Filter element barrel structure

Abstract

The utility model discloses a filter element barrel structure. The filter element barrel structure comprises a barrel body which is provided with a liquid outlet used for discharging filtered liquid; the barrel cover is located at the top of the barrel body, a liquid inlet and at least one filter element positioning through hole are formed in the barrel cover, the liquid inlet is used for introducing liquid to be filtered, and the filter element positioning through hole is used for installing a filter element device; each filter element device is inserted into the bottom of the barrel body from one filter element positioning through hole and is used for filtering liquid introduced from the liquid inlet; the liquid inlet pipeline is arranged in the barrel cover, two ends of the liquid inlet pipeline are respectively communicated with the liquid inlet and the filter element device, and the liquid inlet pipeline is used for enabling liquid introduced from the liquid inlet to flow into the filter element device. According to the filter element barrel structure, the liquid inlet is formed in the barrel cover and directly communicated with the filter element device, the problem that too many fragments exist in the barrel body and flow into a machine table is solved, and the problem that the fragments are accumulated at the bottom of the barrel body of a traditional filter element barrel structure is solved.

Description

Technical Field

[0001] This application relates to the field of filtration equipment technology, specifically to a filter cartridge structure. Background Technology

[0002] In semiconductor manufacturing and related high-precision processing industries, wet processing plays an indispensable role, widely used in key processes such as silicon wafer cleaning and etching. With the continuous expansion of global silicon wafer production capacity, the requirements for wet processing equipment are becoming increasingly stringent, especially regarding the quality of the chemical solutions. The quality of the chemical solutions directly affects product yield and production efficiency; therefore, ensuring the purity of the chemical solutions is one of the key factors in improving product quality and ensuring the stable operation of the production line.

[0003] As a crucial component in wet filtration machines used for filtering pharmaceutical solutions, filter cartridges face numerous challenges after prolonged use. Traditional filter cartridges have the filter element fixed to the bottom of the cartridge, where the inlet is also located. A gap exists between the inlet and the filter element, easily accumulating solid debris generated during filtration. This debris is difficult to clean thoroughly and, over time, gradually affects the filtration efficiency and may contaminate new solutions. Due to these issues, the filtered pharmaceutical solution may still contain a certain amount of debris. If this debris enters the machine's internal piping, it can cause nozzle blockages, affecting normal operation and resulting in additional maintenance costs and downtime. Utility Model Content

[0004] In view of the above problems, this application provides a filter cartridge structure to solve the above technical problems.

[0005] This application provides a filter cartridge structure, comprising:

[0006] The tank body is provided with a liquid outlet for discharging filtered liquid.

[0007] A bucket lid is located on top of the bucket body. The bucket lid is provided with a liquid inlet and at least one filter element positioning through hole. The liquid inlet is used to introduce the liquid to be filtered, and the filter element positioning through hole is used to install the filter element device.

[0008] At least one of the filter cartridge devices, each filter cartridge device being inserted into the bottom of the barrel from a filter cartridge positioning through hole, is used to filter the liquid introduced from the inlet.

[0009] A liquid inlet pipe is installed inside the bucket lid, with its two ends connected to the liquid inlet and the filter element device, respectively, for allowing the liquid introduced by the liquid inlet to flow into the filter element device.

[0010] In some embodiments, the filter cartridge structure provided in this application includes: a filter pipe with multiple filter holes and a cotton coil wrapped around the filter pipe.

[0011] In some embodiments, in the filter cartridge structure provided in this application, one end of the filter element device extends through the cartridge cover, and the other end contacts the bottom of the cartridge body. Both ends of the filter element device are fixed by fasteners.

[0012] In some embodiments, the fixing element in the filter cartridge structure provided in this application is a nut.

[0013] In some embodiments, the filter cartridge structure provided in this application includes six filter cartridge devices arranged in a ring around the liquid inlet.

[0014] In some embodiments, the filter cartridge structure provided in this application further includes:

[0015] A liquid flow channel is arranged in a ring shape between the filter elements inside the bucket lid, for connecting the filter elements.

[0016] In some embodiments, in the filter cartridge structure provided in this application, the liquid inlet is connected to the liquid inlet pipe, and the liquid inlet pipe is provided with a liquid inlet regulating valve for regulating the liquid flow rate in the liquid inlet pipe.

[0017] In some embodiments, in the filter cartridge structure provided in this application, the liquid outlet is connected to the liquid outlet pipe, and the liquid outlet pipe is provided with a liquid outlet regulating valve for regulating the liquid flow rate in the liquid outlet pipe.

[0018] In some embodiments, the filter cartridge structure provided in this application includes a sealing ring between the cartridge cover and the cartridge body.

[0019] In some embodiments, in the filter cartridge structure provided in this application, the liquid outlet is located at the bottom of the cartridge body, or the liquid outlet is located on the side wall of the cartridge body.

[0020] This application provides a filter cartridge structure. The cartridge body of the filter cartridge structure has a liquid outlet, and the lid of the cartridge structure has a liquid inlet and at least one filter cartridge positioning through hole. At least one filter cartridge device is installed in the filter cartridge positioning through hole. Each filter cartridge device is inserted into the bottom of the cartridge body through one of the filter cartridge positioning through holes. The liquid inlet and the filter cartridge device are connected by a liquid inlet pipe so that the liquid introduced by the liquid inlet flows into the filter cartridge device. The filter cartridge structure provided by this application has the liquid inlet located on the lid and directly connected to the filter cartridge device, so that the liquid can be directly guided into the filter cartridge for filtration, then flows into the inner cavity of the cartridge, and finally discharges from the liquid outlet of the cartridge body. This reduces the problem of excessive debris in the cartridge body flowing into the machine. Furthermore, the filter cartridge device, the liquid inlet, and the lid of the filter cartridge structure are set together, so there is no need to set a gap between the filter cartridge device and the bottom of the cartridge body, thus solving the problem of debris accumulation at the bottom of the cartridge body in traditional filter cartridge structures.

[0021] These or other aspects of this application will become more apparent in the following description of the embodiments. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A schematic diagram of a traditional filter cartridge structure is shown.

[0024] Figure 2 A partial schematic diagram of a traditional filter cartridge structure is shown.

[0025] Figure 3 A schematic diagram of the filter cartridge structure provided in an embodiment of this application is shown.

[0026] Figure 4 A partial schematic diagram of the filter cartridge structure provided in an embodiment of this application is shown.

[0027] Figure 5 A schematic diagram of the inside of the cover of the filter cartridge structure provided in an embodiment of this application is shown.

[0028] Figure 6 A schematic diagram of the components of a filter cartridge device with a filter cartridge barrel structure provided in an embodiment of this application is shown.

[0029] Icon labels:

[0030] 10. Inlet pipe; 21. Filter element; 22. Base; 30. Outlet pipe; 100. Tank body; 110. Outlet pipe; 111. Outlet regulating valve; 200. Tank lid; 210. Inlet pipe; 211. Inlet regulating valve; 300. Filter element assembly; 310. Filter pipe; 320. Cotton coil; 400. Inlet pipe; 500. Fixing component; 600. Liquid flow pipe. Detailed Implementation

[0031] To enable those skilled in the art to better understand the solutions of this application, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0032] In the embodiments of this application, it should be noted that, in this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0033] Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0034] Furthermore, in the embodiments of this application, "multiple" refers to two or more. Therefore, in the embodiments of this application, "multiple" can also be understood as "at least two". "At least one" can be understood as one or more, such as one, two, or more. For example, including at least one means including one, two, or more, and is not limited to which ones are included. For example, including at least one of A, B, and C, then it could include A, B, C, A and B, A and C, B and C, or A and B and C.

[0035] As an important component in wet filtration machines used for filtering pharmaceutical solutions, filter cartridges face numerous challenges after long-term use. Figure 1 A schematic diagram of a traditional filter cartridge structure is shown. Figure 2 A partial schematic diagram of a traditional filter cartridge structure is shown. (For example...) Figure 1 and Figure 2As shown, the inlet of a traditional filter cartridge (connected to the inlet pipe 10) is located at the bottom of the cartridge. There is a gap between the base 22 of the filter element 21 and the inlet. However, this design easily accumulates solid debris generated during the filtration process. This debris is not easily cleaned thoroughly and gradually affects the filtration effect of the solution over time, potentially contaminating new solutions. Furthermore, due to the aforementioned problems, the filtered solution may still contain a certain amount of debris. If this debris enters the machine's internal piping through the outlet (connected to the outlet pipe 30), it can cause nozzle blockage and other problems, affecting the normal operation of the machine and resulting in additional maintenance costs and downtime.

[0036] In view of the above problems, embodiments of this application provide a filter cartridge structure. Figure 3 A schematic diagram of the filter cartridge structure provided in an embodiment of this application is shown. Figure 4 This paper shows a partial schematic diagram of the filter cartridge structure provided in an embodiment of this application. Figure 5 This application provides a schematic diagram of the interior of the filter cartridge canister cap, as shown in the embodiment of the present application. Figures 3 to 5 As shown, the filter cartridge structure provided in this application embodiment includes: a cartridge body 100, a cartridge cover 200, at least one filter cartridge device 300, and an inlet pipe 400.

[0037] The barrel body 100 is provided with a liquid outlet, which is connected to a liquid outlet pipe 110. The liquid outlet is used to discharge the filtered liquid. The barrel cover 200 is located on top of the barrel body 100 and is provided with a liquid inlet and at least one filter element positioning through hole. The liquid inlet is connected to a liquid inlet pipe 210 and is used to introduce the liquid to be filtered. The filter element positioning through hole is used to install the filter element device 300. Each filter element device 300 is inserted into the bottom of the barrel body 100 through one filter element positioning through hole to filter the liquid introduced from the liquid inlet and discharge the filtered liquid into the interior of the barrel body 100. The liquid inlet pipe 400 is located inside the barrel cover 200, and its two ends are connected to the liquid inlet and the filter element device 300, respectively, to allow the liquid introduced from the liquid inlet to flow into the filter element device 300.

[0038] In some embodiments, such as Figure 3 As shown, the liquid inlet is connected to the liquid inlet pipe 210. The liquid inlet pipe 210 is equipped with a liquid inlet regulating valve 211. The liquid inlet regulating valve 211 is used to regulate the liquid flow rate in the liquid outlet pipe 110, thereby regulating the flow rate of liquid injected into the tank 100.

[0039] In some embodiments, such as Figure 3 As shown, the liquid outlet is connected to the liquid outlet pipe 110. The liquid outlet pipe 110 is equipped with a liquid outlet regulating valve 111. The liquid outlet regulating valve 111 is used to regulate the liquid flow rate in the liquid outlet pipe 110, thereby regulating the flow rate of the liquid discharged from the tank 100.

[0040] In some embodiments, a sealing ring is provided between the lid 200 and the body 100 to further improve the sealing of the filter cartridge structure when the lid 200 closes the body.

[0041] In some embodiments, such as Figures 2 to 3 As shown, the liquid outlet is located at the bottom of the tank 100, thereby utilizing gravitational potential energy to construct a natural and efficient drainage path. The filtered liquid flows out smoothly under the dominance of gravity, avoiding slow drainage due to insufficient power or pipe blockage, and significantly improving drainage efficiency.

[0042] It is understood that the embodiments of this application do not limit the specific location of the liquid outlet in the barrel. For example, the liquid outlet may also be located on the side wall of the barrel.

[0043] In some embodiments, Figure 6 A schematic diagram of the components of the filter cartridge device with a filter cartridge canister structure provided in an embodiment of this application is shown, such as... Figure 6 As shown in the embodiment of this application, the filter cartridge structure includes a filter pipe 310 with multiple filter holes and a cotton coil 320 wrapped around the filter pipe. The filter pipe 310 is covered with filter holes 310, which allows the medicine to flow out fully and filters out larger fragments in the medicine. The cotton coil 320 wraps around the filter pipe 310 to further filter out smaller fragments.

[0044] In some embodiments, such as Figures 2 to 3 As shown in the embodiment of this application, in the filter cartridge structure, one end of the filter element device 300 extends through the cartridge cover 200, and the other end contacts the bottom of the cartridge body 100. Both ends of the filter element device 300 are fixed by the fixing members 500, thereby limiting the filter element device 300 and preventing displacement and shaking of the filter element device caused by liquid flow impact and equipment vibration.

[0045] In some embodiments, such as Figures 2 to 3 As shown in the embodiment of this application, in the filter cartridge structure, the fixing member 500 is a nut, and both ends of the filter cartridge device 300 are equipped with nuts.

[0046] In some embodiments, such as Figure 5 As shown, the filter cartridge structure provided in this embodiment of the application has a total of six filter cartridge devices, and each of the filter cartridge devices 300 is arranged in a ring around the liquid inlet.

[0047] In some embodiments, such as Figure 5As shown in the embodiment of this application, the filter cartridge structure also includes a liquid flow pipe 600. The liquid flow pipe 600 is disposed between each filter cartridge device 300 within the cover 200, and is used to connect adjacent filter cartridge devices 300, so that liquid can be diverted to adjacent filter cartridge devices 300 through the liquid flow pipe 600, thereby improving the fault tolerance of the filter cartridge structure. Once a filter cartridge suddenly fails or encounters accidental blockage, the liquid flow pipe 600 can quickly guide the liquid flow around the failed filter cartridge, ensuring that the remaining normal filter cartridges continue to work.

[0048] As one implementation method, the filter cartridge structure provided in this application is applied to a wet etching process. First, the material of the filter cartridge structure is determined according to the characteristics of the chemical solution used in the wet etching process and the type of impurities to be filtered. For example, an acid- and alkali-resistant material is used to prepare the filter cartridge structure to adapt to the chemical properties of the etching solution. During use, the chemical solution to be filtered enters through the inlet of the cartridge lid and enters the filter cartridge device through the inlet pipe. The filter cartridge device adopts a double-layer filtration structure. The internal filtration pipe has filter holes of a specific size and distribution, which can intercept larger fragments, while the cotton coil wrapped around the filtration pipe can filter out finer fragments. The inlet is connected to each filter cartridge device through the inlet pipe, so that the chemical solution is evenly distributed to each filter cartridge device. A liquid flow pipe is also provided between each filter cartridge device to further improve the liquid flow capacity. The chemical solution is filtered into the cartridge body through the filter cartridge device and finally flows out from the outlet at the bottom of the cartridge body. Optionally, in this application embodiment, the inlet / outlet is connected to an external pipe to receive / export the liquid.

[0049] The filter cartridge structure provided in this application embodiment has an inlet located on the lid and directly connected to the filter cartridge device. This allows the liquid to be directly guided into the filter cartridge for filtration, then flows into the inner cavity of the cartridge, and finally exits from the outlet of the cartridge. This reduces the problem of excessive debris in the cartridge flowing into the machine. Furthermore, the filter cartridge device, inlet, and lid of the filter cartridge structure are all located together, eliminating the need for gaps between the filter cartridge device and the bottom of the cartridge, thus solving the problem of debris accumulating at the bottom of the traditional filter cartridge structure.

[0050] The above description, in conjunction with specific embodiments, provides a further detailed explanation of this application and should not be construed as limiting the specific implementation of this application to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of this application, and all such modifications and substitutions should be considered within the scope of protection of this application.

Claims

1. A filter cartridge structure, characterized in that, include: The tank body is provided with a liquid outlet for discharging filtered liquid. A bucket lid is located on top of the bucket body. The bucket lid is provided with a liquid inlet and at least one filter element positioning through hole. The liquid inlet is used to introduce the liquid to be filtered, and the filter element positioning through hole is used to install the filter element device. At least one of the filter cartridge devices, each of the filter cartridge devices being inserted into the bottom of the barrel from a filter cartridge positioning through hole, for filtering the liquid introduced from the liquid inlet; A liquid inlet pipe is installed inside the bucket lid, with its two ends connected to the liquid inlet and the filter element device, respectively, for allowing the liquid introduced by the liquid inlet to flow into the filter element device.

2. The filter cartridge structure as described in claim 1, characterized in that, The filter element device includes: a filter pipe with multiple filter holes and a cotton coil wrapped around the filter pipe.

3. The filter cartridge structure as described in claim 1, characterized in that, One end of the filter element device extends through the bucket lid, and the other end contacts the bottom of the bucket body. Both ends of the filter element device are fixed by fasteners.

4. The filter cartridge structure as described in claim 3, characterized in that, The fastener is a nut.

5. The filter cartridge structure according to claim 1, characterized in that, There are six filter cartridges in total, arranged in a ring around the liquid inlet.

6. The filter cartridge structure as described in claim 5, characterized in that, The filter cartridge structure also includes: A liquid flow channel is arranged in a ring shape between the filter elements inside the bucket lid, for connecting the filter elements.

7. The filter cartridge structure as described in claim 1, characterized in that, The liquid inlet is connected to the liquid inlet pipe, and the liquid inlet pipe is equipped with a liquid inlet regulating valve for regulating the liquid flow rate in the liquid inlet pipe.

8. The filter cartridge structure as described in claim 1, characterized in that, The liquid outlet is connected to the liquid outlet pipe, and the liquid outlet pipe is equipped with a liquid outlet regulating valve for regulating the liquid flow rate in the liquid outlet pipe.

9. The filter cartridge structure as described in claim 1, characterized in that, A sealing ring is provided between the lid and the body of the barrel.

10. The filter cartridge structure as described in claim 1, characterized in that, The liquid outlet is located at the bottom of the barrel.

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