Device for reducing air pressure fluctuation of diffusion equipment

Abstract

The utility model relates to the field of air source cabinets, in particular to a device for reducing air pressure fluctuation of diffusion equipment. Comprising a gas source cabinet and an adjusting structure, an adjusting button is installed on one side of the gas source cabinet, a connecting pipe is fixedly communicated with the upper surface of the gas source cabinet, the adjusting structure is located above the gas source cabinet, the adjusting structure comprises a conveying pipe, the conveying pipe is attached to the inner wall of the connecting pipe, the conveying pipe is communicated with the connecting pipe, and the connecting pipe is fixedly connected with the gas source cabinet. The outer wall of the conveying pipe is fixedly communicated with an air storage tank, an adjusting valve is installed on the outer wall of the conveying pipe, and a one-way valve is installed on the outer wall of the conveying pipe. According to the device for reducing the air pressure fluctuation of the diffusion equipment, when a pressure alarm is given out by nitrogen, the one-way valve can stabilize the pressure in the nitrogen storage tank, stabilize the pressure when the equipment operates, stabilize the nitrogen pressure of the equipment, stabilize the gas in the pipe, greatly reduce the utilization rate of silicon wafers, and reduce the production cost. And the reworking condition is reduced.

Description

Technical Field

[0001] This utility model relates to the field of gas source cabinets, and in particular to a device for reducing gas pressure fluctuations in diffusion equipment. Background Technology

[0002] Gas supply cabinets are common equipment in industrial automation, pneumatic control systems, or laboratories, and are mainly used to provide stable and clean gas to the system.

[0003] Currently, the diffusion furnace needs to be connected to a gas supply cabinet during operation. The gas supply cabinet supplies nitrogen to the diffusion furnace, and the nitrogen is connected to the equipment pipeline via a nitrogen supply pipe. At the external gas inlet and the equipment connection point, a pressure stabilizing tank device needs to be added to reduce rework caused by external gas pressure fluctuations. However, the nitrogen supplied in production is currently liquid nitrogen, which will be converted into gas nitrogen for use in the production line. At present, the large temperature difference between day and night causes the nitrogen gas to be unstable, resulting in furnace tube alarms and rework.

[0004] Therefore, it is necessary to provide a new device for reducing pressure fluctuations in diffusion equipment to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a device for reducing pressure fluctuations in diffusion equipment.

[0006] To solve the above-mentioned technical problems, this utility model provides a device for reducing gas pressure fluctuations in diffusion equipment, comprising: a gas source cabinet and an adjustment structure. An adjustment button is installed on one side of the gas source cabinet, and a connecting pipe is fixedly connected to the upper surface of the gas source cabinet. The adjustment structure is located above the gas source cabinet and includes a delivery pipe. The delivery pipe is in contact with the inner wall of the connecting pipe and is connected to the connecting pipe. A gas storage tank is fixedly connected to the outer wall of the delivery pipe. An adjustment valve and a one-way valve are installed on the outer wall of the delivery pipe.

[0007] The effects achieved by the above components are as follows: by setting the adjustment structure, when the nitrogen pressure alarm occurs, the one-way valve can stabilize the pressure in the nitrogen storage tank, stabilize the pressure during equipment operation, stabilize the nitrogen pressure in the equipment, stabilize the gas in the pipe, greatly reduce the utilization rate of silicon wafers, and reduce rework.

[0008] Preferably, a hand valve is installed on the outer wall of the delivery pipe.

[0009] The effect achieved by the above components is that the safety of nitrogen delivery is further enhanced by setting a manual valve.

[0010] Preferably, two ear plates are fixedly connected to the outer wall of the delivery pipe, and screw holes are opened on the side of the ear plates. Two arched plates are fixedly connected to the upper surface of the gas source cabinet. The inner wall of the arched plates fits against the ear plates, and a screw is threaded through the side of the arched plates. The size of the screw is adapted to the screw hole.

[0011] The effect achieved by the above components is that the conveying pipe can be easily disassembled by setting up the above structure.

[0012] Preferably, a sealing ring is fixedly connected to the upper end of the connecting pipe, and the sealing ring is in contact with the outer wall of the conveying pipe.

[0013] The effect achieved by the above-mentioned components is that the sealing ring can block the tiny gaps between the connecting pipe and the nitrogen delivery pipe, thereby improving the sealing performance between the connecting pipe and the nitrogen delivery pipe.

[0014] Preferably, an auxiliary structure is provided on one side of the gas source cabinet. The auxiliary structure includes a support plate. One side of the support plate is fixedly connected to the gas source cabinet. A lead screw is rotatably connected to one side of the support plate. The arc surface of the lead screw is provided with a bidirectional thread. Two connecting plates are threadedly connected to the arc surface of the lead screw. Clamping plates are fixedly connected to the sides of the two connecting plates that are close to each other. The inner wall of the clamping plate abuts against the outer wall of the delivery pipe.

[0015] The effect achieved by the above components is as follows: by setting up an auxiliary structure, after the nitrogen delivery pipe is installed on the gas source cabinet, the clamp can be easily adjusted to clamp and limit the nitrogen delivery pipe, thereby making the nitrogen delivery pipe stable and preventing it from falling due to its own weight, thus improving the stability of the nitrogen transmission process.

[0016] Preferably, a guide rod is slidably passed through the sides of the two connecting plates, and one end of the guide rod is fixedly connected to the support plate.

[0017] The effect achieved by the above components is that when the lead screw drives the connecting plate to move, the guide rod can guide and position the connecting plate, thereby preventing the connecting plate from rotating or shifting during the movement process.

[0018] Preferably, a plurality of rotating plates are fixedly connected to one end of the lead screw, and the rotating plates are evenly distributed at one end of the lead screw.

[0019] The effect achieved by the above components is that the operator can rotate the turntable to drive the lead screw, thus achieving convenient control of the lead screw.

[0020] Compared with related technologies, the device for reducing gas pressure fluctuations in diffusion equipment provided by this utility model has the following beneficial effects:

[0021] This invention provides a device for reducing gas pressure fluctuations in diffusion equipment. By setting an adjustment structure, when a nitrogen pressure alarm occurs, the one-way valve can stabilize the pressure in the nitrogen storage tank, stabilize the pressure during equipment operation, stabilize the nitrogen pressure in the equipment, stabilize the gas in the pipe, greatly reduce the utilization rate of silicon wafers, and reduce rework.

[0022] By setting up an auxiliary structure, after the nitrogen delivery pipe is installed on the gas source cabinet, the clamp can be easily adjusted to clamp and limit the nitrogen delivery pipe, thereby ensuring stable support of the nitrogen delivery pipe and preventing it from falling due to its own weight, thus improving the stability of the nitrogen transmission process. Attached Figure Description

[0023] Figure 1 A schematic diagram of the structure of a device for reducing pressure fluctuations in diffusion equipment provided by this utility model;

[0024] Figure 2 for Figure 1 The diagram shows the structural schematic of the adjustment structure.

[0025] Figure 3 for Figure 1 The diagram shows a partial structural disassembly of the adjustment structure.

[0026] Figure 4 for Figure 3 The diagram shows the structure of the auxiliary structure.

[0027] The following are the labels in the diagram: 1. Gas source cabinet; 2. Adjustment button; 3. Adjustment structure; 301. Delivery pipe; 302. Hand valve; 303. Gas storage tank; 304. Adjustment valve; 305. Check valve; 306. Sealing ring; 307. Ear plate; 308. Screw hole; 309. Arch plate; 310. Screw; 4. Auxiliary structure; 41. Support plate; 42. Lead screw; 43. Connecting plate; 44. Clamping plate; 45. Guide rod; 47. Rotating plate; 5. Connecting pipe. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0029] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0030] Please see Figure 1The present invention provides a device for reducing air pressure fluctuations in diffusion equipment, comprising: an air source cabinet 1 and an adjustment structure 3, wherein an adjustment button 2 is installed on one side of the air source cabinet 1, and a connecting pipe 5 is fixedly connected to the upper surface of the air source cabinet 1.

[0031] The regulating structure 3 is located above the gas source cabinet 1, and the auxiliary structure 4 is provided on one side of the gas source cabinet 1.

[0032] In the embodiments of this utility model, please refer to Figure 2 and Figure 3 The regulating structure 3 includes a delivery pipe 301, which is fitted against the inner wall of the connecting pipe 5 and connected to it. A gas storage tank 303 is fixedly connected to the outer wall of the delivery pipe 301. A regulating valve 304 and a one-way valve 305 are installed on the outer wall of the delivery pipe 301. By setting the regulating structure 3, when a nitrogen pressure alarm occurs, the one-way valve 305 can stabilize the pressure inside the nitrogen storage tank 303, ensuring stable pressure during equipment operation. Furthermore, it stabilizes the nitrogen pressure within the equipment and the gas in the pipe, significantly reducing silicon wafer utilization and rework. A manual valve 302 is installed on the outer wall of the delivery pipe 301. The manual valve 302 further enhances the safety of nitrogen delivery. Two ear plates 307 are fixedly connected to the outer wall of the delivery pipe 301. The ear plates 307 have screw holes 308 on their sides. Two arched plates 309 are fixedly connected to the upper surface of the gas source cabinet 1. The inner wall of the arched plate 309 fits against the ear plates 307. A screw 310 is threaded through the side of the arched plate 309. The screw 310 is matched with the size of the screw hole 308. When it is necessary to limit the position of the conveying pipe 301, first move the conveying pipe 301 to insert into the inner wall of the connecting pipe 5, and at the same time, place the ear plate 307 fixed to the outer wall of the conveying pipe 301 into the inner wall of the arched plate 309. After the screw 310 is aligned with the screw hole 308, rotate the screw 310 to connect with the screw hole 308, thus completing the limitation of the conveying pipe 301. When it is necessary to disassemble the conveying pipe 301, first rotate the screw 310 to separate it from the screw hole 308, and then move the ear plate 307 to separate it from the inner wall of the arched plate 309, thus completing the disassembly of the conveying pipe 301. By setting the above structure, the effect of convenient disassembly of the conveying pipe 301 is achieved. A sealing ring 306 is fixedly connected to the upper end of the connecting pipe 5, and the sealing ring 306 fits against the outer wall of the conveying pipe 301. The sealing ring 306 can seal the tiny gap between the connecting pipe 5 and the nitrogen delivery pipe 301, thereby improving the sealing performance between the connecting pipe 5 and the nitrogen delivery pipe 301.

[0033] In the embodiments of this utility model, please refer to Figure 4The auxiliary structure 4 includes a support plate 41, one side of which is fixedly connected to the gas source cabinet 1. A lead screw 42 is rotatably connected to one side of the support plate 41. The arc surface of the lead screw 42 has a bidirectional thread, and two connecting plates 43 are threadedly connected to the arc surface of the lead screw 42. A clamping plate 44 is fixedly connected to the side of each connecting plate 43 that is close to each other. The inner wall of the clamping plate 44 abuts against the outer wall of the delivery pipe 301. By setting the auxiliary structure 4, after the nitrogen delivery pipe 301 is installed on the gas source cabinet 1, the clamping plate 44 can be easily adjusted to clamp and limit the nitrogen delivery pipe 301, thereby making the nitrogen delivery pipe 301 stably supported and preventing it from falling due to its own weight, thus improving the stability of the nitrogen transmission process. A guide rod 45 is slidably inserted through the side of the two connecting plates 43, and one end of the guide rod 45 is fixedly connected to the support plate 41. When the lead screw 42 drives the connecting plate 43 to move, the guide rod 45 can guide and position the connecting plate 43, thereby preventing rotational deviation during the movement of the connecting plate 43. Several rotating plates 47 are fixedly connected to one end of the lead screw 42, and the rotating plates 47 are evenly distributed at one end of the lead screw 42. Personnel can rotate the rotating plates 47 to drive the lead screw 42, achieving convenient control of the lead screw 42.

[0034] The working principle of the device for reducing gas pressure fluctuations in diffusion equipment provided by this utility model is as follows: In use, first, a one-way valve 305 is added to the nitrogen interface of the nitrogen delivery pipe 301, then the nitrogen storage tank 303 is connected, and a pressure regulating valve is added to the inlet of the storage tank 303. Then, the manual valve 302 is connected to the control switch, and finally, it is connected to the connecting pipe 5 of the equipment's gas source cabinet 1. When it is necessary to limit the delivery pipe 301, first move the delivery pipe 301 to insert into the inner wall of the connecting pipe 5, and simultaneously insert the ear plate 307 fixed to the outer wall of the delivery pipe 301. When the screw 310 is aligned with the screw hole 308, the screw 310 is rotated to connect with the screw hole 308, thus limiting the position of the delivery pipe 301. When the delivery pipe 301 needs to be disassembled, the screw 310 is first rotated to separate from the screw hole 308, and then the ear plate 307 is moved to separate from the inner wall of the arched plate, thus disassembling the delivery pipe 301. The sealing ring 306 can block the tiny gap between the connecting pipe 5 and the nitrogen delivery pipe 301, thereby improving the sealing performance between the connecting pipe 5 and the nitrogen delivery pipe 301.

[0035] When the nitrogen delivery pipe 301 is connected to the connecting pipe 5, and it is necessary to ensure that the nitrogen delivery pipe 301 is stably supported, first rotate the rotating plate 47 to drive the lead screw 42 to rotate. The lead screw 42 drives the two connecting plates 43 with the bidirectional thread on its arc surface, so that the two connecting plates 43 move towards each other at the same time. The connecting plates 43 drive the clamping plate 44. When the clamping plate 44 is firmly abutted against the outer wall of the delivery pipe 301, the reinforcement and support of the nitrogen delivery pipe 301 can be completed. When the lead screw 42 drives the connecting plate 43 to move, the guide rod 45 can guide and position the connecting plate 43, thereby preventing the connecting plate 43 from rotating or shifting during the movement process.

[0036] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0037] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A device for reducing pressure fluctuations in a diffusion device, characterized in that, include: The gas source cabinet (1) and the regulating structure (3) are provided. An regulating button (2) is installed on one side of the gas source cabinet (1). A connecting pipe (5) is fixedly connected to the upper surface of the gas source cabinet (1). The regulating structure (3) is located above the gas source cabinet (1). The regulating structure (3) includes a delivery pipe (301). The delivery pipe (301) is in contact with the inner wall of the connecting pipe (5). The delivery pipe (301) is connected to the connecting pipe (5). A gas storage tank (303) is fixedly connected to the outer wall of the delivery pipe (301). A regulating valve (304) is installed on the outer wall of the delivery pipe (301). A one-way valve (305) is installed on the outer wall of the delivery pipe (301).

2. The device for reducing pressure fluctuations in a diffusion device according to claim 1, characterized in that, A hand valve (302) is installed on the outer wall of the delivery pipe (301).

3. The device for reducing pressure fluctuations in a diffusion device according to claim 1, characterized in that, Two ear plates (307) are fixedly connected to the outer wall of the delivery pipe (301). The ear plates (307) have screw holes (308) on their sides. Two arched plates (309) are fixedly connected to the upper surface of the gas source cabinet (1). The inner wall of the arched plate (309) is in contact with the ear plates (307). A screw (310) is threaded through the side of the arched plate (309). The screw (310) is matched with the size of the screw hole (308).

4. The device for reducing gas pressure fluctuations in a diffusion device according to claim 1, characterized in that, A sealing ring (306) is fixedly connected to the upper end of the connecting pipe (5), and the sealing ring (306) is in contact with the outer wall of the conveying pipe (301).

5. The device for reducing gas pressure fluctuations in a diffusion device according to claim 1, characterized in that, An auxiliary structure (4) is provided on one side of the gas source cabinet (1). The auxiliary structure (4) includes a support plate (41). One side of the support plate (41) is fixedly connected to the gas source cabinet (1). A lead screw (42) is rotatably connected to one side of the support plate (41). The arc surface of the lead screw (42) is provided with a bidirectional thread. Two connecting plates (43) are threadedly connected to the arc surface of the lead screw (42). A clamping plate (44) is fixedly connected to the side of the two connecting plates (43) that are close to each other. The inner wall of the clamping plate (44) abuts against the outer wall of the delivery pipe (301).

6. The device for reducing gas pressure fluctuations in a diffusion device according to claim 5, characterized in that, A guide rod (45) is slidably passed through the sides of the two connecting plates (43), and one end of the guide rod (45) is fixedly connected to the support plate (41).

7. The device for reducing gas pressure fluctuations in a diffusion device according to claim 5, characterized in that, A plurality of rotating plates (47) are fixedly connected to one end of the lead screw (42), and the rotating plates (47) are evenly distributed at one end of the lead screw (42).

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