Wafer testing device

Abstract

The utility model provides a wafer testing device, which comprises a plurality of testing boxes used for acquiring testing data, and the testing boxes are used for being connected with probe card assemblies in an inserted mode. A mounting rack, wherein the plurality of test boxes are fixed on the mounting rack; the rotating part can rotate relative to the mounting frame; the fixed seat is fixedly arranged, and the fixed seat is in guide fit with the rotating part, so that the rotating part drives the mounting rack to lift when rotating, and the test box and the probe card assembly are mutually inserted and pulled; and the probe card assembly is fixedly connected with the fixed seat. According to the wafer testing device provided by the utility model, through the guiding cooperation of the fixed seat and the rotating member, the rotating member drives the mounting rack to lift, on one hand, the stable insertion connection of the testing boxes and the probe card assemblies can be realized, and on the other hand, a plurality of testing boxes can be simultaneously and stably lifted, and the probe card assemblies are uniformly stressed and are not easy to deform.

Description

Technical Field

[0001] This utility model belongs to the field of chip manufacturing technology, and more specifically, it relates to a wafer testing device. Background Technology

[0002] CIS (CMOS Image Sensor) wafer testing refers to the inspection of the electrical and optical performance of CIS chips after wafer manufacturing to ensure they meet design specifications and optical performance requirements. Generally, during wafer testing, the wafer is placed on a probe station, and probe cards are mounted on the station. Test boxes are inserted into the probe cards to perform the tests. However, the insertion of test boxes and probe cards can be challenging, especially when multiple test boxes are inserted simultaneously. Furthermore, the probe cards are prone to deformation. Utility Model Content

[0003] The purpose of this utility model embodiment is to provide a wafer testing device to solve the technical problems in the prior art, such as the difficulty in connecting the test box and the probe card, and the easy deformation of the probe card.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: to provide a wafer testing device, comprising:

[0005] Multiple test boxes are used to acquire test data, and the test boxes are used to connect to the probe card assembly;

[0006] Mounting frame, and multiple test boxes are fixed to the mounting frame;

[0007] The rotating component is capable of rotating relative to the mounting bracket;

[0008] A fixed base is fixedly installed, and the fixed base is guided and cooperated with the rotating component, so that when the rotating component rotates, it drives the mounting frame to rise and fall, so that the test box and the probe card assembly can be plugged and unplugged.

[0009] The probe card assembly is fixedly connected to the mounting base.

[0010] In the above scheme, the wafer testing device includes multiple test boxes, a mounting frame for mounting the test boxes, a rotating component, a fixed base, and a probe card assembly. The probe card assembly and the fixed base are fixedly arranged relative to each other. When the rotating component rotates relative to the mounting frame, it drives the mounting frame to move up and down, thereby causing the test boxes on the mounting frame to move up and down, enabling simultaneous insertion of multiple test boxes into the probe card assembly. Through the guiding cooperation between the fixed base and the rotating component, the rotating component drives the mounting frame to move up and down. This ensures stable insertion of the test boxes into the probe card assembly and allows multiple test boxes to move up and down stably simultaneously, resulting in even force distribution on the probe card assembly and reducing the likelihood of deformation.

[0011] Optionally, the rotating component is provided with a guide groove, which extends circumferentially along the rotating component and has a height difference between its two ends. The fixed base has a first guide portion extending into the guide groove.

[0012] In the above scheme, by setting guide grooves with varying heights at both ends on the rotating component and setting a first guide part on the fixed base, the rotating component can simultaneously perform lifting and lowering movements while rotating, and the lifting and lowering movements of the rotating component can drive the lifting and lowering movements of the mounting frame.

[0013] Optionally, the rotating component is annular, and the rotating component is arranged around the outer periphery of the mounting frame.

[0014] In the above scheme, the rotating component rotates on the outer periphery of the mounting frame, which can cooperate with various circumferential components of the mounting frame. This makes the lifting and lowering movement of the mounting frame more stable, and it does not occupy the space above the probe card assembly, which facilitates the insertion of the test box and the probe card assembly.

[0015] Optionally, a handle is fixedly provided on the rotating component; or the rotating component is driven by a motor.

[0016] In the above solution, the handle allows operators to manually rotate the rotating component. The manual rotation eliminates the need for a motor, allowing manual control of the speed and force of inserting and removing the test box. This reduces deformation of the probe card assembly and makes the insertion and removal of the test box more stable.

[0017] Optionally, the mounting frame includes a fixed frame, a floating frame slidably disposed on the fixed frame, and an elastic element with both ends connected to the fixed frame and the floating frame respectively. The elastic element has a tendency to move the floating frame toward the fixed frame, and the plurality of test boxes are fixed to the floating frame.

[0018] In the above scheme, by setting the mounting frame as a fixed frame, a floating frame, and an elastic element connecting the fixed frame and the floating frame, the floating frame can float relative to the fixed frame. In this way, when the test box and the probe card assembly are plugged into each other, the elastic element can buffer the impact force of the probe card assembly on the test box, reducing the mutual impact between the test box and the probe card assembly.

[0019] Optionally, the floating frame is provided with a second guide portion, which abuts against the lower side of the rotating component.

[0020] In the above scheme, a second guide portion is provided on the floating frame, and this second guide portion abuts against the lower side of the rotating component. In this way, the downward movement of the rotating component can be transmitted to the floating frame through the second guide portion. The upward and downward movement of the rotating component causes the second guide portion to automatically rise under the rebound action of the elastic component. The upward and downward movement of the floating frame is achieved under the premise that the elastic component buffers the impact force between the probe card assembly and the test box.

[0021] Optionally, the floating frame includes a first floating frame, a second floating frame, and a plurality of floating columns. The first floating frame and the second floating frame are respectively fixed to both ends of each of the floating columns, and the test box is disposed between two adjacent floating columns.

[0022] In the above scheme, by setting the floating frame as a first floating frame, a second floating frame and a floating column, the floating frame has greater structural strength and a larger installation space for installing test boxes, and also facilitates the sliding connection between the floating frame and the fixed frame.

[0023] Optionally, the fixing frame includes a plurality of fixing columns and a fixing plate connecting the plurality of fixing columns, the floating column is slidably disposed on the fixing columns, and the two ends of the elastic member are respectively connected to the fixing plate and the first floating frame.

[0024] In the above scheme, by setting a fixed column and sliding the floating column on the fixed column, the floating frame is slidably set on the fixed frame, while providing an installation position for the elastic element.

[0025] Optionally, the wafer testing apparatus further includes a worktable and a lifting assembly capable of outputting lifting motion, the lifting assembly being fixed to the worktable, and the mounting bracket being mounted on the motion output end of the lifting assembly.

[0026] In the above solution, the lifting component allows the mounting frame and test box to be raised and lowered, facilitating the assembly and disassembly of the test box.

[0027] Optionally, the mounting bracket is rotatably connected to the motion output end of the lifting assembly, and the rotation axis of the mounting bracket is in the vertical direction.

[0028] In the above solution, by setting the mounting bracket to a rotatable structure, the entire mounting bracket can be rotated, and each test box can be rotated to the same position, making it convenient for operators to disassemble and assemble them. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 A three-dimensional structural diagram of the wafer testing device provided in the embodiments of this utility model;

[0031] Figure 2 A partial structural diagram of the wafer testing device provided in this embodiment of the utility model. Figure 1 ;

[0032] Figure 3 A partial structural diagram of the wafer testing device provided in this embodiment of the utility model. Figure 2 (Test kit not shown);

[0033] Figure 4 A three-dimensional structural diagram of the rotating component provided in an embodiment of this utility model;

[0034] Figure 5 A three-dimensional structural diagram of the floating frame provided in an embodiment of this utility model;

[0035] Figure 6 A three-dimensional structural diagram of the probe card assembly and rotating component provided in the embodiments of this utility model;

[0036] Figure 7 A three-dimensional structural diagram of the lifting assembly provided in an embodiment of this utility model.

[0037] The following are the labeling elements in the figure:

[0038] 10-Mounting frame; 11-Fixed frame; 111-Fixed column; 112-Fixed plate; 12-Elastic element; 13-Floating frame; 131-First floating frame; 132-Second floating frame; 133-Floating column; 20-Test box; 30-Rotating element; 31-Guide groove; 32-Limit groove; 33-Handle; 40-Probe card assembly; 41-Guide column; 50-Fixed seat; 60-Workbench; 61-Roller; 62-Lifting assembly; 621-Lifting motor; 622-Screw; 623-Sliding plate. Detailed Implementation

[0039] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0040] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0041] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0042] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0043] CIS wafer testing refers to the side-view testing of the electrical and optical performance of CIS chips after wafer manufacturing to ensure they meet design specifications and optical performance requirements. Generally, during wafer testing, the wafer is placed on a probe station, and probe cards are mounted on the probe station. Test boxes are inserted into the probe cards to perform the tests. However, the test boxes and probe cards are not easy to align, especially when multiple test boxes are simultaneously inserted into the probe cards, making operation even more difficult and increasing the risk of probe card deformation.

[0044] To alleviate or solve the above technical problems, this utility model proposes a wafer testing device, including a test box 20, a mounting frame 10, a rotating component 30, a fixed base 50, and a probe card assembly 40. The probe card assembly 40 and the fixed base 50 are both fixedly installed. The rotating component 30 can rotate relative to the probe card assembly 40. During the rotation, the rotating component 30 is guided by the fixed base 50, and the rotating component 30 drives the mounting frame 10 and the test box 20 on the mounting frame 10 to move up and down, thereby realizing the simultaneous insertion and removal of multiple test boxes 20 from the probe card assembly 40, and the probe card assembly 40 is not easily deformed.

[0045] The wafer testing device provided in the embodiments of this utility model will now be described.

[0046] Please refer to the following: Figures 1 to 3The wafer testing equipment includes:

[0047] Multiple test boxes 20 are used to acquire test data, and the test boxes 20 are used to connect to the probe card assembly 40;

[0048] Mounting frame 10, and all of the test boxes 20 are fixed to the mounting frame 10;

[0049] The rotating component 30 is capable of rotating relative to the mounting bracket 10;

[0050] The fixed base 50 is fixedly installed, and the fixed base 50 is guided and cooperated with the rotating part 30 so that when the rotating part 30 rotates, it drives the mounting frame 10 to rise and fall, so that the test box 20 and the probe card assembly 40 can be plugged and unplugged.

[0051] The probe card assembly 40 is fixedly connected to the mounting base 50.

[0052] Test box 20 is used to acquire test data. This can be understood as test box 20 working with probe card assembly 40 to test the wafer and obtain test data, or it can be understood as test box 20 acquiring test data from probe card assembly 40 or other components. After acquiring the test data, test box 20 can also upload the test data to a host computer for analysis. Multiple test boxes 20 are available, and they can be simultaneously inserted into and removed from probe card assembly 40.

[0053] The mounting frame 10 is a structure for fixing the test boxes 20. Multiple test boxes 20 can move synchronously with the mounting frame 10. When the mounting frame 10 moves up and down, the test boxes 20 also move up and down. It should be noted that when the mounting frame 10 is composed of multiple relatively movable parts, the parts that fix the test boxes 20 move synchronously with the test boxes 20.

[0054] The rotating component 30 can rotate relative to the mounting bracket 10, and the rotating component 30 is the power component when the test box 20 and the probe card assembly 40 are inserted. That is to say, the rotation of the rotating component 30 ultimately drives the mounting bracket 10 and the test box 20 to rise and fall. Among them, the rotating component 30 outputs rotational motion when driven.

[0055] The mounting base 50 is fixedly installed. When the rotating component 30 rotates, the mounting base 50 guides the rotating component 30, allowing it to rotate and rise simultaneously, thereby driving the mounting frame 10 to rise and fall. The probe card assembly 40 is fixedly installed relative to the mounting base 50. The probe card assembly 40 contains probes used to connect the continuity test box 20 and the wafer. The probe card assembly 40 has multiple sets of probes, each set of probes corresponding to one test box 20. The probe card assembly 40 is generally fixed on a probe stage. The mounting base 50 can also be fixed on the probe stage, or the mounting base 50 can be fixed on the probe card assembly 40.

[0056] The wafer testing apparatus in the above embodiments includes multiple test boxes 20, a mounting frame 10 for mounting the test boxes 20, a rotating component 30, a fixed base 50, and a probe card assembly 40. The probe card assembly 40 and the fixed base 50 are both fixedly arranged relative to each other. When the rotating component 30 rotates relative to the mounting frame 10, it can drive the mounting frame 10 to move up and down, thereby causing the test boxes 20 on the mounting frame 10 to move up and down, achieving simultaneous insertion of multiple test boxes 20 into the probe card assembly 40. Through the guiding cooperation between the fixed base 50 and the rotating component 30, the rotating component 30 drives the mounting frame 10 to move up and down. This ensures stable insertion of the test boxes 20 into the probe card assembly 40 and allows multiple test boxes 20 to move up and down stably simultaneously, resulting in uniform force on the probe card assembly 40 and preventing deformation.

[0057] Please refer to some embodiments of this utility model. Figures 2 to 4 The rotating component 30 has a guide groove 31 that extends circumferentially along the rotating component 30, with a height difference between its two ends. The fixing base 50 has a first guide portion that extends into the guide groove 31. When the rotating component 30 rotates, its direction around its axis of rotation is circumferential. The guide groove 31 extends circumferentially along the rotating component 30, with a height difference between its two ends. The first guide portion of the fixing base 50 extends into the guide groove 31. This allows the rotating component 30 to be guided by the first guide portion during rotation, resulting in a lifting motion. This lifting motion of the rotating component 30 drives the mounting bracket 10 and the test box 20 to lift. It should be noted that the rotating axis of the rotating component 30 is vertically oriented, and the height difference between the two ends of the guide groove 31 means that the two ends of the guide groove 31 are offset from each other in the axial direction of the rotating component 30.

[0058] By providing guide grooves 31 with varying heights at both ends on the rotating component 30 and providing a first guide portion on the fixed base 50, the rotating component 30 can simultaneously perform lifting and lowering movements while rotating, and the lifting and lowering movements of the rotating component 30 can drive the mounting frame 10 to lift and lower.

[0059] The height difference between the two ends of the guide groove 31 is the insertion stroke of the test box 20 in the vertical direction.

[0060] In some embodiments, the guide groove 31 is spiral-shaped, and the spiral guide groove 31 has an upward and downward trend in the axial direction of the rotating member 30. When the guide groove 31 is spiral-shaped, the first guide portion of the fixed seat 50 slides more smoothly in the guide groove 31, and the rising and falling of the rotating member 30 can be made more gradual, reducing the difficulty of plugging in the test box 20 and the probe card assembly 40, and reducing the impact on the test box 20 and the probe card assembly 40 during plugging in.

[0061] Optionally, the insertion stroke of the test box 20 is generally small, and the central angle corresponding to the spiral guide groove 31 can be less than 90 degrees.

[0062] In some embodiments, the number of guide grooves 31 and the number of first guide portions are both multiple, and the guide grooves 31 are distributed sequentially at intervals along the circumference of the rotating member 30, and the first guide portions are distributed sequentially at intervals along the circumference of the probe card assembly 40.

[0063] Optionally, there are four guide grooves 31 and four first guide parts, which are evenly distributed circumferentially.

[0064] In some embodiments, a first guide portion is installed on the fixed base 50, and the first guide portion is movably connected to the fixed base 50, so that the first guide portion moves more smoothly in the guide groove 31, which can reduce the movement resistance of the rotating part 30.

[0065] Optionally, the first guide part is a roller 61, which is rotatably mounted on the fixed base 50.

[0066] Please refer to some embodiments of this utility model. Figures 2 to 4 The rotating component 30 is annular and is arranged around the outer periphery of the mounting bracket 10. When the rotating component 30 is annular and rotates, the space occupied by the rotating component 30 is always fixed, and it is located on the outer periphery of the mounting bracket 10, so it will not affect the insertion of the test box 20 and the probe card assembly 40.

[0067] The rotating component 30 rotates around the outer periphery of the mounting bracket 10 and can cooperate with various circumferential components of the mounting bracket 10, which can make the lifting and lowering movement of the mounting bracket 10 more stable and will not occupy the space above the probe card assembly 40, making it convenient to insert the test box 20 and the probe card assembly 40.

[0068] In some embodiments, the guide groove 31 extends circumferentially along the rotating member 30, and a plurality of guide grooves 31 are distributed at intervals circumferentially along the rotating member 30.

[0069] In some embodiments, the guide groove 31 is disposed through the inner and outer peripheral walls of the rotating member 30, and the first guide portion can extend from the inner peripheral wall of the rotating member 30 into the guide groove 31. Correspondingly, the fixing seat 50 can be located inside the rotating member 30. Alternatively, the first guide portion can extend from the outer peripheral wall of the rotating member 30 into the guide groove 31, and correspondingly, the fixing seat 50 can be located outside the rotating member 30.

[0070] In some embodiments, the first guide portion extends from the inner peripheral wall of the rotating member 30 into the guide groove 31, the guide groove 31 being formed in the inner peripheral wall of the rotating member 30 and not penetrating the rotating member 30 in the radial direction.

[0071] In some embodiments, the first guide portion extends from the outer peripheral wall of the rotating member 30 into the guide groove 31, the guide groove 31 being formed on the outer peripheral wall of the rotating member 30 and not penetrating the rotating member 30 in the radial direction.

[0072] In some embodiments of this invention, the rotating member 30 is driven to rotate by an electric drive component such as a motor. The motion output end of the electric drive component is directly connected to the rotating member 30, or indirectly connected to the rotating member 30 through a transmission mechanism. In this way, the rotating member 30 can be driven to rotate by an electric drive component.

[0073] Please refer to some embodiments of this utility model. Figure 2 and Figure 3 A handle 33 is fixedly installed on the rotating part 30. The operator can hold the handle 33 to make the rotating part 30 rotate and rise and fall at the same time, thereby driving the mounting frame 10 to rise and fall.

[0074] The handle 33 allows operators to manually rotate the rotating component 30. The manual rotation of the rotating component 30 eliminates the need for a motor, allowing manual control of the insertion and removal speed and force of the test box 20. This reduces deformation of the probe card assembly 40 and makes the insertion and removal of the test box 20 more stable.

[0075] In some embodiments, the handle 33 is provided to protrude radially outward from the outer peripheral wall of the rotating member 30, and the further the handle 33 is from the center of the rotating member 30, the less effort is required when rotating it.

[0076] In some embodiments, the handle 33 and the rotating member 30 are fixedly connected by screws or other connecting members.

[0077] Please refer to some embodiments of this utility model. Figures 3 to 5 The mounting frame 10 includes a fixed frame 11, a floating frame 13 slidably disposed on the fixed frame 11, and elastic members 12 connected at both ends to the fixed frame 11 and the floating frame 13 respectively. The elastic members 12 have a tendency to move the floating frame 13 toward the fixed frame 11. Multiple test boxes 20 are fixed to the floating frame 13. The floating frame 13 can slide relative to the fixed frame 11. When the rotating member 30 rotates, the rotating member 30 drives the floating frame 13 and the test boxes 20 on the floating frame 13 to move up and down. The elastic members 12 are stretched, the fixed frame 11 remains stationary, and the test boxes 20 are inserted into the probe card assembly 40. The elastic members 12 have a tendency to move the floating frame 13 toward the fixed frame 11. Understandably, when the test boxes 20 are not inserted, the elastic members 12 are in a stretched state, which can bear part of the weight of the test boxes 20 and the floating frame 13, and can also reduce the impact of the probe card assembly 40 on the test boxes 20.

[0078] By configuring the mounting bracket 10 as a fixed bracket 11, a floating bracket 13, and an elastic element 12 connecting the fixed bracket 11 and the floating bracket 13, the floating bracket 13 can float relative to the fixed bracket 11. In this way, when the test box 20 and the probe card assembly 40 are plugged into each other, the elastic element 12 can buffer the impact force of the probe card assembly 40 on the test box 20, reducing the mutual impact between the test box 20 and the probe card assembly 40.

[0079] In some embodiments, the elastic element 12 is a spring, with one end of the spring connected to the fixed frame 11 and the other end connected to the floating frame 13.

[0080] In some embodiments, multiple elastic elements 12 are arranged around the perimeter of the floating frame 13, thereby making the lifting and lowering of the floating frame 13 smoother and reducing the impact. For example, four elastic elements 12 are arranged at the four corners of the floating frame 13.

[0081] Please refer to some embodiments of this utility model. Figure 4 and Figure 5 The floating frame 13 is provided with a second guide portion, which abuts against the lower side of the rotating member 30. When the rotating member 30 rotates and descends, it drives the second guide portion to descend, thereby causing the entire floating frame 13 and multiple test boxes 20 to descend, allowing the test boxes 20 to be inserted into the probe card assembly 40. When the rotating member 30 rotates and rises, the second guide portion and the floating frame 13 gradually rise under the rebound action of the elastic member 12, causing the test boxes 20 to automatically disengage from the probe card assembly 40.

[0082] By providing a second guide portion on the floating frame 13, which abuts against the lower side of the rotating member 30, the downward movement of the rotating member 30 can be transmitted to the floating frame 13 through the second guide portion. The upward and downward movement of the rotating member 30 causes the second guide portion to automatically rise under the rebound action of the elastic member 12. The upward and downward movement of the floating frame 13 is achieved while the elastic member 12 buffers the impact force between the probe card assembly 40 and the test box 20.

[0083] In some embodiments, there are multiple second guide portions, which are arranged circumferentially around the rotation axis of the rotating member 30 to make the rising and falling of the floating frame 13 more stable. For example, there are four second guide portions, which are respectively arranged at the four corners of the floating frame 13.

[0084] In some embodiments, the second guide portion is movably mounted on the floating frame 13, so that when the rotating member 30 rotates, the friction between it and the second guide portion is smaller, and the movement is smoother.

[0085] Optionally, the second guide portion is rotatably mounted on the floating frame 13. When the rotating member 30 rotates, the second guide portion also rolls accordingly. The force between the second guide portion and the rotating member 30 is rolling friction, making the rotation and lifting of the rotating member 30 and the lifting of the floating frame 13 smoother.

[0086] Please refer to some embodiments of this utility model. Figure 4 A limiting groove 32 is provided on the lower side of the rotating part 30, and the second guide part abuts against the bottom wall of the limiting groove 32. At least part of the second guide part is located inside the limiting groove 32, making full use of the height space inside the mounting bracket 10, and also limiting the second guide part.

[0087] In some embodiments, the second guide portion extends from the inner peripheral wall of the rotating member 30 into the limiting groove 32, and correspondingly, the floating frame 13 is disposed inside the rotating member 30. Alternatively, the second guide portion extends from the outer peripheral wall of the rotating member 30 into the limiting groove 32, and correspondingly, the floating frame 13 is disposed outside the rotating member 30. The interior of the rotating member 30 is a space annularly enclosed by the rotating member 30, and the exterior of the rotating member 30 is a space not annularly enclosed by the rotating member 30.

[0088] In some embodiments, there are multiple second guide portions, which are distributed circumferentially around the floating frame 13. For example, there are four second guide portions, which are respectively disposed at the four corners of the floating frame 13.

[0089] Please refer to some embodiments of this utility model. Figure 5 The floating frame 13 includes a first floating frame 131, a second floating frame 132, and multiple floating columns 133. The first floating frame 131 and the second floating frame 132 are respectively fixed to both ends of each floating column 133. The test box 20 is disposed between two adjacent floating columns 133. Both the first floating frame 131 and the second floating frame 132 are frame-shaped structures. The first floating frame 131 can be located above the second floating frame 132. The floating columns 133 are vertically or nearly vertically arranged. The two ends of the floating columns 133 are respectively connected to the first floating frame 131 and the second floating frame 132, so that the floating frame 13 forms a relatively stable structure, and its load-bearing capacity, structural strength, etc. all meet the usage requirements.

[0090] By setting the floating frame 13 as a first floating frame 131, a second floating frame 132 and a floating column 133, the floating frame 13 has greater structural strength and a larger installation space for installing the test box 20, and also facilitates the sliding connection between the floating frame 13 and the fixed frame 11.

[0091] In some embodiments, the test box 20 is fixed to at least one of the first floating frame 131, the second floating frame 132, and the floating column 133. For example, the test box 20 is fixed to one of the first floating frame 131, the second floating frame 132, and the floating column 133 by means of a connector. Alternatively, the test box 20 is fixed to both the first floating frame 131 and the second floating frame 132 by means of a connector.

[0092] In some embodiments, the second guide portion is disposed on the second floating frame 132, the height of the second floating frame 132 is lower and closer to the height of the rotating member 30, and the second guide portion drives the second floating frame 132 to rise and fall by abutting against the rotating member 30.

[0093] In some embodiments, the number of floating columns 133 is multiple. For example, there are four floating columns 133, with space for mounting test boxes 20 between each pair of adjacent floating columns 133, and correspondingly, there are also four test boxes 20. The four test boxes 20 are arranged around the rotation axis of the rotating member 30.

[0094] Optionally, the angle between any two adjacent test boxes 20 is 90 degrees, so that the four test boxes 20 form a rectangle. Correspondingly, the probes on the probe card assembly 40 are also arranged in a rectangle. In this way, when the four test boxes 20 are simultaneously inserted into the probe card assembly 40, the force on the probe card assembly 40 is more uniform, and the probe card is less prone to deformation.

[0095] Please refer to some embodiments of this utility model. Figure 2 and Figure 3 The fixing frame 11 includes multiple fixing columns 111 and a fixing plate 112 connecting the multiple fixing columns 111. Floating columns 133 are slidably disposed on the fixing columns 111. The two ends of the elastic element 12 are respectively connected to the fixing plate 112 and the first floating frame 131. The fixing columns 111 are vertically or nearly vertically disposed, and the same end of each fixing column 111 is fixedly connected to the fixing plate 112 to form the fixing frame 11. The fixing columns 111 and the floating columns 133 are slidably connected in a one-to-one correspondence, and the number of fixing columns 111 and floating columns 133 is equal.

[0096] By setting a fixed column 111 and sliding the floating column 133 onto the fixed column 111, the floating frame 13 is slidably set onto the fixed frame 11, while providing an installation position for the elastic element 12.

[0097] In some embodiments, the upper end of each fixing post 111 is fixedly connected to the fixing plate 112. This serves two purposes: first, it allows multiple fixing posts 111 and fixing plate 112 to be connected to form a whole; second, it provides an installation position on the fixing plate 112 for the mounting bracket 10 to be connected to other structures.

[0098] Please refer to some embodiments of this utility model. Figure 5 and Figure 6 One of the probe card assembly 40 and the floating frame 13 is provided with a guide post 41, and the other is provided with a guide hole. Before the test box 20 is to be inserted into the probe card assembly 40, the guide post 41 gradually enters into the guide hole, so that the test box 20 and the probe card assembly 40 are aligned with each other, and the test box 20 gradually aligns with the probe card assembly 40 for insertion during the descent.

[0099] The guide hole and guide post 41 are used to align and position the floating frame 13 with the probe card assembly 40, thereby facilitating the insertion of the test box 20 and the probe card assembly 40.

[0100] In some embodiments, the guide post 41 is disposed on the probe card assembly 40, and the guide hole is formed in the floating frame 13.

[0101] Optionally, the guide hole is formed in the second floating frame 132.

[0102] In some embodiments, the guide post 41 is disposed on the floating frame 13, and the guide hole is formed in the probe card assembly 40.

[0103] Please refer to some embodiments of this utility model. Figure 1 and Figure 7 The wafer testing apparatus also includes a worktable 60 and a lifting assembly 62 capable of outputting lifting motion. The lifting assembly 62 is fixed to the worktable 60, and the mounting bracket 10 is mounted on the motion output end of the lifting assembly 62. The lifting assembly 62 can output lifting motion, driving the mounting bracket 10 and the test box 20 to move up and down. Specifically, when disassembling and assembling the test box 20, the rotating component 30 can be removed first, then the lifting assembly 62 drives the mounting bracket 10 to rise. After disassembling and assembling the test box 20, the driving assembly drives the mounting bracket 10 to descend, and then the rotating component 30 is installed. By rotating the rotating component 30, the test box 20 is lowered to be inserted into the probe card assembly 40.

[0104] The lifting component 62 allows the mounting bracket 10 and the test box 20 to be raised and lowered, facilitating the assembly and disassembly of the test box 20.

[0105] In some embodiments, when the wafer testing apparatus is in use, the worktable 60 can be placed on the ground, and the test box 20 is positioned above the probe station.

[0106] In some embodiments, the bottom of the worktable 60 is provided with rollers 61 to facilitate the movement of the wafer testing device.

[0107] In some embodiments, please refer to Figure 7The lifting assembly 62 includes a lifting motor 621, a lead screw 622, a slide rail, a nut block, a slider, and a sliding plate 623. The lifting motor 621 is connected to the lead screw 622, and the nut block is threadedly connected to the lead screw 622. Both the nut block and the slider are fixed to the sliding plate 623, and the slider is slidably mounted on the slide rail. The motion output end of the lifting motor 621 drives the lead screw 622 to rotate, and the nut block moves along the length of the lead screw, thereby realizing the translation of the sliding plate 623. The sliding plate 623 is fixedly connected to the mounting frame 10. Thus, when the lifting assembly 62 is working, it can realize the lifting movement of the mounting frame 10.

[0108] Optionally, the sliding plate 623 is fixedly connected to the fixed frame 11. When the sliding plate 623 is raised or lowered, the sliding plate 623 drives the entire mounting frame 10 to move up and down.

[0109] Please refer to some embodiments of this utility model. Figure 1 and Figure 7 The mounting bracket 10 is rotatably connected to the motion output end of the lifting assembly 62, and the rotation axis of the mounting bracket 10 is vertical. The mounting bracket 10 can rotate relative to the motion output end of the lifting assembly 62, so that the circumferential position of each test box 20 can be changed, which facilitates the assembly and disassembly of the test box 20.

[0110] By setting the mounting bracket 10 to a rotatable structure, the entire mounting bracket 10 can be rotated, and each test box 20 can be rotated to the same position, making it convenient for operators to disassemble and assemble them.

[0111] In some embodiments, a rotating bearing is provided between the mounting bracket 10 and the motion output end of the lifting assembly 62.

[0112] In some embodiments, the motion output ends of the mounting bracket 10 and the lifting assembly 62 are connected by connecting pins, wherein the mounting bracket 10 is not locked, allowing the mounting bracket 10 to be rotated.

[0113] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer testing device, characterized in that, include: Multiple test boxes are used to acquire test data, and the test boxes are used to connect to the probe card assembly; Mounting frame, and multiple test boxes are fixed to the mounting frame; The rotating component is capable of rotating relative to the mounting bracket; A fixed base is fixedly installed, and the fixed base is guided and cooperated with the rotating component, so that when the rotating component rotates, it drives the mounting frame to rise and fall, so that the test box and the probe card assembly can be plugged and unplugged. The probe card assembly is fixedly connected to the mounting base.

2. The wafer testing apparatus as described in claim 1, characterized in that, The rotating component has a guide groove that extends circumferentially along the rotating component and has a height difference between its two ends. The fixed base has a first guide portion that extends into the guide groove.

3. The wafer testing apparatus as described in claim 2, characterized in that, The rotating component is annular and is arranged around the outer periphery of the mounting frame.

4. The wafer testing apparatus as described in claim 2, characterized in that, A handle is fixedly mounted on the rotating component; or the rotating component is driven by a motor.

5. The wafer testing apparatus as described in claim 1, characterized in that, The mounting frame includes a fixed frame, a floating frame slidably disposed on the fixed frame, and an elastic element with its two ends respectively connected to the fixed frame and the floating frame. The elastic element has a tendency to move the floating frame toward the fixed frame, and multiple test boxes are fixed to the floating frame.

6. The wafer testing apparatus as described in claim 5, characterized in that, The floating frame is provided with a second guide portion, which abuts against the lower side of the rotating component.

7. The wafer testing apparatus as described in claim 5, characterized in that, The floating frame includes a first floating frame, a second floating frame, and multiple floating columns. The first floating frame and the second floating frame are respectively fixed to both ends of each of the floating columns, and the test box is disposed between two adjacent floating columns.

8. The wafer testing apparatus as described in claim 7, characterized in that, The fixed frame includes multiple fixed columns and a fixed plate connecting the multiple fixed columns. The floating column is slidably disposed on the fixed columns, and the two ends of the elastic member are respectively connected to the fixed plate and the first floating frame.

9. The wafer testing apparatus according to any one of claims 1-8, characterized in that, The wafer testing apparatus also includes a worktable and a lifting assembly capable of outputting lifting motion. The lifting assembly is fixed to the worktable, and the mounting bracket is installed on the motion output end of the lifting assembly.

10. The wafer testing apparatus as described in claim 9, characterized in that: The mounting bracket is rotatably connected to the motion output end of the lifting assembly, and the rotation axis of the mounting bracket is in the vertical direction.

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