Grinding and polishing equipment structure

Abstract

The utility model discloses a grinding and polishing equipment structure which comprises a large bottom plate, a stand column, a cross beam, an upper disc assembly, a main transmission assembly, an upper disc driving wheel assembly and a synchronous belt, the stand column and the main transmission assembly are installed on the large bottom plate, a bearing set is arranged in the stand column, the supporting cross beam is installed above the stand column, and the upper disc driving wheel assembly is installed on the supporting cross beam. An upper disc driving wheel assembly, an upper disc assembly and a tensioning wheel are assembled on the cross beam, the upper disc driving wheel assembly and the upper disc assembly are connected through a synchronous belt, and the tensioning wheel tensions the synchronous belt. The mutual influence between the upper grinding and polishing disc transmission shaft and the lower grinding and polishing disc transmission shaft is avoided; and meanwhile, the maintenance and repair complexity of the equipment is also reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of grinding and polishing, in particular to a grinding and polishing equipment structure. BACKGROUND

[0002] The transmission of all actuators of the existing grinding and polishing equipment is concentrated on the main transmission shaft system above the equipment bottom plate, the structure of which is shaft system nesting, and bearings are used to separate the rotating speeds of different transmission parts. The above structure mainly has two problems, one of which is the vibration transmission problem between shaft systems, which is particularly embodied in the mutual influence of the upper and lower grinding / polishing discs, thereby increasing the influence of vibration on the processing performance of the equipment; the other is the shaft system nesting, which increases the complexity of equipment maintenance and repair. If the innermost shaft system of the structure has a problem, the main transmission needs to be disassembled layer by layer to replace the corresponding parts. SUMMARY

[0003] In order to overcome the deficiencies of the prior art, one of the purposes of the present application is to provide a grinding and polishing equipment structure, which avoids the mutual influence between the upper grinding / polishing disc transmission shaft and the lower grinding / polishing disc transmission shaft by arranging the upper disc assembly, the main transmission assembly and the upper disc driving wheel assembly; at the same time, the complexity of equipment maintenance and repair is also reduced.

[0004] One of the purposes of the present application is achieved by using the following technical scheme: a grinding and polishing equipment structure, comprising: a large bottom plate, a column, a cross beam, an upper disc assembly, a main transmission assembly, an upper disc driving wheel assembly and a synchronous belt, the large bottom plate is a mounting platform for other components of the equipment, and provides positioning and support for the parts mounted thereon, the column and the main transmission assembly are mounted on the large bottom plate, the column contains a bearing set, the column provides horizontal support and rotary support for the cross beam of the equipment, the support cross beam is installed above the column, the cross beam is provided with the upper disc driving wheel assembly, the upper disc assembly and a tensioning wheel, the cross beam provides support for the upper disc driving wheel assembly and the upper disc assembly and drives them to rotate horizontally, which facilitates wafer taking, placing and disc changing, the upper disc driving wheel assembly and the upper disc assembly are connected through the synchronous belt, and the tensioning wheel tensions the synchronous belt, the upper disc driving wheel assembly, the synchronous belt and the tensioning wheel jointly provide rotating power for the upper disc assembly.

[0005] According to the grinding and polishing equipment structure, the upper disc assembly is located directly above the main transmission assembly.

[0006] According to the grinding and polishing equipment structure, the column is located on the front side of the main transmission assembly.

[0007] Additional aspects and advantages of the present application will be partially given in the following description, partially will become obvious from the following description, or will be understood by the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0008] The application will be further described below with reference to the accompanying drawings and examples.

[0009] Figure 1 A structural schematic diagram of a grinding and polishing equipment structure according to the application.

[0010] Legend:

[0011] 1, base plate; 2, column; 3, beam; 4, upper disc assembly; 5, main transmission assembly; 6, upper disc driving wheel assembly; 7, synchronous belt; 8, tension pulley. DETAILED DESCRIPTION

[0012] This part will describe the specific embodiments of the application in detail, and the preferred embodiments of the application are shown in the accompanying drawings, which serve to supplement the description in the text part of the specification and enable people to intuitively and visually understand each technical feature and the overall technical solution of the application, but it cannot be understood as a limitation on the protection scope of the application.

[0013] Reference Figure 1 , the grinding and polishing equipment structure according to the embodiment of the application includes: a base plate 1, a column 2, a beam 3, an upper disc assembly 4, a main transmission assembly 5, an upper disc driving wheel assembly 6, and a synchronous belt 7.

[0014] The base plate 1 is located at the lowermost part of the equipment, and is used to support the column 2, the main transmission assembly 5 and other components thereon, and to position the components mounted thereon. The column 2 and the main transmission assembly 5 are mounted on the base plate 1.

[0015] The column 2 is located at the front side of the main transmission assembly 5, and contains a bearing set inside. The column 2 provides horizontal support and rotational support for the beam 3 of the equipment.

[0016] The support beam 3 is installed above the column 2, and is equipped with the upper disc driving wheel assembly 6, the upper disc assembly 4, and the tension pulley 8. The beam 3 provides support for the upper disc driving wheel assembly 6, the tension pulley 8, and the upper disc assembly 4, and can rotate along the axis of the column 2, facilitating the taking and placing of a wafer and the changing of a disc. The upper disc assembly 4 is located directly above the main transmission assembly 5.

[0017] The upper disc assembly 4 is internally installed with a shafting for the rotation and lifting of the upper disc. A synchronous pulley is installed above the shafting, and is connected with the upper disc driving wheel assembly 6 through the synchronous belt 7, so as to transmit the torque of a motor to the upper disc and drive the rotation of the upper disc.

[0018] The main transmission assembly 5 is installed on one side of the base plate 1, and is internally installed with a sun gear, a lower disc, a gear ring, and other transmission shaftings, which are coaxial with the upper disc assembly 4.

[0019] The upper disc driving wheel assembly 6 and the upper disc assembly 4 are connected through a synchronous belt 7, a tension pulley 8 is used to tension the synchronous belt 7, the upper disc driving wheel assembly 6, the synchronous belt 7 and the tension pulley 8 jointly provide rotating power for the upper disc assembly 4, the synchronous belt 7 connects the driving pulley on the upper disc driving wheel assembly 6 and the driven pulley on the upper disc assembly 4, and power transmission from the motor to the upper disc is completed.

[0020] Working principle: when in use, the large base plate 1 is the installation platform of other components of the equipment, and is used for positioning and supporting the parts installed thereon; the stand column 2 provides horizontal support and rotating support for the beam 3; the beam 3 provides support for the upper disc driving wheel assembly 6 and the upper disc assembly 4, and drives them to rotate horizontally, which is convenient for taking, placing and changing the disc; the upper disc driving wheel assembly 6, the synchronous belt 7 and the tension pulley 8 jointly provide rotating power for the upper disc assembly 4, which avoids the mutual influence between the upper polishing disc transmission shaft and the lower polishing disc transmission shaft; at the same time, the complexity of maintenance and repair of the equipment is also reduced.

[0021] The embodiments of the application are described in detail above with reference to the drawings, but the application is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the purpose of the application.

Claims

1. A grinding and polishing equipment structure, characterized in that, include: The base plate (1), column (2), crossbeam (3), upper plate assembly (4), main drive assembly (5), upper plate drive wheel assembly (6) and synchronous belt (7) are installed on the base plate (1). The column (2) contains a bearing assembly. The support crossbeam (3) is installed above the column (2). The crossbeam (3) is equipped with upper plate drive wheel assembly (6), upper plate assembly (4) and tension wheel (8). The upper plate drive wheel assembly (6) and upper plate assembly (4) are connected by synchronous belt (7). The tension wheel (8) tensions the synchronous belt (7).

2. The structure of a grinding and polishing equipment according to claim 1, characterized in that, The upper plate assembly (4) is located directly above the main drive assembly (5).

3. The structure of a grinding and polishing equipment according to claim 1, characterized in that, The column (2) is located on the front side of the main drive assembly (5).

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