base, and the other end is fixedly attached to the connection end. The projections of the second elastic sheet and the first elastic sheet on a plane perpendicular to the second axis intersect each other.

5. The die-bonding swing arm device as described in claim 3 or 4, characterized in that, The first elastic sheet is arranged in a horizontal direction, the second axis passes through the first elastic sheet, and in the horizontal direction, the first elastic sheet is located in a region that is flush with the suction surface of the suction structure.

6. The die-bonding swing arm device as described in claim 5, characterized in that, The swing arm assembly includes a swing arm mounting base and a swing arm body. The first end of the swing arm mounting base is connected to the support base through an elastic connection group, and the second end is connected to the first end of the swing arm body. The second end of the swing arm body extends away from the swing arm mounting base. The driving end is connected to the swing arm mounting base. The first end of the swing arm mounting base is the connecting end, and the second end of the swing arm body is the die bonding end.

7. The die-bonding swing arm device as described in claim 1 or 2, characterized in that, The drive unit includes a voice coil motor, which includes a stator assembly and a mover assembly. The stator assembly is fixedly mounted on the support base, and the mover assembly is movably disposed inside the stator assembly. At least a portion of the mover assembly is connected to the middle portion of the swing arm assembly. The stator assembly has a magnetic part, and the mover assembly has a coil part for communicating with an external circuit. The coil part is also used to interact with the magnetic part after being energized to drive the mover assembly to reciprocate along a preset path.

8. The die-bonding swing arm device as described in claim 1 or 2, characterized in that, An elastic limiting group is provided between the support base and / or the body of the drive unit and the swing arm assembly. The elastic limiting group is used to limit the swing arm assembly to avoid collision between the swing arm assembly and the support base.

9. The die-bonding swing arm device as described in claim 8, characterized in that, The elastic limiting group includes a mounting bracket and an elastic top pin. One end of the elastic top pin is fixed to the support base or the drive unit through the mounting bracket, and the other end of the elastic top pin abuts against the swing arm assembly.

10. A die bonding apparatus, characterized in that, Includes the die-bonding swing arm device as described in any one of claims 1 to 9.

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