Optical fiber interface structure of vacuum valve

Abstract

The utility model provides an optical fiber interface structure of a vacuum valve, which comprises a shell and an optical fiber interface arranged in the shell, one end of the shell is provided with an avoiding hole, and the end part, provided with the avoiding hole, of the shell is connected to the vacuum valve to allow the tail part of a piston of the vacuum valve to enter; the two optical fiber interfaces are symmetrically arranged on the two sides of the shell respectively, at least one optical fiber jack is formed in each optical fiber interface, the optical fiber jack of each optical fiber interface is communicated with the corresponding avoiding hole, and the optical fiber jacks of the two optical fiber interfaces symmetrically extend in the radial direction of the corresponding avoiding hole; an interface pairing clamping tongue is arranged on one side of an optical fiber jack in the optical fiber interface, when an optical fiber connector provided with an optical fiber is inserted into the optical fiber interface, the optical fiber is inserted into the optical fiber jack, and the optical fiber connector and the interface pairing clamping tongue are clamped and fixed. According to the optical fiber interface structure of the vacuum valve provided by the utility model, the plugging smoothness and the connection reliability during the connection of the optical fiber interface are improved.

Description

Technical Field

[0001] This utility model relates to the field of molecular pump control technology, and in particular to a fiber optic interface structure for a vacuum valve. Background Technology

[0002] A vacuum valve is a component in a vacuum system used to change the direction of airflow, regulate the flow rate, and cut off or connect pipelines. Powered by compressed air, it is driven by actuators such as cylinders, offering advantages such as rapid action and sensitive response. It is primarily used in electronics, semiconductors, aerospace, chemical, and pharmaceutical industries. For example, in semiconductor manufacturing, vacuum valves control the vacuum environment within the reaction chamber to ensure the precision and quality of chip manufacturing. Vacuum valves typically have a fiber optic interface structure at the rear, using an optical fiber within the interface to detect the position of the piston within the valve.

[0003] However, existing fiber optic interface structures for vacuum valves have shortcomings. They only consider the pairing of fibers during connection but neglect the ease of insertion and removal and the reliability of the connection. Therefore, it is necessary to provide a fiber optic interface structure for vacuum valves to solve or at least partially solve the above problems. Utility Model Content

[0004] This utility model provides a fiber optic interface structure for a vacuum valve, which improves the ease of insertion and removal and the reliability of the connection when connecting the fiber optic interface.

[0005] This utility model provides a fiber optic interface structure for a vacuum valve, including a housing and fiber optic interfaces disposed within the housing. One end of the housing has a clearance hole, and the end of the housing with the clearance hole is connected to the vacuum valve, allowing the tail of the piston of the vacuum valve to enter. Two fiber optic interfaces are symmetrically disposed on both sides of the housing, each fiber optic interface having at least one fiber optic jack. The fiber optic jack of the fiber optic interface communicates with the clearance hole, and the fiber optic jacks of the two fiber optic interfaces extend symmetrically along the radial direction of the clearance hole. One side of each fiber optic jack in the fiber optic interface has an interface mating latch. When a fiber optic connector with an optical fiber is inserted into the fiber optic interface, the optical fiber is inserted into the fiber optic jack, and the fiber optic connector is engaged and fixed with the interface mating latch.

[0006] Preferably, the housing has a first end and a second end, and the clearance hole includes a first clearance hole disposed at the first end and a second clearance hole disposed at the second end, wherein the first clearance hole and the second clearance hole are coaxially connected; the first end of the housing is connected to a vacuum valve.

[0007] Preferably, the diameter of the first clearance hole is larger than the diameter of the second clearance hole, and the first clearance hole and the second clearance hole are connected by a tapered hole.

[0008] Preferably, interface mounting holes are symmetrically provided on both sides of the housing, the two interface mounting holes are located on both sides of the second clearance hole and communicate with the second clearance hole, and the two optical fiber interfaces are respectively provided in the interface mounting holes on both sides.

[0009] Preferably, the surface of the second end of the housing is provided with an insertion indicator mark.

[0010] Preferably, the optical fiber interface is provided with an interface cylinder, the optical fiber jack is disposed through the center of the interface cylinder, and a buffer plate is formed on the outer periphery of the interface cylinder.

[0011] Preferably, there are two fiber optic jacks, which are arranged along the axial direction of the clearance hole.

[0012] Preferably, one end of the interface mating latch is connected to the inner wall of the fiber optic interface near the clearance hole, and the other end is provided with a buckle; a gap is reserved between the interface mating latch and the inner wall of the fiber optic interface to allow the interface mating latch to undergo elastic deformation.

[0013] Preferably, a positioning groove is provided on the inner wall of one side of the optical fiber interface.

[0014] Preferably, both the housing and the optical fiber interface are made of plastic.

[0015] Compared with the prior art, the technical solution of this utility model has beneficial effects.

[0016] For example, the fiber optic interface structure of a vacuum valve includes a housing and a fiber optic interface disposed within the housing. One end of the housing has a clearance hole, and the end of the housing with the clearance hole connects to the vacuum valve, allowing the tail of the vacuum valve's piston to enter. There are two fiber optic interfaces, symmetrically arranged on both sides of the housing. Each fiber optic interface has at least one fiber optic jack, which communicates with the clearance hole. The fiber optic jacks of the two fiber optic interfaces extend symmetrically along the radial direction of the clearance hole. One side of each fiber optic jack has an interface mating latch. When a fiber optic connector with an optical fiber is inserted into the fiber optic interface, the optical fiber is inserted into the fiber optic jack, and the fiber optic connector is locked in place by the interface mating latch. The position of the piston tail is detected by the optical fiber, thereby determining the state of the vacuum valve. The fiber optic jack positions the optical fiber, and the interface mating latch guides and secures the fiber optic connector during insertion, improving the ease of insertion and removal and the reliability of the connection between the fiber optic interface and the fiber optic connector. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the fiber optic interface structure of the vacuum valve in this embodiment of the present invention;

[0018] Figure 2 This is a cross-sectional view of the fiber optic interface structure of the vacuum valve in this embodiment of the present invention;

[0019] Figure 3 Cross-sectional view of the shell in an embodiment of this utility model;

[0020] Figure 4 This is a cross-sectional view of the fiber optic interface in an embodiment of this utility model;

[0021] Figure 5 This is a schematic diagram of the fiber optic interface structure of the vacuum valve applied to the vacuum valve structure in this embodiment of the present invention.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1-Housing; 11-Allowance hole; 111-First clearance hole; 112-Second clearance hole; 113-Tapered hole; 12-Interface mounting hole; 13-First end; 14-Second end; 15-Insert indicator mark;

[0024] 2-Fiber optic interface; 21-Fiber optic jack; 22-Interface mating tongue; 221-Snap-on; 23-Interface cylinder; 24-Buffer plate; 25-Positioning slot;

[0025] 3-Vacuum valve. Detailed Implementation

[0026] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.

[0027] Reference Figures 1-5 This utility model embodiment provides a fiber optic interface structure for a vacuum valve.

[0028] Specifically, the fiber optic interface structure of the vacuum valve includes a housing 1 and a fiber optic interface 2 disposed in the housing 1. One end of the housing 1 is provided with a clearance hole 11, and the end of the housing 1 with the clearance hole 11 is connected to the vacuum valve 3, allowing the tail of the piston of the vacuum valve 3 to enter. There are two fiber optic interfaces 2, which are symmetrically arranged on both sides of the housing 1. Each fiber optic interface 2 is provided with at least one fiber optic jack 21, which communicates with the clearance hole 11. The fiber optic jacks 21 of the two fiber optic interfaces 2 extend symmetrically along the radial direction of the clearance hole 11. One side of the fiber optic jack 21 in the fiber optic interface 2 is provided with an interface mating latch 22. When a fiber optic connector with a fiber optic cable is inserted into the fiber optic interface 2, the fiber optic cable is inserted into the fiber optic jack 21, and the fiber optic connector is locked and fixed with the interface mating latch 22. The position of the piston tail is detected by the fiber optic cable, thereby determining the state of the vacuum valve 3. The fiber optic jack 21 realizes the positioning of the fiber optic cable, and the interface mating latch 22 realizes the guidance and fixation of the fiber optic connector when it is inserted. This improves the smoothness of insertion and removal and the reliability of the connection when the fiber optic interface 2 is connected to the fiber optic connector.

[0029] In some embodiments, the housing 1 has a first end 13 and a second end 14. The clearance hole 11 includes a first clearance hole 111 disposed at the first end 13 and a second clearance hole 112 disposed at the second end 14. The first clearance hole 111 and the second clearance hole 112 are coaxially connected. The first end 13 of the housing 1 is connected to the vacuum valve 3. In some embodiments, the diameter of the first clearance hole 111 is larger than the diameter of the second clearance hole 112. The first clearance hole 111 and the second clearance hole 112 are transitionally connected through a tapered hole 113. The structure of the clearance hole matches the tail structure of the piston of the vacuum valve 3.

[0030] In some embodiments, interface mounting holes 12 are symmetrically provided on both sides of the housing 1. The two interface mounting holes 12 are located on both sides of the second clearance hole 112 and are connected to the second clearance hole 112. Two optical fiber interfaces 2 are respectively provided in the interface mounting holes 12 on both sides.

[0031] In some embodiments, the surface of the second end 14 of the housing 1 is provided with an insertion indicator mark 15 to indicate the insertion direction of the optical fiber.

[0032] In some embodiments, the fiber optic interface 2 is provided with an interface cylinder 23, the fiber optic jack 21 is disposed through the center of the interface cylinder 23, and a buffer plate 24 is formed on the outer periphery of the interface cylinder 23.

[0033] In some embodiments, there are two fiber optic jacks 21, which are arranged along the axial direction of the clearance hole 11.

[0034] In some embodiments, one end of the interface mating tongue 22 is connected to the inner wall of the fiber optic interface 2 near the clearance hole 11, and the other end is provided with a buckle 221; a gap is reserved between the interface mating tongue 22 and the inner wall of the fiber optic interface 2 to allow the interface mating tongue 22 to undergo elastic deformation.

[0035] In some embodiments, a positioning groove 25 is provided on the inner wall of one side of the optical fiber interface 2, and a positioning protrusion matching the positioning groove 25 is provided on the optical fiber connector. When the optical fiber connector is inserted into the position, the positioning protrusion is locked into the positioning groove 25 and fixed, making the connection more stable.

[0036] In some embodiments, both the housing 1 and the fiber optic interface 2 are made of plastic. Specifically, the fiber optic interface 2 is made of POM (Polyformaldehyde), and the housing 1 is made of PA66 (nylon 66, polyhexamethylene adipate).

[0037] See Figure 5 In specific implementation, two optical fiber interfaces 2 are symmetrically arranged on the front and rear sides of the housing 1, and mounting holes are provided through the left and right sides of the housing 1. The vacuum valve 3 is installed by screws passing through the mounting holes.

[0038] The housing 1 is equipped with multiple auxiliary and limiting structures to enhance the safety and integrity of assembly and mating. The two screw-matching mounting holes of the housing 1 and the vacuum valve 3 allow the interface structure to be connected to the vacuum valve 3 by threaded mating, which enhances the stability of the entire valve structure. The internal longitudinal clearance hole 11 allows the piston inside the vacuum valve 3 to move back and forth in a controlled manner, ensuring smooth valve operation. The fiber optic interface 2 that matches the fiber optic connector fits tightly, greatly improving assembly stability and safety.

[0039] In summary, the fiber optic interface structure of the vacuum valve of this utility model includes a housing 1 and fiber optic interfaces 2 disposed in the housing 1. One end of the housing 1 is provided with a clearance hole 11, and the end of the housing 1 with the clearance hole 11 is connected to the vacuum valve 3, allowing the tail of the piston of the vacuum valve 3 to enter. There are two fiber optic interfaces 2, which are symmetrically disposed on both sides of the housing 1. Each fiber optic interface 2 is provided with at least one fiber optic jack 21, and the fiber optic jack 21 of the fiber optic interface 2 communicates with the clearance hole 11. The fiber optic jacks 21 of the two fiber optic interfaces 2 are radially connected to the clearance hole 11. The optical fiber interface 2 features a symmetrical extension design. One side of the optical fiber jack 21 in the optical fiber interface 2 has an interface mating latch 22. When an optical fiber connector with an optical fiber is inserted into the optical fiber interface 2, the optical fiber is inserted into the optical fiber jack 21, and the optical fiber connector is locked in place by the interface mating latch 22. The position of the piston tail is detected by the optical fiber, thereby determining the state of the vacuum valve 3. The optical fiber jack 21 positions the optical fiber, and the interface mating latch 22 guides and secures the optical fiber connector during insertion. This improves the ease of insertion and removal and the reliability of the connection between the optical fiber interface 2 and the optical fiber connector.

[0040] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.

[0041] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A fiber optic interface structure for a vacuum valve, characterized in that, The device includes a housing and an optical fiber interface disposed within the housing. One end of the housing has a clearance hole, and the end of the housing with the clearance hole is connected to a vacuum valve, allowing the tail of the piston of the vacuum valve to enter. There are two optical fiber interfaces, symmetrically disposed on both sides of the housing. Each optical fiber interface has at least one optical fiber jack, which communicates with the clearance hole. The optical fiber jacks of the two optical fiber interfaces extend symmetrically along the radial direction of the clearance hole. One side of each optical fiber jack in the optical fiber interface has an interface mating latch. When an optical fiber connector with an optical fiber is inserted into the optical fiber interface, the optical fiber is inserted into the optical fiber jack, and the optical fiber connector is locked in place by the interface mating latch.

2. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, The housing has a first end and a second end. The clearance hole includes a first clearance hole disposed at the first end and a second clearance hole disposed at the second end. The first clearance hole and the second clearance hole are coaxially connected. The first end of the housing is connected to a vacuum valve.

3. The fiber optic interface structure of the vacuum valve as described in claim 2, characterized in that, The diameter of the first clearance hole is larger than the diameter of the second clearance hole, and the first clearance hole and the second clearance hole are connected by a tapered hole.

4. The fiber optic interface structure of the vacuum valve as described in claim 2, characterized in that, The housing has symmetrically arranged interface mounting holes on both sides. The two interface mounting holes are located on both sides of the second clearance hole and are connected to the second clearance hole. The two optical fiber interfaces are respectively arranged in the interface mounting holes on both sides.

5. The fiber optic interface structure of the vacuum valve as described in claim 2, characterized in that, An insertion indicator mark is provided on the surface of the second end of the housing.

6. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, The fiber optic interface has an interface cylinder, and the fiber optic jack is disposed through the center of the interface cylinder. A buffer plate is formed on the outer periphery of the interface cylinder.

7. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, There are two fiber optic jacks, which are arranged along the axial direction of the clearance hole.

8. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, One end of the interface mating latch is connected to the inner wall of the fiber optic interface near the clearance hole, and the other end is provided with a buckle; a gap is reserved between the interface mating latch and the inner wall of the fiber optic interface to allow the interface mating latch to undergo elastic deformation.

9. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, A positioning groove is provided on the inner wall of one side of the optical fiber interface.

10. The fiber optic interface structure of the vacuum valve as described in claim 1, characterized in that, Both the housing and the fiber optic interface are made of plastic.

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