Small pressurizing device

Abstract

The utility model provides a small-sized pressurizing device, and belongs to the field of mechanical testing and semiconductor processing. The small pressurizing device comprises an objective table, a sheet placing groove is formed in the upper end face of the objective table, a positioning sheet is placed in the sheet placing groove, and a pressurizing disc is arranged at the top of the objective table; a gear transmission mechanism is arranged at the bottom of the objective table, a plurality of lead screws are connected to the top of the gear transmission mechanism, and the gear transmission mechanism can drive the lead screws to rotate synchronously; the screw rod penetrates through the objective table and the pressurizing disc, a pressure spring is arranged at the top of the pressurizing disc, a pressurizing nut disc is arranged at the top of the pressure spring, and the pressurizing nut disc comprises a plurality of nuts correspondingly arranged on the screw rod in a sleeving mode. According to the scheme, the small pressurizing device is simple and compact in structure, easy to operate and high in space adaptability, the manufacturing cost and the occupied area can be effectively reduced, meanwhile, energy consumption is reduced, the small pressurizing device is suitable for various scenes such as laboratories and industrial sites, the use threshold and the maintenance cost are reduced, and the experiment efficiency and the data reliability are improved.

Description

Technical Field

[0001] This utility model relates to the fields of mechanical testing and semiconductor processing technology, and in particular to a small pressure device. Background Technology

[0002] In the fields of materials mechanics testing and semiconductor processing, pressure testing devices are core equipment used to test the mechanical properties of small materials and perform bonding experiments. Currently, most mainstream pressure testing devices on the market are large-scale devices, characterized by complex designs, large size, and high costs. They not only occupy a significant amount of space but also require high energy consumption and maintenance costs. Particularly in materials performance research, the lack of real-time detection methods for changes in the microscopic behavior of samples under pressure limits the depth and accuracy of research. Utility Model Content

[0003] This utility model provides a small pressurization device to solve the technical problems that existing pressurization devices are mostly large-scale equipment, with complex designs, large size and high cost, which not only occupy a lot of space, but also require high energy consumption and maintenance costs.

[0004] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0005] A small pressurizing device includes a platform with a slot for placing a positioning plate on its upper surface. A pressure plate is mounted on the top of the platform. A gear transmission mechanism is located at the bottom of the platform, and multiple lead screws are connected to the top of the gear transmission mechanism. The gear transmission mechanism can drive the multiple lead screws to rotate synchronously. The lead screws pass through the platform and the pressure plate. A compression spring is mounted on the top of the pressure plate, and a pressure nut plate is mounted on the top of the compression spring. The pressure nut plate includes multiple nuts corresponding to the lead screws.

[0006] Optionally, the pressure nut disc includes multiple connecting rods, which are distributed in a divergent manner and correspond one-to-one with the nuts, with the nuts disposed at the ends of the corresponding connecting rods.

[0007] Optionally, the plate placement slot is located at the center of the upper end face of the stage, and the gear transmission mechanism includes a first gear located at the center of the bottom of the stage and a plurality of second gears meshing with the first gear. The plurality of second gears are evenly distributed in a ring around the first gear, and the lead screw corresponds one-to-one with the second gear.

[0008] Optionally, the compression spring corresponds one-to-one with the lead screw, and the compression spring is sleeved on the lead screw and located at the bottom of the corresponding nut.

[0009] Optionally, a positioning hole is provided at the center of the positioning piece.

[0010] Optionally, the bottom of the pressure plate is provided with a boss that matches the plate placement groove.

[0011] Optionally, a first groove is provided on the upper surface of the pressure plate, and a temperature control module is provided in the first groove.

[0012] Optionally, a second groove is provided on the lower end face of the stage, and a sonar sensor is disposed in the second groove.

[0013] The beneficial effects of the above-mentioned technical solution of this utility model are as follows:

[0014] In the above solution, the small pressurization device has a simple and compact structure, is easy to operate, and has strong space adaptability. It can effectively reduce manufacturing costs and floor space, while reducing energy consumption. It is suitable for various scenarios such as laboratories and industrial sites, which not only lowers the threshold for use and maintenance costs, but also improves experimental efficiency and data reliability. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the small pressurization device of this utility model;

[0016] Figure 2 This is a top view of the small pressurization device of this utility model;

[0017] Figure 3 This is a bottom view of the small pressurization device of this utility model;

[0018] Figure 4 This is a cross-sectional view of the small pressurization device of this utility model;

[0019] Figure 5 This is a schematic diagram of the positioning piece and the chip to be bonded according to this utility model;

[0020] Figure 6 This is a schematic diagram of the positioning plate and the sample to be pressurized according to this utility model.

[0021] [Figure Labels]

[0022] 1. Stage;

[0023] 2. Pressure plate;

[0024] 3. Lead screw;

[0025] 4. Pressure nut disc;

[0026] 5. Compression spring;

[0027] 6. Positioning pad;

[0028] 7. Chips to be bonded;

[0029] 8. First gear;

[0030] 9. Second gear;

[0031] 10. Sonar sensors;

[0032] 11. Temperature control module. Detailed Implementation

[0033] To make the technical problems, technical solutions and advantages of this utility model clearer, a detailed description will be given below in conjunction with the accompanying drawings and specific embodiments.

[0034] like Figures 1-6 As shown, an embodiment of this utility model provides a small pressurizing device, including a platform 1. The upper surface of the platform 1 is provided with a slot for placing a positioning piece 6. A pressure plate 2 is provided on the top of the platform 1. A gear transmission mechanism is provided at the bottom of the platform 1. A plurality of lead screws 3 are connected to the top of the gear transmission mechanism. The gear transmission mechanism is connected to a motor and can drive the plurality of lead screws 3 to rotate synchronously. The lead screws 3 pass through the platform 1 and the pressure plate 2. A compression spring 5 is provided on the top of the pressure plate 2. A pressure nut plate 4 is provided on the top of the compression spring 5. The number of lead screws 3 is at least 4. The pressure nut plate 4 includes a plurality of nuts correspondingly sleeved on the lead screws 3.

[0035] like Figure 1 and Figure 2 As shown, the pressure nut disc 4 is an integral structure, thereby preventing the screw 3 from rotating and causing the nut to rotate. The pressure nut disc 4 includes multiple connecting rods, which are distributed in a divergent manner and correspond one-to-one with the nuts. The nuts are located at the ends of the corresponding connecting rods.

[0036] like Figure 3 and Figure 5 As shown, the placement slot is located at the center of the upper end face of the platform 1. The gear transmission mechanism includes a first gear 8 located at the center of the bottom of the platform 1 and multiple second gears 9 meshing with the first gear 8. The multiple second gears 9 are evenly distributed in a ring around the first gear 8. The lead screw 3 corresponds one-to-one with the second gear 9, and the bottom of the lead screw 3 is fixed to the corresponding second gear 9 through a keyway structure. The bottom of the first gear 8 is fixedly connected to the output shaft of the motor. When the motor drives the first gear 8 to rotate, it will drive the second gears 9 to rotate, thereby driving the multiple lead screws 3 to rotate synchronously.

[0037] like Figure 1As shown, the compression spring 5 corresponds one-to-one with the lead screw 3. The compression spring 5 is sleeved on the lead screw 3 and located at the bottom of the corresponding nut. The compression spring 5 is high-strength and high-temperature resistant, with flat upper and lower end faces. The loading force is proportional to the compression length of the compression spring 5, and the applied load F=nkvt, where n is the number of compression springs, k is the spring elastic coefficient, v is the descent rate of the compressed nut, and t is the descent time of the compressed nut. In this embodiment, the spring elastic coefficient of the compression spring 5 is 10N / mm~20N / mm, and the natural length is 40mm.

[0038] like Figure 4 and Figure 6 As shown, the size and shape of the outer contour of the positioning piece 6 are adapted to the placement groove. The thickness of the positioning piece 6 is greater than the depth of the placement groove and does not exceed 90% of the total thickness of the sample to be pressurized. A positioning hole is provided at the center of the positioning piece 6. The positioning hole is customized according to the shape and size of the sample to be pressurized to prevent the sample to be pressurized from moving during the pressurization process.

[0039] like Figure 4 As shown, the bottom of the pressure plate 2 is provided with a boss that matches the plate placement slot. A first groove is formed on the upper surface of the pressure plate 2, and a temperature control module 11 is disposed in the first groove. The temperature control module 11 is existing technology and has temperature detection and temperature adjustment functions, and can automatically heat and maintain the temperature according to preset parameters. A second groove is formed on the lower surface of the stage 1, and a sonar sensor 10 is disposed in the second groove.

[0040] In this embodiment, the stage 1 and the pressure plate 2 have corresponding through holes for the lead screw 3 to pass through. The diameter of the through holes is 4mm to 9mm. Both the stage 1 and the pressure plate 2 are disc-shaped. The diameter of the stage 1 is 70mm to 150mm and the thickness is 10mm to 30mm. The diameter of the pressure plate 2 is 70mm to 150mm and the thickness is 8mm to 20mm. Figure 5 and Figure 6 As shown, the plate placement groove is a square groove, specifically, the side length of the plate placement groove is 20mm~50mm, and the depth is 0.4mm~4mm. The length of the lead screw 3 is 70mm~170mm.

[0041] The working process of the small pressurization device provided by this utility model is as follows:

[0042] When bonding the chips 7 to be bonded, the positioning plate 6 is installed in the chip slot of the stage 1, and the two chips 7 to be bonded are placed in the positioning hole. The pressure plate 2 passes through the lead screw 3, with the boss facing down, and presses it onto the chip 7 to be bonded. Each lead screw 3 is fitted with a compression spring 5 and a nut. The motor drives the gear transmission mechanism to rotate, causing multiple lead screws 3 to rotate simultaneously in the same direction. By controlling the motor speed and time, the pressure nut plate 4 moves down precisely a certain distance at a certain speed and compresses the compression spring 5, applying uniform pressure to the pressure plate 2. The pressure plate 2 and the stage 1 generate a counterforce, pressurizing the chip 7 to be bonded. At the same time, the temperature control module 11 heats and keeps the temperature, realizing the behavior monitoring of the chip 7 to be bonded during the pressure bonding, and completing the bonding.

[0043] When pressurizing the sample to be pressurized, replace the two chips 7 to be bonded with the sample to be pressurized. Other operations are the same as the above steps, so as to realize the pressurization of the sample to be pressurized and the behavior detection during the pressurization process and the holding pressure.

[0044] In the above solution, the small pressurization device is small in size, simple and compact in structure, and highly adaptable to space. It can effectively reduce manufacturing costs and floor space, while reducing energy consumption. It is suitable for various scenarios such as laboratories and industrial sites. It not only lowers the threshold for use and maintenance costs, but also improves experimental efficiency and data reliability.

[0045] The small pressurization device integrates a sonar sensor at the bottom of the stage, which can monitor the acoustic response of the sample in real time during the pressurization process, providing high-precision data support for material performance analysis.

[0046] The above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications should also be considered within the protection scope of this utility model.

Claims

1. A small pressurization device, comprising a stage, characterized in that, The upper surface of the platform is provided with a slot for placing a positioning piece. A pressure plate is provided on the top of the platform. A gear transmission mechanism is provided at the bottom of the platform. Multiple lead screws are connected to the top of the gear transmission mechanism, which can drive the multiple lead screws to rotate synchronously. The lead screws pass through the platform and the pressure plate. A compression spring is provided on the top of the pressure plate. A pressure nut plate is provided on the top of the compression spring. The pressure nut plate includes multiple nuts corresponding to the lead screws.

2. The small pressurizing device according to claim 1, characterized in that, The pressure nut disc includes multiple connecting rods, which are distributed in a divergent manner and correspond one-to-one with the nuts. The nuts are located at the ends of the corresponding connecting rods.

3. The small pressurizing device according to claim 1, characterized in that, The plate placement slot is located at the center of the upper end face of the platform. The gear transmission mechanism includes a first gear located at the center of the bottom of the platform and a plurality of second gears meshing with the first gear. The plurality of second gears are evenly distributed in a ring around the first gear. The lead screw corresponds one-to-one with the second gear.

4. The small pressurizing device according to claim 2, characterized in that, The compression spring corresponds to the lead screw in a one-to-one manner. The compression spring is sleeved on the lead screw and located at the bottom of the corresponding nut.

5. The small pressurizing device according to claim 1, characterized in that, A positioning hole is provided at the center of the positioning piece.

6. The small pressurizing device according to claim 1, characterized in that, The bottom of the pressure plate is provided with a boss that matches the plate placement groove.

7. The small pressurizing device according to claim 1, characterized in that, The upper surface of the pressure plate is provided with a first groove, and a temperature control module is provided in the first groove.

8. The small pressurizing device according to claim 1, characterized in that, The lower end face of the stage is provided with a second groove, and a sonar sensor is disposed in the second groove.

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